射线技术在材料评价和材料缺陷评价方面的开发研究动向

1前言 射线透照试验是用X射线或γ射线等短波电磁波透过物体,通过检测透射率的差异获得试样内部信息的技术.射线透照试验缺陷检测法按摄像方法分为直接摄像法,.透视法和特殊摄像法等等.直接摄像法是在试样背面安放的X线胶片和显像板上显现出透过试样的X线强度的变化情况,根据其对比度或与对比度相对应的彩色图像判别材料内部存在的缺陷.     

软X射线显微成像

软X射线显微成像技术为研究生物显微结构开辟了一条新的途径,突破了光学显微镜和电子显微镜在应用上的某些限制。本文评述了软X射线接触显微镜、软X射线成像显微镜、软X射线扫描显微镜以及三维软X射线显微成像和X射线全息术,并介绍了中国科技大学在软X射线接触显微成像方法研究中所取得的成果。     

软X射线椭圆晶体谱仪的研制

为了测量激光等离子体软X射线的空间和时间分辨光谱,研制了一种新型的双通道椭圆晶体谱仪,椭圆的离心率和焦距分别为0.9586和1350mm。将两个完全相同的椭圆晶体分析器进行上下对称布置,在上通道用软X射线CCD相机测量空间分辨光谱,在下通道用软X射线条纹相机测量时间分辨光谱。利用KAP椭圆晶体作色散元件,测量的波长范围是1.33~2.46nm。首次在“星光Ⅱ”激光装置上进行了打靶实验,利用该谱仪配软X射线CCD相机获取了钛激光等离子体X射线的光谱,实验结果表明该谱仪的最高光谱分辨率可以达到1173。     

18.2nm Schwarzschild显微物镜用多层膜带宽匹配问题分析

软X射线多层膜的进展使正入射高分辨率成像系统从红外、可见和紫外扩展到软X射线波段.由于软X射线多层膜的反射率还不能像其它波段反射镜反射率那样高,因此由两块同心球面反射镜组成的Schwarzschild物镜在软X射线波段得到了广泛的应用.本文从多层膜带宽匹配条件、Schwarzschild显微物镜的几何尺寸和多层膜镀制设备的性能出发,研究了实现Schwarzschild显微物镜带宽匹配条件的镀膜过程,为实际制备Schwarzschild显微物镜用多层膜提供理论指导.     

18.2nm Schwarzschild显微物镜用多层膜带宽匹配问题分析

软X射线多层膜的进展使正入射高分辨率成像系统从红外、可见和紫外扩展到软X射线波段。由于软X射线多层膜的反射率还不能像其它波段反射镜反射率那样高,因此由两块同心球面反射镜组成的Schwarzschild物镜在软X射线波段得到了广泛的应用。本文从多层膜带宽匹配条件、Schwarzschild显微物镜的几何尺寸和多层膜镀制设备的性能出发,研究了实现Schwarzschild显微物镜带宽匹配条件的镀膜过程,为实际制备Schwarzschild显微物镜用多层膜提供理论指导。     

高强度脉冲软X光源

本文介绍清华大学电机工程系研制的一种高强度软X光源,这种光源是由喷气式Z箍缩等离子体产生的。阐述了Z箍缩装置的工作原理,研究了装置的运行参数(如充电电压、充气密度等)对软X射线发射的影响。用热电堆测量了X射线的产额。并介绍了用无窗XRD(X射线二极管)测量脉冲x射线的初步结果:光源处的X射线总能量超过100J,发射时间约100ns,其功率达10⁹W以上。     

宽响应高灵敏度软X射线单光子计数探测器

本文阐述了不同类型的软X射线探测器的机理及近期发展,总结了以往的工作,针对当前软X射线研究的迫切需要,提出了用CsI光电阴极做为转换材料、道电子倍增器做为电子倍增元件的宽响应,单光子计数探测器。     

用透射光栅谱仪测量多层膜的反射特性

软X射线多层膜是当前应用光学和工程光学的研究热点之一,反射率是其性能和膜层质量最直观的参数,它的测量对了解多层膜性能和改进多层膜制备工艺具有重要意义。本文介绍采用带有前置光学系统的大面积透射光栅光谱仪分光,让软X射线多层膜反射+1级或-1级软X射线,用国产的SIOFM型X射线胶片接受软X射线,通过测量可定性地判断多层膜制备质量,为改进多层膜制备工艺提供重要的参考依据。     

软X射线多层膜反射镜的设计、制备与检测

本文提出一种图像直观、结果可靠的软X线多层膜设计方法,讨论了与软X射线多层膜制备有关的基板选择,膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果,并对软X射线多层膜工作做了展望。     

软X射线界面传输特性及应用研究

对软X射线与界面相互作用的规律进行初步研究,给出了软X射线界面散射的一级近似一般理论推导,从中给出了粗糙界面软X射线的散射传输特性,表明在粗糙表面上软X射线的镜向反射系数,需要做与粗糙度有关的数学修正。作为形式上的一种方法,本文还给出了粗糙表面对软X射线全反射的动力学模型,以及一维软X射线散射测量粗糙度原理。通过实验测量了λ=243Å,256Å时具有超光滑表面的Mo,Si样品之反射率和λ=44.6Å时石英超光滑样品的反射率。采用镀碘化铯的方法,使“真空紫外-软X光反射率计”的可测量短波长从200Å降至10Å.对44.6Å进行了散射测量,可以明显看到软X射线的非正常反射现象;还对积分散射测粗糙度方法进行了初步研究。最后给出了X线聚焦装置的理论公式和设计实例。     

X-ray microscopy of plant cells by using LiF crystal as a detector

A lithium fluoride (LiF) crystal has been utilized as a new soft X-ray detector to image different biological samples at a high spatial resolution. This new type of image detector for X-ray microscopy has many interesting properties: high resolution (nanometer scale), permanent storage of images, the ability to clear the image and reuse the LiF crystal, and high contrast with greater dynamic range. Cells of the unicellular green algae Chlamydomonas dysosmos and Chlorella sorokiniana, and pollen grains of Olea europea have been used as biological materials for imaging. The biological samples were imaged on LiF crystals by using the soft X-ray contact microscopy and contact micro-radiography techniques. The laser plasma soft X-ray source was generated using a Nd:YAG/Glass laser focused on a solid target. The X-ray energy range for image acquisition was in the water-window spectral range for single shot contact microscopy of very thin biological samples (single cells) and around 1 keV for multishots microradiography. The main aim of this article is to highlight the possibility of using a LiF crystal as a detector for the biological imaging using soft X-ray radiation and to demonstrate its ability to visualize the microstructure within living cells.     

Simulation of partially coherent image formation in a compact soft X-ray microscope

In this paper, we describe a numerical method of simulating two-dimensional images in a compact soft X-ray microscope using partially coherent illumination considerations. The work was motivated by recent test object images obtained by the latest generation in-house compact soft X-ray microscope, which showed diffraction-like artifacts not observed previously. The numerical model approximates the condenser zone plate as a secondary incoherent source represented by individually coherent but mutually incoherent source points, each giving rise to a separate image. A final image is obtained by adding up all the individual source point contributions. The results are compared with the microscope images and show qualitative agreement, indicating that the observed effects are caused by partially coherent illumination.     

Scanning luminescence X-ray microscopy: Imaging fluorescence dyes at suboptical resolution

Scanning luminescence X-ray microscopy is based on the use of the very small focused probe of a scanning X-ray microscope to stimulate visible light emission from phosphors and dyes. Using an undulator X-ray source and a Fresnel zone plate to produce a focused X-ray probe, images of P31 phosphor grains with a resolution of 50–75 nm have been obtained, and luminescence from polystyrene spheres loaded with 50–100 μmol/g of fluorescent dye has been imaged. The resolution was not limited by the focused X-ray probe (the microscope has imaged features at 36-nm spacing in transmission mode) but by dark noise and the low net efficiency of the luminescence detection system used for this investigation. This technique may make it possible to image dye-tagged sites of biochemical activity at the resolution of the X-ray microscope in wet, unsectioned, and unfixed cells, especially with soft X-ray optimized dyes. Because the image is formed from the detection of signal against a dark background, calculations suggest that the radiation dose for luminescence imaging of dye-tagged features should be 2–22 times lower than it is in transmission X-ray microscopy. A possible extension of the technique for three-dimensional imaging at the transverse resolution of the X-ray microscope is described, where visible light collection optics might be used to obtain submicrometre axial resolution.     

用数字图像处理技术检测钢丝绳表面缺陷

介绍一种基于纹理特征提取的数字图像处理技术进行钢丝绳检测的新方法。首先利用图像处理的方法对在役钢丝绳图像进行预处理,以减小或消除噪声的影响,然后提取图像的纹理特征值——熵和平滑度,通过线性分类器来判断在役钢丝绳表面是否有断丝或锈蚀等缺陷。实验结果证明,该检测方法在实际应用中能代替人工目测,使用方便,能够满足实时要求。     

A compact Schwarzschild soft X-ray microscope with a laser-produced plasma source

A compact Schwarzschild soft X-ray microscope using a laser-produced plasma soft X-ray source has been developed. The laser-produced plasma source, which is small but of high brilliance, has made it possible to use the soft X-ray microscope in a small laboratory. The microscope is composed of a Schwarzschild objective and a grazing incidence mirror condenser. Image contrast for biological specimens in soft X-ray regions is investigated briefly. It is possible to observe the fine structures of a thin specimen at a wavelength of 15 nm; at this wavelength high-contrast images of biological specimens have been obtained with a single laser shot of pulse width of 8 ns at a resolution of 0·3 μm. The resolution of the system is limited by the detector.     

Optimization of a Wolter type I mirror for a soft X-ray microscope

The demand for an X-ray microscope has received much attention because of the desire to study living cells under high resolution. A Wolter type I mirror used for soft X-ray microscope optics has a number of advantages. Although much progress has been made, it is still not easy to fabricate this mirror and satisfy the surface roughness and figure error requirements. From the mirror fabrication point of view, it is necessary to see the mirror design and the tolerance budget, especially with respect to the surface roughness and the figure errors. This paper deals with the design and optimization of a Wolter type I microscope mirror. The optimization was carried out by choosing an optimum central grazing incidence angle for which a merit function had the maximum value. The image quality of the mirror was also examined. A smaller diameter gave better image quality because of the Abbe sine condition. Finally, the figure errors for the axial and the radial directions were simulated by sinusoidal deformation waves, and the figure tolerance was obtained.     

长春光机所软X射线-极紫外波段光学研究

综述了我所软X射线-极紫外波段关键技术的研究进展。描述了软X射线-极紫外波段光源技术,研制了工作波段为6~22 nm的微流靶激光等离子体光源;介绍了光子计数成像探测器技术,研制出了有效直径为25 mm,等效像元分辨率为0.3 mm的极紫外波段探测器;开展了超光滑表面加工、检测技术的研究,研制了超光滑表面抛光机,加工出高面形精度的超光滑表面,面形精度为6 nm(RMS值),表面粗糙度达0.6 nm(RMS值);进行了软X射线-极紫外波段多层膜技术的研究,研制出13 nm处反射率为60%的多层膜反射镜,150 mm口径反射镜的反射率均匀性优于±2.5%;最后,讨论了软X射线-极紫外波段测量技术研究,研制出该波段反射率计,其测量范围为5~50 nm,光谱分辨率好于0.2 nm,测量重复性好于±1%。在上述关键技术研究基础上,研制出了极紫外波段成像仪和空间极紫外波段太阳望远镜,这些仪器在我国空间科学研究项目中发挥了作用。     

复杂曲面特征线自动提取技术研究

复杂曲面零件的几何模型重构是逆向工程的研究重点之一,由零件表面的数字化数据提取特征线是构造几何模型的重要步骤。针对由CMM获取的三维数据“点云”,提出了基于扫描线的三维分层式方法实现特征线的自动提取,提出了基于局部增量网格扩张的三维散乱数据三角剖分算法,实现任意曲面尖锐棱线的自动提取。实践说明,通过该算法得到的复杂曲面的边界线能够满足模型重建的工程需求。     

微通道板对软X射线响应的实验研究

在X光成像望远镜中微通道板(MCP)作为焦平面上的成像接收器,探测天体的软X射线辐射图像。本文实验研究在软X射线波段MCP的成像性能以及与此有关的其他性能。作者没计了实验装置,测量了在碳K_a(4.47nm)线下微通道板——荧光屏组件的分辨率,与计算结果进行了比较。提出了一种用软X射线光电发射作为初电流测量MCP电流增益的新方法,具有可反复多次测量、重复性良好及测量方便等优点。测量了在两个波长下微通道板的量子效率及随X射线入射角的变化。     

Non-destructive characterization of deer (Cervus Elaphus) antlers by X-ray microtomography coupled with image analysis

X-ray microtomography coupled with image analysis was tested as a non-destructive alternative method for the textural characterization of the trabecular part of deer antlers ( Cervus Elaphus ). As gas adsorption and mercury intrusion cannot be applied on this soft and spongy material, its pore texture was, up to now, determined from histological sections that give only two-dimensional information. In this work, X-ray microtomography is used to scan entire or half pieces of antlers and three-dimensional image analysis is performed in order to assess the differences between samples collected at various antler locations. Results clearly show a porosity profile along the sample diameter. The pore size distribution is showed to be dependent on the sample original site.