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7A04铝合金表面DLC薄膜制备及性能研究 总被引:1,自引:0,他引:1
为提高7A04铝合金的表面性能,利用射频辅助等离子体浸没离子注入与沉积设备,在其表面制备类金刚石(DLC)薄膜。由于DLC薄膜与铝合金基体力学性能差别较大,导致膜基结合力差。本研究采用非平衡磁控溅射技术预先沉积一层Si膜,作为过渡层改善膜基结合力;利用激光拉曼光谱仪、维式显微硬度计、纳米划痕仪、摩擦磨损试验机等设备,系统分析了薄膜结构、显微硬度、膜基结合力及耐磨损性能。结果表明,Si过渡层的制备提高了基体的承载能力和膜基结合力,进而使耐磨损性能得到大幅度提高。 相似文献
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在钛合金(TC4)表面制备类金刚石(DLC)薄膜是提高其耐磨损性能和使用寿命的一种有效方法。本文采用磁过滤阴极弧源技术在钛合金表面上制备软硬相间的类金刚石多层薄膜、Ti和Ti/TiC过渡层组成的类金刚石多层薄膜。利用光学显微镜和扫描电镜分析多层膜表面外观形态,并使用台阶仪、纳米压痕仪、摩擦实验机等分析多层膜的残余应力、纳米硬度、膜基结合力和摩擦磨损特性。研究结果表明:DLC多层薄膜的残余应力均低于单层DLC薄膜,残余应力从12.63 GPa降低到6.21 GPa,增加Ti/TiC过渡层的DLC多层薄膜的残余应力最小。压痕结合力研究结果表明,加入Ti/TiC过渡层的DLC多层薄膜的结合状况得到了显著提高。Ti/TiC过渡层构成的类金刚石多层薄膜,有较大的硬度和良好减摩耐磨性能。试验结果将为TC4钛合金基体上制备硬质耐磨损DLC多层薄膜提供技术方案和理论依据。 相似文献
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脉冲真空电弧离子镀在不锈钢上沉积类金刚石薄膜的研究 总被引:2,自引:1,他引:2
利用脉冲真空电弧离子镀技术在3Cr13不锈钢上制备了类金刚石(DLC)薄膜,通过Raman光谱分析了膜的结构特征,采用摩擦磨损试验机测试了薄膜在不同载荷下的摩擦系数,运用划痕仪研究了膜基的结合强度.结果表明:所镀制的薄膜具有典型类金刚石结构特征,膜中ID/IG为1.33;摩擦系数随着载荷的增大而减小,载荷为5 N,转速120 r/min时的摩擦系数为0.12;Ti过渡层的引入显著地提高了膜基结合力. 相似文献
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掺氮类金刚石薄膜的制备与性能研究 总被引:2,自引:0,他引:2
利用空心阴极放电在玻璃基底表面沉积掺氮类金刚石(DLc)薄膜.拉曼光谱(Raman)分析表明,所制备的碳膜具有典型的类金刚石结构.扫描电镜(SEM)和原子力显微镜(AFM)分析了薄膜表面形貌和粗糙度;利用摩擦磨损仪测量膜的摩擦磨损性能.结果表明,氮的掺入使得薄膜中颗粒致密平整,改变了薄膜的表面微观形貌,进而改善了薄膜的摩擦磨损性能. 相似文献
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采用等离子体浸没离子注入及沉积技术在钛合金(Ti6Al4V)表面制备了类金刚石薄膜和含有SiC/DLC过渡层的类金刚石薄膜。采用拉曼光谱及扫描电子显微镜分析了薄膜的成分和结构,并利用超显微硬度计、薄膜结合力测试仪和往复式摩擦实验机研究了薄膜的硬度、韧性、膜/基结合力和耐磨性。研究结果表明,SiC/DLC过渡层可以提高钛合金(Ti6Al4V)表面类金刚石薄膜的韧性及膜/基结合力,与未制备过渡层的类金刚石薄膜相比,含有SiC/DLC过渡层的类金刚石薄膜的耐磨性明显提高。 相似文献
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用脉冲电弧离子镀技术在NiTi合金生物材料表面沉积了类金刚石(DLC)薄膜.研究分析结果表明制备的DLC薄膜是四面体非晶碳薄膜;随着DLC薄膜厚度的增加,薄膜的表面粗糙度增加,薄膜中sp3的含量减少;随着sp3含量的增加,薄膜的纳米硬度升高;划痕实验表明临界载荷大于0.9 N.研究得出与NiTi合金相比,DLC薄膜能够有效地降低摩擦系数和磨损.DLC薄膜的摩擦系数主要与薄膜的硬度及薄膜中sp3的含量有关,DLC薄膜的磨损主要是轻微的磨粒磨损及疲劳磨损. 相似文献
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用于微机电系统的类金刚石膜制备及表征 总被引:3,自引:0,他引:3
采用等离子体源离子注入和电子回旋共振-微波等离子体辅助化学气相沉积技术相结合的方法在Si衬底上制备出了性能良好的类金刚石膜.通过共聚焦Raman光谱验证了薄膜的类金刚石特性,用原子力显微镜、微摩擦计和扫描电镜等对薄膜的表面形貌、摩擦系数和耐磨损性能进行了表征和测量.结果表明,用离子注入法制备过渡层大大提高了DLC膜与衬底的结合强度,薄膜的表面比较光滑,粗糙度大约为0.198 nm,具有较低的摩擦系数(0.1~0.15),具有较好的耐磨损性能. 相似文献
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Structure, mechanical and tribological properties of diamond-like carbon films on aluminum alloy by arc ion plating 总被引:2,自引:0,他引:2
The low hardness and poor tribological performance of aluminum alloys restrict their engineering applications. However, protective hard films deposited on aluminum alloys are believed to be effective for overcoming their poor wear properties. In this paper, diamond-like carbon (DLC) films as hard protective film were deposited on 2024 aluminum alloy by arc ion plating. The dependence of the chemical state and microstructure of the films on substrate bias voltage was analyzed by X-ray photoelectron spectroscopy and Raman spectroscopy. The mechanical and tribological properties of the DLC films deposited on aluminum alloy were investigated by nanoindentation and ball-on-disk tribotester, respectively. The results show that the deposited DLC films were very well-adhered to the aluminum alloy substrate, with no cracks or delamination being observed. A maximum sp3 content of about 37% was obtained at −100 V substrate bias, resulting in a hardness of 30 GPa and elastic modulus of 280 GPa. Thus, the surface hardness and wear resistance of 2024 aluminum alloy can be significantly improved by applying a protective DLC film coating. The DLC-coated aluminum alloy showed a stable and relatively low friction coefficient, as well as narrower and shallower wear tracks in comparison with the uncoated aluminum alloy. 相似文献
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Evaluation of microstructures and mechanical properties of diamond like carbon films deposited by filtered cathodic arc plasma 总被引:1,自引:0,他引:1
Diamond-like carbon (DLC) films were deposited by a cathodic arc plasma evaporation (CAPD) process, using a mechanical shield filter combined with a magnetic filter with enhanced arc structure at substrate-bias voltage ranging from − 50 to − 300 V. The film characteristics were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and high-resolution transmission electron microscopy (HRTEM). The mechanical properties were investigated by using a nanoindentation tester, scratch test and ball on disc wear test. The Raman spectra of the films showed that the wavenumber ranging from 900 to 1800 cm− 1 could be deconvoluted into 1140 cm− 1, D band and G band. The bias caused a significant effect on the sp3 content which was increased with the decreasing of ID/IG ratio. The XPS spectra data of the films which were etched by H+ plasma indicated the sp3 content are higher than those of the as-deposited DLC films. This implied that there is a sp2-rich layer present on the surface of the as-deposited DLC films. The nanoindentation hardness increased as the maximum load increased. A 380 nm thick and well adhered DLC film was successfully deposited on WC-Co substrate above a Ti interlayer. The adhesion critical load of the DLC films was about 33 N. The results of the wear tests demonstrated that the friction coefficient of the DLC films was between 0.12 and 0.2. 相似文献
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钛离子注入类金刚石碳膜的结构与性能的研究 总被引:7,自引:0,他引:7
使用金属离子注入的方法制备了 Ti掺杂的DLC膜。采用原子力显微镜观察了薄膜的表面形貌,Ti掺杂后 DLC 膜的表面粗糙度明显减小,表面光洁度增加,颗粒细化。拉曼光谱分析表明实验获得的薄膜是典型的DLC膜,掺杂Ti后的 DLC膜的拉曼光谱存在明显的肩峰,DLC膜化学结构中的sp2 组分增加,sp3 组分减少。透射电子显微镜分析表明Ti注入后有TiC纳米晶形成。掺入Ti的 DLC膜的硬度从 14GPa增加到 20GPa。Ti 掺杂后的 DLC 膜的摩擦系数(0.15)明显低于未掺杂的DLC膜的摩擦系数(0.21),Ti离子注入有助于提高薄膜的抗磨损性。 相似文献
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采用线性离子束沉积技术于AZ80镁合金微弧氧化(MAO)陶瓷层表面沉积不同厚度的类金刚石碳(DLC)膜,形成DLC/MAO复合膜层。对比研究4种膜基系统的表面结构特征、力学性能以及摩擦学性能差异。结果表明:随DLC膜厚度增加,复合膜层表面微孔数量减少,孔径减小,但凹凸不平趋势增加,且DLC膜表面颗粒特征更加明显,表现为DLC-80min/MAO/AZ80膜基系统具有最小的表面粗糙度,最大的硬度H、弹性模量E及H/E值;不同厚度DLC/MAO/AZ80膜基系统平均摩擦因数较MAO/AZ80显著降低;DLC膜厚度增加导致3种复合膜基系统的表面微观结构改变,使得摩擦因数与磨痕形貌存在差异;各膜基系统表面磨痕处均形成了Fe的转移层,由于表层DLC膜"裸露"的大量C对磨损界面具有很好的润滑作用,而使得镁合金基体获得有效保护。 相似文献
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Kuan-Wei Chen 《Thin solid films》2009,517(17):4916-4920
In this study, thin diamond-like carbon (DLC) films were deposited onto a steel substrate. By using the plasma immersion ion implantation (PIII) technique, a nitrogen layer was formed on the steel surface before depositing the DLC films. This PIII formed nitrogen layer, which acts as the buffer layer, has apparently increased the adhesion between the DLC film and the steel substrate. The microstructures, the nanomechanical properties, and the adhesion of the DLC were investigated by the techniques of X-ray diffraction (XRD), transmission electron microscopy (TEM), nanoindentation, and nanoscratch. Results show that the hardness and Young's modulus were significantly improved, up to 2 to 9 times; while the implantation depth and the microstructure of the nitrogen layers vary with nitrogen/hydrogen ratio (N:H = 1:0, 1:1, 1:3). Raman analyses indicate that the I(D)/I(G) ratio increases with the thickness of DLC film. By using the PIII technique in the steel substrate, the adhesion of the DLC film onto the substrate is greatly enhanced, and wear resistance is elevated if the DLC film is sufficiently thick. 相似文献
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《Vacuum》2013
Due to renewed interest in hard-on-hard prosthetic joint replacements, especially metal-on-metal (MOM) and ceramic-on-metal joints (COM), concerns about debris and released metal ions from wear and mechanical-enhanced electrochemical (tribocorrosion) processes have raised. In order to reduce the metal debris quantity and the release of metal ions, a diamond like carbon (DLC) film is deposited on CoCrMo alloy by using a filtered cathodic vacuum arc technique (FCVA). The tribocorrosion behavior of DLC coated CoCrMo alloy is studied in bovine calf serum and 0.9% NaCl solution by using a linear reciprocating pin-on-plate tribometer with an integrated electrochemical cell. The open circuit potential (OCP) and the polarization test are monitored during the reciprocating pin-on-plate test. The results show that the absorbed protein layer on DLC surface play a positive role in reducing wear and metal ion release. The presence of DLC layer improves the tribocorrosion resistance of CoCrMo alloy. And The DLC film has a potential application on hard-on-hard prosthetic joint replacements and it can effectively reduce the metal debris quantity and the release of metal ions. 相似文献
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Depositions of titanium-containing diamond-like carbon (Ti-DLC) films were conducted by mixing C+ and Ti+ plasma streams originated from cathodic arc plasma sources in argon (Ar). The deposition was processed at Ti target current ranging from 20 Amp to 70 Amp. Film characteristics were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS). Film microstructures were evaluated using field emission scanning electron microscopy (FEGSEM), an atomic force microscope (AFM), X-ray diffractometry (XRD) and high-resolution transmission electron microscopy (HRTEM). Mechanical properties were investigated by using a nanoindentation tester and ball on disc wear test. Results shows that surface roughness (Ra) of the films ranged between 2.4 and 7.2 nm and roughness increased relative to the increase in Ti target current. The FESEM studies showed that the surface micrographs of Ti-DLC films revealed a cauliflower-like microstructure and the cross-sectional micrograph revealed a snake-skin like structure. HRTEM studies showed that the Ti-DLC films consisted of nano scale TiC particles which were comparable with low angle XRD and XPS results. XPS analysis established that the Ti2p spectrum is present when the Ti target current reaches 30 Amp or higher. Ti concentration increased as the Ti target current was increased. An extremely thin TiO2 layer exists on the top of the Ti-DLC films which was comparable with the AES results. The film thickness which could be deposited for Ti-DLC is much higher than that of conventional DLC films. Nanoindentation tests show that the nanohardness of the films ranging 15-22 GPa, with Er values ranging from 145 to 175 GPa. The wear test demonstrates the friction coefficient of the 420SS substrate, DLC and Ti-DLC films were about 0.8, 0.3 and 0.2, respectively. Obviously, the friction coefficients of the Ti-DLC films were lower than that of the DLC films. 相似文献