Processing of micro-components made of sintered reaction-bonded silicon nitride (SRBSN). Part 2: Sintering behaviour and micro-mechanical properties

This second part of the report deals with, how the sintering additives Y₂O₃, Al₂O₃, and MgO influence the sintering behaviour of SRBSN. Paraffin-based feedstocks with varying sintering aid compositions and silicon grain size were used for moulding macro- and micro-scale samples. It was observed that compositions with smaller Si grain size (with correspondingly high SiO₂ content) and containing Al₂O₃ as sintering additive exhibit higher shrinkage and lower residual porosity when sintered at 1700–1800 °C after nitridation. The mechanical properties determined for micro-scale samples were obtained by three-point bending tests, with the resulting characteristic strength values σ₀ ranging from 500 MPa up to 1200 MPa. Surprisingly residual porosity did not play the role of a strength limiting factor; rather it was observed that the presence of crystalline secondary phases – mainly Y₂Si₃O₃N₄ – was responsible for reducing the micro-bending strength. As micro-samples exhibit a large surface-to-volume ratio they are in particular affected by decomposition of Si₃N₄ and volatilization of SiO₂ which is considered to be responsible for the occurrence of secondary phases preferred at the sample surface. The powder bed condition was also found to play a prominent role in the development of the secondary phases during liquid phase sintering.     

In-situ reaction synthesis of porous Si2N2O-Si3N4 multiphase ceramics with low dielectric constant via silica poly-hollow microspheres

In the present work, a novel and facile process has been proposed to fabricate porous Si₂N₂O-Si₃N₄ multiphase ceramics with low dielectric constant (ε_r＜4.0). Since silica poly-hollow microspheres could serve as the source of SiO₂ and the pore-forming agent, they have been introduced into Si₃N₄ slurry through the gelcasting technique. This process is benefited from the liquid phase sintering reaction between SiO₂ and Si₃N₄ with the aid of sintering additives, leading to in-situ synthesis of Si₂N₂O phase and porous structure. The content of silica poly-hollow microspheres has great influence on the properties of the final products. It indicates that Si₂N₂O phase would become the major phase when the content of silica poly-hollow microspheres was above 25 wt%. Furthermore, the micromorphology results reveal that the content of pores with many smaller aggregate microspheres increases as microspheres amount rises. As a result, along with the addition of silica poly-hollow microspheres, the bulk density decreases to 1.32±0.01 g/cm³, and open porosity ranges from 28.4±0.4% to 52.0±0.5%. Porous Si₂N₂O-Si₃N₄ multiphase ceramics prepared with 25 wt% silica poly-hollow microspheres addition possess flexural strength of 42.3±3.8 MPa, low dielectric constant of 3.31 and loss tangent of 1.93×10⁻³. It turns out to be an effective method to fabricate porous Si₂N₂O-Si₃N₄ composites with excellent mechanical and dielectric properties, which could be applied to radome materials.     

The role of MgSiN2 during the sintering process of silicon nitride ceramic

The reaction process between MgSiN₂ SiO₂ and Si₃N₄ was investigated by analyzing the composition change of the powder mixture of 61 wt% MgSiN₂, 34 wt% SiO₂ and 5 wt% α-Si₃N₄ after heat treatment at different temperatures. The phase and chemical compositions of the grain boundary phase in the silicon nitride ceramic was analyzed by x-ray diffraction, transmission electron microscope, and energy-dispersive x-ray spectroscopy. The results demonstrated that MgSiN₂ reacted with the surface silica and Si₃N₄ to form Mg–Si–O–N liquid phase, which promoted the consolidation densification of silicon nitride powders through liquid-phase sintering mechanism. The amount of Mg–Si–O–N glass boundary phase using MgSiN₂ as additives is much less than that using the same amount of MgO additive, owing to the lower oxygen concentration and higher nitrogen content.     

Diamond dispersed Si3N4 composites obtained by pulsed electric current sintering

30 vol.% 2 and 30 μm diamond dispersed Si₃N₄ matrix composites were prepared by pulsed electric current sintering (PECS) for 4 min at 100 MPa in the 1550–1750 °C range. The densification behaviour, microstructure, Si₃N₄ phase transformation and stiffness of the composites were assessed, as well as the thermal stability of the dispersed diamond phase. Monolithic Si₃N₄ with 4 wt% Al₂O₃ and 5 wt% Y₂O₃ sintering additives was fully densified at 1550 °C for 4 min and 60 MPa. The densification and α to β-Si₃N₄ transformation were substantially suppressed upon adding 30 vol.% diamond particles. Diamond graphitisation in the Si₃N₄ matrix was closely correlated to the sintering temperature and grit size. The dispersed coarse grained diamonds significantly improved the fracture toughness of the diamond composite, whereas the Vickers hardness was comparable to that of the Si₃N₄ matrix ceramic. The Elastic modulus measurements were found to be an excellent tool to assess diamond graphitisation in a Si₃N₄ matrix.     

Effect of magnesium titanate content on microstructures,mechanical performances and dielectric properties of Si3N4-based composite ceramics

Silicon nitride-based composite ceramics with different contents of magnesium titanate have been fabricated via gas pressure sintering method. The phase compositions, microstructure, mechanical performances and dielectric properties of the composite ceramics were investigated. The density of the Si₃N₄-based composite ceramics firstly increased with additive of magnesium titanate powder up to 5 wt% and then gently decreased, and the mechanical properties firstly increased and then declined. Besides, the dielectric constant and dielectric loss increased with the increase of magnesium titanate contents. For the Si₃N₄-based composite ceramics with 5 wt% magnesium titanate powders, the flexural strength, elastic modulus, dielectric constant and dielectric loss reached 451 MPa, 274 GPa, 7.65, 0.0056, respectively. These results suggested that the magnesium titanate was beneficial for the improvement of mechanical performances and dielectric constant of Si₃N₄-based composite ceramics.     

Influence of glass compositions on the microstructure and dielectric properties of low temperature fired BaTi4O9 microwave material with copper electrodes in reducing atmosphere

BaTi₄O₉ (BT4) dielectric ceramics, containing 10 wt% BaO–ZnO–B₂O₃–SiO₂ (BZBS) glass frit as sintering aid were co-fired with copper paste under reducing atmosphere at 950 °C and investigated on microstructures and dielectric properties. Experimental results show the microstructures and microwave dielectric properties of BT4–BZBS glass composite materials are strongly dependent on the Ba–Zn–B–Si ratio, especially for the content of SiO₂ addition, in BZBS glass. XRD and EDS results indicate that Cu reacts with BZBS glass-added BT4 ceramics seriously to form complicated reaction products such as BaCuO₂ phase, when the BZBS glass composition with lower content of SiO₂ (less than 20 wt%), and transformation of some BaTi₄O₉ into barium titanate with various ratios of Ba/Ti, which, fortunately, does not seriously degrade the dielectric properties.     

Mechanical,dielectric and thermal properties of porous boron nitride/silicon oxynitride ceramic composites prepared by pressureless sintering

Porous boron nitride/silicon oxynitride (BN/Si₂N₂O) composites were fabricated by pressureless sintering at 1650 °C with Li₂O as sintering aid. The influence of Li₂O and hexagonal boron nitride (h-BN) contents on phase, microstructure, mechanical, dielectric and thermal properties of the resulting porous BN/Si₂N₂O composites was investigated. Increasing Li₂O content facilitated densification and decomposition of Si₂N₂O into Si₃N₄. The apparent porosity of the composites increases with the h-BN content increases and Si₂N₂O grain growth was restrained by the dispersed h-BN particles. The dielectric properties and thermal conductivities (TC) were affected mainly by porosity. Porous BN/Si₂N₂O ceramic composites with 4 mol% Li₂O and 25 mol% BN exhibit both low dielectric constant (3.83) and dielectric loss tangent (0.008) with good mechanical and thermal performance, suggesting possible use as high-temperature structural/functional materials.     

Microstructure and properties of mullite–ZrO2 ceramics with silicon nitride additive prepared by spark plasma sintering

The process of densification and development of the microstructure of mullite–ZrO₂/Y₂O₃ ceramics from mixture of Al₂O₃, SiO₂, ZrO₂ and Y₂O₃ by gradually adding of α–β Si₃N₄ nanopowder from 1 to 5 wt% by traditional and spark plasma sintering were investigated by means of differential thermal analysis (DTA), X-ray diffraction (XRD), scanning electron microscopy (SEM), and some ceramic and mechanical properties. The processes of DTA for all samples are characterised by a low-pitched endo-effect, when gradual mullite formation and noticeable densification at temperatures of 1200–1400 °C is started. It is testified by shrinkage and density both for traditionally and by SPS-sintered samples. The influence of the Si₃N₄ additive on the density characteristics is insignificant for both sintering cases. For SPS samples, the density reaches up to 3.33 g/cm³, while for traditionally sintered samples, the value is 2.55 g/cm³, and the compressive strength for SPS grows with Si₃N₄ additives, reaching 600 N/mm². In the case of traditional sintering, it decreases to approximately 100 N/mm². The basic microstructure of ceramic samples sintered in a traditional way and by SPS is created from mullite (or pseudo-mullite) crystalline formations with the incorporation of ZrO₂ grains. The microstructure of ceramic samples sintered by SPS shows that mullite crystals are very densely arranged and they do not have the characteristic prismatic shape. The traditional sintering process causes the creation of voids in the microstructure, which, with an increasing amount of Si₃N₄ additive, are filled with mullite crystalline formations.     

Structure–property relations of ferroelectric BaTiO3 ceramics containing nano-sized Si3N4 particulates

Barium titanate/silicon nitride (BaTiO₃/xSi₃N₄) powder (when x = 0, 0.1, 0.5, 1 and 3 wt%) were prepared by solid-state mixed-oxide method and sintered at 1400 °C for 2 h. X-ray diffraction result suggested that tetragonality (c/a) of the BaTiO₃/xSi₃N₄ ceramics increased with increasing content of Si₃N₄. Density and grain size of BaTiO₃/xSi₃N₄ ceramic were found to increase for small addition (i.e. 0.1 and 0.5 wt%) of Si₃N₄ mainly due to the presence of liquid phase during sintering. BaTiO₃ ceramics containing such amount of Si₃N₄ also showed improved dielectric and ferroelectric properties.     

Effect of the Y2O3 additive concentration on the properties of a silicon nitride ceramic substrate

Silicon nitride (Si₃N₄) ceramics offer excellent thermal, mechanical and dielectric properties, which make Si₃N₄ a good candidate material for an application as electronic packaging material. For an application as a heat dissipation substrate, most studies focused on achieving a high thermal conductivity through long-time heat preservation and different kinds of heat treatments. Very few studies also considered the mechanical and dielectric properties. In addition, there have not been systematic researches about influence of additives concentration and type on the combination properties of Si₃N₄. Therefore, in this study, Si₃N₄ ceramic samples were prepared via hot pressing at 1800 °C with a relatively short heat preservation step (2 h), with different amounts of Y₂O₃ added as sintering additive. The effect of the initial concentration of the rare earth oxide on the chemical composition, microstructure, thermal conductivity, as well as the mechanical and dielectric properties of the Si₃N₄ ceramic samples was systematically studied.     

High-pressure spark plasma sintering of silicon nitride with LiF additive

High-pressure spark plasma sintering of Si₃N₄ with Y₂O₃, Al₂O₃ and LiF additives was employed to fabricate high quality dense ceramics comprising approximately 92% α-Si₃N₄ phase and 8% β-Si₃N₄ phase. The relatively high pressure applied (up to 650 MPa) had a substantial effect on densification by enhancing particle rearrangement, making it possible to obtain dense Si₃N₄ at a significantly lower sintering temperature (1350 °C). Consequently, virtually no α to β phase transformation transpired during the liquid phase sintering process. The LiF additive had an indispensable influence on the densification process by lowering the viscous glass formation temperature, which also contributed to enhanced particle rearrangement. The nearly fully dense samples (theoretical density ≥99%) obtained displayed a good combination of mechanical properties, namely elastic modulus (304–316 GPa), hardness (1720–1780 HV2) and fracture toughness (6.0 MPa m^1/2).     

Improved thermal conductivity of sintered reaction-bonded silicon nitride using a BN/graphite powder bed

Sintered reaction-bonded silicon nitride (SRBSN) with improved thermal conductivity was achieved after the green compact of submicron Si powder containing 4.22 wt% impurity oxygen and Y₂O₃-MgO additives was nitrided at 1400 °C for 6 h and then post-sintered at 1900 °C for 12 h using a BN/graphite powder bed. During nitridation, the BN/10 wt% C powder bed altered the chemistry of secondary phase by promoting the removal of SiO₂, which led to the formation of larger, purer and more elongated Si₃N₄ grains in RBSN sample. Moreover, it also enhanced the elimination of SiO₂ and residual Y₂Si₃O₃N₄ secondary phase during post-sintering, and thus induced larger elongated grains, decreased lattice oxygen content and increased Si₃N₄-Si₃N₄ contiguity in final SRBSN product. These characteristics enabled SRBSN to obtain significant increase (∼40.7%) in thermal conductivity from 86 to 121 W ∙ m⁻¹ ∙ K⁻¹ without obvious decrease in electrical resistivity after the use of BN/graphite instead of BN as powder bed.     

Preparation and characterization of Si3N4-based composite ceramic tool materials by microwave sintering

Si₃N₄-based composite ceramic tool materials with (W,Ti)C as particle reinforced phase were fabricated by microwave sintering. The effects of the fraction of (W,Ti)C and sintering temperature on the mechanical properties, phase transformation and microstructure of Si₃N₄-based ceramics were investigated. The frictional characteristics of the microwave sintered Si₃N₄-based ceramics were also studied. The results showed that the (W,Ti)C would hinder the densification and phase transformation of Si₃N₄ ceramics, while it enhanced the aspect-ratio of β-Si₃N₄ which promoted the mechanical properties. The Si₃N₄-based composite ceramics reinforced by 15 wt% (W,Ti)C sintered at 1600 °C for 10 min by microwave sintering exhibited the optimum mechanical properties. Its relative density, Vickers hardness and fracture toughness were 95.73 ± 0.21%, 15.92 ± 0.09 GPa and 7.01 ± 0.14 MPa m^1/2, respectively. Compared to the monolithic Si₃N₄ ceramics by microwave sintering, the sintering temperature decreased 100 °C,the Vickers hardness and fracture toughness were enhanced by 6.7% and 8.9%, respectively. The friction coefficient and wear rate of the Si₃N₄/(W,Ti)C sliding against the bearing steel increased initially and then decreased with the increase of the mass fraction of (W,Ti)C., and the friction coefficient and wear rate reached the minimum value while the fraction of (W,Ti)C was 15 wt%.     

Effect of post-sintering heat-treatment on thermal and mechanical properties of Si3N4 ceramics sintered with different additives

To improve the thermal conductivity of Si₃N₄ ceramics, elimination of grain-boundary glassy phase by post-sintering heat-treatment was examined. Si₃N₄ ceramics containing SiO₂–MgO–Y₂O₃-additives were sintered at 2123 K for 2 h under a nitrogen gas pressure of 1.0 MPa. After sintering, the SiO₂ and MgO could be eliminated from the ceramics by vaporization during post-sintering heat-treatment at 2223 K for 8 h under a nitrogen gas pressure of 1.0 MPa. Thermal conductivity of 3 mass% SiO₂, 3 mass% MgO and 1 mass% Y₂O₃-added Si₃N₄ ceramics increases from 44 to 89 Wm⁻¹ K⁻¹ by the decrease in glassy phase and lattice oxygen after the heat-treatment. Relatively higher fracture toughness (3.8 MPa m^1/2) and bending strength (675 MPa) with high hardness (19.2 GPa) after the heat-treatment were achieved in this specimen. Effects of heat-treatment on microstructure and chemical composition were also observed, and compared with those of Y₂O₃–SiO₂-added and Y₂O₃–Al₂O₃-added Si₃N₄ ceramics.     

Microstructure and mechanical properties of tantalum carbide ceramics: Effects of Si3N4 as sintering aid

Stoichiometric Tantalum carbide (TaC) ceramics were prepared by reaction spark plasma sintering using 0.333–2.50 mol% Si₃N₄ as sintering aid. Effects of the Si₃N₄ addition on densification, microstructure and mechanical properties of the TaC ceramics were investigated. Si₃N₄ reacted with TaC and tantalum oxides such as Ta₂O₅ to form a small concentration of tantalum silicides, SiC and SiO₂, with significant decrease in oxygen content in the consolidated TaC ceramics. Dense TaC ceramics having relative densities >97% could be obtained at 0.667% Si₃N₄ addition and above. Average grain size in the consolidated TaC ceramics decreased from 11 µm at 0.333 mol% Si₃N₄ to 4 µm at 2.50 mol% Si₃N₄ addition. The Young's modulus, Vickers hardness and flexural strength at room temperature of the TaC ceramic with 2.50 mol% Si₃N₄ addition was 508 GPa, 15.5 GPa and 605 MPa, respectively. A slight decrease in bending strength was observed at 1200 °C due to oxidation of the samples.     

Fabrication and mechanical properties of boron nitride nanotube reinforced silicon nitride ceramics

In this study, silicon nitride (Si₃N₄) ceramics added with and without boron nitride nanotubes (BNNTs) were fabricated by hot-pressing method. The influence of sintering temperature and BNNTs content on the microstructures and mechanical properties of Si₃N₄ ceramics were investigated. It was found that both flexural strength and fracture toughness of Si₃N₄ were improved when sintering temperature increases. Moreover, α-Si₃N₄ phase could transform into β-Si₃N₄ phase completely when sintering temperature rises to 1800 °C and above. BNNTs can enhance the fracture toughness of Si₃N₄ dramatically, which increases from 7.2 MPa m^1/2 (no BNNTs) to 10.4 MPa m^1/2 (0.8 wt% BNNTs). However, excessive addition of BNNTs would reduce the fracture toughness of Si₃N₄. Meanwhile, the flexural strength and relative density of Si₃N₄ decreased slightly when BNNTs were added. The related toughening mechanism was also discussed.     

Liquid phase sintering of Al2O3/SiC nanocomposites

Al₂O₃/SiC nanocomposites are usually prepared by hot pressing or using high sintering temperatures, viz. 1700°C. This is due to the strong inhibiting effect of the nano-sized SiC particles on the densification of the material. Liquid phase sintering (LPS) can be used to improve densification. This work explored two eutectic additive systems, namely MnO₂.SiO₂ (MS) and CaO.ZnO.SiO₂ (CZS). The additive content in Al₂O₃/5 wt% SiC nanocomposite material varied from 2 to 10 wt%. Densities of up to 99% of the theoretical value were achieved at temperatures as low as 1300°C. Characterisation of the materials by XRD, indicated the formation of secondary crystalline phases in addition to Al₂O₃ and SiC. SEM and TEM analysis showed the presence of a residual glassy phase in the grain boundaries, and an increase in the average grain size when compared to nanocomposites processed without LPS additives.     

Microwave dielectric properties of LBBS glass added (Zn0.95Co0.05)2SiO4 for LTCC technology

The effects of Li₂O–B₂O₃–Bi₂O₃–SiO₂ (LBBS) glass on the sintering characteristics and microwave dielectric properties of (Zn_0.95Co_0.05)₂SiO₄ were investigated in this study. (Zn_0.95Co_0.05)₂SiO₄ powders were fabricated by traditional solid-state preparation, and LBBS glass was synthesised by quenching method. The LBBS glass can effectively reduce the sintering temperature of (Zn_0.95Co_0.05)₂SiO₄ from 1300 °C to 900 °C and thus promote the densification and uniformity of the specimens. XRD patterns indicated that no other secondary phases existed in our doping range (0–2 wt%). To obtain the highest sintering density and a uniform microstructure when the samples were sintered at 900 °C, the optimal doping content was set to be 1.5 wt%. The sample also demonstrated the following excellent microwave dielectric properties: ɛ_r=6.16, Qf=33,000 GHz and τ_f=−59 ppm/°C.     

Densification behaviors and high-temperature characteristics of Si3N4 sintered bodies using Al2O3–Yb2O3 additives

The densification behaviors (include α–β transformation) and high-temperature characteristics (especially oxidation resistance and high-temperature strength properties) of Si₃N₄ sintered bodies using Al₂O₃–Yb₂O₃ based sintering additive are investigated.Densification and α–β transformation behaviors were investigated by varying the compositions of Al₂O₃–Yb₂O₃ additives. In terms of the influence of the Y₂O₃/Al₂O₃ ratio on densification behavior, a greater Yb₂O₃/Al₂O₃ ratio tends to inhibit densification. The α–β transformation tended to be delayed in sintered bodies with a small additive amount of 3.4 mass%. Compared with the transformation behaviors of the sintered bodies using Al₂O₃–Y₂O₃ additives, those using Al₂O₃–Yb₂O₃ additives exhibited a narrower temperature zone for α–β transformation, which attributed to the finer structure for the sintered body using Al₂O₃–Yb₂O₃ additives. This is affected by the difference in solubility of Si₃N₄ in the two kinds of glass phase.High room temperature strength of 900–1000 MPa was obtained for sintered bodies with a 10.0 mass% addition of additives, and this is considered to be due to the finer micro-structure. Precipitation of a Yb₄Si₂N₂O₇ phase at the grain boundary glass phase, as induced by crystallization processing, enables the improvement of 1300 °C strength to about 650–720 MPa. Crystallization processing resulted in a 30% reduction in the amount of weight change during oxidation (from 3.42 to 2.46 mg/cm²), demonstrating the effectiveness in improving oxidation resistance.     

Optimization of spark plasma sintering parameters of Si3N4-SiC composite using response surface methodology (RSM)

The Si₃N₄-SiC micro-nano composites were fabricated via the spark plasma sintering method using MgSiN₂ as an additive. Response surface methodology and central composite design were applied to optimize the spark plasma sintering process for the fabrication of Si₃N₄-SiC/MgSiN₂ with improved density. The relation between the three parameters of sintering including temperature, pressure, and holding time was modeled and the optimized parameters were obtained. The best sintering results obtained for the sintering temperature, holding time, and pressure are 1700 °C, 487 s, and 49 MPa, respectively. The addition of MgSiN₂ as an additive and SiC as a secondary phase were also investigated in the present work. The Si₃N₄−5 vol% SiC composite exhibited high hardness (19 GPa) and fracture toughness values (6.5 MPa m^1/2) at room temperature.