单片集成的高性能压阻式三轴高g加速度计的设计、制造和测试

设计、制造并测试了一种单片集成的压阻式高性能三轴高g加速度计,量程可达105g.x和y轴单元均采用一种带微梁的三梁-质量块结构,z轴单元采用三梁-双岛结构.与传统的单悬臂梁结构或者悬臂梁-质量块结构相比,这两种结构均同时具有高灵敏度和高谐振频率的优点.采用ANSYS软件进行了结构分析和优化设计.中间结构层主要制作工艺包括压阻集成工艺和双面Deep ICP刻蚀,并与玻璃衬底阳极键合和上层盖板BCB键合形成可以塑封的三层结构,从而提高加速度计的可靠性.封装以后的加速度计采用落杆方法进行测试,三轴灵敏度分别为2.28,2.36和2.52 μV/g,谐振频率分别为309,302和156 kHz.利用东菱冲击试验台,采用比较校准法测得y轴和z轴加速度计的非线性度分别为1.4%和1.8%.     

基于MEMS的压阻式三轴加速度计的设计与测试

随着微机电(MEMS)产业的兴起,加速度计正在向微型化,集成化,高可靠性,高灵敏度的方向发展,具有广泛的军事和民用前景。在此提出了一种压敏电阻完全对称分布的“8梁—质量块”结构的硅微压阻式三轴加速度计,与传统的单悬臂梁结构或悬臂梁—质量块结构相比,这种结构具有更高的灵敏度和更小的轴间耦合度。介绍了采用ANSYS软件进行结构分析的过程,给出了三轴加速度计敏感单元的制作工艺流程。通过对加速度计的静态测试得出X、Y、Z轴的灵敏度分别为SX=48*10-6V/g, SY=54*10-6V/g, SZ=217*10-6V/g,非线性度分别为0.4%,0.6%,0.4% 。     

基于SOI硅片高g值加速度计的设计与分析

基于SOI硅片,设计了一种新型平面内振动高g值压阻式加速度计。该加速度计包括X轴向与Y轴向单元,采用三梁一扇形质量决平板内振动结构,与传统的平面外振动结构相比较,该结构具有较高的谐振频率与灵敏度。采用两两相对的单元布局方式,可有效的消除横向灵敏度的影响,提高结构的测量精度。建立理论模型并利用ANSYS软件对结构进行模拟分析与验证。分析表明,加速度计在X轴向、Y轴向灵敏度分别为1.2μv／g、1.18μv／g;谐振频率分别为479KHz、475KHz。可实现对量程高达25万g加速度的测量。     

声加速度计

本文讨论了近年来研究的一些声加速度计的特性。这些加速度计采用压电晶体和微型机械悬臂梁作为谐振元件,而悬臂梁内含压电电容器,压阻电路,或声表面波振荡器。另一些加速度计采用一种具有闭环伺服电子线路的力再平衡技术。加速度计的灵敏度受重量和频率响应的限制,电压型加速度计灵敏度可达300mV/g,SAW加速度计可达10000Hz/g。动态范围达10~7,频率比例系数稳定性达10~(-3)ppm时,加速度计的测量范围为10μg—200000g。加速度计可以是分离的、混合集成的或整体的。     

基于单质量块微纳光栅泰伯效应的双轴MOEMS加速度计

对一种基于单质量块微纳光栅泰伯效应双轴微光机电系统(MOEMS)加速度计进行了设计、加工与测试。利用有限元分析和时域有限差分法分别对双轴加速度计的敏感结构和光栅参数进行仿真优化。在保证加速度计高集成度的同时,为了实现双轴加速度的高精度测量,采用不同周期的两组光栅进行双轴加速度检测,通过磁控溅射工艺将两组光栅结构沉积在质量块的不同区域,最终通过阳极键合方式实现该双轴MOEMS加速度计的制备。实验结果表明,光栅泰伯效应双轴MOEMS加速度计x轴与y轴的灵敏度分别为3.36和3.54 V/g,零偏稳定性分别为25.53和20.91μg@1 s。该研究为实现高精度多轴加速度计提供了一种新的方法。     

单片集成三轴加速度传感器

基于硅压阻效应原理,单片集成三轴加速度传感器通过双惯性质量块和六梁结构组成敏感结构,其中四个L型梁对称布置用来测量x和y轴加速度;中间的对称双梁测量z轴加速度。通过工艺兼容技术,在同一芯片上制作出MEMS敏感结构和CMOS信号处理电路。利用ANSYS软件对所设计的结构进行了应力模拟分析,并对产品的加工工艺进行了描述。通过对研制出的单片集成三轴加速度传感器进行性能测试,验证了模拟分析的合理性,最终产品满足设计要求。所研制的产品具有体积小、可靠性高、易于批量生产等优点,可广泛应用于导航系统、汽车工业以及消费电子产品等领域。     

薄膜体声波谐振器微加速度计惯性力敏特性

研究了由硅微质量块-悬臂梁惯性力敏结构和氮化铝(AlN)薄膜体声波谐振器(FBAR)检测元件集成的FBAR微加速度计表头的惯性力敏特性。采用有限元(FEA)静力学仿真,得到惯性力载荷作用下硅微悬臂梁上的应力分布;选取最大应力值作为载荷,基于第一性原理计算纤锌矿AlN的弹性系数与应力的关系式,预测惯性力载荷作用下AlN弹性系数的最大变化量;采用谐响应分析,预测FBAR微加速度计的加速度-谐振频率偏移特性。分析得到：惯性力载荷作用下,FBAR微加速度计的谐振频率向高频偏移,灵敏度约为数kHz/g;其加速度增量-谐振频率偏移特性曲线具有良好的线性度。     

一种具有"8悬臂梁-质量块"结构的新型硅微加速度计

提出了一种具有"8悬臂梁-质量块"结构的新型三明治式硅微机械电容式加速度计,用微机械加工工艺在(111)硅片上制作出了具有信号输出的器件.该加速度计的惯性质量块由同一(111)硅片上下表面对称分布的8根悬臂梁支撑.这些悬臂梁是利用(111)硅在KOH溶液中的各向异性腐蚀特性结合深反应离子刻蚀(DRIE)实现的,其尺度精确可控,保证了结构的对称性.该加速度计的谐振频率为2.08kHz,品质因子Q为21.4,灵敏度为93.7mV/g.     

一种具有“8悬臂梁-质量块”结构的新型硅微加速度计

提出了一种具有"8悬臂梁-质量块"结构的新型三明治式硅微机械电容式加速度计,用微机械加工工艺在(111)硅片上制作出了具有信号输出的器件.该加速度计的惯性质量块由同一(111)硅片上下表面对称分布的8根悬臂梁支撑.这些悬臂梁是利用(111)硅在KOH溶液中的各向异性腐蚀特性结合深反应离子刻蚀(DRIE)实现的,其尺度精确可控,保证了结构的对称性.该加速度计的谐振频率为2.08kHz,品质因子Q为21.4,灵敏度为93.7mV/g.     

基于SOI的低横向灵敏度压阻式加速度计的设计

提出了一种非同一平面的双弯曲梁的压阻式加速度计,在加速度作用下该结构梁的质心与质量块的质心对齐,从而实现低横向效应。利用SOLIDWORKS软件建立了结构模型,并用Comsol仿真软件和有限元ANSYS仿真软件对其进行静态分析、模态分析和电学性能分析。分析了影响频率和灵敏度的相关参数,对加速度计的结构参数进行了优化。设计了一套版图以及工艺加工方案,采用微电子机械系统(MEMS)标准工艺完成了加速度计的制备。最后进行精密离心机测试,结果表明该结构的加速度计具有较低的横轴灵敏度,其中X轴的横向灵敏度为0.078%,Y轴的横向灵敏度为0.002%,比较高的主轴灵敏度,Z轴灵敏度为0.64 mV/g。     

GEMNET: a generalized, shuffle-exchange-based, regular, scalable,modular, multihop, WDM lightwave network

GEMNET is a generalization of shuffle-exchange networks and it can represent a family of network structures (including ShuffleNet and de Bruijn graph) for an arbitrary number of nodes. GEMNET employs a regular interconnection graph with highly desirable properties such as small nodal degree, simple routing, small diameter, and growth capability (viz. scalability). GEMNET can serve as a logical (virtual), packet-switched, multihop topology which can be employed for constructing the next generation of lightwave networks using wavelength-division multiplexing (WDM). Various properties of GEMNET are studied     

Thermodynamics of copper matte converting: Part III. Steady-state volatilization of Au,Ag, Pb,Zn, Ni,Se, Te,Bi, Sb,and As from slag,matte, and metallic copper

A comprehensive compilation of various thermodynamic data required for a complete analysis of copper matte converting reactions is presented. The data comprise estimated free energies of formation for such gases as SeO, SeS, TeO, TeS, BiO, BiS, SbO, SbS, AsO, and AsS, as well as activity coefficients in dilute copper alloys and vapor pressures of various elements and compounds. The volatilization of minor elements in steady-state reactors comprising gas and several condensed phases is mathematically formulated, and a parameter which governs the volatilization in such reactors is defined and named volatilization constant. The vapor pressures of various volatile species are calculated thermodynamically for the Noranda Process reactor by assuming equilibrium conditions. The volatilization constants of various minor elements are expressed explicitly as functions of oxygen and sulfur activities. Formerly Associate Professor, Department of Metallurgical Engineering, University of Utah, Salt Lake City, UT     

Bits, symbols, bauds, and bandwidth

The use of clear, concise, and unambiguous language in telecommunications engineering is vital to communicate a desired meaning and understanding. Terminology should be based on rigorous engineering principles and traceable to well known and dependable sources. This article deals with four everyday terms commonly encountered in the popular semi-technical press as well as in serious engineering periodicals. The misuse of these and other terms can lead to low-balled cost proposals, court litigation, and patent infringement cases. Imagine how an engineering student can be confused when she/he typically encounters bandwidth measured in bits per second     

Novel planar, square-shaped, dielectric-waveguide, single-, and dual-mode filters

This paper presents a novel concept of a square-shaped dielectric-waveguide resonator, which can easily realize a dielectric-waveguide cross-coupled filter or a dielectric-waveguide dual-mode filter, using the conventional printed circuit board (PCB) process. This planar dielectric-waveguide resonator has a higher Q value than a microstrip resonator. The physical mechanisms of both single- and dual-mode filters are elucidated. Some new coupling structures are developed for undergoing the PCB process. Filter design procedures are detailed. Design curves for the coupling coefficients of internal- and external-coupling structures are determined by full-wave finite-element-method electromagnetic calculations. Measurement results are highly consistent with theory for all trial filters. This study offers an effective means of producing low-cost high-performance planar circuit filters.     

PBX技术.市态.营销.选购

本文介绍了ＰＢＸ交换机的技术及市场需求态势。并提出ＰＢＸ产品的营销要素及其用户在选购时应遵循的原则。     

Dilemmas,uncertainty, risks,and board performance

This paper traces the origins of the words risk, uncertainty, governance and development and argues that a deeper understanding of each allows more effective decision taking in the boardroom. It argues that the role of the board of directors is to balance and rebalance continuously their irresolvable dilemma — ‘how do we drive our enterprise forward while keeping it under prudent control?’ It argues that it is the board’s role to focus on uncertainty, rather than risk, and this requires a different set of intellectual skills from board members to be able to cope with monitoring a range of diverse scenarios. This is crucial for a board to develop stronger ways of both leading their organisation and of ensuring the connectedness of the learning within and between the board and the operational unit’s risk taking. It advocates that to achieve this a board must develop new ways of learning — especially of thinking strategically and becoming more sensitised to the dynamics of their changing external environments. This will take them well beyond the comforts of their specialist managerial disciplines and into the true world of directing. The paper demonstrates the importance of continuous learning in reducing organisational uncertainty and risk. It uses the ‘Learning Board’ process and model as the central processor of both strategic and operational learning to create an annual rhythm for the board’s year.