基于MEMS器件的电解微细加工技术的研究

基于MEMS器件的微细加工技术,提出了在微电流密度下电化学钝化机理基础上,用高频振动效应消除钝化,用与高频振动同频同步的窄脉冲电流电解作用去除机体材料,实现电解复合微细加工,这是微细加工技术的新构想及发展趋势.     

微细电解加工技术的概况与展望

概括总结了微细电解加工的典型技术,综合分析了近几年微细电解加工技术的研究成果和最新进展,包括脉冲电源、新型电解液、复合加工、微器件加工以及基础理论等方面,展望了其未来的研究重点和发展趋势.     

微结构超声复合加工机理分析与试验

提出制作微结构的超声复合电加工方法.分析微细超声、超声复合电火花、超声复合电解微细加工过程机理.用微细放电组合技术制作多种截面形状微细工具电极;完善超声复合电加工试验系统,进行了多种材料、形状的微结构超声复合加工试验.结果表明:用超声加工是制作硬脆材料微结构的有效方法,用超声复合电火花制作的金属材料微结构有好的精度及稳定性;超声复合电解加工兼有效率高、精度好的技术优势.     

微细电解加工技术的发展现状

结合近些年国内外微细电解加工技术的研究进展,论述了微细电解加工技术在微细机械加工领域取得的最新研究成果,如脉冲微细电解加工、掩膜微细电解加工、微细电解铣削加工、复合电解微细加工等,这些成果在未来的微细电解加工领域应用将更为广泛,具有很好的使用价值。     

微细电解加工机理探讨

介绍了微细电解加工技术的原理和特点，通过对其加工工艺的分析，简述了在微细电解加工过程中，影响其加工速度、精度、效率的主要因素，并通过对这些因素的综合分析，总结了制约微细电解加工技术应用的因素和进行微细电解加工应具备的基本条件。最后，针对微细电解加工技术的现状，对其发展提出了新的展望。     

微细电解铣削加工技术研究进展及展望

微细电解铣削加工技术具有工具电极无损耗、加工柔性高、与工件材料硬度无关等特点,在金属微结构器件制造领域展现出极具诱惑力的应用前景。通过综合国内外文献资料,按照不同的电解液供给方式介绍微细电解铣削加工技术的研究进展,分析微细电解铣削加工相关技术研究中存在的不足,并展望该领域的未来发展趋势。     

超声协同气膜屏蔽微细电解铣削加工技术研究

为了改善微细电解铣削加工存在的加工效率低和水跃现象导致的杂散腐蚀等问题,提出在电解加工过程中引入超声场和气流场的超声协同气膜屏蔽微细电解铣削加工技术,并探索不同加工参数对材料去除效率、工件加工质量的影响规律。结果表明:相同参数下,超声协同气膜屏蔽微细电解铣削加工的微槽平均宽度相较于超声辅助微细电解加工降低11.69%、微槽平均深度相较于气膜屏蔽微细电解加工增大28.56%,验证了该技术的加工可行性与优越性;在电压10 V、气压0.03 MPa、脉冲频率120 kHz、扫描速度0.36 mm/min、振幅8μm时,超声协同气膜屏蔽微细电解铣削加工技术能加工出精度较高、侧壁锥度较小的微槽结构。     

基于特种加工的微细制造技术

通过例证概括介绍了特种加工方法在微细加工方面所取得的成就，这些加工技术包括：电火花加工、电化学加工、超声加工、激光加工、精密电铸等。阐述了特种加工技术在微细制造方面的特点：擅长加工复杂的三维微机械结构，且投资小，适于中小批量生产。     

超声扰动电解液的微细孔电解加工精度研究

根据法拉第定律、间隙内流场的特性以及超声扰动参数的影响,探讨了采用超声扰动电解液方法进行微细孔电解加工的机理,对微细电解和超声扰动电解液下的微细电解加工工艺试验进行了比较,结果表明超声扰动电解液加工时,加工间隙减小,加工的定域性得到改善,加工精度得到提高.     

微机电系统(MEMS)研究现状及展望

主要综述了微机电系统（MEMS）领域所涉及的微材料、微机械学、微细加工技术、微元器件、封装等基础理论和关键技术的研究现状，分析了存在问题。提出了今后的研究重点，并对其未来发展作了展望，提出了相应的发展策略。     

Probability of precision micro-machining of insulating Si3N4 ceramics by EDM

Electrical discharge machining (EDM) is used as a precision machining method for the electrically conductive hard materials with a soft electrode material. But recently we succeeded to machine on insulating material by EDM. The technology is named as an assisting electrode method. The EDMed surface is covered with the electrical conductive layer during discharge. The layer holds the electrical conductivity during discharge. For micro-EDM, the wear of tool electrode becomes lager ratio than the normal machining. So the micro-machining is extremely difficult to get the precision sample.

In this paper to obtain a fine and precise ceramics sample, some trials were carried out considering the EDM conditions, tool electrodes material and assisting electrode materials. Insulating Si₃N₄ ceramics were used for workpiece. The machining properties were estimated by the removal rate and tool wear ratio. To confirm the change of micro-machining process, the discharge waveforms were observed. The micro-machining of the Ø0.05 mm hole could be machined with the commercial sinking electrical discharge machine.     

Dynamic long axis for ultra-precision machining of optical linear structures

Currently, fly cutting is the most popular manufacturing technology for the machining of planar groove structures. The disadvantage of this technology is the long machining time. A promising alternative technology for the machining of planar grooves is planing. The main disadvantage of planing in comparison to fly cutting is the limitation of conventional precision axes concerning a high dynamic movement. Regarding to this aspect the Fraunhofer IPT has developed a precise linear axis. It allows high dynamic movements by using an impulse decoupling system (AiF-FV-Nr.: 13,270 N). The paper describes the mechanical setup and the development and optimization of the mechanical main component. The detailed simulation of the drive system (including motor control loop and impulse decoupling system), results of static and dynamic measurements and test machining results are presented.     

基于车铣复合中心的针阀接头数控加工

介绍利用车铣复合中心加工针阀接头零件的新工艺,重点分析加工难点的工艺过程,解决了采用普通数控加工方法加工精密零件时加工精度低、效率低和工序分散问题,为符合现代制造技术发展方向的车铣复合加工的推广和应用提供参考和借鉴。     

微细电火花加工实验及工艺规律研究

微细电火花加工在当前微细加工中显示出巨大的发展潜力。通过用自行研制的微细电火花加工系统进行的一系列微细电欠花加工实验，对影响微细电火花加工加工效率和加工精度的各种因素(如充放电电容、开路电压和工作介质等)进行了研究，     

Chemical Assisted Laser Machining for The Minimisation of Recast and Heat Affected Zone

Laser processing techniques have been widely used for high speed, high accuracy subtractive manufacturing such as cutting, drilling, milling and micro-machining. Most of these processes are based on thermal mechanisms. For the machining of metallic materials, a layer of recast and heat affected zone is normally present on the laser-machined components. This paper reports a novel technique that aims to minimize such heat affects and at the same time to improve the material removal efficiency. A relatively environmentally friendly salt solution, in contact with the beam-material interaction point, was used in this study to enable material removal to be based on laser activated thermal-chemical mechanism. It has been shown that, not only the recast layer can be removed during the processing, the material removal rate can be increased up to 300% for 316 stainless steel work piece.     

第十四届中国国际模具技术和设备展览会现代模具制造技术及设备评述

通过第十四届中国国际模具技术和设备展览会中模具加工技术及其关键设备、测量仪器、模具加工刀具技术等评述,介绍了现代模具制造技术的现状、特点和发展趋势。     

Influence of tool vibration on machining performance in electrochemical micro-machining of copper

Electrochemical micro-machining (EMM) appears to be promising as a future micro-machining technique since in many areas of applications, it offers several advantages, including biomedical and MEMS applications. A suitable micro-tool vibration system has been developed, which consists of tool-holding unit, micro-tool vibrating unit, etc. The developed system was used successfully to control material removal rate (MRR) and machining accuracy to meet the micro-machining requirements. Micro-holes have been produced on thin copper workpiece by EMM with stainless-steel micro-tool. Experiments have been carried out to investigate the most effective values of process parameters such as micro-tool vibration frequency, amplitude and electrolyte concentration for producing micro-hole with high accuracy and appreciable amount of MRR. From the experimental results and SEM micrographs, it is evident that the introduction of micro-tool vibration improves EMM performance characteristics. Lower electrolyte concentration in the range of 15–20 g/l reduces stray current effects. Hertz (Hz) range of tool vibration frequency improves the removal of sludge and precipitates from very small interelectrode gap. The 150–200 Hz range of tool vibration frequency can be recommended for EMM, which provides a better electrochemical machining in the narrow end gap. Compared to kHz range, Hz range micro-tool's vibration improves the MRR and accuracy in EMM.     

叶轮5轴加工方法及制造工艺研究

航空工业作为一个国家综合实力的象征,在航空零部件当中,航空喷气发动机是飞机的主要动力部件,而喷气发动机的主要部件就是叶轮、叶片。航空发动机的制造技术高低已成为一个国家科技实力的标准,所以叶轮、叶片的制造加工技术的研究,对各类型飞机、军事装备、汽车、船只和民用设备等等有着重要的研究价值,并且对经济和国防有着重要的战略意义。在分析5轴加工的功能、特点和应用喷气式发动机叶轮的运作原理和结构特征的基础上,编制了叶轮5轴加工的加工工艺和程序。     

模具多轴数控加工技术的现状与发展

随着科学技术的突飞猛进,模具制造技术迅速发展,多轴数控加工、高速加工、电火花加工、快速模具制造等先进技术在模具制造中得到了广泛的应用。本文介绍了多轴数控加工技术的特点与应用现状,并指出了多轴数控加工编程技术存在的问题、以及实现多轴数控加工技术的难点,最后对多轴数控加工技术的发展趋势进行了展望。     

Analysis–synthesis of dimensional deviation of the machining feature for discrete-part manufacturing processes

Dimensional deviation analysis has been an active and important research topic in mechanical design, manufacturing processes, and manufacturing systems. This paper proposes a comprehensive dimensional deviation evaluation framework for discrete-part manufacturing processes (DMP). A generic, explicit, and transmission model is developed to describe the dimensional deviation accumulation of machining processes by means of kinematic analysis of relationships between fixture error, datum error, machine tool geometric error, fixturing force inducing error and the dimensional quality of the product. The developed modeling technology can deal with general fixture configurations. In addition, the local contact deformations of the workpiece–fixture system are determined by solving a nonlinear programming problem of minimizing the total complementary energy of the frictional workpiece–fixture subsystem in machining system. Moreover, the deviation of an arbitrary point on machining feature can be also evaluated based on a point deviation model with prediction dimension deviation from the transmission model. The dimensional error transmission within the machining process is quantitatively described in this model. A systematic procedure to construct the model is presented and validated. This model can be also applied to process design evaluation for complicated machining processes.