肺心病患者急性发作期血液流变学和D-二聚体测定的临床意义

光致弯曲薄膜是一种可遥控供能的新型微执行器驱动元件.介绍了光致弯曲薄膜的驱动原理,综述了光致弯曲薄膜微执行器的开发和研究现状,重点介绍了光致弯曲薄膜微执行器在微液体控制系统和微马达中的应用,并对光致弯曲薄膜在微执行器中的应用进行了展望.     

光致弯曲薄膜微执行器的研究

光致弯曲薄膜是一种可遥控供能的新型微执行器驱动元件.介绍了光致弯曲薄膜的驱动原理,综述了光致弯曲薄膜微执行器的开发和研究现状,重点介绍了光致弯曲薄膜微执行器在微液体控制系统和微马达中的应用,并对光致弯曲薄膜在微执行器中的应用进行了展望.     

静磁微执行器模型研究进展

磁驱动微执行器是一种重要的微执行器.与静电驱动相比,磁驱动具有一些无可替代的优点.静磁驱动是磁驱动方式中重要的一种,具有广阔的应用前景.综述了国内外静磁微执行器模型的最新进展,分析了各类模型的优缺点,特别强调了在微观领域,不能通过简单的电-磁类比得到相应的磁微执行器的各类模型.讨论了磁微执行器的各种典型的pull-in模型.这些模型对磁微执行器的设计、分析与优化具有重要的参考和实用价值.     

压电膜片的优化设计及在微泵中的应用

压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一。该文采用ANSYS有限元软件对压电膜片结构参数和在微执行器上的装配方法进行了优化设计,得到PZT/Si,PZT/Cu压电膜片结构的优化数据,将其应用于有阀微泵的研制。经测试,微泵压电驱动效果与仿真结果一致,微泵背压可达836 Pa,流量达1.4 mL/min。     

基于热膨胀效应的微执行器进展

本文首先分析了热驱动微执行器的基本及其相对于静电驱动,磁驱动的优势。接着分析了五种常见的热驱动结构的原理,特点,它们的某些典型应用也随后作了介绍,最后对热驱动微执行器计算机辅助设计的前景进行了展望。     

管道微机器人中压电执行器的研究

微执行器作为微机械系统的核心单元,一直是微机械发展关键。文章介绍了一种应用于管道微机器人的足式压电执行器。在交变电压作用下,该压电执行器将压电体的弯曲振动转化成其弹性足沿管壁的移动,从而实现执行器的运动。在分析其工作原理的基础上,研制了压电微执行器的驱动电源,并进行了简单的实验研究。研究表明该执行器具有结构简单,易于微型化,响应快,驱动方便等特点。     

薄膜型超磁致伸缩微执行器的研究现状

超磁致伸缩薄膜是一种性能优良的新型微驱动元件,文章介绍了超磁致伸缩薄膜驱动的原理,综述了薄膜型超磁致伸缩微执行器的开发和最新研究成果,重点介绍了薄膜型超磁致伸缩微执行器在微流体控制系统、线性超声微马达及微小型行走机械中的应用,并对超磁致伸缩薄膜的微执行器中的应用进行了展望。     

基于静电驱动的平行板式微执行器的静态吸合现象的研究

本文先讨论了基于静电驱动的平行板式微执行器在忽略边缘效应下的静态吸合现象,之后在前面研究的基础上,进一步分析了该微执行器在考虑边缘效应下的静态吸合现象,最后建立该微执行器的模型,并设置参数,仿真得到结果证明静态吸合现象的发生。     

微器件操作末端执行器研究现状

微纳制造技术和微机电系统(MEMS)的迅猛发展,推动了微器件向微型化、集成化、多功能化方向发展。微器件操作末端执行器是微操作工具与微器件直接作用的部件,具有重要研究意义。综述了微器件操作末端执行器的研究现状和成果;对国内外微器件操作末端执行器进行了汇总和分类;对微器件操作末端执行器的工作原理和结构进行了介绍;基于对接触式和非接触式末端执行器研究现状的总结,分析了各种末端执行器的优势和局限。最后,讨论了微器件操作末端执行器的应用现状和面临的挑战,并对末端执行器的发展进行了展望。该研究为微器件操作末端执行器的选取和开发提供了技术参考。     

MEMS技术现状及应用

微机电系统(MEMS)技术是一门新兴的技术,它将微电子技术和精密机械加工技术融合在一起,实现了微电子与机械的融为一体。近年来,对MEMS的技术发展、加工工艺及其产业化的研究也被越来越多的人所重视。文章介绍了MEMS的特点与技术发展现状、MEMS器件的类型及其功能,并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。     

静电梳齿驱动器薄膜变形反射镜

提出一种大冲程静电梳齿驱动器微机械薄膜变形反射镜,理论上研究了静电梳齿驱动器微机械薄膜变形反射镜的静电驱动力和变形位移与驱动电压的关系,分析了变形反射镜的驱动稳定性,比较了平板电容驱动器与纵向梳齿驱动器的驱动能力.结果表明,变形反射镜的静电驱动力和变形位移没有关系;在相同的面积下,纵向梳齿驱动器的驱动力比平板电容驱动器的驱动力大很多.     

微驱动器的原理与应用

为了优化设计微驱动器,笔者通过对比近年来各种微驱动器的研究和发展,系统地概括总结了微驱动器所采用的主要的驱动原理、驱动方式和加工技术及其存在的优缺点等。并在此基础上,首次将微驱动器按功能进行了分类。     

单腔双振子压电泵的结构设计与实验研究

对单腔体双振子压电泵进行结构设计,并分析了泵的工作原理。对泵在电源信号同步激励和异步激励下进行实验结果测试,得到同步激励下的输出效果好于异步激励,并分析了泵在异步激励下能够工作的原因。将泵在不同进出口管长的情况下进行实验测试发现,进出口管长对泵的最佳工作频率及流量输出有很大影响。把单腔双振子压电泵的输出性能同单腔单振子压电泵的进行实验比较,证明采用双振子结构使泵的输出性能比单振子结构有很大提高。     

Carbon‐Based Photothermal Actuators

Actuators that can convert environmental stimuli into mechanical work are widely used in intelligent systems, robots, and micromechanics. To produce robust and sensitive actuators of different scales, efforts are devoted to developing effective actuating schemes and functional materials for actuator design. Carbon‐based nanomaterials have emerged as preferred candidates for different actuating systems because of their low cost, ease of processing, mechanical strength, and excellent physical/chemical properties. Especially, due to their excellent photothermal activity, which includes both optical absorption and thermal conductivities, carbon‐based materials have shown great potential for use in photothermal actuators. Herein, the recent advances in photothermal actuators based on various carbon allotropes, including graphite, carbon nanotubes, amorphous carbon, graphene and its derivatives, are reviewed. Different photothermal actuating schemes, including photothermal effect–induced expansion, desorption, phase change, surface tension gradient creation, and actuation under magnetic levitation, are summarized, and the light‐to‐heat and heat‐to‐work conversion mechanisms are discussed. Carbon‐based photothermal actuators that feature high light‐to‐work conversion efficiency, mechanical robustness, and noncontact manipulation hold great promise for future autonomous systems.     

RF MEMS器件驱动机制理论与分析

介绍了驱动机制在RF MEMS器件制作中所处的地位。以悬梁类型的RF MEMS开关为例,介绍了RF MEMS器件的各种驱动方式,给出了其原理结构图;详细分析了静电驱动、压电驱动、热驱动和磁驱动的原理。对各种驱动机制进行了比较和分析,得出应根据不同场合和不同参数要求,选择不同驱动机制的驱动器。     

Electrostatic linear actuator with a long stroke rolling spring guide

In contrast with diverse design concepts of actuators, we have developed an electrostatic linear actuator integrated with a long stroke rolling spring guide. The rolling spring guide realizes guiding function through rolling movements of two parallel preloaded belt-shaped springs. The electrostatic actuating force is generated by applying electrical fields to the structure of spring guide. Besides the driving voltage, the geometric size and the preloaded span of the spring guide are the main influential parameters of electrostatic actuating force and actuating displacement. With adequate adjustment of the preloaded span, this electrostatic actuator can generate not only a large actuating displacement in /spl mu/m range, but also a fine positioning displacement in /spl mu/m range. The finite element analysis (FEA) and the geometric analysis are applied to analyze spring stress and to derive the shape equation of the spring guide. Furthermore, a theoretical model for our electrostatic actuating principle is deduced on the basis of the shape equation. In addition to the theoretical analyses, the performance of the electrostatic actuator is experimentally tested and studied.     

基于驱动量补偿的压电型微小机器人运动控制

为解决一种左右平行驱动式压电陶瓷微小机器人,由装配误差和压电陶瓷特性的不一致所带来的运动偏差,提出了一种基于驱动量补偿的方法对微小机器人进行运动控制.在详细分析微小机器人的stick-and-slip 运动原理的基础上进行实验设计,对左右压电陶瓷驱动器分别输入不同的驱动量,得到多个微小型机器人在横向位置上的位移偏差量.对所得实验数据用最小二乘法进行处理,并拟合出曲线,进而确定微小型机器人的输入驱动量的补偿值.实验表明,加入了补偿输入后,微小型机器人在相同步数下的直线前进运动中,横向的位置偏差减少为原来的6.1％.利用最小二乘法所得到的基于驱动量补偿的运动控制,能有效抑制微小机器人直线运动中横向位置的偏差.     

Laser‐Induced Rapid Carbon Nanotube Micro‐Actuators

Laser‐induced rapid actuating microstructures made of aligned carbon nanotube (CNT) arrays are achieved. Desirable operational features of the CNT micro‐actuators include low laser power activation, rapid response, elastic and reversible motion, and robust durability. Experimental evidence suggests a laser‐induced electrostatic interaction mechanism as the primary cause of the optomechanical phenomenon. Oscillating CNT micro‐actuators up to 40 kHz are achieved by driving them with a modulated laser beam. The micro‐actuators are utilized in exerting a sub‐micro‐Newton force to bend nanowires. Electrical coupling of the micro‐actuator and feasibilities of multi‐actuator systems made entirely out of CNTs are also demonstrated.     

扭转微镜光学致动器研究

应用基于表面硅、体硅微电子工艺的混合微加工技术研制了新型扭转微镜光学致动器 ,实现了致动器结构与具有光纤自固定、自对准功能的新型光纤定位保持结构的单片集成。新型扭转微镜光学致动器的机电和光学特性研究表明 ,其工作寿命超过 10 8次动作 ,最小动作时间估计可低于2ms ,存在驱动微镜自然地翻转 90°角的静电阈值电压和维持微镜处于已翻转 90°角状态的静电最低保持电压 ;其微镜的表面粗糙度及其分布基本满足光的波分复用技术等的应用要求。新型扭转微镜光学致动器可在光纤网络中作为光开关或可变光衰减器使用。设计、制作及研究了由新型扭转微镜光学致动器组成的 2× 2光开关阵列     

Multiresponsive Bidirectional Bending Actuators Fabricated by a Pencil‐on‐Paper Method

Recently, actuating materials based on carbon nanotubes or graphene have been widely studied. However, present carbon‐based actuating materials are mostly driven by a single stimulus (humidity, light, electricity, etc.), respectively, which means that the application conditions are limited. Here, a new kind of multiresponsive actuating material which can be driven by humidity, light, and electricity is proposed, so it can be used in various conditions. The fabrication is based on the simplest pencil‐on‐paper method, in which the pencil and paper are both low‐cost and easily obtained daily materials. The actuation effect is more remarkable due to a dual‐mode actuation mechanism, which leads to an ultralarge actuation (bending curvature up to 2.6 cm^?1). Elaborately designed, the actuator can further exhibit a bidirectional bending actuation, which is a significant improvement compared with previous reported thermal actuators. What is more, a colorful biomimetic flower and a smart curtain are also fabricated, fully utilizing the printable characteristic of the paper and multiresponsive characteristic of the actuator. It is assumed that the newly designed actuating material has great potential in the fields of lab‐on‐paper devices, artificial muscles, robotics, biomimics, and smart household materials.