共查询到19条相似文献,搜索用时 296 毫秒
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声表面波谐振式力学量传感器的发展与现状 总被引:1,自引:0,他引:1
扼要回顾了国内外在声表面波力学量传感器方面一些重要的成就 ,阐述了声表面波力学量传感器的特点、基本工作原理 ,简单推导了该传感器输入 -输出关系 ,并对声表面波其他传感器作了介绍。 相似文献
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为实现高灵敏度、低温漂的高性能电流传感器,提出将声表面波技术与磁致伸缩效应相结合的电流检测方法,分析了其敏感机理并改善其温度特性.这种声表面波电流传感器采用128°YX-LiNbO3作为压电基片,表面覆盖SiO2薄膜来改善器件温度稳定性,并溅射超磁致伸缩TbDyFe薄膜以响应电流.在电流作用下,TbDyFe薄膜会发生磁致伸缩效应和ΔE效应,引起声表面波相速度的改变.结合层状介质中声传播理论,分析了给定电流下层状结构中声表面波的传播特性,特别分析了TbDyFe和SiO2膜厚对传感器响应的影响.计算结果表明,TbDyFe和SiO2薄膜厚度分别为0.5μm、2μm时,该声表面波电流传感器具有最大检测灵敏度58.2 kHz/A,有良好温度稳定性和较高的灵敏度,从而为高性能声表面波电流传感器的研制奠定理论基础. 相似文献
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将声表面波传感器与信号无线保真(WIFI)技术相结合,提出了一种基于WIFI的无线声表面波传感器信号采集系统.该系统由声表面波传感器、信号调理电路、处理器、WIFI模块和无线接收终端组成.声表面波传感器混频后的信号经过信号调理电路后,转换为处理器可计频的低频方波信号,并通过WIFI模块将采集到的信号无线发送到接收终端.通过一个输出信号范围在100 kHz~350 kHz声表面波传感器信号采集系统的实现,对该系统的结构、性能进行了验证和测试.实验结果表明,该系统可以实现测试范围内信号的采集、发送和无线接收,系统输入信号与无线接收终端接收信号之间的平均绝对误差为0.843 kHz,最大相对误差为0.51%,无障碍环境有效采集范围约为100 m,有障碍环境有效采集范围约为50 m. 相似文献
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基于声表面波延迟线和谐振器的无源无线阵列传感器 总被引:2,自引:0,他引:2
本文介绍了延迟线型无源无线声表面波传感器的结构、传感器系统的组成、工作原理和传输特性.在分析延迟线型无源无线声表面波传感器缺点的基础上,提出了一种全新的谐振延迟型无源无线声表面波传感器的模型,并用延迟线和谐振器构造了这种传感器.它既有谐振型传感器传感距离远的优点,又有延迟线型传感器容易编码的优势.本文还分析了该传感器的信号响应特性和传感器系统的构造. 相似文献
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Da ChenAuthor Vitae Jing Jing WangAuthor VitaeDe Hua LiAuthor Vitae Yan XuAuthor Vitae 《Sensors and actuators. B, Chemical》2011,159(1):234-237
We present an application of the Pd-functionalized film bulk acoustic resonator for hydrogen detection. The resonator consisted of an AlN piezoelectric stack and a Bragg reflector has a working resonance near 2.23 GHz and a high performance. A 50 nm thick Pd film was coated on the top electrode as a specific layer to capture hydrogen. The absorption of hydrogen can trigger changes of elastic properties of the Pd layer, which affects the resonance frequency of the resonator. The experimental results show that the Pd-functionalized film bulk acoustic resonator can yield a rapid, sensitive, reversible and reproducible response to hydrogen in the concentrations from 0.3% to 2%. The advantages of this sensor, including the simple fabrication process, ease of detection method, rapid response and high sensitivity and working at room temperature, make this promising in the early alarm of hydrogen leaking. 相似文献
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为了有效解决无线传感器网络节点的供电难题,提出之字形结构的微型压电式能量收集器。相比于传统的直悬臂梁,此结构等效加大了压电梁的长度,降低了系统的固有振动频率。建立了之字形压电梁的本构方程和受迫振动方程,推导得到其输出电压的频域表达式。基于之字形压电梁的结构,利用ANSYS软件对其进行了谐响应分析。仿真结果表明,压电梁的输出电压在各阶固有振动频率处存在极值,符合理论分析的结果;输出电压大小随压电梁长度增加而降低,随压电梁宽度增加而升高,但均为非线性关系;压电梁末端质量块的长度和厚度、基体层厚度减小时,会导致输出电压的增大。在论文中所提出的结构尺寸下,10根直梁构成的之字形结构压电梁,在其一阶固有振动频率处,输出电压可达10 V以上,符合无线传感器网络节点的实际供电需求,证明了之字形压电梁结构的有效性。 相似文献
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Pd/PVDF thin film hydrogen sensor system based on photopyroelectric purely-thermal-wave interference 总被引:1,自引:0,他引:1
Chinhua Wang Andreas Mandelis Jose A. Garcia 《Sensors and actuators. B, Chemical》1999,60(2-3):228-237
A novel sensitive solid-state sensor system for trace hydrogen gas detection has been developed as a next generation device to earlier photopyroelectric (PPE) hydrogen sensors. The basic principle of the sensor is based on the technique of PPE purely-thermal-wave interferometry recently developed in this Laboratory. The active element of the sensor is a thin polyvinylidene fluoride (PVDF) pyroelectric film, sputter-coated with Pd on one surface and with a Ni–Al alloy electrode on the other surface. Unlike the conventional PPE hydrogen sensors, this new sensor produces a coherent differential PPE signal in a single detector, rather than using two detectors (one active, the other reference) and complicated electronics. The measurement results show that the signal noise level, the detectivity and the signal dynamic range are improved by more than one order of magnitude compared with the conventional single-beam method. The operating characteristics have been examined for three different thicknesses of Pd coating on the same thickness PVDF-film detector. The signal generating mechanism, attributed to the change of the optical absorptance of the Pd coating when exposed to hydrogen, and/or the shift in the Pd work function, is also discussed. 相似文献
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以PDMS为柔性基底设计的PVDF压电薄膜新型压电能量收集器压电性能良好,柔韧性强,可适应复杂的振动环境,具有广阔的应用前景.首先设计了具有柔性基底的压电能量收集器的结构;其次,用PVDF颗粒采用静电纺丝法制备了PVDF压电薄膜;最后,实验表明设计的压电能量收集器在振动频率为25 Hz,振动幅度为2 mm的激励下,开路输出峰值电压为8.38 V,输出功率密度为6.32 μW/cm2;经Ansys有限元分析,发现增大激励源的振动幅度,可以提高压电能量收集器的开路输出电压和输出功率. 相似文献
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A surface acoustic wave (SAW)-based high-voltage sensor is described. The sensor consists of a SAW oscillator fabricated on a 10 mm × 10 mm 128° rotated Y-cut, X-propagating LiNbO3 substrate. The voltage is applied to electrodes on the substrate, and the resulting electric field changes the propagation time of the SAW. The propagation time is directly related to the output frequency of the SAW oscillator. The high-voltage sensor offers a small-sized high-voltage measurement device with several attractive features: a high resolution (better than 0.2 V up to 2.4 kV, better than 0.4 V for higher voltages), a large range (−10 to +10 kV), a high input impedance (> 1013 ω) and a low input capacitance (< 10 pF). The sensitivity amounts to 16 Hz V−1. 相似文献
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设计了一种由超磁致伸缩材料Terfenol-D和SAW谐振器构成的复合磁传感器,在磁场作用下,Terfenol-D沿长度方向伸缩,并将应力应变传递至SAW谐振器,使其产生应变,造成谐振频率改变,通过测量SAW谐振器谐振频率的变化来测量磁场强度.分析了该磁传感器的传感原理,建立了该复合磁传感器的静态模型,对弹性敏感元件进行了受力分析,根据压磁方程和受力平衡得到该磁传感器的静态特性.实验结果表明:该复合磁传感器灵敏度可达341.6Hz/Oe,较Terfenol-D/SAW谐振器结构灵敏度提高了3倍;测量谐振频率的分辨率为1Hz,SAW谐振器频率稳定度为0.1×10-6时,该磁传感器对磁场的分辨率为10-6T. 相似文献
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为减小双磁环磁致伸缩位移传感器磁环间的测量盲区,对传感器在测量盲区内的输出信号进行了分析。从双磁环偏置磁场与磁环间距的关系进行研究,建立了双磁环磁致伸缩位移传感器的输出电压模型,计算了不同偏置磁场强度的双磁环在不同间距与放置方向时传感器的输出电压,并通过实验进行了验证。结果表明,磁环规格相同时,测量盲区的大小与磁环放置方向无关,磁环偏置磁场强度越小,磁环间的测量盲区越小,磁场叠加影响的电压幅值变化量也越小。且在传感器的测量盲区内,电压输出信号将会受到偏置磁场与电压输出波形叠加的影响,这两种因素都会导致传感器检测失效。该研究结果为多磁环位移传感器磁环的选型及减小传感器磁环间的测量盲区提供理论基础。 相似文献