面向可持续发展的半导体制造的集成产品和过程控制

Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products. In this paper, an advanced control strategy through integrating product and process control is established. The proposed multiscale scheme contains three layers for coordinated equipment control, process control and product quality control. In the upper layer, online control performance assessment is applied to reduce the quality variation and maximize the overall product performance (OPP). It serves as supervisory control to update the recipe of the process controller in the middle layer. The process controller is designed as an exponentially weighted moving average (EWMA) run-to-run controller to reject disturbances, such as process shift, drift and tool worn out, that are exerted to the op-eration. The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness (OEE), based on the set point given by the process controller. The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies, where both the OPP (for product) and the OEE (for equipment) are enhanced.     

流化床反应器中气相丙烯聚合反应的动力学和预测控制(英文)

A two-phase dynamic model, describing gas phase propylene polymerization in a fluidized bed reactor, was used to explore the dynamic behavior and process control of the polypropylene production rate and reactor temperature. The open loop analysis revealed the nonlinear behavior of the polypropylene fluidized bed reactor, jus- tifying the use of an advanced control algorithm for efficient control of the process variables. In this case, a central- ized model predictive control （MPC） technique was implemented to control the polypropylene production rate and reactor temperature by manipulating the catalyst feed rate and cooling water flow rate respectively. The corre- sponding MPC controller was able to track changes in the setpoint smoothly for the reactor temperature and pro- duction rate while the setpoint tracking of the conventional proportional-integral （PI） controller was oscillatory with overshoots and obvious interaction between the reactor temperature and production rate loops. The MPC was able to produce controller moves which not only were well within the specified input constraints for both control vari- ables, but also non-aggressive and sufficiently smooth for practical implementations. Furthermore, the closed loop dynamic simulations indicated that the speed of rejecting the process disturbances for the MPC controller were also acceotable for both controlled variables.     

一种对预测控制系统经济性能评估的实用方法及其工业应用

In this article, an approach for economic performance assessment of model predictive control (MPC) system is presented. The method builds on steady-state economic optimization techniques and uses the linear quadratic Gaussian (LQG) benchmark other than conventional minimum variance control (MVC) to estimate the potential of reduction in variance. The LQG control is a more practical performance benchmark compared to MVC for performance assessment since it considers input variance and output variance, and it thus provides a desired basis for determining the theoretical maximum economic benefit potential arising from variability reduction. Combining the LQG benchmark directly with benefit potential of MPC control system, both the economic benefit and the op-timal operation condition can be obtained by solving the economic optimization problem. The proposed algorithm is illustrated by simulated example as well as application to economic performance assessment of an industrial model predictive control system.     

Design of a modern automatic control system for the activated sludge process in wastewater treatment

The Activated Sludge Process (ASP) exhibits highly nonlinear properties. The design of an automatic control system that is robust against disturbance of inlet wastewater flow rate and has short process settling times is a chal enging matter. The proposed control method is an I-P modified controller automatic control system with state variable feedback and control canonical form simulation diagram for the process. A more stable response is achieved with this type of modern control. Settling times of 0.48 days are achieved for the concentration of microorganisms, (reference value step increase of 50 mg·L?1) and 0.01 days for the concentration of oxygen (reference value step increase of 0.1 mg·L?1). Fluctuations of concentrations of oxygen and microorganisms after an inlet disturbance of 5 × 103m3·d?1 are smal . Changes in the reference values of oxygen and microorganisms (increases by 10%, 20%and 30%) show satisfactory response of the system in al cases. Changes in the value of inlet wastewater flow rate disturbance (increases by 10%, 25%, 50%and 100%) are stabilized by the control system in short time. Maximum percent overshoot is also taken in consideration in all cases and the largest value is 25%which is acceptable. The proposed method with I-P controller is better for disturbance rejection and process settling times compared to the same method using PI control er. This method can substitute optimal control systems in ASP.     

基于广义最小变差基准的多变量控制性能评估方法

This paper is concerned with the control performance assessment based on the multivariable generalized minimum variance benchmark. An explicit expression for the feedback controller-invariant (the generalized minimum variance) term of the multi-variable control system is obtained, which is used as a standard benchmark for the assessment of the control performance for multi input multi output (MIMO) process. The proposed approach is based on the multivariable minimum variance benchmark. In com-parison with the minimum variance benchmark, the developed method is more reasonable and practical for the control performance assessment of multivariable systems. The approach is illustrated by a simulation example and an industrial application.     

基于线性时变扰动模型的间歇过程最优迭代学习控制

A batch-to-batch optimal iterative learning control (ILC) strategy for the tracking control of product quality in batch processes is presented. The linear time-varying perturbation (LTVP) model is built for product quality around the nominal trajectories. To address problems of model-plant mismatches, model prediction errors in the previous batch run are added to the model predictions for the current batch run. Then tracking error transition models can be built, and the ILC law with direct error feedback is explicitly obtained. A rigorous theorem is proposed, to prove the convergence of tracking error under ILC. The proposed methodology is illustrated on a typical batch reactor and the results show that the performance of trajectory tracking is gradually improved by the ILC.     

一类连续/间歇过程的迭代学习模型预测控制

An iterative learning model predictive control (ILMPC) technique is applied to a class of continuous/batch processes. Such processes are characterized by the operations of batch processes generating periodic strong disturbances to the continuous processes and traditional regulatory controllers are unable to eliminate these periodic disturbances. ILMPC integrates the feature of iterative learning control (ILC) handling repetitive signal and the flexibility of model predictive control (MPC). By on-line monitoring the operation status of batch processes, an event-driven iterative learning algorithm for batch repetitive disturbances is initiated and the soft constraints are adjusted timely as the feasible region is away from the desired operating zone. The results of an industrial appli-cation show that the proposed ILMPC method is effective for a class of continuous/batch processes.     

基于动态PLS框架的多回路内模控制器设计(英文)

In this paper, a multi-loop internal model control (IMC) scheme in conjunction with feed-forward strategy based on the dynamic partial least squares (DyPLS) framework is proposed. Unlike the traditional methods to decouple multi-input multi-output (MIMO) systems, the DyPLS framework automatically decomposes the MIMO process into a multi-loop system in the PLS subspace in the modeling stage. The dynamic filters with identical structure are used to build the dynamic PLS model, which retains the or-thogonality among the latent variables. To address the model mismatch problem, an off-line least squares method is applied to obtain a set of optimal filter parameters in each latent space. Without losing the merits of model-based control, a simple and easy-tuned IMC structure is readily carried over to the dynamic PLS control framework. In addition, by projecting the measurable disturbance into the latent subspace, a multi-loop feed-forward control is yielded to achieve better performance for disturbance rejection. Simulation re-sults of a distillation column are used to further demonstrate this new strategy outperforms conventional control schemes in servo behavior and disturbance rejection.     

苯氯化侧反应精馏过程的系统设计与控制(英文)

The distillation column with side reactors (SRC) can overcome the temperature/pressure mismatch in the traditional reactive distillation, the column operates at temperature/pressure favorable for vapor-liquid separation, while the reactors operate at temperatures/pressures favorable for reaction kinetics. According to the smooth operation and automatic control problem of the distillation column with side reactors (SRC), the design, simulation calculation and dynamic control of the SCR process for chlorobenzene production are discussed in the paper. Firstly, the mechanism models, the integrated structure optimal design and process simulation systems are established, respectively. And then multivariable control schemes are designed, the controllability of SRC process based on the optimal steady-state integrated structure is explored. The dynamic response performances of closed-loop system against several disturbances are discussed to verify the effectiveness of control schemes for the SRC process. The simulating results show that the control structure using conventional control strategies can effectively overcome feeding disturbances in a specific range.     

An LMI Method to Robust Iterative Learning Fault-tolerant Guaranteed Cost Control for Batch Processes

Based on an equivalent two-dimensional Fornasini-Marchsini model for a batch process in industry, a closed-loop robust iterative learning fault-tolerant guaranteed cost control scheme is proposed for batch processes with actuator failures. This paper introduces relevant concepts of the fault-tolerant guaranteed cost control and formulates the robust iterative learning reliable guaranteed cost controller （ILRGCC）. A significant advantage is that the proposed ILRGCC design method can be used for on-line optimization against batch-to-batch process uncertainties to realize robust tracking of set-point trajectory in time and batch-to-batch sequences. For the convenience of implementation, only measured output errors of current and previous cycles are used to design a synthetic controller for iterative learning control, consisting of dynamic output feedback plus feed-forward control. The proposed controller can not only guarantee the closed-loop convergency along time and cycle sequences but also satisfy the H∞ performance level and a cost function with upper bounds for all admissible uncertainties and any actuator failures. Sufficient conditions for the controller solution are derived in terms of linear matrix inequalities （LMIs）, and design procedures, which formulate a convex optimization problem with LMI constraints, are presented. An example of injection molding is given to illustrate the effectiveness and advantages of the ILRGCC design approach.     

Disturbance rejection of ball mill grinding circuits using DOB and MPC

Ball mill grinding circuit is essentially a multivariable system with couplings, time delays and strong disturbances. Many advanced control schemes, including model predictive control (MPC), adaptive control, neuro-control, robust control, optimal control, etc., have been reported in the field of grinding process. However, these control schemes including the MPC scheme usually cannot achieve satisfying effects in the presence of strong disturbances. In this paper, disturbance observer (DOB), which is widely used in motion control applications, is introduced to estimate the disturbances in grinding circuit. A compound control scheme, consisting of a feedforward compensation part based on DOB and a feedback regulation part based on MPC (DOB-MPC), is thus developed. A rigorous analysis of disturbance rejection performance is given with the considerations of both model mismatches and external disturbances. Simulation results demonstrate that when controlling the ball mill grinding circuit, the DOB-MPC method possesses a better performance in disturbance rejection than that of the MPC method.     

An optimal filter based MPC for systems with arbitrary disturbances

In this study, a linear model predictive control (MPC) approach with optimal filters is proposed for handling unmeasured disturbances with arbitrary statistics. Two types of optimal filters are introduced into the framework of MPC to relax the assumption of integrated white noise model in existing approaches. The introduced filters are globally optimal for linear systems with unmeasured disturbances that have unknown statistics. This enables the proposed MPC to better handle disturbances without access to disturbance statistics. As a result, the effort required for disturbance modeling can be alleviated. The proposed MPC can achieve offset-free control in the presence of asymptotically constant unmeasured disturbances. Simulation results demonstrate that the proposed approach can provide an improved disturbance õrejection performance over conventional approaches when applied to the control of systems with unmeasured disturbances that have arbitrary statistics.     

Disturbance rejection of dead-time processes using disturbance observer and model predictive control

This article mainly focuses on disturbance rejection of dead-time processes by integrating a modified disturbance observer (MDOB) with a model predictive controller (MPC). The effect caused by model mismatches is regarded as a part of the lumped disturbances. This means that the disturbances considered here include not only external disturbances, but also internal disturbances caused by model mismatches. Control structure of the proposed method includes two parts which can be designed separately. The MPC which acts as a prefilter, is employed to generate appropriate control actions such that a desired setpoint tracking response is achieved. The MDOB is employed to estimate the disturbances of the closed-loop system, and the estimation is used for feedforward compensation design to reject disturbances. Rigorous analysis of setpoint tracking and disturbance rejection properties of the closed-loop system are given in the presence of both model mismatches and external disturbances. The proposed scheme is applied to control the temperature of a simplified jacketed stirred tank heater (JSTH). Simulation results demonstrate that the proposed method possesses a better disturbance rejection performance than those of the MDOB-PI, MPC and PI methods in controlling such dead-time processes.     

鲁棒模型预测控制系统的评估基准

在控制系统的性能评估中,基准的设计是个重要问题。将基本设计极限理论推广到模型预测控制系统(MPC),建立性能评估基准。直接考虑多输入多输出系统的频域扰动,建立输出反馈鲁棒模型预测控制器。此控制器仅仅依赖于过程参数,也是令闭环系统达到控制性能极限的基准控制器。建立了用于评估的性能指标,提出基于此基准的性能评估程序,用以评价其他模型预测控制系统的性能。数学算例证实了这一评估程序的有效性。     

基于扰动观测器的模型预测控制在磨矿分级过程中的应用

磨矿分级过程（GCP）是冶金选矿行业的关键流程,其产品粒度指标必须严格控制,以保证精矿产品品位和金属回收率。GCP本质上是一个多变量强耦合过程,具有时滞和逆向特性,且存在强扰动。扰动的存在造成系统控制性能变差,甚至不稳定。以两输入两输出GCP为研究对象,提出了一种基于扰动观测器（DOB）的模型预测控制（MPC）复合控制方案DOB-MPC。仿真研究表明DOB-MPC不仅可以有效抑制GCP的外部扰动,而且可以抑制由模型失配和变量之间的耦合而导致的内部扰动;在获得良好的解耦控制能力的同时,取得了满意的抗扰动性能。     

基于模型预测残差闭环潜能指标的MPC控制器实时性能监控

由于模型预测控制器对模型失配等不确定因素具有较强的鲁棒性,因此现有的多步预测误差方法不能及时显著地检测到由模型失配导致的MPC控制器性能潜能的变化。针对上述问题,提出一种改进的多步预测误差方法和实时性能监控策略。考虑到MPC控制器的模型预测残差能有效反映模型失配等信息,利用预测残差对现有多步预测误差方法进行改进,改进的方法能够更好地检测由模型失配引起的MPC控制器性能潜能的改变。在连续搅拌槽加热器(continuous stirred tank heater,CSTH)系统上的仿真实验验证了该方法的可行性与有效性。     

A MODEL-BASED DIRECT ADAPTIVE PI CONTROLLER FOR NONLINEAR PROCESS CONTROL

This article proposes a model-based direct adaptive proportional-integral (PI) controller for a class of nonlinear processes whose nominal model is input-output linearizable but may not be accurate enough to represent the actual process. The proposed direct adaptive PI controller is composed of two parts: the first is a linearizing feedback control law that is synthesized directly based on the process's nominal model and the second is an adaptive PI controller used to compensate for the model errors. An effective parameter-tuning algorithm is devised such that the proposed direct adaptive PI controller is able to achieve stable and robust control performance under uncertainties. To show the robust stability and performance of the direct adaptive PI control system, a rigorous analysis involving the use of a Lyapunov-based approach is presented. The effectiveness and applicability of the proposed PI control strategy are demonstrated by considering the time-dependent temperature trajectory tracking control of a batch reactor in the presence of plant/model mismatch, unanticipated periodic disturbances, and measurement noises. Furthermore, for use in an environment that lacks full-state measurements, the integration of a sliding observer with the proposed control scheme is suggested and investigated. Extensive simulation results reveal that the proposed model-based direct adaptive PI control strategy enables a highly nonlinear process to achieve robust control performance despite the existence of plant/model mismatch and diversified process uncertainties.     

基于证据网络的多变量MPC经济性能评估

MPC控制系统作为先进控制策略,已经被广泛地应用于工业生产中。但在实际工业中,MPC控制系统的变量的软约束往往设定得比较保守,使系统无法达到最优经济性能。针对有约束的MPC控制系统,采用二次型经济性能指标函数来评价系统的经济性能,将最优工作点的求解问题转化为一个典型的有约束的线性规划问题。进而根据历史数据和二次型经济性能指标函数所得最优运行结果建立多变量MPC的证据网络模型,通过证据网络的反向推理和决策,得到造成MPC控制系统性能下降的可能原因,并提出改善控制系统性能的策略。最后通过仿真实验,验证了基于证据网络的经济性能评估的有效性。     

Nonlinear model-based repetitive control of simulated moving bed process

The simulated moving bed (SMB) process, after more than 40 years of successful operation in the petro-chemical industry, has emerged as one of the most important separation processes in the pharmaceutical, fine chemical, and biotechnology fields. However, optimal operation and automatic control of the SMB process is still challenging because of its complex dynamics caused by periodic port switching and inherent nonlinearity. In this research, a novel advanced control technique for the SMB process has been proposed. In the proposed technique, regulation of both extract and raffinate purities measured at the terminal time of each switching period is performed by a nonlinear repetitive controller which utilizes the past period data as feedback information. The repetitive controller was designed on the basis of a fundamental nonlinear model of the SMB process. Through application to a numerical SMB process, it was found that the proposed control technique performs quite satisfactorily against model error as well as set point and disturbance changes.     

ENHANCED IMC-PID CONTROLLER DESIGN WITH LEAD-LAG FILTER FOR UNSTABLE AND INTEGRATING PROCESSES WITH TIME DELAY

In this article, a design method for a PID controller is proposed based on IMC principles for control of open loop integrating and unstable first-order processes with time delay. The design is based on H₂ optimal closed-loop transfer function for set point changes and step input disturbances. The method has one tuning parameter, and systematic guidelines are provided for the selection of this tuning parameter based on peak value of the sensitivity function. The performance of the designed controller is verified on various integrating and unstable processes, and it is observed that nominal and robust control performance is achieved with the proposed design method. Improved closed-loop performance was obtained when compared to other methods recently reported in the literature. Further, the proposed method provides good closed-loop performance even when there are large uncertainties in the process parameters.