Deposition of AgGaS<Subscript>2</Subscript> thin films by double source thermal evaporation technique

In this study, polycrystalline AgGaS₂ thin films were deposited by the sequential evaporation of AgGaS₂ and Ag sources with thermal evaporation technique. Thermal treatment in nitrogen atmosphere for 5 min up to 700 °C was applied to the deposited thin films and that resulted in the mono phase AgGaS₂ thin films without the participation of any other minor phase. Structural and compositional analyses showed the structure of the films completely changes with annealing process. The measurements of transmittance and reflectance allowed us to calculate the band gap of films lying in 2.65 and 2.79 eV depending on annealing temperature. The changes in the structure with annealing process also modify the electrical properties of the films. The resistivity of the samples varied in between 2 × 10³ and 9 × 10⁶ (Ω-cm). The room temperature mobility depending on the increasing annealing temperature was in the range of 6.7–37 (cm² V⁻¹ s⁻¹) with the changes in carrier concentrations lying in 5.7 × 10¹³–2.5 × 10¹⁰ cm⁻³. Mobility-temperature dependence was also analyzed to determine the scattering mechanisms in the studied temperature range with annealing. The variations in the electrical parameters of the films were discussed in terms of their structural changes.     

Effects of substrate temperatures on the thermal stability of Al-doped ZnO thin films grown by DC magnetron sputtering

In this work, Al-doped (4 at%) ZnO(AZO) thin films were prepared by DC magnetron sputtering using a home-made ceramic target at different substrate temperatures. The microstructure, optical, electrical and thermal stability properties of these thin films were characterized systematically using scanning electron microscopy, UV–Vis-NIR spectrometry, X-ray diffraction, and Hall measurements. It was observed that the AZO thin films deposited at 350 °C exhibited the lowest resistivity of 5.76 × 10⁻⁴ Ω cm, high average visible transmittance (400–800 nm) of 92%, and the best thermal stability. Comparing with the AZO thin films deposited at low substrate temperatures, the AZO thin films deposited at 350 °C had the highest compact surface morphology which could hinder the chemisorbed and diffused oxygen. This was considered to be the main mechanism which was responsible for the thermal degradation of AZO thin films.     

Effect of deposition conditions on the InP thin films prepared by spray pyrolysis method

InP thin films were prepared by spray pyrolysis technique using aqueous solutions of InCl₃ and Na₂HPO₄, which were atomized with compressed air as carrier gas. The InP thin films were obtained on glass substrates. Thin layers of InP have been grown at various substrate temperatures in the range of 450–525°C. The structural properties have been determined by using X-ray diffraction (XRD). The changes observed in the structural phases during the film formation in dependence of growth temperatures are reported and discussed. Optical properties, such as transmission and the band gap have been analyzed. An analysis of the deduced spectral absorption of the deposited films revealed an optical direct band gap energy of 1.34–1.52 eV for InP thin films. The InP films produced at a substrate temperature 500°C showed a low electrical resistivity of 8.12 × 10³ Ω cm, a carrier concentration of 11.2 × 10²¹ cm⁻³, and a carrier mobility of 51.55 cm²/Vs at room temperature.     

Studies on tin oxide films prepared by electron beam evaporation and spray pyrolysis methods

Transparent conducting tin oxide thin films have been prepared by electron beam evaporation and spray pyrolysis methods. Structural, optical and electrical properties were studied under different preparation conditions like substrate temperature, solution flow rate and rate of deposition. Resistivity of undoped evaporated films varied from 2.65 × 10⁻² ω-cm to 3.57 × 10⁻³ ω-cm in the temperature range 150–200°C. For undoped spray pyrolyzed films, the resistivity was observed to be in the range 1.2 × 10⁻¹ to 1.69 × 10⁻² ω-cm in the temperature range 250–370° C. Hall effect measurements indicated that the mobility as well as carrier concentration of evaporated films were greater than that of spray deposited films. The lowest resistivity for antimony doped tin oxide film was found to be 7.74 × 10⁻⁴ ω-cm, which was deposited at 350°C with 0.26 g of SbCl₃ and 4 g of SnCl₄ (SbCl₃/SnCl₄ = 0.065). Evaporated films were found to be amorphous in the temperature range up to 200°C, whereas spray pyrolyzed films prepared at substrate temperature of 300– 370°C were poly crystalline. The morphology of tin oxide films was studied using SEM.     

Titanium-doped indium oxide films prepared by d.c. magnetron sputtering using ceramic target

Polycrystalline thin films of Ti-doped indium oxide (indium–titanium-oxide, ITiO) were prepared by d.c. magnetron sputtering and their electrical and optical properties were investigated. Doping of Ti was effective in improvement of the electroconductivity of the indium oxide: the electrical resistivity of 1.7 × 10⁻³ Ω cm of non-doping decreased to minimum value of 1.8 × 10⁻⁴ Ω cm at 2.4 at.% Ti-doping when the films were deposited at 300 °C. The polycrystalline ITiO films of 0.8–1.6 at. % Ti-doping showed the high Hall mobilitiy (82–90 cm² V⁻¹ s⁻¹) and the relatively low carrier density (2.4–3.5 × 10²⁰ cm⁻³) resulting in characteristics of both low resistivity (2.1–3.0 × 10⁻⁴ Ω cm) and high transmittance in the near-infrared region (over 80% at 1550 nm), which cannot be shown in the conventional Sn-doped indium oxide (ITO) films.     

Anisotropic behaviors in polycrystalline Cd-doped GaSe thin films

GaSe thin films were deposited by thermal evaporation technique with Cd doping. X-ray diffraction analysis showed that Cd-doped films have polycrystalline structure with the preferred orientation along (008) direction. Temperature dependent electrical conductivity measurements were carried out in the temperature range of 100–400 K along perpendicular and parallel directions to the growth direction for the films exhibiting p-type conduction determined by hot probe technique. The room temperature conductivity values of the films were found to be as 1.5 × 10⁻⁸ and 4.9 × 10⁻¹² (Ω cm)⁻¹ due to the measurements along both perpendicular and parallel directions, respectively. The difference in the conductivity values is the indication of electrical anisotropy in the samples. Carrier conduction in the films was provided by the thermionic emission in the high temperature region (310–400 K) with almost the same activation energies in both directions. Space charge limited current analysis at different temperatures reveals the existence of two discrete sets of trap levels for both perpendicular and parallel directions. Calculated trap levels and trap concentrations are 99 meV, 3.5 × 10¹² cm⁻³ and 418 meV, 2.2 × 10⁵ cm⁻³ for perpendicular direction, 58 meV, 2.1 × 10¹⁸ cm⁻³ and 486 meV, 1.4 × 10¹² cm⁻³ for parallel direction. The differences in the values of the trap levels and concentrations for both directions confirm the existence of electrical anisotropy in Cd-doped GaSe thin films, because of the structural anisotropy between and inside the crystallites.     

Electrical behavior of Y-doped Ba<Subscript>0.6</Subscript>Sr<Subscript>0.4</Subscript>TiO<Subscript>3</Subscript> thin films

Ba_0.6Sr_0.4TiO₃ (BST) and 1.5 at% Y-doped Ba_0.6Sr_0.4TiO₃ (Y-BST) thin films have been deposited on single-crystal (100) oriented LaAlO₃ substrates using pulsed-laser deposition technique (PLD), respectively. X-ray diffraction (XRD) scanning revealed that the two kinds of films could be epitaxially grown in pure single-oriented perovskite phases, but Y-BST thin films showed an enhanced crystallization effect. The dielectric properties of the pure and Y-BST thin films were measured at 10 kHz and 300 K with a parallel-plate capacitor configuration. The results revealed that the addition of Y as an acceptor doping is very effective to increase dielectric tunability, and to reduce leakage current of BST thin films. The figure-of-merit (FOM) factor value increases from 17.32 for BST to 25.84 for Y-BST under an applied electric field of 300 kV/cm. The leakage current density of the BST thin films at a negative bias field of 300 kV/cm decreases from 2.45 × 10⁻⁴ A/cm² to 1.55 × 10⁻⁶ A/cm² by Y doping. The obtained results indicated that the Y-doped BST thin film is a promising candidate material for tunable microwave devices.     

Microstructure and properties of Al-doped ZnO thin films by nonreactive DC magnetron sputtering at room temperature following rapid thermal annealing

A series of Al-doped ZnO (AZO) thin films deposited by nonreactive DC magnetron sputtering at room temperature following rapid thermal annealing was studied to examine the influence of these Al doping concentration, sputtering power and annealing temperature on their microstructure, electrical and optical transport properties. AZO thin films with Al dopant of 3 wt% were oriented more preferentially along the (002) direction, bigger grain size and lower electrical resistivity The resistivity of AZO films decreases with the increase of Al content from 1 to 3 wt%, sputtering power from 60 to 100 W and the annealing temperature from 50 to 250 °C. Sputtering power and annealing had some effect on the average transmittance of AZO thin films. For AZO thin films with Al doping level of 3 wt%, the lowest electrical resistivity of 5.3 × 10⁻⁴ Ω cm and the highest optical transmittance of 88.7% could gain when the sputtering power was 100 W and the annealing temperature was 200 °C or above.     

Low-temperature preparation of transparent conductive Al-doped ZnO thin films by a novel sol–gel method

We developed a novel sol–gel method to prepare transparent conductive Al-doped ZnO (AZO) thin film at low temperature. The AZO nanocrystals were prepared by a solvothermal method and then they were dispersed in the monoethanolamine and methanol to form AZO colloids. A (002)-oriented ZnO thin film was used as a nucleation layer to induce the (002)-oriented growth of AZO thin films. The AZO thin films were prepared on Si(100) and fused quartz glass substrates with the (002)-oriented ZnO nucleation layer and annealed at 400 °C for 60 min. All AZO thin films showed (002) orientation. For electrical and optical measurements, the films deposited on glass substrates were post-annealed at 400 °C for 30 min in forming gas (100 % H₂) to improve their conductivity. These samples had high transparency in the visible wavelength range, and also showed good conductivity. A 0.2 mol L^?1 AZO solution with 3 at.% Al content was heated in a Teflon autoclave at 160 °C for 30 min to form AZO nanocrystals, and then the AZO nanocrystals were suspended in the MEA and methanol to obtain the stable AZO colloid. The Al content in the AZO nanocrystals was 2.7 at.%, and the high Al doping coefficient was mainly attributed to the formation of AZO nanocrystals in the autoclave. The AZO thin film using this colloid had the lowest resistivity of 3.89 × 10^?3 Ω cm due to its high carrier concentration of 3.29 × 10²⁰ cm^?3.     

Effect of temperature on the properties of Al:ZnO films deposited by magnetron sputtering with inborn surface texture

Al:ZnO (AZO) films were deposited on glass substrate with inborn surface texture by magnetron sputtering at a power density as high as 7 W/cm². The sputtering parameters, such as argon working pressure and substrate temperature were varied from 1.0 to 6.0 Pa and from room temperature to 500 °C, respectively. All the films exhibited perfect (002) orientations with very weak (004) peaks measured by X-ray diffraction. A linear relationship between the growth rate of AZO film and working pressure was found. The AZO film with best electrical properties of all films obtained at room temperature was deposited at working pressure of 2.0 Pa. And the root-mean-square roughness tested by atomic force microscopy was 37.50 nm, which indicated that surface texture was successfully fabricated without further etching process. For higher substrate temperature a decrease in the resistivity was observed due to an increase in the mobility and the carrier concentration. Resistivity low as 9.044 × 10⁻⁴ ohm/cm was obtained at 500 °C and 2.0 Pa, the corresponding mobility and carrier concentration were 20.45 m²/Vs and 3.379 × 10²⁰/cm³, respectively. The grain size and the surface texture size tested by scanning electron microscopy also peaked at 500 °C. All the films showed a relatively high transmittance about 80%.     

Atmospheric pressure chemical vapor deposition of transparent conducting films of fluorine doped zinc oxide and their application to amorphous silicon solar cells

Transparent conducting ZnO:F was deposited as thin films on soda lime glass substrates by atmospheric pressure chemical vapor deposition (CVD) deposition at substrate temperatures of 480–500 °C. The precursors diethylzinc, tetramethylethylenediamine and benzoyl fluoride were dissolved in xylene. The solution was nebulized ultrasonically and then flash vaporized by a carrier gas of nitrogen preheated to 150 °C. Ethanol was vaporized separately, and these vapors were then mixed to form a homogeneous vapor mixture. Good reproducibility was achieved using this new CVD method. Uniform thicknesses were obtained by moving the heated glass substrates through the deposition zone. The best electrical and optical properties were obtained when the precursor solution was aged for more than a week before use. The films were polycrystalline and highly oriented with the c-axis perpendicular to the substrate. The electrical resistivity of the films was as low as 5 × 10⁻⁴ Ωcm. The mobility was about 45 cm²/Vs. The electron concentration was up to 3 × 10²⁰/cm³. The optical absorption of the films was about 3–4% at a sheet resistance of 7 Ω/square. The diffuse transmittance was about 10% at a thickness of 650 nm. Amorphous silicon solar cells were deposited using the textured ZnO:F films as the front electrode. The short circuit current was increased over similar cells made with fluorine doped tin oxide, but the voltages and fill factors were reduced. The voltage was restored by overcoating the ZnO:F with a thin layer of SnO₂:F.     

Electrochemical synthesis of Tl-based highT c single-phase superconductor thin films

Co-deposition of the Tl-based superconductors using electrodeposition technique was successfully carried out. Different processing parameters such as deposition potential, current density, deposition period etc were studied. The Tl-based alloyed thin films were deposited at a constant potential of −1·25V with respect to SCE electrode onto silver substrates and oxidized at 850°C in oxygen atmosphere. The samples thus prepared showed superconducting behaviour below 122·5 K and the critical current density was 1·5×10³A/cm². Electrochemical synthesis of Tl-based highT _c single-phase superconductor thin films is also reported.     

Quality enhancement of AZO thin films at various thicknesses by introducing ITO buffer layer

Due to the simultaneously superior optical transmittance and low electrical resistivity, transparent conductive electrodes play a significant role in semiconductor electronics. To enhance the electrical properties of these films, one approach is thickness increment which degrades the optical properties. However, a preferred way to optimize both electrical and optical properties of these layers is to introduce a buffer layer. In this work, the effects of buffer layer and film thickness on the structural, electrical, optical and morphological properties of AZO thin films are investigated. Al-doped zinc oxide (AZO) is prepared at various thicknesses of 100 to 300 nm on the bare and 100 nm-thick indium tin oxide (ITO) coated glass substrates by radio frequency sputtering. Results demonstrate that by introducing ITO as a buffer layer, the average values of sheet resistance and strain within the film are decreased (about 76 and 3.3 times lower than films deposited on bare glasses), respectively. Furthermore, the average transmittance of ITO/AZO bilayer is improved nearly 10% regarding single AZO thin film. This indicates that bilayer thin films show better physical properties rather than conventional monolayer thin films. As the AZO film thickness increases, the interplanar spacing, d₍₀₀₂₎, strain within the film and compressive stress of the film in the hexagonal lattice, decreases indicating the higher yield of AZO crystal. Moreover, with the growth in film thickness, carrier concentration and optical band gap (E_g) of AZO film are increased from 4.62?×?10¹⁹ to 8.21?×?10¹⁹ cm^?3 and from 3.55 to 3.62 eV, respectively due to the Burstein-Moss (BM) effect. The refractive index of AZO thin film is obtained in the range of 2.24–2.26. With the presence of ITO buffer layer, the AZO thin film exhibits a resistivity as low as 6?×?10^?4 Ω cm, a sheet resistance of 15 Ω/sq and a high figure of merit (FOM) of 1.19?×?10⁴ (Ω cm)^?1 at a film thickness of 300 nm. As a result, the quality of AZO thin films deposited on ITO buffer layer is found to be superior regarding those grown on a bare glass substrate. This study has been performed over these two substrates because of their significant usage in the organic light emitting diodes and photovoltaic applications as an enhanced carrier injecting electrodes.     

Reactive deposition of Y1Ba2Cu3O7 −x superconductor films by pulsed laser ablation from an unreacted mixture of Y2O3, BaCO3 and CuO

Superconducting thin films of Y₁Ba₂Cu₃ O_{7 −x} have been deposited on (100) Y-ZrO₂ substrates by pulsed excimer laser ablation from anunreacted mixture of Y₂O₃, BaCO₃ and CuO. The films deposited at substrate temperature of 680°C and oxygen partial pressure of 200 mtorr were found to be superconducting with zero resistive transition temperature of 89 K and critical current density of over 3 × 10⁵ A/cm² at 77 K. These results are compared with those obtained by laser ablation from a sintered superconducting pellet.     

Sol–gel derived Co<Subscript>3</Subscript>O<Subscript>4</Subscript> thin films: effect of annealing on structural,morphological and optoelectronic properties

Nanocrystalline Co₃O₄ thin films were prepared on glass substrates by using sol–gel spin coating technique. The effect of annealing temperature (400–700 °C) on structural, morphological, electrical and optical properties of Co₃O₄ thin films were studied by X-ray diffraction (XRD), Scanning Electron Microscopy, Electrical conductivity and UV–visible Spectroscopy. XRD measurements show that all the films are nanocrystallized in the cubic spinel structure and present a random orientation. The crystallite size increases with increasing annealing temperature (53–69 nm). These modifications influence the optical properties. The morphology of the sol–gel derived Co₃O₄ shows nanocrystalline grains with some overgrown clusters and it varies with annealing temperature. The optical band gap has been determined from the absorption coefficient. We found that the optical band gap energy decreases from 2.58 to 2.07 eV with increasing annealing temperature between 400 and 700 °C. These mean that the optical quality of Co₃O₄ films is improved by annealing. The dc electrical conductivity of Co₃O₄ thin films were increased from 10⁻⁴ to 10⁻² (Ω cm)⁻¹ with increase in annealing temperature. The electron carrier concentration (n) and mobility (μ) of Co₃O₄ films annealed at 400–700 °C were estimated to be of the order of 2.4–4.5 × 10¹⁹ cm⁻³ and 5.2–7.0 × 10⁻⁵ cm² V⁻¹ s⁻¹ respectively. It is observed that Co₃O₄ thin film annealing at 700 °C after deposition provide a smooth and flat texture suited for optoelectronic applications.     

Preparation and characterizations of tungsten oxide electrochromic nanomaterials

Nanoscaled tungsten oxide thin films were fabricated by galvanostatic electrodeposition. The effect of preparation parameters such as tungsten ions concentration, pH, current density and annealing on the properties and performance of WO₃ thin films electrochromic materials was investigated. XRD, SEM–EDS, TEM, FTIR, UV–VIS spectrophotometry, and electrochemical measurements were utilized to characterize the structural and compositional properties as well as the electrochromic behaviour of the prepared thin films. Triclinic WO₃ structure was prepared at 0.1 M W⁺ and current density of 0.5 mA cm⁻², while at 0.2 M W⁺ and 1 mA cm⁻², orthorhombic structure was revealed. High energy gap of 3.5 eV with diffusion coefficient of 6.81 × 10⁻¹¹ cm² S⁻¹ and coloration efficiency of 62.68 cm² C⁻¹ were obtained for the films prepared at pH 2, 1 mA cm⁻², and 0.1 M W⁺.     

Electrical characterization of low temperature deposited oxide films on ZnO/<Emphasis Type="Italic">n</Emphasis>-Si substrate

Thin films of silicon dioxide are deposited on ZnO/n-Si substrate at a low temperature using tetra-ethylorthosilicate (TEOS). The ZnO/n-Si films have been characterized by atomic force microscopy (AFM) and scanning electron microscopy (SEM). The border trap density (Q_bt) and fixed oxide charge density (Q_f/q) of the SiO₂/ZnO/n-Si films are found to be 3.9 × 10¹⁰ cm⁻² and 1.048 × 10¹¹ cm⁻², respectively. The trapping characteristics and stress induced leakage current (SILC) have also been studied under Fowler-Nordheim (F-N) constant current stressing.     

Optical and photoelectric properties of α-Dy<Subscript>2</Subscript>S<Subscript>3</Subscript> and α-Dy<Subscript>2</Subscript>S<Subscript>3</Subscript>〈Pb〉 films

A process is described for the growth of thin crystalline α-Dy₂S₃ films by thermal evaporation from separate dysprosium and sulfur sources. The films were doped with Pb, and their reflection and transmission spectra were measured at room temperature and photon energies in the range (0.3−5.2) × 10⁻¹⁹ J. The α-Dy₂S₃ films were shown to have an exponential absorption edge. The photoconductivity of the doped films was measured at photon energies in the range (0.3−5.2) × 10⁻¹⁹ J and temperatures from 115 to 400 K.     

Optical and electrical properties of SnO2 films prepared by chemical vapour deposition

Transparent and conducting SnO₂ films are prepared at 500°C on quartz substrates by chemical vapour deposition technique, involving oxidation of SnCl₂. The effect of oxygen gas flow rate on the properties of SnO₂ films is reported. Oxygen with a flow rate from 0·8–1·35 lmin⁻¹ was used as both carrier and oxidizing gas. Electrical and optical properties are studied for 150 nm thick films. The films obtained have a resistivity between 1·72 × 10⁻³ and 4·95 × 10⁻³ ohm cm and the average transmission in the visible region ranges 86–90%. The performance of these films was checked and the maximum figure of merit value of 2·03 × 10⁻³ ohm⁻¹ was obtained with the films deposited at the flow rate of 1·16 lmin⁻¹.     

Preparation and characterization of indium oxide (In2O3) films by activated reactive evaporation

The electrical and optical properties of In₂O₃ films prepared at room temperature by activated reactive evaporation have been studied. Hall effect measurements at room temperature show that the films have a relatively high mobility 15 cm²v⁻¹s⁻¹, high carrier concentration 2·97 × 10²⁰/cm³, with a low resistivityρ = 1·35 × 10⁻³ ohm cm. As-prepared film is polycrystalline. It shows both direct and indirect allowed transitions with band gaps of 3·52eV and 2·94eV respectively.