A new scanning MEMS mirror

This paper introduces the development of a new MEMS-based optical mirror, which performs optical scanning function with discrete reflection angles in an out-of-plane configuration. The device was fabricated through Deep Reactive Ion Etching (DRIE) process on silicon-on-insulator (SOI) wafer, followed by assembly with two metalised glass dies. The optical mirrors can be tilted by electrostatic forces between the opposite electrodes on the SOI and glass dies. The most outstanding performance that can be expected from the device is the discrete and therefore, reliable tilting angle of the mirror, which is guaranteed by its unique mechanical structure and the electrostatically driven mechanism. In this paper, the working principle of the new MEMS mirror was presented, followed by the introduction of device design, mechanical simulation, microfabrication process, assembly solution, and some testing results. The potential application of this new MEMS mirror is for light beam scanning or optical sensing (detection).     

Linearization of electrostatically actuated surface micromachined2-D optical scanner

This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two-dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projected images from 72% to only 13%. A theoretical model has been developed to predict the angle-voltage transfer characteristics of the 2-D scanner. The simulation results agree very well with experimental data. Differential voltage operation has been found to suppress the crosstalk of two orthogonal scan axes by both experiment and theoretically. We have found that a circular mirror is expected to have the lowest angular distortion compared with square mirrors. Perfect grid scanning pattern of small distortion (0.33%) has been successfully obtained by predistorting the driving voltages after calibration     

Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators

This paper reports on novel polysilicon surface-micromachined one-dimensional (1-D) analog micromirror arrays fabricated using Sandia's ultraplanar multilevel MEMS technology-V (SUMMiT-V) process. Large continuous DC scan angle (23.6/spl deg/ optical) and low-operating voltage (6 V) have been achieved using vertical comb-drive actuators. The actuators and torsion springs are placed underneath the mirror (137/spl times/120 /spl mu/m/sup 2/) to achieve high fill-factor (91%). The measured resonant frequency of the mirror ranges from 3.4 to 8.1 kHz. The measured DC scanning characteristics and resonant frequencies agree well with theoretical values. The rise time is 120 /spl mu/s and the fall time is 380 /spl mu/s. The static scanning characteristics show good uniformity (相似文献   

Improved surface-micromachined hinges for fold-out structures

We describe a new surface-micromachined polysilicon micromechanical hinge that is designed for “foldout” surface-micromachined elements. The new hinge shows reduced wobble and enhanced accuracy as compared to previous foldout hinge designs. Features of the new hinge, which is built using only two structural layers of polycrystalline silicon, are two sets of cantilevers that are fixed to opposing hinge flanges. These cantilevers overlay an axle and thereby allow rotation while holding the rotating part to the support member. A precise locking mechanism for 90° out-of-plane rotation makes this hinge design especially suitable for applications to fixed-position vertical-foldout micromirrors. Measurements on such mirrors have confirmed predicted high precision in vertical locking. The new hinge has also permitted the construction of a mirror on a movable carriage that has been driven in a one-dimensional (1-D) sliding motion more than 100 μm by on-chip microvibromotors     

Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical switching applications. These mirrors may be actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide two-axis orthogonal actuation. A custom package brings the MEMS mirror array and magnets into close proximity. Actuation is linear versus drive current on both axes, and displays negligible charging and drift. These mirrors have achieved greater than 10/spl deg/ mechanical rotation per mA in each axis. The mirror rotation angle is hysteresis free to less than the 0.01/spl deg/ measurement accuracy.     

Crystalline silicon tilting mirrors for optical cross-connect switches

This paper discusses a two-piece approach for fabricating two-dimensional (2-D) arrays of tilting MEMS mirrors with application in very-large optical cross-connect switches. In the new process, a two-sided etching of silicon-on-insulator (SOI) wafers is used to create crystalline mirrors on a first wafer that is later aligned and bonded to a separate wafer containing the activation electrodes, traces, and bond pads. The approach allows a very close spacing of mirror elements and a very simple design for the mechanical structures, and also greatly simplifies wire routing.     

Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch

A novel magnetically actuated 8/spl times/8-port MEMS-based fiber-optic switch is described. Fiber-to-fiber insertion loss measurements of six 8/spl times/8 switch units show average and worst-case insertion loss of 1.3 dB and 2 dB, respectively. Low insertion loss is achieved through a unique MEMS design that uses anisotropically etched single-crystal silicon sidewalls to provide a global mechanical alignment stop for an array of MEMS mirrors. This alignment surface produces a uniform and repeatable mirror angle across the mirror array. Mirror misalignment is attributed to the surface roughness of the silicon sidewalls. Repeated interferometric measurements of the mirrors of 24 8/spl times/8 switch units show repeatability of the mirror angle of 3/spl times/10/sup -3/ degrees, while the uniformity of the mirror angle across the MEMS array is 2/spl times/10/sup -2/ degrees, in agreement with the angular error predicted from measurements of sidewall surface roughness. In turn, the average repeatability and uniformity of the insertion loss are 0.01 dB and 1 dB, respectively, in agreement with predictions based on the interferometric measurements. Finally, the unique dynamics of the magnetic actuation and electrostatic addressing scheme are described. Measurements show that fast switching can be achieved by driving the mirrors with a magnetic pulse that is faster than the mechanical resonant frequency of the mirror, relying on an electrostatic clamping force to capture the mirror as it overshoots the magnetic field angle. This actuation scheme is shown to result in switching times of 8.5 ms to 13.5 ms, but requires accurate control of the kinetic energy of the mirror.     

Large-stroke MEMS deformable mirrors for adaptive optics

Surface-micromachined deformable mirrors that exhibit greater than 10 /spl mu/m of stroke are presented. The segmented arrays described here consist of 61 and 85 hexagonal, piston/tip/tilt mirrors (three actuators each) with diameters of 500 and 430 /spl mu/m, respectively, and fill a 4 mm circular aperture. Devices were packaged in 208 and 256 pin-grid arrays and driven by a compact control board designed for turn-key operation. After metallization and packaging mirror bow is /spl sim/680 nm (/spl lambda//1), but a heat-treatment procedure is proposed for controlling mirror curvature to better than /spl lambda//10. An optical test bed was used to demonstrate basic beam splitting and open-loop aberration correction, the results of which are also presented.     

Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of /spl plusmn/6.2/spl deg/ (at 55 Vdc) and /spl plusmn/4.1/spl deg/ (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm. [1454].     

Force and acceleration sensor fusion for compliant manipulation control in 6 degrees of freedom

This paper focusses on sensor fusion in robotic manipulation: six-dimensional (6-D) force/torque signals and 6-D acceleration signals are used to extract forces and torques caused by inertia. As result, only forces and torques established by environmental contact(s) remain. Apart from an improvement of hybrid force/pose control behavior, an additional major benefit is that regular resetting/zeroing of force/torque sensors before free space/contact transitions can be omitted. All essential equations, transformations and calculations that are required for this 6-D fusion approach are derived. To highlight the meaning for practical implementations, numerous experiments with a six-joint Staeubli RX60 industrial manipulator are presented and the achieved results are discussed.     

Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

We examine the nonlinear electromechanical response of piezoelectric mirrors driven by PZT thick films in a combined numerical and experimental investigation. First, some electromechanical tests were performed to measure the response (displacement versus load, displacement versus electric field) of the PZT thick films on elastic layers. A finite element analysis was then employed to determine the material properties in the PZT thick films using measured data. Next, the mirror tilt angle and electromechanical field concentrations due to electrodes in piezoelectric mirrors under electric fields were analyzed by introducing a model for polarization switching in local areas, and a nonlinear behavior was discussed in detail. The mirrors consisted of four fully or partially poled PZT unimorphs. Test results on the mirror tilt angle versus electric field, which verify the model, were also presented.     

Application of a multilayered magnetostrictive film to a micromachined 2-D optical scanner

A novel two-dimensional (2-D) optical scanner has been designed, manufactured and characterized. This scanner features a large mirror (8/spl times/6 mm) and is therefore suitable for industrial applications where cheap optical sources and lenses are requested. This scanner uses a multilayer film for its actuation. This film is well known for its high magnetostriction. The mechanical design has been optimized using conventional mechanical considerations as well as finite-element simulations. The device has been characterized in two configurations. Depending on the direction of the applied magnetic field, the magnetostrictive properties of the active film or the electromagnetic force are selectively used. Using this last, total optical deflection angles of 32/spl deg/ and 11/spl deg/ for an applied magnetic field of 0.3 mT are obtained. The ratio of the corresponding resonant frequencies is around 4.5, allowing a nice scanning pattern. Compared to our previous prototype on the same project , the mechanical-magnetic sensitivity has been improved by about a factor 24 when the magnetostriction is used, and by about a factor 75 when the electromagnetic force is used.     

Design and experiment of an electromagnetic levitation system for a micro mirror

In this paper, the design and characterization of a contactless electromagnetic levitation and electrostatic driven microsystem is presented, which has applications for example for large scale angle rotation micro mirrors. The proposed design can levitate a fabricated aluminum micro rotor which can incorporate a mirror and control it to rotate around the vertical axis within the range of ± 180°, which enlarges the scanning angle dramatically compared with conventional torsion micro mirrors. The rotation angle of the micro rotor is detected by the change of capacitance and controlled by the electrostatic force produced by variable capacitors. The levitation of the micro rotor is realized by utilizing electromagnetic inductions. The rotation is achieved through electrostatic forces generated by a digital controller. The hybrid system design for a micro rotor, combining magnetic and electrostatic forces is introduced. The digital control strategy is based on a PID controller with bias voltage. The detection interface circuit, which is based on frequency multiplexing, is also presented in this paper. It has been experimentally shown that the proposed design can levitate a 1.65 mm radius and 8 µm thickness aluminum micro rotor to 100 µm height with 20 MHz frequency and 0.5A p-p input current. Square and slope wave input experiments were carried out. The experimental results show that the control principal is in good agreement with the simulation models and this applies as well to the time-response performance and stability.

     

The impact of rear-view mirror distance and curvature on judgements relevant to road safety

We report two experiments that investigate the impact of rear-view mirror distance and curvature on distance, spacing, and time-to-contact (TTC) judgements. The variation in mirror distance had a significant effect on TTC judgements, but only marginally influenced distance and spacing estimations. As mirror distance increased, TTC was overestimated, which is potentially dangerous. Control conditions with identical visual angles across different mirror distances revealed that effects were not solely caused by variation in visual angle. The impact of mirror curvature moderated the effect. While observers were unable to compensate for the mirror distance effect, they could do so for the distortions generated by non-planar mirrors, at least up to a certain degree of distortion. Implications for vehicle design and national guidelines are discussed. PRACTITIONER SUMMARY: Regulations regarding rear-view mirrors are vastly different between countries. For instance EU regulations encourage convex driver-side mirrors, whereas US regulations allow them merely on the passenger's side. The use of a dynamic TTC paradigm puts the human factors designer in a position to evaluate the existing regulations and to design safer mirrors.     

Surface tension powered self-assembly of 3-D micro-optomechanicalstructures

A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-on-insulator material and rotated out-of-plane by melting photoresist pads at tow temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45° mirrors and scanning mirror assemblies     

Rapid communication Effects of driver-side mirror type on lane-change accidents

This quasi-experiment was designed to investigate the effects of the type of driver-side mirror on lane-change accidents. The analysis was based on 407 accidents reported from 1987 to 1992 to Finnish insurance companies, for vehicles with passenger-side convex mirrors and one of three types of driver-side mirrors (flat, convex or multiradius). The results showed that there was no difference between the multiradius and convex mirrors in the frequencies of lane-change accidents to the left. Compared to the flat mirror, the mean effect of the multiradius and convex mirror was a 22% decrease. However, the statistical strength of the data was low; 95% confidence interval ranged from a 51% decrease to a 25% increase. This result was not related to driver characteristics or driving conditions. In conclusion, the multiradius and convex driver-side mirrors, in comparison to the flat mirror, are more likely to reduce than increase lane-change accidents. A theoretical implication of this study is that minimizing the blind spot is likely to be more important than providing an undistorted image of objects. From a practical point of view, the present findings support the use of multiradius and convex driver-side mirrors.     

Development of Three-Dimensional Microstages Using Inclined Deep-Reactive Ion Etching

Three-dimensional (3-D) microstages driven by electrostatic comb actuators that provide continuous motion along three axes (x,y , and z ) were designed and fabricated. Each 3-D microstage consisted of sets of traveling tables, suspension systems, and comb actuators. To convert lateral displacement of the comb actuators to vertical motion, one suspension system incorporated leaf springs inclined to a substrate. To efficiently construct the inclined leaf springs, we devised a fabrication technique that uses deep reactive ion etching. Three-dimensional microstages were then fabricated in a 20-mum-thick device layer on a silicon-on-insulator wafer. The maximum vertical (z) displacement of this 3-D microstage was 2.6 mum, and the maximum lateral displacement (x and y) was more than 6 mum in each direction, achieved by using support suspensions to suppress the interference between the comb actuators. A 3-D microstage was then installed in a commercial atomic force microscope, and a 3-D image of a grating was successfully measured without hysteresis using this 3-D microstage as the scanning device.     

Two-axis electromagnetic microscanner for high resolution displays

A novel microelectromechanical systems (MEMS) actuation technique is developed for retinal scanning display and imaging applications allowing effective drive of a two-axes scanning mirror to wide angles at high frequency. Modeling of the device in mechanical and electrical domains, as well as the experimental characterization is described. Full optical scan angles of 65/spl deg/ and 53/spl deg/ are achieved for slow (60 Hz sawtooth) and fast (21.3 kHz sinusoid) scan directions, respectively. In combination with a mirror size of 1.5 mm, a resulting /spl theta//sub opt/D product of 79.5 deg/spl middot/mm for fast axis is obtained. This two-dimensional (2-D) magnetic actuation technique delivers sufficient torque to allow non-resonant operation as low as dc in the slow-scan axis while at the same time allowing one-atmosphere operation even at fast-scan axis frequencies large enough to support SXGA (1280 /spl times/ 1024) resolution scanned beam displays.     

The effects of a convex rear-view mirror on ocular accommodative responses

Convex mirrors are universally used as rear-view mirrors in automobiles. However, the ocular accommodative responses during the use of these mirrors have not yet been examined. This study investigated the effects of a convex mirror on the ocular accommodative systems. Seven young adults with normal visual functions were ordered to binocularly watch an object in a convex or plane mirror. The accommodative responses were measured with an infrared optometer. The average of the accommodation of all subjects while viewing the object in the convex mirror were significantly nearer than in the plane mirror, although all subjects perceived the position of the object in the convex mirror as being farther away. Moreover, the fluctuations of accommodation were significantly larger for the convex mirror. The convex mirror caused the 'false recognition of distance', which induced the large accommodative fluctuations and blurred vision. Manufactures should consider the ocular accommodative responses as a new indicator for increasing automotive safety.     

On the calibration of multicomponent microforce sensors

A calibration method for multicomponent microforce sensors using Lorentz forces is proposed. The method permits generation of six force and moment components in three orthogonal directions on two-dimensional (2-D) structures that can be fabricated through existing silicon micromachining technology. Two multicomponent microforce sensor and calibration devices were developed and tested to verify the method