A hybrid humidity sensor using optical waveguides on a quartz crystal microbalance

In this study, slab and ridge optical waveguides (OWGs) made of fluorinated polyimides were deposited on a quartz crystal microbalance (QCM), and hybrid sensors using OWG spectroscopy and the QCM technique were prepared. Polyvinyl alcohol (PVA) film with CoCl₂ was deposited on the OWGs, and the characteristics of humidity sensing were investigated. A prism coupler was used to enter a He–Ne laser beam (λ = 632.8 nm) to the slab OWG. The output light intensity markedly changed due to chromism of the CoCl₂ as a result of humidity sorption, and this change was dependent on the incident angle of the laser beam to the slab OWG. During the measurement of output light, the QCM frequency was simultaneously monitored. The humidity dependence of the sensor with the slab OWG was also investigated in the range from 15 to 85%. For the sensor with the ridge OWG, white light was entered by butt-coupling, and the characteristics of humidity sensing were investigated by observing the output light spectrum and the QCM frequency.     

空间用油脂材料原位质损测试及出气成分分析方法

QCM（QuartzCrystal Microbalance）作为一种新型的高灵敏度质量传感器,具有测量精度高、稳定性好、体积小和工作温度范围广等优点,被用来监测微小质量的变化。针对QCM的原理,提出了将空间用油脂材料包裹在QCM电极上,在空间材料出气成分分析设备中原位监测材料的质损和出气成分的方法,并对实验方法进行了验证。     

Nonlabeled quartz crystal microbalance biosensor for bacterial detection using carbohydrate and lectin recognitions

High percentages of harmful microbes or their secreting toxins bind to specific carbohydrate sequences on human cells at the recognition and attachment sites. A number of studies also show that lectins react with specific structures of bacteria and fungi. In this report, we take advantage of the fact that a high percentage of microorganisms have both carbohydrate and lectin binding pockets at their surface. We demonstrate here for the first time that a carbohydrate nonlabeled mass sensor in combination with lectin-bacterial O-antigen recognition can be used for detection of high molecular weight bacterial targets with remarkably high sensitivity and enhanced specificity. A functional mannose self-assembled monolayer in combination with lectin concanavalin A (Con A) was used as molecular recognition elements for the detection of Escherichia coli W1485 using a quartz crytsal microbalance (QCM) as a transducer. The multivalent binding of Con A to the E. coli surface O-antigen favors the strong adhesion of E. coli to the mannose-modified QCM surface by forming bridges between these two. As a result, the contact area between cell and QCM surface that increases leads to rigid and strong attachment. Therefore, it enhances the binding between E. coli and the mannose. Our results show a significant improvement of the sensitivity and specificity of the carbohydrate QCM biosensor with a experimental detection limit of a few hundred bacterial cells. The linear range is from 7.5 x 10(2) to 7.5 x 10(7) cells/mL, which is four decades wider than the mannose-alone QCM sensor. The change of damping resistances for E. coli adhesion experiments was no more than 1.4%, suggesting that the bacterial attachment was rigid, rather than a viscoelastic behavior. Little nonspecific binding was observed for Staphylococcus aureus and other proteins (fetal bovine serum, Erythrina cristagalli lectin). Our approach not only overcomes the challenges of applying QCM technology for bacterial detection but also increases the binding of bacteria to their carbohydrate receptor through bacterial surface binding lectins that significantly enhanced specificity and sensitivity of QCM biosensors. Combining carbohydrate and lectin recognition events with an appropriate QCM transducer can yield sensor devices highly suitable for the fast, reversible, and straightforward on-line screening and detection of bacteria in food, water, and clinical and biodefense areas.     

A quartz crystal microbalance-based sensor system coated with functional polymers for SO2 and NO2 detection

In this work, a quartz crystal microbalance (QCM)-based adsorption sensor system with high sensitivity, selectivity, and reproducibility is designed and fabricated. The functional polymers such as polypyrrole, poly(3,4-ethylenedioxythiophene) (PEDOT), and polystyrene are coated on 8 MHz AT-cut quartz crystal surfaces as sensing materials for SO2 and NO2. All sensing materials on the QCM surface are characterized experimentally by SEM and AFM. The frequency shifts of the QCM by adsorption and desorption of gases are measured and analyzed to assess the practical applicability of the sensor system. The overall results show that the QCM coated with polypyrrole is highly selective for SO2 gas and that coated with PEDOT is for NO2. It is proven that the QCM-based adsorption sensor system is possible for monitoring SO2 and NO2 gases in the mixture of ppm level.     

Rückseitenmetallisierung Wafer‐basierter Si‐Solarzellen mittels EB‐PVD

Back Side Metallization of Wafer Based Silicon Solar Cells by Means of Electron Beam Evaporation Electron beam evaporation is an innovative vacuum deposition technology regarding the wafer backside metallization of crystalline silicon solar cells. The motivation for the consideration of electron beam evaporation as cell finishing step is based on the one hand on the competition with thin film photovoltaic modules and on the other on the remarkable cost reduction potential by applying EB‐PVD (Electron Beam Physical Vapor Deposition). This article presents a highly productive coater concept and gives an explanation of important aspects for the adaption of the coater concept to typical solar cell features. Various PVD technologies are compared concerning their possible use as wafer backside metallization method. Challenges and chances of the introduction of EB‐PVD in the wafer based solar cell production are considered.     

Selective protein separation using siliceous materials with a trimethoxysilane-containing glycopolymer

A copolymer with α-D-mannose (Man) and trimethoxysilane (TMS) units was synthesized for immobilization on siliceous matrices such as a sensor cell and membrane. Immobilization of the trimethoxysilane-containing copolymer on the matrices was readily performed by incubation at high heat. The recognition of lectin by poly(Man-r-TMS) was evaluated by measurement with a quartz crystal microbalance (QCM) and adsorption on an affinity membrane, QCM results showed that the mannose-binding protein, concanavalin A, was specifically bound on a poly(Man-r-TMS)-immobilized cell with a higher binding constant than bovine serum albumin. The amount of concanavalin A adsorbed during permeation through a poly(Man-r-TMS)-immobilized membrane was higher than that through an unmodified membrane. Moreover, the concanavalin A adsorbed onto the poly(Man-r-TMS)-immobilized membrane was recoverable by permeation of a mannose derivative at high concentration.     

Investigation of metallic nanoparticles adsorbed on the QCM sensor by SEM and AFM techniques

Quartz crystal microbalance (QCM) is known as a very sensitive device used for determination of mass quantity adsorbed on sensor surface. Its detection limits are in the range of ng cm\(^{-2}\). The adsorption mechanism of metallic nanoparticles on QCM sensor was investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM). This study aims to highlight the importance of QCM applications in nanoparticles deposition field. The layers formed through adsorption process, induced by the oscillations of the QCM sensor, were investigated by AFM for surface topography and for particle mean size values. The morphology of layers and nanoparticles dimensions were determined by SEM. For a more complex investigation of the nanoparticles adsorption mechanism, the chemical composition of layers was achieved using SEM coupled with energy dispersive X-ray spectrometer (SEM-EDS). This preliminary research involved a new approach in characterization of metallic nanoparticles layers to achieve functional assembled monolayers.     

国产镀膜机实现多层膜自动化晶振控制

介绍了改造国产镀膜机的继电器控制线路的方法，从而实现其与INFICONIC／5晶振薄膜沉积监视器之间接口电路的转接。生产试验表明，采用此法改造后的装置可实现对多层光学薄膜的高精度、快速自动化监控。     

Ligand exchange based paraoxon imprınted QCM sensor

In the present work, a paraoxon imprinted QCM sensor has been developed for the determination of paraoxon based on the modification of paraoxon imprinted film onto a quartz crystal combining the advantages of high selectivity of the piezoelectric microgravimetry using MIP film technique and high sensitivity of QCM detection. The paraoxon selective memories have formed on QCM electrode surface by using a new metal–chelate interaction based on pre-organized monomer and the paraoxon recognition activity of these molecular memories was investigated. Molecular imprinted polymer (MIP) film for the detection of paraoxon was developed and the analytical performance of paraoxon imprinted sensor was studied. The molecular imprinted polymer were characterized by FTIR measurements. Paraoxon imprinted sensor was characterized with AFM and ellipsometer. The study also includes the measurement of binding interaction of paraoxon imprinted quartz crystal microbalance (QCM) sensor, selectivity experiments and analytical performance of QCM electrode. The detection limit and the affinity constant (K_affinity) were found to be 0.06 μM and 2.25 × 10⁴ M^? 1 for paraoxon [MAAP–Cu(II)–paraoxon] based thin film, respectively. Also, it has been observed that the selectivity of the prepared paraoxon imprinted sensor is high compared to a similar chemical structure which is parathion.     

On the vacuum design of vacuum web coaters

The main features which determine the vacuum design of a vacuum web coater are reviewed. Measurements on the outgassing of polymer and paper web rolls as well as on the conductance of the slit configurations usually employed in production roll coaters are presented. On this basis the vacuum design of an advanced web coater concept for coating video type is discussed in some detail. The discussion includes the concept of additional buffer chambers between the deposition chamber and the winding chamber to minimize the gas flow into the deposition chamber.     

Signal amplification with multilayer arrangements on chemical quartz-crystal-resonator sensors

Viscoelastic properties of chemically sensitive coatings can enhance the mass sensitivity of quartz-crystal-microbalance (QCM) sensors. If analyte sorption is accompanied by a change of the viscoelastic properties of the coating material, the accumulated mass cannot be calculated from the frequency shift without further information. We developed a sensor concept, which is based on a double-layer arrangement, permitting acoustic amplification and chemical sensitivity to be separated. With a proper selection of materials, the first layer realizes a constant acoustic amplification of the mass effect; the chemically sensitive layer acts purely gravimetrically. Major sensor design parameters are the shear modulus and the thickness of the first layer. From the acoustic point of view, the thickness of the chemically active layer and its material properties are less critical; a glasslike, rigid coating is preferred for a stable sensor transfer function. Simultaneous measurement of the resonant frequency of the quartz crystal and its motional resistance can be exploited to check the acoustic amplification.     

QCM露点传感器水粘性影响的抑制方法研究

为了解决基于主控温式的石英晶体微天平（Quartz Crystal Microbalance， QCM）露点测量系统中冷凝水粘弹特性影响露点识别准确性的问题，对QCM电极进行疏水处理，改善凝结特性，减小水粘性引起的频率耗散，实现液态水质量变化引起的谐振频率偏移测量。在QCM电极上制备静态水接触角为133° ± 2°的疏水层并对其进行表征，将疏水电极与未经处理的电极用于露点识别实验，并与精密露点仪获得的标准露点进行比对。实验证明，通过疏水处理电极凝结面的方法能够有效提升QCM露点传感器的露点识别精度，为主控温式露点传感器结构的优化设计提供理论和实验依据。     

Synthesis and characterization of plasma-polymerized tert-butylacrylate films

Plasma polymerized tert-butylacrylate (pp-t-BA) film was prepared using tert-butylacrylate monomer under 100 Pa of vapor pressure with varying RF power of 10-250 W and continuous wave RF power of 13.56 MHz. The deposition rates of pp-t-BA films were determined using quartz crystal microbalance (QCM) method. The chemical structure of pp-t-BA films was characterized using FT-IR, contact angle and XPS techniques. The gas sorption properties of pp-t-BA were measured using a QCM sensor array. Results showed that deposition rates of pp-t-BA film were proportional to the polymerization time at 100 Pa of monomer pressure under the same RF power. The deposition amount of pp-t-BA films increased gradually with increasing RF power of 30-150 W. Increasing the RF power on plasma polymerization decreased the amount of ester group in pp-t-BA films. Sensitivity of gas sorption on pp-t-BA films is related to the RF power of polymerization.     

In-liquid sensing of chemical compounds by QCM sensors coupled with high-accuracy ACC oscillator

A novel oscillator circuit with automatic capacitance compensation (ACC) capability has been coupled with quartz-crystal-microbalance (QCM) sensors coated with quinoxaline- and pyrazine-bridged cavitands to detect aromatic and chlorinated compounds in water. With double-side immersed 10-MHz crystals coated with the quinoxaline cavitand, the detection of toluene in deionized water was possible down to concentrations of a few parts per million. The ACC oscillator advantageously provides the simultaneous measurement of the sensor resonant frequency, damping, and value of the compensated parallel capacitance. This enabled observing that the analyte sorption in the cavitand coating not only brings about a mass uptake but also an increase of losses and, apparently, a rise in the coating average permittivity.     

Layer-by-layer of liposomes and membrane protein as a recognition element of biosensor

Layer-by-layer (LBL) assembly composed of liposome and membrane protein, bacteriorhodopsin (bR) was fabricated on quartz crystal microbalance (QCM) as a sensor element for bio-recognition. The LBL assembly was prepared by stacking of liposome/bR solutions alternately with a flowing system. By atomic force microscopy (AFM) and the QCM monitoring the bR and the liposome were found to be stacked regularly until the 8th layer of the liposome. The fabricated LBL assembly on the QCM was engaged to detect nonylphenol in solution, which is one of the endocrine disrupting chemicals. It was confirmed that the existence of nonylphenol in solution can be detected by a mass decrease of the LBL assembly on the QCM, which is caused by the disruption of the liposome through nonylphenol, in the low concentration range of 0.1–10 ppm.     

Simultaneous monitoring of protein adsorption kinetics using a quartz crystal microbalance and field-effect transistor integrated device

We developed an integrated device comprising a quartz crystal microbalance (QCM) and a field-effect transistor (FET) with a single common gold electrode in a flow chamber. An alternating current inducing oscillations in the piezoelectric quartz of the QCM sensor is electrically independent of the circuit for the FET output so that the two sensors in different detection mechanisms simultaneously record binding kinetics from a single protein solution on the same electrode. A conjunction of adsorbed mass from QCM with electric nature of bound protein from FET provided deeper understanding on a complex process of nonspecific protein adsorption and subsequent conformational changes at a solid/liquid interface. Lower apparent k(on) values obtained by FET than those obtained by QCM on hydrophobic surfaces are interpreted as preferred binding of protein molecules facing uncharged domains to the electrode surface, whereas higher k(off) values by FET than those by QCM imply active macromolecular rearrangements on the surfaces mainly driven by hydrophobic association in an aqueous medium. The advanced features of the combined sensor including in situ, label-free, and real-time monitoring provide information on structural dynamics, beyond measurements of affinities and kinetics in biological binding reactions.     

基于实例推理的镀膜机快速设计研究

目的研究大规模定制模式下镀膜机的快速设计方法。方法阐述了基于实例推理技术的基本原理和关键技术,将基于实例推理的快速设计技术应用到镀膜机的设计过程中;研究了镀膜机的实例表示、检索和修正的具体实现方法,即采用数据库表的实例表示方法构建了镀膜机的实例库,运用最相邻策略法进行镀膜机实例的检索,采用基于框架的方案变换方法对检索的最相似实例进行修正。结果以Pro Engineer 5.0为开发平台,开发了基于实例推理的镀膜机快速设计系统,实现了资源的整合和重复利用。通过测试,该系统使设计效率提高了30%。结论将基于实例推理的快速设计技术引入到镀膜机的设计中,能够提高产品的设计效率和缩短产品的开发周期,从而解决客户个性化需求与大批量生产之间的矛盾,提高企业的市场竞争力。     

A real time detection of the ovarian tumor associated antigen 1 (OVTA 1) in human serum by quartz crystal microbalance immobilized with anti-OVTA 1 polyclonal chicken IgY antibodies

In this study, we developed a sensitive quartz crystal microbalance (QCM) sensor which employs the anti-ovarian tumor associated antigen 1 (OVTA 1) IgY polyclonal chicken antibodies on the crystal surface for the detection of OVTA 1 in human serum. The anti-OVTA 1 IgY antibodies were anchored on the thiol-activated sensor surface using 1-ethyl-3[3-dimethylaminopropyl] carbodiimide hydrochloride/N-hydroxysuccinimide (EDC–NHS) coupling. The responses for different concentrations of anti-OVTA 1 antibody were also studied and 40 μg/mL was favorable for homogenous antibody coverage. The QCM sensor was used to monitor both immobilization and the target binding affinity. The anti-OVTA 1 antibody based QCM has allowed the competent detection of OVTA 1 in a high linear range of 0.5–10 μg/mL. The total time needed to complete the detection was as short as 5–6 h. The regeneration studies demonstrated that the proposed sensor was reusable up to 9 cycles with a slight loss in binding affinity. The detection of OVTA 1 in human serum allows a potential exploitation of the anti-OVTA 1 polyclonal antibody based QCM immunoassay for the screening of OVTA 1 antigen.     

A versatile planar QCM-based sensor design for nonlabeling biomolecule detection

Despite high theoretical sensitivity, low-cost manufacture, and compactness potentially amenable to lab-on-a-chip use, practical hurdles have stymied the application of the quartz crystal microbalance (QCM) for aqueous applications such as detection of biomolecular interactions. The chief difficulty lies in achieving a sufficiently stable resonance signal in the presence of even minute fluctuations in hydrostatic pressure. In this work, we present a novel versatile planar sensor chip design (QCM chip) for a microliter-scale on-line biosensor. By sealing the quartz resonator along its edges to a flat, solid support, we provide uniform support for the crystal face not exposed to solvent, greatly decreasing deformation of the crystal resonator under hydrostatic pressure. Furthermore, this cassette design obviates the need for direct handling when exchanging the delicate quartz crystal in the flow cell. A prototype 27-MHz sensor signal exhibited very low noise over a range of flow rates up to 100 microL/min. In contrast, signals obtained from a conventional QCM sensor employing an O-ring-based holder were less stable and deteriorated even further with increasing flow rate. Additional control designs with intermediate amounts of unsupported undersurface yielded intermediate levels of stability, consistent with the interpretation that deformation of the crystal resonator under fluctuating hydraulic pressure is the chief source of noise. As a practical demonstration of the design's high effective sensitivity, we readily detected interaction between myoglobin and surface-bound antibody.     

Functionalized cubic mesostructured silica films

Cubic Pm3n mesoporous silica films have been prepared on silicon wafers and quartz crystal microbalance (QCM) devices covered with gold electrodes by a spin-coating process from preformed silica/CTABr/ethanol/water assemblies under acidic conditions. Post-synthesis functionalization of mesoporous films with amino- and thiol-containing organosilanes is performed in order to modify the mesoporous surface for further confinement of nanoscale structures. The type of mesophase structure and the functionalization process was followed with surface sensitive techniques such as grazing incidence diffraction (GID), reflection-absorption FT-IR spectroscopy and gravimetric measurements by applying QCMs technique. Nitrogen sorption data using QCM devices were obtained for the calcined and functionalized mesoporous films.