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1.
采用GaN材料常用的生长设备金属有机化合物气相沉积(MOCVD)系统,以蓝宝石为衬底,在GaN上沉积Al GaN薄膜。通过调整MOCVD中喷淋头与基座间的距离,探讨喷淋头高度对AlGaN薄膜生长的影响。选择4个喷淋头高度生长样品,利用金相显微镜、原子力显微镜(AFM)和X射线衍射(XRD)对样品进行表征。实验结果表明,在一定范围内,随着喷淋头高度增大,样品表面平滑粗糙度减小,由XRD测试可得此时晶体质量也变好,Al组分线性减少;但继续增大喷淋头高度时,导致预反应过多,Al组分更少,且表面粗糙度增大。  相似文献   

2.
采用抗刻蚀性光刻胶作为掩膜,并利用光刻技术制作周期性结构,进行ICP干法刻蚀C面(0001)蓝宝石制作图形蓝宝石衬底(PSS);然后,在PSS上进行MOCVD制作GaN基发光二极管(LED)外延片;最终,进行芯片制造和测试。PSS的基本结构为圆孔,直径为3μm,间隔为2μm,深度为864 nm,呈六角形分布。与同批生长的普通蓝宝石衬底(CSS)GaN基LED芯片相比,PSS芯片的光强和光通量比CSS分别提高57.32%和28.33%(20 mA),并可减小芯片的反向漏电流,且未影响芯片的波长分布和电压特性。  相似文献   

3.
自发极化和压电极化是氮化镓制作光电器件没有解决的问题,对非极性GaN材料的研究解决了极化现象.采用低温AlN作为缓冲层,在(11-02)r面蓝宝石和(0001)c面蓝宝石上分别生长了(112-0)非极性a面和(0001)极性c面GaN,用原子力显微镜和高分辨X射线衍射、光致发光谱比较了生长在r面蓝宝石上的a面GaN和c面蓝宝石上的c面GaN,a面GaN材料质量和c面GaN相差较大,在a面GaN上发现了三角坑的表面形貌,这和传统的c面生长的极性GaN截然不同.对a面GaN的缺陷形成原因进行了讨论,并且确定了三角坑缺陷的晶向.  相似文献   

4.
自发极化和压电极化是氮化镓制作光电器件没有解决的问题,对非极性GaN材料的研究解决了极化现象.采用低温AIN作为缓冲层,在(1102)γ面蓝宝石和(0001)с面蓝宝石上分别生长了(1120)非极性α面和(0001)极性с面GaN,用原子力显微镜和高分辨X射线衍射、光致发光谱比较了生长在γ面蓝宝石上的α面GaN和с面蓝宝石上的с面GaN,α面GaN材料质量和с面GaN相差较大,在α面GaN上发现了三角坑的表面形貌,这和传统的с面生长的极性GaN截然不同.对α面GaN的缺陷形成原因进行了讨论,并且确定了三角坑缺陷的晶向.  相似文献   

5.
以无水乙醇为溶剂、柠檬酸为分散剂,用超声分散技术配制Ni纳米粒子分散液;将分散液用旋涂的方法在GaN基发光二极管(LED)的ITO电流扩展层上制备单层Ni纳米粒子掩膜,采用ICP(inductively coupledplasma)干法刻蚀技术在ITO层上制作出表面粗化的结构。在20 mA工作电流下,与普通GaN基LED相比,这种ITO表面粗化的GaN基LED芯片发光强度提高了30%,并且对器件的电性能影响很小。结果表明,该表面粗化技术是一种工艺简单、成本低和能有效提高LED发光效率的方法。  相似文献   

6.
技术开发单位中国科学院半导体研究所技术简介该材料采用金属有机化学气相沉积(MOCVD)法,在蓝宝石或碳化硅衬底上外延生长高性能GaN基电子材料,为《军用技术转民用推广目录(2012年度)》中微电子与电子信息领域的重点推荐项目。  相似文献   

7.
采用Sol-gel法在Pt/Ti/SiO2/Si衬底上制备了Ba(Zr0.2Ti0.8)O3(BZT)薄膜.X射线衍射分析表明,该BZT薄膜为钙钛矿结构而无其他物相存在.光学显微镜分析结果表明,退火温度为900℃时,BZT薄膜表面光滑平整,无裂纹产生.  相似文献   

8.
运用射频溅射法在Si和LaNiO3/Si衬底上分别制备了高度(002)和(110)取向的ZnO薄膜.通过X射线衍射(XRD)和扫描电子显微镜(SEM)表征,发现ZnO/LaNiO3/Si薄膜的(110)取向度高达96%,ZnO/Si薄膜为(002)择优取向,两种薄膜表面均致密平整,晶粒尺寸小于80nm.光致发光结果表明,ZnO/LaNiO3/Si薄膜的光致发光峰主要为带边发射的紫外光,而ZnO/Si薄膜的光致发光峰主要为过量氧导致的缺陷引起的缺陷发光峰.因此,采用LaNiO3薄膜作为ZnO在Si衬底上生长的过渡层,能够有效抑制缺陷发光,改善ZnO薄膜的发光性能.  相似文献   

9.
通过阐述外延薄膜进行原位监测的反射高能电子衍射(RHEED)以及RHEED图像的条纹或点阵与GaN基薄膜表面形貌的关系,提出了基于RHEED图像分析外延GaN基薄膜晶体结构演变情况,从衬底α-Al2O3的氢氮等离子体清洗、氮化、生长缓冲层以及生长外延层进行具体的分析、比较和演算.结果表明衬底在清洗前后表面晶格常数基本保持一致,对于氮化层、缓冲层以及外延层情况,表面原子层处于应变状态.  相似文献   

10.
金刚石在目前所知的天然物质中具有最高的热导率,在高频、大功率GaN基高电子迁移率晶体管(HEMT)和电路的散热方面极有应用潜力。综述化学气相沉积多晶金刚石衬底的衬底转移技术、单晶金刚石衬底的直接外延技术和纳米金刚石表面覆膜的器件工艺技术在GaN基HEMT器件中的应用研究和发展历程,并分析每种技术的优缺点。  相似文献   

11.
在大学英语教学过程中,有关/n/与/l/的发音错误很常见,原因是没有完全掌握它们的发音规则。/n//l/发音规则的相似性造成了/n//l/不分的情况,而且局部方言中这两个音也不作区分,使得/n//l/混淆的情况更加严重。在教学过程中,可以通过重点讲解区分/n/与/l/的发音规则及其区别来避免/n//l/发音错误。本文同时也分析了含糊/l/音的发音错误,通过对/n/与/l/相关的发音错误分析找出大学英语语音教学行之有效的途径:在完全把握单音的发音规则的基础上,进一步强调语调的掌握,使学生拥有良好的语音。  相似文献   

12.
对肼、一甲基肼、偏二甲肼的亚临界--超临界蒸发/分解燃烧进行了研究,计算了肼类燃料滴在不同压力下液滴温度和蒸发速度的变化历程,计算了蒸发常数、传热数和传质数,其结果和实验数据是吻合的。本文不但考虑了肼类燃料滴的亚临界蒸发/分解燃烧,还考虑到了其超临界蒸发/分解燃烧,并对达到超临界工况时的界限参数进行了计算。  相似文献   

13.
LiCo1/3Ni1/3Mn1/3O2 was coated by a layer of 1.0 wt% CeO2 via sol-gel method. The bared and coated LiMn1/3Co1/3Ni1/3O2 was characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), cyclic voltammogram (CV) and galvanotactic charge-discharge test. The results show that the coating layer has no effect on the crystal structure, only coating on the surface; the 1.0 wt% CeO2-coated LiCo1/3Ni1/3Mn1/3O2 exhibits better discharge capacity and cycling performance than the bared LiCo1/3Ni1/3Mn1/3O2. The discharge capacity of 1.0 wt% CeO2-coated cathode is 182.5 mAh·g−1 at a current density of 20 mA·g−1, in contrast to 165.8 mAh·g−1of the bared sample. The discharge capacity retention of 1.0 wt% CeO2-coated sample after 12 cycles reaches 93.2%, in comparison with 86.6% of the bared sample. CV results show that the CeO2 coating could suppress phase transitions and prevent the surface of cathode material from direct contact with the electrolyte, thus enhance the electrochemical performance of the coated material.  相似文献   

14.
The infuence of Cu dopant (x) and sintering temperature(Ts) on the troansport propeties of La2/3Ca1/3Mn1-xCuxO3 series samples prepared by Sol-Gel technique was investigated.X-ray diffraction patterns show that all the samples with different Cu dopant and sintering temperatures (Ts) are of single phase without obvious latice distortion.Experimental results indicate that the insulator-metal transition temperature is diectly related to the sintering temperature and Cu dopant x.It is interesting to observe that a proper amount of Cu dompant can substantially improve magnetoresistance effects.  相似文献   

15.
RDSS/Doppler/GPS/SINS组合导航系统研究   总被引:6,自引:0,他引:6  
针对双星定位系统(RDSS)存在的定位位置滞后的先天缺陷,根据组合导航定位系统输出速度误差小的特点,给出了一套消除RDSS位置滞后的方案,并对RDSS/SINS组合系统进行了建模,依据联邦滤波器理论,考虑到GPS的实际情况,提出了RDSS/Doppler/GPS/SINS多传感器组合导航系统的设想,仿真结果表明,该组合导航系统具有准确度高、自主性强的特点。  相似文献   

16.
A thin organic film of p-type semiconducting copper phthalocynanine (CuPc) was deposited by vacuum evaporation on an n-type GaAs single-crystal semiconductor substrate. The fabricated Ag/p-CuPc/n-GaAs/Ag sensor was carried through an ageing process to stabilize the parameters. Voltage-current characteristics and photoelectrical response of the sensor were investigated at a wide temperature range of 82 to 350 K. Photoelectric characteristics were measured under nonmodulated filament-lamp illumination. It was observed that such sensor parameters as rectification ratio, threshold voltage, junction, shunt and series resistances, open-circuit voltage and short circuit current are temperature-dependent. It was found that wide-range voltage-current characteristics of the sensor may be described similarly to that of a Schottky barrier diode. Using the experimental data on voltage-current characteristics and absorbance of the CuPc films, the energy-band diagram of the p-CuPc/n-GaAs heterojunction was developed. It was shown that data obtained from simulation of an equivalent circuit of photoelectric sensor agreed with experimental results. Supported by the National Engineering and Scientific Commission of Pakistan  相似文献   

17.
A ferroelectric memory diode that consisted of Au/PZT/BIT/p-Si multilayer configuration was fabricated by pulsed laser deposition (PLD) technique. The reliability issues (I-V characteristics, capacitance retention, fatigue and imprint) were investigated. The I-V curve showed the conventional Schottky diode characteristics with a small current density of - 5.3×10 -10 A/cm2 at a voltage of - 4 V and 6.7×10-8 A/cm2 at a voltage of + 4V, and this characteristic can be maintained below 50℃. The capacitance variety of the ferroelectric diode was only 5 % in 10 hours after withdrawing the applied bias of + 5 V or - 5 V, indicating the diode had good capacitance retention. By applying 100 kHz bipolar pulses of 5 V amplitude, the decay in remanent polarization was only 10% after 109 switching cycles, and meanwhile the increase in coercive field was 12%. After being irradiated for 20 min with a 200 W ultraviolet ray lamp, the remanent polarization and coercive field had both varied, and a voltage shift was obse  相似文献   

18.
研究了用固相反应法制备亚锰酸盐多晶样品La0.7-xYxCa0.3MnO3,并研究了Y的不同掺杂(x=0.1,0.2)对样品的晶体结构、电磁特性和磁电阻效应的影响.实验结果表明,随着温度的降低,x=0.1样品的R-T曲线没有出现峰值,而x=0.2样品出现了峰值,显示了复杂的输运特性.两种样品的磁电阻Rm都随着温度的降低而升高,但都没有出现峰值.x=0.2的样品在较宽的温区内,磁电阻效应都很显著,而且Y掺杂由x=0.1提高至x=0.2,磁电阻效应增强.  相似文献   

19.
采用半连续乳液种子聚合法合成苯乙烯(St)、丙烯酸丁酯(BA)、甲基丙烯酸(MAA)、丙烯酸(AA)、醋酸乙烯酯(VAc)的复合乳液。分析了丙烯酸对乳液电解质性能的影响,引发剂对聚合反应转化率的影响及乳化剂含量对乳液粘度的影响。通过正交试验确定组分的适当配比。该共聚乳液的粘度及固体含量符合要求,稳定性好,性能价格比高。应用表明:用此乳液配制成地毯乳胶,胶膜具有良好的机械性能。  相似文献   

20.
对含铬固体废物焚烧体系进行动力学分析是提出控制六价铬化合物排放措施的基础。本文对铬/氢/空气/氯焚烧体系进行了动力学分析,研究了温度、初始氯含量对产物中六价铬化合物含量的影响。研究表明,六价铬化合物主要以CrO2(OH)2的形式出现,最高含量出现在1700K左右;氯的存在没有导致六价铬化合物CrO2Cl2的大量生成;六价铬化合物CrO2(OH)2的含量随初始氯含量的增大略有下降。建议含铬固体废物实际焚烧过程中,避开1700K左右的温度区域,减少六价铬化合物的排放。  相似文献   

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