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1.
VHF-PECVD法高速率沉积氢化微晶硅薄膜   总被引:4,自引:2,他引:4  
采用光发射谱(OES)技术对氢化微晶硅(μc-Si:H)薄膜的甚高频等离子体增强化学气相沉积(VHF-PECVD)生长过程进行了原位监测,并对不同沉积条件下VHF等离子体中SiH和H的发光峰强度与薄膜沉积速率之间的关系进行了分析与讨论。通过Raman光谱、X射线衍射与扫描电子显微镜(SEM)测量,研究了μc-Si:H薄膜的结构特征与表面形貌。基于当前的沉积系统,对μc—Si:H薄膜沉积条件进行了初步优化,使μc—Si:H薄膜的沉积速率提高到2.0nm/s。  相似文献   

2.
图16为以等离子体内SiH3为生长前驱物模式的硅薄膜沉积示意图. 此模型中假设在SiH3离子落向衬底之前,表面将被H覆盖.首先SiH4在等离子体内与电子发生碰撞,(1)电子将自己的动能给予SiH4,使其分解成SiH3和H原子;(2) SiH3附着于衬底表面;(3) SiH3在表面覆盖有H的帮助下,在衬底表面运动以寻找合适的成键位置;(4)最后在能量最低处与表面硅的悬键键合生成表面Si层上的原子之一;(5)上式分解出的原子H或表面覆盖的H,反过来也可能与SiH3反应生成气态的硅烷而回到等离子体中去.  相似文献   

3.
张晓丹  赵颖  熊绍珍 《太阳能》2012,(15):16-17
(3)非晶硅氧(a-SiO:H)合金[34,35]以H稀释硅烷添加CO2作混合气源,控制衬底温度、沉积气压及CO2浓度比CO2/(CO2+SiH4)(其中硅烷用氢稀释浓度比SiH4/(SiH4+H2)表示),在等离子体放电作用下,CO2、SiH4、H2之间将产生以下反应:SiH4+CO2+H2→a-SiO:H,生成非(或微)晶硅氧合金薄膜。硅氧(SiO:H)合金可以是非晶态,也可以是含微晶相的。由Si的无规网络(图34a)与SiO2网络(图34b)之间融合状态的不同,硅氧合金的原子构  相似文献   

4.
图16为以等离子体内SiH3为生长前驱物模式的硅薄膜沉积示意图。此模型中假设在SiH3离子落向衬底之前,表面将被H覆盖。首先SiH4在等离子体内与电子发生碰撞,(1)电子将自己的动能给予SiH4,使其分解成SiH3和H原子;(2)SiH3附着于衬底表面;(3)SiH3在表面覆盖有H的帮助下,在衬底表面运动以寻找合适的成键位置;(4)最后在能量最低处与表面硅的悬键键合生成表面Si层上的原子之一;(5)上式分解出的原子H或表面覆盖的H,反过来也可能与  相似文献   

5.
4 非晶硅中氢(H)的作用(1)钝化悬挂键实际上早期采用蒸发方法制备的非晶硅材料并不含有氢(H),所以写成a-Si.缺陷态密度很高,很难制备出性能优良的器件.自从1969年Chitick等人发明了用辉光放电法(GD)制备氢化非晶硅(a-Si:H)[15],以非晶硅作有源层的器件才成为可能.硅烷的辉光放电是硅烷(SiH4)在一定氢气(H2)稀释下通过射频(RF)激发产生等离子体的辉光放电,将硅烷分解制备成非晶硅.它有以下最简单的反应表达式:  相似文献   

6.
采用等离子增强化学气相沉积(PECVD)技术制备了系列本征微晶硅薄膜材料和nip单结微晶硅太阳电池,研究了硅烷浓度、衬底温度和辉光功率等沉积参数与薄膜材料性能、薄膜电池性能三者之间的关系.拉曼光谱和器件测试结果表明:随硅烷浓度的增加,本征层晶化率逐渐减小,直至转变为非晶硅;沉积温度高于200℃时,电池性能严重恶化;随等离子辉光功率增加,材料晶化率保持不变,而电池开路电压逐渐增大,短波光谱响应逐渐增强.在此基础上,优化了单结微晶硅电池沉积参数,得到效率为6.48% (AM0,25℃)的单结微晶硅薄膜太阳电池;并将其应用到非晶硅/微晶硅叠层电池中,在不锈钢柔性衬底上得到效率为9.28%( AM0,25℃)的叠层电池.  相似文献   

7.
采用计算流体力学软件CFD对S40反应器SiH4和C2H2不同进口流量条件下,化学气相沉积法制备碳化硅过程中反应器内温度场、速度场及碳化硅沉积浓度变化规律进行模拟分析,研究结果表明:随着进口处气体流量缓慢增加基板上的碳化硅质量分数也在逐渐增加,但当气体流量超过一定范围时会使得SiH4和C2H2气体来不及沉积于基板之上,同时如果进口气体流量过大将会使得反应区温度场分布紊乱,流入气体带走大量热量,使得反应器内难以达到合成反应所需的温度条件。通过模拟与实验,一般进气口SiH4和C2H2流量分别取9.6、3.2 mL/min。  相似文献   

8.
生产氢气的新方法--接触辉光等离子体电解制氢   总被引:2,自引:0,他引:2  
氢能源被认为是21世纪的清洁二次能源.文章介绍了一种新的制氢技术--接触辉光等离子体电解制氢.接触辉光等离子体电解制氢的基础是辉光等离子体电解.文章分析了辉光等离子体电解的非法拉第特性,阐述了辉光等离子体电解的化学反应机理;对接触辉光等离子体电解制氢技术、矿物燃料制氢技术、常规电解制氢技术进行了比较;分析了发展接触辉光等离子体电解制氢技术存在的问题.  相似文献   

9.
系统研究了非晶硅本征层的沉积温度和激光刻线功率对薄膜电池组件性能的影响。各非晶硅薄膜(P层、I层和N层)采用等离子体增强化学气相沉积(PECVD)制备。I层的光学带隙随着沉积温度的升高而降低,同时也引起电池转换效率的变化。采用傅里叶红外分析检测I层的H含量及键合方式,H含量及键合方式的变化是引起光学带隙变化的根本原因。激光刻线的形貌采用光学显微镜作微观分析,而采用不同激光功率刻线后,薄膜电池的性能也有所差异,结果显示7.5μJ是最合适的功率。  相似文献   

10.
采用射频等离子体增强化学气相沉积(RF-PECVD)技术,保持衬底温度在125℃沉积硅薄膜材料及电池,研究了硅烷浓度、辉光功率等沉积参数对材料和电池性能的影响。在125℃的低温条件下,通过优化沉积工艺,在玻璃衬底和PET塑料衬底上分别制备出效率达到6.8%和3.9%的单结非晶硅电池。在PET衬底上,将低温沉积非晶硅电池的技术应用于的叠层电池的顶电池,制备出效率为4.6%的非晶/微晶硅叠层电池。  相似文献   

11.
Woody biomass in Finland and Sweden comprises mainly four wood species: spruce, pine, birch and aspen. To study the ash, which may cause problems for the combustion device, one tree of each species were cut down and prepared for comparisons with fuel samples. Well-defined samples of wood, bark and foliage were analyzed on 11 ash-forming elements: Si, Al, Fe, Ca, Mg, Mn, Na, K, P, S and Cl. The ash content in the wood tissues (0.2–0.7%) was low compared to the ash content in the bark tissues (1.9–6.4%) and the foliage (2.4–7.7%). The woods’ content of ash-forming elements was consequently low; the highest contents were of Ca (410–1340 ppm) and K (200–1310), followed by Mg (70–290), Mn (15–240) and P (0–350). Present in the wood was also Si (50–190), S (50–200) and Cl (30–110). The bark tissues showed much higher element contents; Ca (4800–19,100 ppm) and K (1600–6400) were the dominating elements, followed by Mg (210–2400), P (210–1200), Mn (110–1100) and S (310–750), but the Cl contents (40–330) were only moderately higher in the bark than in the wood. The young foliage (shoots and deciduous leaves) had the highest K (7100–25,000 ppm), P (1600–5300) and S (1100–2600) contents of all tissues, while the shoots of spruce had the highest Cl contents (820–1360) and its needles the highest Si content (5000–11,300). This paper presented a new approach in fuel characterization: the method excludes the presence of impurities, and focus on different categories of plant tissues. This made it possible to discuss the contents of ash element in a wide spectrum of fuel-types, which are of large importance for the energy production in Finland and Sweden.  相似文献   

12.
正1 ABSTRACT To reduce the effect of global warming on our climate,the levels of CO2emissions should be reduced.One way to do this is to increase the efficiency of electricity production from fossil fuels.This will in turn reduce the amount of CO2emissions for a given power output.Using US practice for efficiency calculations,then a move from a typical US plant running at 37%efficiency to a 760℃/38.5 MPa(1 400/5 580 psi)plant running at 48%efficiency would reduce CO2emissions by 170kg/MW.hr or 25%.  相似文献   

13.
Performance assessment of some ice TES systems   总被引:1,自引:0,他引:1  
In this paper, a performance assessment of four main types of ice storage techniques for space cooling purposes, namely ice slurry systems, ice-on-coil systems (both internal and external melt), and encapsulated ice systems is conducted. A detailed analysis, coupled with a case study based on the literature data, follows. The ice making techniques are compared on the basis of energy and exergy performance criteria including charging, discharging and storage efficiencies, which make up the ice storage and retrieval process. Losses due to heat leakage and irreversibilities from entropy generation are included. A vapor-compression refrigeration cycle with R134a as the working fluid provides the cooling load, while the analysis is performed in both a full storage and partial storage process, with comparisons between these two. In the case of full storage, the energy efficiencies associated with the charging and discharging processes are well over 98% in all cases, while the exergy efficiencies ranged from 46% to 76% for the charging cycle and 18% to 24% for the discharging cycle. For the partial storage systems, all energy and exergy efficiencies were slightly less than that for full storage, due to the increasing effect wall heat leakage has on the decreased storage volume and load. The results show that energy analyses alone do not provide much useful insight into system behavior, since the vast majority of losses in all processes are a result of entropy generation which results from system irreversibilities.  相似文献   

14.
The purpose of this paper is to illustrate the advantages of the direct surface-curvature distribution blade-design method, originally proposed by Korakianitis, for the leading-edge design of turbine blades, and by extension for other types of airfoil shapes. The leading edge shape is critical in the blade design process, and it is quite difficult to completely control with inverse, semi-inverse or other direct-design methods. The blade-design method is briefly reviewed, and then the effort is concentrated on smoothly blending the leading edge shape (circle or ellipse, etc.) with the main part of the blade surface, in a manner that avoids leading-edge flow-disturbance and flow-separation regions. Specifically in the leading edge region we return to the second-order (parabolic) construction line coupled with a revised smoothing equation between the leading-edge shape and the main part of the blade. The Hodson–Dominy blade has been used as an example to show the ability of this blade-design method to remove leading-edge separation bubbles in gas turbine blades and other airfoil shapes that have very sharp changes in curvature near the leading edge. An additional gas turbine blade example has been used to illustrate the ability of this method to design leading edge shapes that avoid leading-edge separation bubbles at off-design conditions. This gas turbine blade example has inlet flow angle 0°, outlet flow angle −64.3°, and tangential lift coefficient 1.045, in a region of parameters where the leading edge shape is critical for the overall blade performance. Computed results at incidences of −10°,   −5°,   +5°,   +10° are used to illustrate the complete removal of leading edge flow-disturbance regions, thus minimizing the possibility of leading-edge separation bubbles, while concurrently minimizing the stagnation pressure drop from inlet to outlet. These results using two difficult example cases of leading edge geometries illustrate the superiority and utility of this blade-design method when compared with other direct or inverse blade-design methods.  相似文献   

15.
Chlamydomonas reinhardtii cc124 and Azotobacter chroococcum bacteria were co-cultured with a series of volume ratios and under a variety of light densities to determine the optimal culture conditions and to investigate the mechanism by which co-cultivation improves H2 yield. The results demonstrated that the optimal culture conditions for the highest H2 production of the combined system were a 1:40 vol ratio of bacterial cultures to algal cultures under 200 μE m?2 s?1. Under these conditions, the maximal H2 yield was 255 μmol mg?1 Chl, which was approximately 15.9-fold of the control. The reasons for the improvement in H2 yield included decreased O2 content, enhanced algal growth, and increased H2ase activity and starch content of the combined system.  相似文献   

16.
Natural gas is a fossil fuel that has been used and investigated extensively for use in spark-ignition (SI) and compression-ignition (CI) engines. Compared with conventional gasoline engines, SI engines using natural gas can run at higher compression ratios, thus producing higher thermal efficiencies but also increased nitrogen oxide (NOx) emissions, while producing lower emissions of carbon dioxide (CO2), unburned hydrocarbons (HC) and carbon monoxide (CO). These engines also produce relatively less power than gasoline-fueled engines because of the convergence of one or more of three factors: a reduction in volumetric efficiency due to natural-gas injection in the intake manifold; the lower stoichiometric fuel/air ratio of natural gas compared to gasoline; and the lower equivalence ratio at which these engines may be run in order to reduce NOx emissions. High NOx emissions, especially at high loads, reduce with exhaust gas recirculation (EGR). However, EGR rates above a maximum value result in misfire and erratic engine operation. Hydrogen gas addition increases this EGR threshold significantly. In addition, hydrogen increases the flame speed of the natural gas-hydrogen mixture. Power levels can be increased with supercharging or turbocharging and intercooling. Natural gas is used to power CI engines via the dual-fuel mode, where a high-cetane fuel is injected along with the natural gas in order to provide a source of ignition for the charge. Thermal efficiency levels compared with normal diesel-fueled CI-engine operation are generally maintained with dual-fuel operation, and smoke levels are reduced significantly. At the same time, lower NOx and CO2 emissions, as well as higher HC and CO emissions compared with normal CI-engine operation at low and intermediate loads are recorded. These trends are caused by the low charge temperature and increased ignition delay, resulting in low combustion temperatures. Another factor is insufficient penetration and distribution of the pilot fuel in the charge, resulting in a lack of ignition centers. EGR admission at low and intermediate loads increases combustion temperatures, lowering unburned HC and CO emissions. Larger pilot fuel quantities at these load levels and hydrogen gas addition can also help increase combustion efficiency. Power output is lower at certain conditions than diesel-fueled engines, for reasons similar to those affecting power output of SI engines. In both cases the power output can be maintained with direct injection. Overall, natural gas can be used in both engine types; however further refinement and optimization of engines and fuel-injection systems is needed.  相似文献   

17.
A chemical reactor for the steam-gasification of carbonaceous particles (e.g. coal, coke) is considered for using concentrated solar radiation as the energy source of high-temperature process heat. A two-phase reactor model that couples radiative, convective, and conductive heat transfer to the chemical kinetics is applied to optimize the reactor geometrical configuration and operational parameters (feedstock's initial particle size, feeding rates, and solar power input) for maximum reaction extent and solar-to-chemical energy conversion efficiency of a 5 kW prototype reactor and its scale-up to 300 kW. For the 300 kW reactor, complete reaction extent is predicted for an initial feedstock particle size up to 35 μm at residence times of less than 10 s and peak temperatures of 1818 K, yielding high-quality syngas with a calorific content that has been solar-upgraded by 19% over that of the petcoke gasified.  相似文献   

18.
The physical aspects of the activation energy, in higher and high temperatures, of the metal creep process were examined. The research results of creep-rupture in a uniaxial stress state and the criterion of creep-rupture in biaxial stress states, at two temperatures, are then presented. For these studies creep-rupture, taking case iron as an example the energy and pseudoenergy activation was determined. For complex stress states the criterion of creep-rupture was taken to be Sdobyrev's, i.e. σred = σ1 β + (1 − β)σi, where: σ1-maximal principal stress, σi-stress intensity, β-material constant (at variable temperature β = β(T)). The methods of assessment of the material ageing grade are given in percentages of ageing of new material in the following mechanical properties: 1) creep strength in uniaxial stress state, 2) activation energy in uniaxial stress state, 3) criterion creep strength in complex stress states, 4) activation pseudoenergy in complex stress states. The methods 1) and 3) are the relatively simplest because they result from experimental investigations only at nominal temperature of the structure work, however, for methods 2) and 4) it is necessary to perform the experimental investigations at least at two temperatures.  相似文献   

19.
Hydrogen was produced from primary sewage biosolids via mesophilic anaerobic fermentation in a continuously fed bioreactor. Prior to fermentation the sewage biosolids were heated to 70 °C for 1 h to inactivate methanogens and during fermentation a cellulose degrading enzyme was added to improve substrate availability. Hydraulic retention times (HRT) of 18, 24, 36 and 48 h were evaluated for the duration of hydrogen production. Without sparging a hydraulic retention time of 24 h resulted in the longest period of hydrogen production (3 days), during which a hydrogen yield of 21.9 L H2 kg−1 VS added to the bioreactor was achieved. Methods of preventing the decline of hydrogen production during continuous fermentation were evaluated. Of the techniques evaluated using nitrogen gas to sparge the bioreactor contents proved to be more effective than flushing just the headspace of the bioreactor. Sparging at 0.06 L L min−1 successfully prevented a decline in hydrogen production and resulted in a yield of 27.0  L H2 kg−1 VS added, over a period of greater than 12 days or 12 HRT. The use of sparging also delayed the build up of acetic acid in the bioreactor, suggesting that it serves to inhibit homoacetogenesis and thus maintain hydrogen production.  相似文献   

20.
汽轮机数字电液调节系统挂闸异常的技术完善   总被引:1,自引:0,他引:1  
分析了200MW汽轮机数字电液调节系统在运行中存在的挂闸异常问题,采取了相应的技术处理措施,且运行实践效果良好。  相似文献   

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