Simulation and fabrication of piezoresistive membrane type MEMS strain sensors

Two piezoresistive (n-polysilicon) strain sensors on a thin Si₃N₄/SiO₂ membrane with improved sensitivity were successfully fabricated by using MEMS technology. The primary difference between the two designs was the number of strips of the polysilicon patterns. For each design, a doped n-polysilicon sensing element was patterned over a thin 3 μm Si₃N₄/SiO₂ membrane. A 1000×1000 μm² window in the silicon wafer was etched to free the thin membrane from the silicon wafer. The intent of this design was to fabricate a flexible MEMS strain sensor similar in function to a commercial metal foil strain gage. A finite element model of this geometry indicates that strains in the membrane will be higher than strains in the surrounding silicon. The values of nominal resistance of the single strip sensor and the multi-strip sensor were 4.6 and 8.6 kΩ, respectively. To evaluate thermal stability and sensing characteristics, the temperature coefficient of resistance [TCR=(ΔR/R₀)/ΔT] and the gage factor [GF=(ΔR/R₀)/] for each design were evaluated. The sensors were heated on a hot plate to measure the TCR. The sensors were embedded in a vinyl ester epoxy plate to determine the sensor sensitivity. The TCR was 7.5×10⁻⁴ and 9.5×10⁻⁴/°C for the single strip and the multi-strip pattern sensors. The gage factor was as high as 15 (bending) and 13 (tension) for the single strip sensor, and 4 (bending) and 21 (tension) for the multi-strip sensor. The sensitivity of these MEMS sensors is much higher than the sensitivity of commercial metal foil strain gages and strain gage alloys.     

Calorimetric hydrocarbon sensor for automotive exhaust applications

We have developed a calorimetric sensor utilizing a thermoelectric device supported on a planar alumina substrate. By using a highly selective carbon monoxide (CO) oxidation catalyst and a non-selective platinum (Pt) catalyst, the device can be built to detect either CO or hydrocarbons with high selectivity. The CO oxidation catalyst comprises lead-modified platinum and exhibits excellent selectivity over the 200–400 °C temperature range. The thermoelectric device consists of two thick film junctions made of niobium pentoxide (Nb₂O₅)-doped titanium dioxide (TiO₂) and a lithiated nickel (Ni), which are supported on a planar alumina substrate. The thermocouple detects the difference in temperature due to different catalytic reactions over the two junctions and shows a high output signal because of the high Seebeck coefficient of Nb₂O₅-doped TiO₂ (−400 μV/°C). In gas bench tests, the sensor has a linear output of 0–2.75 mV over 0–1000 ppm of propylene and a response time of 2.5 s (at 90% of amplitude) at a gas temperature of 350 °C. An engine dynamometer evaluation shows that the response of the sensor parallels the change in CO and hydrocarbon constituent concentrations when the engine air-to-fuel ratio is varied.     

Micromachined sol–gel carbon nanotube/SnO2 nanocomposite hydrogen sensor

A novel micromachined single wall carbon nanotube (SWCNT) reinforced nanocrystalline tin dioxide gas sensor has been developed. The presence of SWCNT in SnO₂ matrix was realized by a spin-on sol–gel process. The SWCNT/SnO₂ sensor's sensitivity for hydrogen detection has greatly increased by a factor of three, in comparison to that of pure SnO₂ sensor. The novel sensor also lowers the working temperature, response time and recovery time. The greatly improved performances are mainly attributed to the effective gas accessing nano passes through SWCNT plus the smaller distance between adjacent gas accessing boundaries formed by the distribution of tiny SWCNTs. Therefore, both the spatial requirement (D ≤ 2L, D is the distance between adjacent gas accessing boundaries and L is the space charge layer thickness) and surficial requirement (adequate gas activation area) are met and the maximum inherent sensitivity of SnO₂ is achieved.     

Effect of surface modification on NO2 sensing properties of SnO2 varistor-type sensors

NO₂ sensing properties of SnO₂-based varistor-type sensors have been investigated in the temperature range of 400-650°C and in the NO₂ concentration range of 15–30 ppm. Pure SnO₂ exhibited a weak nonlinear I–V characteristic in air, but clear nonlinearity in NO₂ at 450°C. The breakdown voltage of SnO₂ shifted to a high electric field upon exposure to NO₂ and the magnitude of the shift was well correlated with NO₂ concentration. Thus, SnO₂ exhibited some sensitivity to NO₂ as a varistor-type sensor. When SnO₂ particles coated with a SiO₂ thin film were used as a raw material for fabricating a varistor, the breakdown voltage in air was approximately the double that of pure SnO₂ and the sensitivity to 15 ppm NO₂ was enhanced slightly. However, the sensitivity to 30 ppm NO₂ decreased. The Cr₂O₃-loading on SnO₂ also led to an increase in the breakdown voltage in air, but the Cr₂O₃ addition was not effective for promoting the NO₂ sensitivity under the present experimental conditions.     

Heaps and heapsort on secondary storage

A heap structure designed for secondary storage is suggested that tries to make the best use of the available buffer space in primary memory. The heap is a complete multi-way tree, with multi-page blocks of records as nodes, satisfying a generalized heap property. A special feature of the tree is that the nodes may be partially filled, as in B-trees. The structure is complemented with priority-queue operations insert and delete-max. When handling a sequence of S operations, the number of page transfers performed is shown to be O(∑_{i = 1}^S(1/P) log_(M/P)(N_i/P)), where P denotes the number of records fitting into a page, M the capacity of the buffer space in records, and N_i, the number of records in the heap prior to the ith operation (assuming P 1 and S> M c · P, where c is a small positive constant). The number of comparisons required when handling the sequence is O(∑_{i = 1}^S log₂ N_i). Using the suggested data structure we obtain an optimal external heapsort that performs O((N/P) log_(M/P)(N/P)) page transfers and O(N log₂ N) comparisons in the worst case when sorting N records.     

Integrated optical pH sensor using replicated chirped grating coupler sensor chips

Integrated optical sensor chips suitable for high-resolution pH measurements are presented. The pH-sensitive swelling of a polymer membrane is detected by refractometry using a compact multi-channel sensor module. The signal transduction is achieved by means of chirped grating couplers which allow simple yet high functionality sensor modules to be built. The experiments have been performed with high sensitivity replicated polycarbonate TiO₂ waveguide sensor chips coated with an ultrathin photopatterned hydrogel membrane having functional groups which reversibly change from the neutral state to a charged state upon acidification. A resolution δpH <±1.1×10⁻⁴ in terms of the pH (at pH 7.5) has been obtained in a dual-channel module with size 10×10×10 cm³.     

H2 sensors using Fe2O3-based thin film

This paper describes the fabrication procedure as well as the sensing properties of new hydrogen sensors using Fe₂O₃-based thin film. The film is deposited by the r.f. sputtering technique; its composition is Fe₂O₃, TiO₂(5 mol%) and MgO(0–12 mol%). The conductance change of the film is examined in various test gases. The sensitivity to hydrogen gas is enhanced by treating the film in vacuum at 550 °C for 4 h and then in air at 700 °C for 2 h. The sputtered film is identified to be polycrystalline -Fe₂O₃ based on X-ray diffraction patterns. However, the surface layer is considered to be changed to Fe₃O₄ after heating in vacuum and then to γ-Fe₂O₃ after heating in air. The film is thus a multilayer one with a thin γ-Fe₂O₃ layer on a -Fe₂O₃ layer. The sensing mechanism is discussed based on measurements of the physical properties of the film, such as the temperature dependence of the sensor conductance, X-ray diffraction pattern, surface morphology, RBS (Rutherford back-scattering) spectrum and optical absorption spectrum.     

Enhanced oxygen detection using porous polymeric gratings with integrated recognition elements

The development of ordered porous nanostructured materials, such as polymeric Bragg gratings, offers an attractive platform for the encapsulation of chemical and biological recognition elements. To date, various types of polymer gratings have been developed with several demonstrated applications in switching, lasing, and display devices. Here, we focus on a new class of holographically ordered porous polymer (HOPP) gratings that are an extension of holographic polymer dispersed liquid crystal (H-PDLC) structures. We present biochemical sensing using HOPP gratings that include a volatile solvent as the phase separation fluid. The resulting HOPP gratings are simple to fabricate, chromatically tunable, highly versatile, and can be employed as a general template for the encapsulation of recognition elements. As a prototype, we developed an oxygen (O₂) sensor by encapsulating the fluorophore (tris(4,7-diphenyl-1,10-phenathroline)ruthenium(II) within these nanostructured materials. The resulting O₂ sensors performed across the full-scale range (0–100%) of oxygen in nitrogen, with a response time of less than 1 s. The O₂ sensor system uses a LED excitation source and a silicon photodiode detector. The ability of these HOPP reflection gratings to transmit or reflect a particular wavelength range, based on the grating spacing, enables us to selectively enhance the detection efficiency for the wavelengths of interest.     

Fabrication and characterization of low temperature sintering PMN–PZN–PZT step-down multilayer piezoelectric transformer

For the fabrication as step-down multilayer piezoelectric transformer, piezoelectric properties of Pb(Mg_1/3Nb_2/3)O₃–Pb(Zn_1/3Nb_2/3)O₃–Pb(Zr_0.52Ti_0.48)O₃ (PMN–PZN–PZT) ceramics were optimized by ZnO–Li₂CO₃ (ZL) and Pb₃O₄ content. Effects of the additions on the structure, bulk density and electrical properties of ceramics were investigated. The results revealed that the proper additions of ZL with Pb₃O₄ content could modify the electrical properties of the PMN–PZN–PZT ceramics. The composition sintered at 995 °C with 0. 01 wt.% ZL and 0.10 wt.% Pb₃O₄ content showed higher values, which were listed as follows: d₃₃ = 256 pC/N, K_p = 0.60, Q_m = 1910, _r = 1032, tan δ = 0.0070 and r = 2.09 Ω. In addition, the step-down piezoelectric transformers with optimized PMN–PZN–PZT composites were fabricated and the characteristics as the output power and resistance loads were measured. Meanwhile, the step-down piezoelectric transformers sintered at 995 °C showed the favorable characteristics with a higher gain G of 0.204 and a lower temperature rise of 6 °C when the output power was 5 W, and the driving frequency were approximately constant (≈126 kHz) when the output power was from 5 to 13 W. Moreover, the maximum efficiency (90.2%) was obtained at load resistance of 10 Ω.     

High-resolution high-voltage sensor based on SAW

A surface acoustic wave (SAW)-based high-voltage sensor is described. The sensor consists of a SAW oscillator fabricated on a 10 mm × 10 mm 128° rotated Y-cut, X-propagating LiNbO₃ substrate. The voltage is applied to electrodes on the substrate, and the resulting electric field changes the propagation time of the SAW. The propagation time is directly related to the output frequency of the SAW oscillator. The high-voltage sensor offers a small-sized high-voltage measurement device with several attractive features: a high resolution (better than 0.2 V up to 2.4 kV, better than 0.4 V for higher voltages), a large range (−10 to +10 kV), a high input impedance (> 10¹³ ω) and a low input capacitance (< 10 pF). The sensitivity amounts to 16 Hz V⁻¹.     

Ceria-doped SnO2 sensor highly selective to ethanol in humid air

In our earlier study, we reported that at 300 °C, a 2.0 wt.% CeO₂-doped SnO₂ sensor is highly selective to ethanol in the presence of CO and CH₄ gases [F. Pourfayaz, A. Khodadadi, Y. Mortazavi, S.S. Mohajerzadeh, CeO₂ doped SnO₂ sensor selective to ethanol in presence of CO, LPG and CH₄, Sens. Actuators B 108 (2005) 172–176]. In the present investigation, we report the influence of ambient air humidity on the ethanol selective SnO₂ sensor doped with 2.0 wt.% CeO₂. Maximum response to ethanol occurs at 300 °C which decreases with the relative humidity. The relative humidity was changed from 0 to 80% for different ambient air temperatures of 30, 40 and 50 °C and the response of the sensor was monitored in a 250–450 °C temperature range. As the relative humidity in 50 °C air increased from 0 to 30%, a 15% reduction in the maximum response to ethanol was observed. A further increase in the relative humidity no longer reduced the response significantly. The presence of humidity improved the sensor response to both CO and CH₄ up to 350 °C after which the extent of improvement became smaller and at 450 °C was almost diminished. The sensor is shown to be quite selective to ethanol in the presence of humid air containing CO and CH₄. The selectivity passes a maximum at 300 °C; however it declines at higher operating temperatures.     

TiO2 thin films from titanium butoxide: Synthesis, Pt addition, structural stability, microelectronic processing and gas-sensing properties

TiO₂ thin films were prepared by spin-coating of a Ti butoxide-derived sol onto oxidized silicon wafers, followed by a heat-treatment at temperatures ranging from 500 to 800 °C. The film thickness after heat-treatment at 500 °C was 50 nm. Pt addition, with a Pt:Ti nominal atomic ratio ranging from 0.01 to 0.1, was achieved by adding solutions of Pt(II) acetylacetonate to the TiO₂ sols. The thin films were investigated by X-ray diffraction, evidencing that Pt promoted the structural transformation of the starting anatase phase of TiO₂ to rutile, with a more enhanced effect with increasing the Pt concentration and/or the heat-treatment temperature. High-resolution transmission electron microscopy evidenced that, when a Pt:Ti atomic ratio of 0.05 and a heat treatment at 500 °C were used, the TiO₂ contained both anatase and rutile phases and interspersed Pt nanocrystals (2–3 nm). This result allowed attributing the structural transformation in TiO₂ to the strain created by the Pt nanocrystals—a conclusion which was further corroborated by the observation that Pd-modified films, prepared under similar conditions, were only composed of anatase TiO₂ and did not contain any Pd nanocrystals. The films heat-treated at 500 °C were able to withstand a full microelectronic processing sequence, including dry etching for gas sensors sensitive area definition, Ti/Pt contact formation, and heater processing on the backside of the sensor substrates. H₂ gas-sensing tests evidenced that the anatase TiO₂ phase was much more sensitive than the rutile one. The presence of Pt further enhanced the gas-sensing properties, lowering the optimum sensor operation temperature to about 330 °C and allowing for the detection of a minimum H₂ concentration of about 1000 ppm.     

Impedancemetric gas sensor based on Pt and WO3 co-loaded TiO2 and ZrO2 as total NOx sensing materials

Pt-loaded metal oxides [WO₃/ZrO₂, MO_x/TiO₂ (MO_x = WO₃, MoO₃, V₂O₅), WO₃ and TiO₂] equipped with interdigital Au electrodes have been tested as a NO_x (NO and NO₂) gas sensor at 500 °C. The impedance value at 4 Hz was used as a sensing signal. Among the samples tested, Pt-WO₃/TiO₂ showed the highest sensor response magnitude to NO. The sensor was found to respond consistently and rapidly to change in concentration of NO and NO₂ in the oxygen rich and moist gas mixture at 500 °C. The 90% response and 90% recovery times were as short as less than 5–10 s. The impedance at 4 Hz of the present device was found to vary almost linearly with the logarithm of NO_x (NO or NO₂) concentration from 10 to 570 ppm. Pt-WO₃/TiO₂ showed responses to NO and NO₂ of the same algebraic sign and nearly the same magnitude, while Pt/WO₃ and WO₃/TiO₂ showed higher response to NO than NO₂. The impedance at 4 Hz in the presence of NO for Pt-WO₃/TiO₂ was almost equal at any O₂ concentration examined (1–99%), while in the case of Pt/WO₃ and WO₃/TiO₂ the impedance increased with the oxygen concentration. The features of Pt-WO₃/TiO₂ are favorable as a NO_x sensor that can monitor and control the NO_x concentration in automotive exhaust. The effect of WO₃ loading of Pt-WO₃/ZrO₂-based sensor is studied to discuss the role of surface W-OH sites on the NO_x sensing.     

Fast evaluation of radial basis functions: I

This paper describes some new techniques for the rapid evaluation and fitting of radial basic functions. The techniques are based on the hierarchical and multipole expansions recently introduced by several authors for the calculation of many-body potentials. Consider in particular the N term thin-plate spline, s(x) = Σ_j=1^N d_jφ(x−x_j), where φ(u) = |u|²log|u|, in 2-dimensions. The direct evaluation of s at a single extra point requires an extra O(N) operations. This paper shows that, with judicious use of series expansions, the incremental cost of evaluating s(x) to within precision ε, can be cut to O(1+|log ε|) operations. In particular, if A is the interpolation matrix, a_i,j = φ(x_i−x_j, the technique allows computation of the matrix-vector product Ad in O(N), rather than the previously required O(N²) operations, and using only O(N) storage. Fast, storage-efficient, computation of this matrix-vector product makes pre-conditioned conjugate-gradient methods very attractive as solvers of the interpolation equations, Ad = y, when N is large.     

Titania NOx sensors for exhaust monitoring

Oxide semiconductors have been examined to develop NO_x sensors for exhaust monitoring. Titania doped with trivalent elements, such as Al³⁺, Sc³⁺, Ga³⁺ or In³⁺, has a good sensitivity and selectivity to NO between 450 and 550 °C, and shows rapid response. A sensor probe for monitoring exhaust NO_x has been fabricated. Many kinds of interference gases, such as C₃H₆, CO and SO₂, have been found to have only a slight influence on the sensor response to NO. The influence of O₂ and H₂O is also negligible, except for the cases of 0% H₂O and fuel-rich conditions. In accordance with these results, the sensor probe operates satisfactority in the exhaust gas of various combustion conditions without interference from the various kinds of gas species in the exhaust gases.     

Gas-sensing property and mechanism of CaxLa1−xFeO3 ceramics

LaFEO₃ and Ca_xLa_1−xFeO₃ ceramic powders have been prepared by the coprecipitation method from La(NO₃)₃, Fe(NO₃)₃ and Ca(NO₃)₂ aqueous solutions. The orthorhombic perovskite phases of LaFeO₃ and Ca_xLa_1−xFeO₃ are characterized by X-ray diffraction patterns. The sensors fabricated with those powders have high sensitivity to alcohol. Partial substitution of La³⁺ in LaFeO₃ with Ca²⁺ can enhance the sensitivity of the materials to reducing gases. The resistance of an LaFeO₃ sensor in air, vacuum and alcohol-containing air has been measured. Complex impedance spectroscopy has been used to try and analyse the gas-sensing mechanism. According to the experimental results, it can be deduced that the surface adsorptive and lattice oxygen govern the sensing properties of LaFeO₃ and Ca_xLa_1−xFeO₃ ceramics.     

Hydrogen sensor based on antimonium pentoxide-phosphoric acid solid electrolyte

A solid composite electrolyte with high proton conductivity based on antimonium pentoxide with additives of phosphoric acid has been obtained. A potentiometric solid-state gas sensor using this electrolyte has been developed for detecting small amounts of hydrogen (10–2000 ppm) in gas mixtures at ambient temperature. The sensor consists of the reference electrode: Ag or Ag/(Ag + Ag₂SO₄), the solid composite electrolyte and H₂-sensitive electrode: Pt or Pd. The electromotive force (e.m.f.) of the sensor varies logarithmically with H₂ concentration for hydrogen partial pressures in the range 100–2000 ppm and depends on the oxygen partial pressure. The slope of e.m.f.-log(pH₂) dependence is 170 and 200 mV for Pt and Pd, respectively, which exceeds the Nernst value, presumably due to the formation of a mixed potential. The sensor can operate at a wide range (20–95%) of a relative humidity.     

High-performance solid-electrolyte SOx sensor using MgO-stabilized zirconia tube and Li2SO4---CaSO4---SiO2 auxiliary phase

Solid-electrolyte-based electrochemical SO_x sensors fabricated with MgO-stabilized zirconia and Li₂SO₄---CaSO₄---SiO₂ (4:4:2 in molar ratio) exhibit fairly good sensing characteristics for 2–200 ppm SO₂ in air at 600–750 °C, with the e.m.f. responses following the Nernst equation for the two-electron reduction of SO₂. The 90% response and 90% recovery times to 20 ppm SO₂ are 10 s and 7 min at 650 °C, and 10 s and 3 min at 700 °C, respectively. It is further found that the sensor exhibits excellent selectivity to SO_x in the coexistence of CO₂ and NO_x, and good long-term stability. The sensor is simple in structure, easy to prepare, and quite tough chemically and mechanically. These features should ensure practical use for this SO_x sensor.     

Resolvability and the upper dimension of graphs

For an ordered set W = {w₁, w₂,…, w_k} of vertices and a vertex v in a connected graph G, the (metric) representation of v with respect to W is the k-vector r(v | W) = (d(v, w₁), d(v, w₂),…, d(v, w_k)), where d(x, y) represents the distance between the vertices x and y. The set W is a resolving set for G if distinct vertices of G have distinct representations. A new sharp lower bound for the dimension of a graph G in terms of its maximum degree is presented.

A resolving set of minimum cardinality is a basis for G and the number of vertices in a basis is its (metric) dimension dim(G). A resolving set S of G is a minimal resolving set if no proper subset of S is a resolving set. The maximum cardinality of a minimal resolving set is the upper dimension dim⁺(G). The resolving number res(G) of a connected graph G is the minimum k such that every k-set W of vertices of G is also a resolving set of G. Then 1 ≤ dim(G) ≤ dim⁺(G) ≤ res(G) ≤ n − 1 for every nontrivial connected graph G of order n. It is shown that dim⁺(G) = res(G) = n − 1 if and only if G = K_n, while dim⁺(G) = res(G) = 2 if and only if G is a path of order at least 4 or an odd cycle.

The resolving numbers and upper dimensions of some well-known graphs are determined. It is shown that for every pair a, b of integers with 2 ≤ a ≤ b, there exists a connected graph G with dim(G) = dim⁺(G) = a and res(G) = b. Also, for every positive integer N, there exists a connected graph G with res(G) − dim⁺(G) ≥ N and dim⁺(G) − dim(G) ≥ N.     

Characterization of ozone sensors based on WO3 reactively sputtered films: influence of O2 concentration in the sputtering gas, and working temperature

We report on electrical responses of tungsten oxide thin film ozone sensors based on a tungsten trioxide (WO₃)/tin oxide (SiO₂)/Si structure with interdigitated Pt electrodes. The influence of O₂ concentration in the sputtering gas and working temperature of the sensor are investigated. Sensitivity to ozone increases with O₂ content in the sputtering gas. It reaches its highest value for sensors fabricated with 50% O₂. For these sensors, the best ozone sensitivity and shortest response and recovery times are obtained at a working temperature of 523 K. Ozone sensitivity is compared to other ozone sensors.