高速相位式激光测距数字鉴相方法仿真与实现

为实现高速、高精度相位式激光测距鉴相,根据数字相关法、数字同步解调法、频域数字鉴相法和全相位FFT法的鉴相原理,基于仿真考察了在白噪声、频率偏移等因素影响下的鉴相性能。仿真结果证明,在高速测量下(500 kHz),全相位FFT法优于其他方法。为应用于高精度相位式激光测距原理样机,设计全相位FFT法的FPGA信号处理方案,利用傅里叶变换共轭对称性从而实现了高速实时鉴相。实验数据表明:在500 kHz测距速率下,信噪比为40 dB,频率偏移0.01时,鉴相精度为0.09°;调制频率为100 MHz时,测距精度为0.38 mm。因此,全相位FFT鉴相法适用于高速、高精度相位差测量,提出的实现方案具有实际意义。     

矢量内积法高速相位式激光测距技术

测量速度和测量精度是相位式激光测距系统的两个重要指标。针对高速高精度测距需求,研究了基于矢量内积(Vector Inner Product, VIP)法的高速数字鉴相方法,从鉴相计算的点数、鉴相计算速度和鉴相精度等方面对VIP法的鉴相性能进行了仿真分析和实验测试,并与传统的数字频域鉴相法(Discrete Fourier Transform, DFT)进行了性能对比。仿真和实验结果表明,VIP法具有更高的鉴相速度和鉴相精度,当信号调制频率为50 MHz时,基于高速采样板卡实测得到的鉴相精度优于0.1°,测距精度0.2 mm以内,相同计算点数VIP法的鉴相处理速度是DFT法的3倍。研究结果表明,VIP法具有鉴相精度高、鉴相速度快的优点,适用于高速高精度激光测距系统。     

相位式激光测距全相位谱分析鉴相算法

为降低相位式激光测距的鉴相偏差,以余弦信号为对象深入研究全相位谱分析鉴相的性能。将余弦信号分解为指数形式进行频谱变换,得出负频率会引起谱分析鉴相偏差,但全相位谱分析的频谱泄漏远小于传统傅里叶变换(FFT)法,仿真时鉴相偏差降为后者的1‰。从信噪比增益角度研究窗函数对鉴相精确度的影响,分析表明,归一化频率偏移量绝对值小于0.3时,采用矩形窗的全相位谱分析鉴相方差最小,可达克拉美罗下限的1.3倍。实验结果表明,在测距系统中可忽略全相位谱分析鉴相的偏差,当信噪比为34 dB时,每秒百万次鉴相的精确度为3.3 mrad,测距精确度达1 mm,全相位谱分析适用于高精确度相位式激光测距。     

基于欠采样的激光测距数字鉴相方法

欠采样方法为实现全数字化接收、降低激光测距系统复杂性提供了有效途径。针对传统欠采样数字同步解调法引入干扰大的缺点,为提高系统的测量精度,提出了欠采样频域谱分析鉴相法。方法基于Nyquist采样谱分析鉴相思想,通过对欠采样后搬移到低频的频谱成分进行分析获取相位信息实现鉴相,在抵抗干扰方面具有较好的性能。在加入信噪比40 dB、杂散频率、0.1 MHz频率偏移、2次谐波的综合影响因素后的仿真结果表明,在1 MHz测距速率下,欠采样谱分析鉴相法精度为0.13,调制频率80 MHz时测距精度为0.68 mm,优于传统的欠采样数字同步解调法。因此,欠采样谱分析法更适用于高速、高精度的数字化相位差测量,提出的实现方案具有实际意义。     

应用欠采样原理提高相位式激光测距精度

在激光测距中,测程和测量精度一直都是一对矛盾体.在保证测程的同时,提高测量精度是本次设计的关键所在.相位式激光测距的传统思想是将高频信号进行混频之后得到频率较低的差频信号,使用FFT得到相位,但是信号经混频后会带来幅度的衰减和相位的偏移.为了解决该问题,提出一个新的思路,利用欠采样技术与同步检测原理改进测相方法,降低数据处理的复杂度,提高相位检测的精度.用MATLAB仿真有白噪声和其他干扰信号存在时欠采样技术测量相位的精度,经过误差分析之后进行改进并与传统的方法进行了比较.     

对机械手定位的全相位傅里叶变换相位式激光测距系统

针对机械手中用于标定以及空间定位的激光测距装置测距精度不足、容易受工作环境等因素的影响，进而导致测量不准确，影响机械手空间标定以及定位的缺点，提出了一种基于全相位傅里叶变换（apFFT）的相位式激光测距系统。该系统采用apFFT算法来进行鉴相，进而得出实时测量的距离。相比于传统的基于傅里叶变换的相位式激光测距方法，该方法能够有效抑制实际应用中由于多种因素导致的频谱泄露现象。实验结果表明，该系统具有良好的稳定性和抑制频谱泄露能力，同时该系统的平均定位精度可以达到1 mm，满足实际工业生产制造的需求。     

基于apFFT的I/Q通道幅相误差校正算法

在I/Q正交采样时,I/Q正交性幅相误差需要补偿。经幅相误差建模,提出利用全相位FFT(all-phase FFT,apFFT)简单、有效地校正I/Q正交性幅相误差的新方法。在分析apFFT输入数据形式的基础上,与以往仿真直接设置-(N-1)～N-1点数据作为apFFT输入不同,提出利用矩阵束前向外推得到apFFT的输入数据。经apFFT处理后,求取I/Q通道信号的初相位误差即为相位误差,求传统FFT谱峰之比即为幅度误差。通过计算机仿真验证了前向外推的可靠性以及apFFT求I/Q正交性幅相误差的精度,在3 dB信噪比,镜像抑制度达到60 dB。     

干涉解调鉴相测距法

针对相位法激光测距技术中其测量精度与测量范围 不能够同时兼顾问题,提出干涉解调鉴相测距系统。经过理论推导与实验验证表明,干涉解 调鉴相测距系统中的 偏振光干涉解调的方法能够代替传统的模拟鉴相系统,简化了模拟鉴相电路,减小了鉴相系 统中的附加相 移噪声;小步进改变调制频率扫频的方法能够解决相位测距系统中的模糊距离问题;干涉解 调鉴相测距系 统的测距精度能够达到10－5量级。     

基于Matlab的相位式激光测距研究

基于相位式激光测距系统的基本原理和鉴相方法,采用双调制频率的方法解决了测量距离和测距精度之间的矛盾,采用差频鉴相的方法减少电路复杂度。首次基于模块化的思想,运用Matlab的Simulink工具实现了系统的原理分析,对频域数字测相、数字同步解调测相法和自动数字测相法进行了比较。从理论上证明了实现一个高精度、快速相位式激光测距系统的可行性,为下一步实际设备研制奠定了基础。     

基于欠采样谱分析的激光拍频相位式测距方法

介绍了一种高精度相位式测距方法,载波通过双频氦氖激光器加偏振器产生1.08 GHz光强调制的拍频信号来实现,以克服半导体激光器的调制带宽限制,从而提高测距精度。为降低高速ADC实现难度,根据带通抽样定理,采用欠采样的方法采集波形数据,分析了其理论依据;然后通过全相位谱分析法对采样数据进行鉴相,并重点分析了鉴相数据的截取问题。搭建系统实验,在采样率为50 MSa/s时,157个欠采样数据就能实现0.1 mm左右的测距精度。实验表明,应用欠采样全相位谱分析法,以远低于测尺频率的采样率采样依然能实现高精度测距。     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.