精密隔振平台振动的模糊控制

采用混合隔振技术建立了以空气弹簧作为被动隔振元件、超磁致伸缩致动器作为主动隔振元件的精密隔振平台隔振系统，并采用模糊控制理论设计其主动控制器。应用MATLAB软件进行了仿真分析以验证系统的振动控制效果。仿真分析结果表明，该振动控制系统在较宽的频率范围内具有良好的减振效果，该系统可应用于超精密测量．制造设备的隔振领域。     

精密隔振平台振动的LQG控制

建立了以空气弹簧作为被动隔振元件、超磁致伸缩致动器作为主动隔振元件的精密隔振平台隔振系统，应用LOG控制算法设计其主动控制器。采用MATLAB软件进行了仿真分析以验证系统的振动控制效果。仿真结果表明所设计的振动主动控制系统可在非常宽的频率范围对基础干扰和由仪器设备产生的直接干扰所引起的精密隔振平台振动进行有效的控制。     

带有三维激光干涉仪和压电位移执行器的新型主动隔振系统

我们为超精密测量系统开发了一种新型主动隔振系统。它由三套三维激光干涉仪传感器及六组压电位移执行器组成，以限制空间运动的六个自由度。实现实时补偿振动的功能。     

超精密机床垂向有源隔振系统的实验研究

分析了有源和无源两种隔振方式理论,建立了超精密机床垂直方向有源隔振系统。通过实验证明引入有源控制后,隔振台对环境干扰主振动的隔离有所增强;隔振台低频振动情况得到一定程度的改善,有效隔振范围3～5Hz;工件加工表面质量有所提高。     

Systematic analyses of vibration noise of a vibration isolation system for high-resolution scanning tunneling microscopes

We designed and constructed an effective vibration isolation system for stable scanning tunneling microscopy measurements using a separate foundation and two vibration isolation stages (i.e., a combination of passive and active vibration isolation dampers). Systematic analyses of vibration data along the horizontal and vertical directions are present, including the vibration transfer functions of each stage and the overall vibration isolation system. To demonstrate the performance of the system, tunneling current noise measurements are conducted with and without the vibration isolation. Combining passive and active vibration isolation dampers successfully removes most of the vibration noise in the tunneling current up to 100 Hz. These comprehensive vibration noise data, along with details of the entire system, can be used to establish a clear guideline for building an effective vibration isolation system for various scanning probe microscopes and electron microscopes.     

微制造隔振平台振动的模糊广义预测控制

采用主动隔振与被动隔振相结合的技术,建立以空气弹簧为被动隔振元件、超磁致伸缩致动器为主动隔振元件的微制造平台6自由度隔振系统及其结构模型。提出一种改进的自适应广义预测控制算法,并与模糊控制结合起来,应用于微制造平台的振动控制中,实现广义预测控制与模糊控制的优势互补。计算机仿真与试验结果表明,所设计的微制造平台模糊广义预测控制系统具有良好的鲁棒稳定性、抗干扰能力和时域性能,可在非常宽的频率范围内将由干扰所引起的微制造平台的振动在被动隔振的基础上减少80%左右,效果显著。     

基于气动肌肉并联隔振系统的主动控制研究

为了解决仪器仪表等高精密设备的防微振和抗冲击问题,基于气动肌肉搭建了隔振实验系统,对其主被动控制进行研究。建立了隔振系统的动力学模型,在此基础之上分别采用被动和PID控制算法进行了实验。通过对比试验结果表明该隔振系统在宽频段内有较好的隔振效果,在低频段内效果尤为显著,该研究为气动肌肉在隔振系统中的进一步控制奠定了基础。     

微制造平台隔振系统仿生设计

在分析啄木鸟头部独特生物构造及其隔振机理的基础上，运用仿生学原理，采用主动隔振与被动隔振相结合的技术，建立了以空气弹簧为被动隔振元件、超磁致伸缩致动器为主动隔振元件的微制造平台六自由度仿生隔振系统及其结构模型。实验结果表明，该隔振系统具有很好的隔振效果。     

双层混合隔振系统的CMAC和PID复合控制研究

为了提高双层被动隔振系统隔离低频结构噪声的效果,采用混合隔振思想,将小脑模型神经网络（cerebellar model articulation controller,CMAC）理论与PID控制算法相结合,设计了双层混合隔振系统CMAC与PID复合控制器,仿真分析了双层混合隔振系统在不同低频正弦激励信号下的加速度和加速度功率谱。仿真结果表明,采用CMAC与PID复合控制的双层混合隔振系统的隔振效果要优于被动双层隔振系统的隔振效果。     

Theoretical study on response of two-dimensional compound pendulum to ground vibration

Active vibration isolation against low-frequency ground tilt is important for detection of gravitational wave, however until now few low-frequency ground tilt detection and vibration isolation systems with high precision have been reported. We reported a kind of active vibration isolation system called as two-dimensional compound pendulum, which is constructed by connecting a cylindrical simple pendulum with a U-shape inverse pendulum. The structure of the two-dimensional compound pendulum is designed and its response to the ground vibration is investigated by means of analytical mechanic. The simulations show that the compound pendulum system is not only sensitive to low-frequency tilt vibration but also suppresses effectively high frequency tilt vibration and low frequency horizontal vibration, which is consistent with the theoretical results, and we discuss the possibility of experimental investigation on the response to low-frequency tilt vibration. Therefore, the designed compound pendulum is feasible for detecting ground tilt vibration.     

Active low-frequency vertical vibration isolation system for precision measurements

Low-frequency vertical vibration isolation systems play important roles in precision measurements to reduce seismic and environmental vibration noise. Several types of active vibration isolation systems have been developed. However, few researches focus on how to optimize the test mass install position in order to improve the vibration transmissibility. An active low-frequency vertical vibration isolation system based on an earlier instrument, the Super Spring, is designed and implemented. The system, which is simple and compact, consists of two stages: a parallelogram-shaped linkage to ensure vertical motion, and a simple spring-mass system. The theoretical analysis of the vibration isolation system is presented, including terms erroneously ignored before. By carefully choosing the mechanical parameters according to the above analysis and using feedback control, the resonance frequency of the system is reduced from 2.3 to 0.03 Hz, a reduction by a factor of more than 75. The vibration isolation system is installed as an inertial reference in an absolute gravimeter, where it improved the scatter of the absolute gravity values by a factor of 5. The experimental results verifies the improved performance of the isolation system, making it particularly suitable for precision experiments. The improved vertical vibration isolation system can be used as a prototype for designing high-performance active vertical isolation systems. An improved theoretical model of this active vibration isolation system with beam-pivot configuration is proposed, providing fundamental guidelines for vibration isolator design and assembling.     

A vibration-control platform on the basis of magnetorheological elastomers

The design of a vibration-control platform on the basis of magnetorheological (MR) elastomers is described. The platform is designed for protecting precision equipment and instruments against external vibrations at frequencies of up to 200 Hz and amplitudes of up to 100 µm. The platform contains four active dampers on the basis of MR elastomers and four elastic-support units with a mass corrector using which the platform is adjusted to a required equipment mass and a required resonance frequency. The proposed platform provides passive vibration isolation at a level of ～10 dB at frequencies of from 0.5 to 30 Hz and vibration amplitudes of up to 500 µm. The results of experimental studies of transient processes (the minimum transient-process time is 30 ms), the transfer coefficient of the vibration-displacement amplitude, and the mechanical hysteresis are presented.     

Active vibration isolation of electronic components by piezocomposite clamped-clamped beam

The sensitive electronic components used in military and aerospace applications endure some intense vibrations. These vibrations have some disturbing effects on the stability and on the service life of these devices. So, protecting these elements becomes a major economic and strategic stake. Vibration isolation can be applied to different levels of the on-board systems. Indeed, it is advisable to isolate electronic components either at the rack level or at the board level or at the component level. In this paper, the last solution is chosen because of low moving masses which imply low control energies.An active suspension system is located between the host board and the sensitive element to be isolated. This designed control system uses a simple Integral Force Feedback strategy. This vibration isolation control is stable for its collocated version and does not need a numerical model of the system to be controlled. Robustness of the system is asymptotically guaranteed. The proposed isolation device, made of alumina for passive structure and made of PZT and PVDF for transducing layers, is experimentally tested. Experimental performances are compared with theoretical performances.     

高精度测量的被动隔振研究

随着精密测量设备的快速发展,对其隔振系统的要求也越来越高。隔振系统也越来越显示出其重要性。许多精密设备所达到的分辨力被周围环境的振动所限制,没有一个好的隔振系统,测量过程中任何精密动作都难于实现。本文对常用的被动隔振系统进行了分析,以恒温恒湿工作腔体内工作台为隔振对象,设计了一两级隔振系统,并进行了MATLAB仿真分析。     

Modelling of viscoelastic damper support for reduction in low frequency residual vibration in machine tools

Residual vibrations deteriorate the accuracy and productivity of precision machine tools. Rocking vibration is excited by feed motion. Rocking vibration is the mode in which the entire machine vibrates and is the main source of residual vibrations at low frequencies. The characteristics of rocking vibration are influenced by the characteristics of the machine support structure. Thus, it is necessary to increase the damping of the machine support structure to reduce the residual vibrations caused by rocking vibration. In addition, it is important for machine tools to be stiff to reduce vibrations caused by the acceleration of feed drives. Conventional passive damper supports decrease the stiffness of a machine support structure while increasing the damping. Consequently, a passive viscoelastic damper system is developed to increase support damping without decreasing stiffness by focusing on the horizontal component of rocking vibration. However, the proposed damper damping capacity has a magnitude dependency. This makes it difficult to quantitatively determine the damper area in machine tools to reduce rocking vibrations to the required level. In this study, the developed damper is modeled using a viscoelastic four element model. Because of the nonlinearity of the model, an iterative time domain calculation method is introduced for the simulation. This method enables us to quantitatively estimate the effect of the damper on the machine tool. Based on the model proposed in this study, the proposed damper system can be applied to various machine tools to reduce the residual vibration without adjusting the damper area on the machine tool by a trial and error method.     

Reduction of vibrations of passively-isolated ultra-precision manufacturing machines using mode coupling

Ultra-precision manufacturing (UPM) machines are used to fabricate and measure complex parts having micrometer-level features and nanometer-level tolerances/surface finishes. Therefore, random vibration of the machine due to ground excitations and residual vibration stemming from onboard disturbances must be mitigated using vibration isolation systems. A long-standing rule of thumb in vibration isolation system design is to locate the isolators in such a way that the vibration modes of the isolated machine are decoupled. However, prior work by the authors has demonstrated that coupling vibration modes of passively-isolated UPM machines could provide conditions for drastic reduction of residual vibrations compared to decoupling. The authors’ analysis was based on the restrictive assumption that the isolated machine was modally damped. The key contribution of this paper is in investigating the effect of mode coupling on the residual vibrations of UPM machines with non-proportional (NP) damping—which is more realistic than modal damping. It also analyzes the effects of mode coupling on the reduction of ground vibrations (i.e., transmissibility). The analyses reveal that, even though NP damping changes the vibration behavior of the machine compared to modal damping, mode coupling still provides ample opportunities to reduce residual vibration and transmissibility. Guidelines for properly designing a UPM machine to best exploit mode coupling for vibration reduction are provided and validated through simulations and experiments. Up to 40% reduction in residual vibration and 50% reduction in transmissibility are demonstrated.     

周期性机械振动主动控制算法

为提高周期性机械装置的隔振性能,减少其对底座(或地面)及周围环境的影响,采用由弹性橡胶和压电堆作动器组成的主动悬置(active control mount, ACM).针对压电堆作动器输出位移较小的情况,设计液压位移放大机构.通过对压电作动器和橡胶主簧性能的分析,建立由主动悬置构成的隔振系统的力学模型.周期性机械振动系统,其周期振动信号可用作控制同步信号,因此控制系统采用基于同步滤波-X LMS(least mean square)算法的自适应控制策略,传递到机座的残余力作为误差信号,实现对周期性机械振动系统的主动控制.计算机仿真实验结果表明,采用这种主动悬置和同步滤波-X LMS算法的主动控制系统,相对于采用普通橡胶悬置的被动系统,明显减少了对底座的力传递,减振效果明显.     

Dynamic wireless passive strain measurement in CNC turning using surface acoustic wave sensors

Wireless, passive and dynamic surface acoustic wave (SAW) strain sensors are especially advantageous in applications with harsh environments where complex force measurements are required. High frequency multiple axis force measurement during machining processes typically requires state-of-the-art piezoelectric dynamometer technologies. Integrating dynamometers and their associated measurement chains into the machining environment typically requires significant modification to the machine structure. In this paper, SAW sensors were developed for process monitoring operations. Single-axis continuous and interrupted cutting investigations were carried out using the SAW technology installed on cutting tool holders demonstrating high dynamic bandwidth strain measurement. SAW dual-axis oblique cutting measurements were carried out where four SAW sensors were set up as two differential pairs each measuring a single axis of applied force. Improvements in sensitivity and cross-talk compensation has been realised. High-frequency wireless passive realtime process signals are presented from a passive wireless SAW force measurement system successfully integrated into an LT15 Okuma machining centre. The paper aims to present wireless passive SAW technology as a potentially platform changing approach for process and tool condition monitoring applications in the future.     

Effectiveness of a passive-active vibration isolation system with actuator constraints

In the prediction of active vibration isolation performance, control force requirements were ignored in previous work. This may limit the realization of theoretically predicted isolation performance if control force of large magnitude cannot be supplied by actuators.The behavior of a feed-forward active isolation system subjected to actuator output constraints is investigated. Distributed parameter models are developed to analyze the system response, and to produce a transfer matrix for the design of an integrated passive-active isolation system. Cost functions comprising a combination of the vibration transmission energy and the sum of the squared control forces are proposed. The example system considered is a rigid body connected to a simply supported plate via two passive-active isolation mounts. Vertical and transverse forces as well as a rotational moment are applied at the rigid body, and resonances excited in elastic mounts and the supporting plate are analyzed. The overall isolation performance is evaluated by numerical simulation. The simulation results are then compared with those obtained using unconstrained control strategies. In addition, the effects of waves in elastic mounts are analyzed. It is shown that the control strategies which rely on tmconstrained actuator outputs may give substantial power transmission reductions over a wide frequency range, but also require large control force amplitudes to control excited vibration modes of the system. Expected power transmission reductions for modified control strategies that incorporate constrained actuator outputs are considerably less than typical reductions with unconstrained actuator outputs. In the frequency range in which rigid body modes are present, the control strategies can only achieve 5-10 dB power transmission reduction, when control forces are constrained to be the same order of the magnitude as the primary vertical force. The resonances of the elastic mounts result in a notable increase of power transmission in high frequency range and cannot be attenuated by active control. The investigation provides a guideline for design and evaluation of active vibration isolation systems.     

智能微位移主动隔振模糊PID控制系统

为了解决精密加工设备的微位移隔振问题,研制了一种以压电陶瓷为作动器的智能微位移主动隔振系统。在现有数据采集系统和激振器的基础上搭建了相应的实验平台,提出将模糊-比例积分微分(fuzzy-proportional integral derivative,简称Fuzzy-PID)算法理论应用到微位移的主动隔振控制中,在实验室虚拟仪器工程平台(laboratory virtual instrumentation engineering workbench,简称LabVIEW)环境下开发了整个系统的算法控制程序,分别在扫频、随机和正弦激励信号下进行了微位移主动隔振实验。实验结果表明,受控后的振动位移大幅度降低,验证了该方法对微位移主动隔振的有效性。