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剪式压电微喷的设计及分析 总被引:3,自引:0,他引:3
利用压电陶瓷的厚度切变振动,设计出一种新型微喷。介绍了它的结构、工作方式及驱动方法。用弹性薄板模型对微喷进行理论分析,推导出振动位移函数,估算了自由振动基频和受迫振动端部位移。用有限元软件模拟振动模态,其模拟结果与理论计算接近。使用微电子及微电子机械系统(MEMS)工艺,在国内首次制备出该类型微喷,加载驱动波形后达到喷射效果。 相似文献
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为了增加压电陶瓷驱动快速反射镜的偏摆范围,对菱形微位移放大机构进行了研究设计。首先介绍了菱形结构的放大原理并利用变形能法分析了影响菱形结构性能的关键参数,然后建立了快速反射镜系统要求与菱形结构设计要求之间的联系,并根据自行设计的快速反射镜系统选择了菱形结构的关键参数,最后通过有限元仿真对菱形结构和快速反射镜系统进行了模态分析并对快速反射镜的偏摆范围进行了实验测试。仿真与实验结果表明,快速反射镜的偏摆范围大于6',低阶谐振频率约为400 Hz,满足了快速反射镜的系统要求。文中研究得出,菱形结构的位移放大倍率与最大驱动力是此消彼长的两个性能,可以通过合理调整菱形长轴与菱形边夹角以及菱形边宽度使两个性能同时满足系统设计要求。 相似文献
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近年来,点胶系统的使用日益广泛,各类精密液体分配系统对该技术需求旺盛。该文提出了一种由叠层压电陶瓷驱动的非接触式点胶阀,该阀由两个相同的叠层压电陶瓷驱动,通过位移放大机构,改变位移的输出方向,并将力传递给阀杆,最终实现喷射。利用FLUENT软件模拟了点胶过程,分析了流体喷射机理,通过实验研究了阀杆抬起时间、气压、流体粘度等喷射参数对于点胶量的影响,实验结果与仿真结果吻合。实验使用直径为0.35mm的喷嘴、喷射液体为甘油时,可以获得平均直径为0.53mm的液滴,其一致性误差小于6%。 相似文献
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提出了一种应用于压电制动器的微位移放大机构,该机构以叠层压电陶瓷为驱动元件,通过基于三角形放大原理的柔性铰链放大机构,放大叠层压电陶瓷的输出位移。分析了放大机构的运动及放大机理,建立了制动系统的力学模型,并利用ANSYS软件建立机构有限元模型进行仿真,在试制样机上对其输出特性进行了实验。实验测试结果表明,该机构对叠层压电陶瓷输出位移的放大倍数为3.2倍,与有限元仿真得到的放大倍数4倍相近,一阶固有频率为1 814Hz,最大输出力为44.1N(150V电压下),且该机构线性良好、分辨率高、迟滞效应较小。 相似文献
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纳米级精度微位移驱动与控制通常使用压电陶瓷驱动器驱动柔性机构来实现.但是压电陶瓷驱动器行程较小,需要使用柔性放大机构对其位移进行放大,并且压电陶瓷驱动器存在蠕变和迟滞等非线性特性,而这些非线性特性极大影响了其输出位移经放大机构放大后的运动精度.针对以上两点,将传统桥式机构的4条桥臂用Scott-Russell机构代替,设计了一种新型柔性放大机构.同时,采用基于动力学逆模型前馈控制与PID反馈控制相结合的复合控制策略,提升放大机构的控制带宽和运动精度.实验结果表明,复合控制策略在1 Hz输入频率下的均方根跟踪误差相较传统PID反馈控制降低了33%,在10 Hz下降低了73%,说明了基于动力学逆模型前馈控制同PID反馈控制相结合的复合控制能够大幅度提高放大机构的跟踪精度. 相似文献
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为了探究压电驱动器的输出性能及提高压电驱动机构的性能,该文对“十”字型压电惯性驱动器进行了理论分析与应用测试。首先说明了驱动器结构组成与驱动机理;然后利用弹性力学理论对驱动器进行了理论分析,得出驱动器弹性振动位移表达式,给出了影响驱动器性能的影响因素;最后对驱动器进行实验应用测试,将其用于驱动盲文柔性点显装置。结果表明,该驱动器能较好地实现系统驱动,放大柔性薄膜凸点的位移输出,柔性薄膜触点凸出明显,性能良好。验证了用这种压电惯性驱动器实现系统驱动是可行且有效的。 相似文献
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针对超磁致伸缩致动器输出位移有限,无法直接驱动伺服阀阀芯运动的问题,设计了一种基于柔性活塞的新型液压式微位移放大机构:由超磁致伸缩(GMM)棒驱动大活塞变形,并通过密闭容腔内的油液在小活塞端将GMM棒的输出位移放大。建立了超磁致伸缩致动器及其液压式微位移放大机构的耦合模型,采用弹性小挠度理论,有限元法和液压弹簧刚度理论对放大机构进行了分析和优化,并制作了样机。仿真和实验表明,所设计的液压式微位移放大机构可将GMM棒位移放大3.2倍,所建立的耦合模型较准确,误差在10%以内。 相似文献
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《Electronics Packaging Manufacturing, IEEE Transactions on》2008,31(3):248-259
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胶液喷射技术现广泛应用于表面贴装工艺领域。在流固耦合仿真中,对流体动边界的处理是一个难点。利用ANSYS流固耦合作用工具FSI及任意拉格朗日欧拉法对胶液喷射器内胶液流动过程进行了研究。得到喷针运动下胶液喷射器内胶液的压力及速度分布,证明了该方法的有效性,并得出喷针运动直接影响胶液喷射技术实现的结论。 相似文献
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Jana Kolbe Andreas Arp Francesco Calderone Edouard Marc Meyer Wilhelm Meyer Helmut Schaefer Manuela Stuve 《Microelectronics Reliability》2007,47(2-3):331-334
Ink jet is an accepted technology for dispensing small volumes of material (50–500 picolitres). Currently traditional metal-filled conductive adhesives cannot be processed by ink jetting (owing to their relatively high viscosity and the size of filler material particles). Smallest droplet size achievable by traditional dispensing techniques is in the range of 150 μm, yielding proportionally larger adhesive dots on the substrate. Electrically conductive inks are available on the market with metal particles (gold or silver) <20 nm suspended in a solvent at 30–50 wt%. After deposition, the solvent is eliminated and electrical conductivity is enabled by a high metal ratio in the residue. Some applications include a sintering step. These nano-filled inks do not offer an adhesive function. Work reported here presents materials with both functions, adhesive and conductive. This newly developed silver filled adhesive has been applied successfully by piezo-ink jet and opens a new dimension in electrically conductive adhesives technology.The present work demonstrates feasibility of an inkjettable, isotropically conductive adhesive in the form of a silver loaded resin with a two-step curing mechanism: In the first-step, the adhesive is dispensed (jetted) and precured leaving a ‘dry’ surface. The second step consists of assembly (wetting of the 2nd part) and final curing. 相似文献
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喷射点胶技术是电子组装的核心技术,针对如何喷射小直径胶点以满足微电子封装要求这一问题。文中基于气压驱动点胶阀的工作原理,建立顶针和喷嘴碰撞结构二维几何模型,采用CFD计算机流体动力学分析软件对点胶过程中喷嘴口胶水喷射速度、密闭内腔胶水液压进行仿真模拟分析。数值仿真结果表明,顶针几何外形、顶针运动行程及喷嘴张角是影响胶水喷射速度的主要因素,喷射胶点的直径大小是由这些影响因素决定的。 相似文献
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文章首先介绍了微波多芯片组件两种常见的封装结构形式及导电胶自动分配技术需求,并对接触式和无接触式导电胶点胶技术进行了论述,分析了它们各自的优缺点并对各项点胶参数进行了对比。然后,阐述了计量管式接触点胶技术以及需要研究的针头漏胶、点胶间隙确定以及基板表面状态对胶滴的影响三方面内容。紧接着阐述喷射式非接触点胶技术以及需要研究的空气阻力造成的胶滴飞溅问题。最后,提出计量管式接触点胶技术最适合腔体结构微波多芯片组件自动点胶。 相似文献
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《Mechatronics》2023
Consistent dosages placed with high accuracy onto the substrate are critical for drop-on-demand (DoD) inkjet printing to be adopted in additive manufacturing and device characterization. Practically, the consistency of drop volume and drop jetting velocity is subject to process uncertainties, such as fluctuations of applied pressure and variations in printheads, for which open-loop approaches are unable to compensate. In this work, a stochastic process model of the relation between two control parameters of a firing waveform and two output features, drop volume and drop jetting velocity, is developed from standard printhead calibration data. An image-based control strategy based on a projection-based one-step-ahead Kalman estimator for model parameters estimation is proposed to regulate the drop volume and the drop jetting velocity. The effectiveness of the proposed control strategy is experimentally validated for three inks with broad properties. By including input boundary layers, an order of magnitude improvement in reducing drop volume and jetting velocity variations is also experimentally demonstrated. 相似文献
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《Mechatronics》2020
In this paper, a flexure-based piezoelectric actuated microgripper is presented for high precision micro/nano manipulation tasks. A new design of microgripper based on a three-stage displacement amplification mechanism is utilized to magnify the piezoelectric actuator displacement. A bridge-type mechanism with a two-sided output port is serially connected with two consecutive lever mechanisms. The output motion on both sides is linearized by parallelogram mechanisms. The single-notch and double-notch circular flexural hinges were used in lever, bridge-type and parallelogram configuration. The displacement amplification and transmission mechanisms are arranged symmetrically to obtain stability of shape and compact layout of the entire microgripper. Analytical modeling was performed to establish an input and output displacement relationship. Finite Element Analysis (FEA) method was utilized to evaluate the performance of the microgripper. The design parameters of the microgripper were optimized through FEA method. The simulation results of the FEA method were validated through experimentation on the established design. The experimental results show that the total displacement amplification ratio of the microgripper is 12.76. The microgripper jaws have a high precision positioning accuracy. The microgripper also achieves a high-level working mode frequency of 1044 Hz, which is capable of accommodating rapid transient responses. 相似文献
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