收缩管型压电微滴喷射理论分析与实验研究

为了得到驱动电压波形对收缩管型压电微滴喷射性能的影响规律,基于Bogy等提出的压力波传递理论,分析了收缩管型压电微滴喷射头喷腔中的压力传导过程。构建了压电微滴喷射系统的实验平台,以质量分数为58%的甘油和水混合液为实验中的喷射对象,对微滴喷射过程中驱动电压的脉冲宽度、幅值和频率对微滴喷射性能的影响进行了研究。研究结果表明,随着驱动电压脉冲宽度的增大,所形成的液滴速度和直径呈先增大后减小,微滴喷射过程存在最佳电压脉冲保持时间;随着驱动电压脉冲幅值的增大,所形成的液滴速度和直径均增大;随着操作频率的增大,在一定范围内,液滴速度和直径几乎不受影响,但频率过大时,喷射会发生混乱。     

基于撞针原理的高粘性微喷系统的设计与分析

为了实现对高粘性微量液滴的高效率喷射,研制了一种基于撞针原理的非接触式微喷装置。采用压电陶瓷作为驱动装置,再利用菱形放大机构进行微位移放大,采用有限元软件对菱形放大机构进行静、动态特性分析,确定喷针和喷嘴的配合形式及相关尺寸,然后利用MATLAB软件进行动力学方程的求解,仿真结果显示,喷针的位移和速度均满足喷射条件,最后针对5～10Pa.s粘度的液体进行了微喷实验。实验结果表明:该微喷装置可稳定地实现胶液的喷射,输出流量随着驱动电压的增大而增大。     

新型电磁铁驱动的撞针式微滴喷射装置

液滴喷射技术具有广泛的应用前景和技术优势,结合现有技术设计了一种能够实现有效的微滴喷射的装置,该装置基于电磁铁驱动,采用撞针式结构。本装置包括电磁铁、滑轨、撞针、喷嘴、弹簧、垫圈等几个主要部分,通过电磁铁驱动撞针撞击喷嘴从而使液滴从喷嘴中喷射出。整体而言其结构简单、成本较低、易于加工,可实现液滴稳定喷射。以甘油溶液(丙三醇)作为喷射实验材料,进行了多粘度溶液及多种喷嘴直径的喷射实验,并对实验结果进行分析,总结了该装置液滴喷射的相关性能,实现了粘度为0～1 410 mpas的多种粘度液滴的稳定喷射,丰富了微滴喷射装置的结构设计。     

人工中耳惯性压电式悬浮振子驱动电压研究

为研究人工中耳惯性压电悬浮振子的驱动电压特性,首先建立中耳的有限元模型,其可靠性通过实验对比得以验证;再利用该中耳有限元模型分析了振子绑定装置处的位移阻抗特性,并基于此建立听骨链与绑定装置的等效力学模型;最终建立听骨链与惯性压电悬浮振子的耦合力学模型,分析了其所需驱动电压特性.研究结果表明,振子所需驱动电压随着频率的增大而减小,在语音频段,所需最大驱动电压为20.9 V;在感音神经性听力损伤多发生的中高频段,该驱动电压不高于3.8 V,满足人工中耳低电压、低能耗的要求.     

基于时间分辨荧光各向异性成像的罗丹明B溶液粘度特性研究

基于时间分辨荧光各向异性成像技术,利用激光扫 描共聚焦显微镜耦合时间相关单光子计数系统,对不同浓度甘油及不同浓度蔗糖的罗丹明B 溶液粘度的荧光各向异性进行了测量。实验表明,随着溶液浓度增大,荧光偏振值和粘度都 相应增大,而荧光寿命与溶液微环境的粘度成反比。据此,基于荧光分子各向异性的产生原 理,给出了荧光团在转动过程中旋转弛豫时间与旋转相关时间的定量关系。它表明时间分 辨荧光各向异性检测可用于微环境粘度的检测和源自细胞内粘度变化导致的机体某些疾病或 机能失调的诊断。     

电流体动力学近场直写工艺参数对微图案的影响

以聚氧化乙烯(PEO)为直写溶液,光泽柔性绝缘相纸作为基板材料,采用自主研制的电流体动力学近场直写(ENDW)设备直写微图案。研究了工作电压、直写高度和直写溶液的质量分数等参数对PEO溶液的直写微图案宽度的影响。结果表明在使用质量分数3%的PEO溶液在进行直写时,喷嘴与基底之间的工作电压从1.1 kV增大到2.6 kV,PEO微图案的平均宽度从35.61μm下降到23.3μm,并且图案宽度的工艺误差从8.24μm下降到2.21μm。随着工作电压的增大,喷嘴处的射流形态变化依次为:液滴状、弯液面、稳定射流、多股射流。同时研究发现,通过降低直写高度和增加PEO溶液的质量分数,能进一步减小微图案的宽度,并且能够提高微图案宽度的均匀性。     

基于介电电泳组装技术的PEDOT/PSS-SWCNTs气体传感器的研究

采用介电电泳技术组装制备PEDOT/PSS-SWCNTs纳米气敏薄膜,并研究外加交流电场的频率、电压及组装时间与气体传感器的导电及气敏性能的关系.结果表明,良好分散在PEDOT/PSS基质中的SWCNTs定向排列在叉指电极对之间.当频率在0.5～10 MHz的范围内,传感器的电导率及气敏响应的变化不大.由电场电压引起的传感器性能的变化趋势与组装时间引起的相似,即随着电压或时间增大,传感器的电阻增大,而气敏响应则先增后减.当电场频率为2 MHz、电压为5V、组装时间为3 min时,PEDOT/PSS-SWCNTs纳米气敏传感器对10 9级别的H2S气体最为灵敏.     

开放V型系统中自发辐射诱导相干的影响

利用开放的V型三能级原子系统密度矩阵运动方程的数值解,从不同角度研究了原子自发辐射诱导相干(SGC)对系统吸收和色散的影响。研究发现,这种相干性可导致无粒子数反转激光(LWI)、电磁感应透明(EIT)和无吸收高色散。研究还表明,这种相干性越强,获得最大无反转增益所需的驱动场Rabi频率的值越大而所需的非相干泵浦速率R的值越小;随着原子退出速率的增大,无反转增益逐渐减小并最终转变为吸收,而且增益减小的速度随这种相干性的增强而加快。     

聚苯乙烯滤光膜均匀性的研究

为了研究静置时间、液面下降速度对聚苯乙烯（C8H8）滤光膜厚度和均匀性的影响,采用浸渍法制备了C8H8滤光膜,通过改变静置时间、液面下降速度,制备了不同的样品。用Vecco Dektak6.0探针轮廓仪测量样品厚度,利用插值法方法,研究了C8H8滤光膜与静置时间、液面下降速度的关系。结果表明,静置时间和液面下降速度对C8H8薄膜厚度和均匀性有很大影响。静置时间越短,液面下降速度越小,浸渍法制备的C8H8滤光膜的均匀性越好。     

卡盘转速及喷淋臂摆动方式对晶片腐蚀性能的影响

随着晶片尺寸的不断增大,精准控制单片湿法腐蚀速率及非均匀性变得越来越具有挑战性.主要研究了300 mm单片湿法腐蚀工艺过程中,喷射稀释氢氟酸时卡盘的旋转速度和喷淋臂摆动方式对晶片表面腐蚀性的影响.结果表明,随着卡盘旋转速度的增大,腐蚀速率从1.02 nm/min线性提高到1.06 nm/min,腐蚀速率的非均匀性先是迅速降低,但当转速高于150 r/min后,基本保持在2.70％.喷淋臂在晶片中心定点喷射、匀速摆动和呈抛物线型摆动时,晶片腐蚀速率都约为1 nm/min,腐蚀速率均沿晶片中心到边缘径向降低,与定点喷射相比,喷淋臂在晶片表面摆动后,腐蚀速率的非均匀性明显降低,且抛物线摆动低于匀速摆动,达到1.48％.     

Control of droplet formation for low viscosity fluid by double waveforms applied to a piezoelectric inkjet nozzle

When dispensing liquid through a piezoelectric inkjet nozzle, a single droplet without a satellite is formed in the limited range of the Ohnesorge number. Especially, it is difficult to eject low viscosity fluids such as a silver nanoparticle suspension in the form of a single free drop using conventional single waveforms to drive the piezoelectric actuators. To overcome the lower limit of fluid viscosity, in the present study, double waveforms with two square pulses have been applied to control the droplet formation in the piezoelectric inkjet nozzle and its response has been observed. With regard to the double waveforms, the effect of the driving voltage and time separation between the pulses was investigated. The present nozzle shows that several satellites are produced by the successive ejection in a single pulse because the oscillating pressure wave is rarely damped out in the low viscosity fluid. On the other hand, a single droplet is easily formed in the double waveform and the droplet formation could be precisely controlled by changing the time separation between the pulses. The upper and lower limits of the time separation are discussed in view of the kinetic phenomena of a primary drop and a transient satellite for the low viscosity fluid. In addition, it is addressed how the time separation and driving voltage in the double waveform affect the droplet size and velocity.     

斜入射下液晶偏振光栅衍射特性研究

为了表征光束倾斜入射下液晶偏振光栅的衍射特性，提出了液晶偏振光栅斜入射角度-驱动电压-衍射效率的三维模型建模方法。该方法利用吉布斯自由能方程，求解液晶分子指向矢，得到驱动电压与液晶分子倾斜角的表达式，推导出斜入射角度与相位延迟量之间的关系，结合扩展琼斯矩阵表征不同入射角度下液晶偏振光栅的透过率，通过矢量衍射理论，建立了斜入射角度-驱动电压-衍射效率的三维模型。该模型不仅可以定量求解不同斜入射角度下液晶偏振光栅衍射效率，而且能够实现衍射效率最优时驱动电压的标定。通过仿真分析和实验对该模型的有效性进行了验证，结果表明:光束入射角度从0°倾斜到10°时，最优驱动电压由2.2 V降低到2.0 V，液晶偏振光栅衍射效率从85%下降到78%；光束入射角度从0°倾斜到?10°时，最优驱动电压由2.2 V升高到2.4 V，液晶偏振光栅衍射效率从85%下降到74%。     

矩形波导中试管对液体柱散射特性的影响

为了探讨影响矩形波导中心加载分层介质圆柱散射特性的因素，通过实验得到了矩形波导中装满水的玻璃试管反射系数的频率响应特性，并对电磁波频率、液体相对介电常数、液体柱高度以及试管壁厚度发生变化时，试管对液体柱散射特性的影响进行了数值模拟。结果证明：当液体柱处于谐振状态，或者液体柱高度小于波导窄边高度的1／2时，试管的存在对液体柱反射系数影响较大，试管壁厚度对反射系数也有影响。该结论可用于基于波导的微波化学实验系统的研究中。     

Threshold and sheet concentration sensitivity of high electron mobility transistors

We present results of an analysis of the dependence of the threshold voltage and the sheet carrier concentration on background substrate doping, Al1 - xGaxAs doping, thickness, and metal barrier height in the high electron mobility transistor (HEMT) at room and liquid nitrogen temperatures. The sensitivity of threshold voltage and sheet carrier concentration to buffer layer or substrate background concentrations improves at lower temperatures. The sensitivity of threshold voltage and sheet carrier concentration to Ga1 - xAlxAs doping and thickness degrades at lower temperatures. The threshold sensitivity to barrier height is temperature independent but increases for sheet carrier concentration at lower temperatures. The design of a device structure for integrated circuit application with minimial threshold variations will require an optimal design of the device and will depend on the status of control of the various parameters.     

Simulation and optimization on the squeeze-film damping of a novel high-g accelerometer

The damping characteristics of a packaged high-g accelerometer have been investigated in this paper. Firstly, a multi-segments-plates-approximate (MSPA) model on curved surface damping suitable for this component has been established to obtain the relationship between the parallel-shift-distance (PSD) of curved stop and the damping of component. Subsequently, not only the effect of the PSD of curved protection but also the impact of the characteristics of damping media on the dynamic shock response of the component has been studied with ANSYS FEM technology. Results show that the dynamic output responses of component were in reality the superposition of both the forced vibration under acceleration shock and the vibration of cantilever in its inherent frequency. With the increase of PSD, the inherent frequency vibration became outstanding in output response and both the peak output voltage and displacement of beam end increased linearly whereas its corresponding time decreased nonlinearly. The effects of damping media on the dynamic response characteristics of the component were attributed to the difference of viscosity coefficient of damping medium. Under the same other conditions, with increment of viscosity coefficient, the output response curve become smoother except for lower peak voltage. Therefore, the PSD of curved stop should be controlled between 0.5 and 0.65 μm during the fabrication of chip and if the PSD was about 0.5 μm, air would be the most suitable damping media in the packaging of the component.     

一种低关断功耗的地端关断整流器

基于TSMC 180 nm CMOS工艺,设计了一种采用负压关断的地端关断整流器。将关断时的控制电平从0降到负值,降低了使能管的亚阈值电流。将使能管的工作状态从亚阈值区变为截止区,进一步降低了关断功耗。仿真结果表明,当整流器使能时,该负压地端关断整流器的导通性能与传统地端关断整流器几乎相当。当整流器关断且输入电压幅值为1 V时,关断功耗为-24.0 dBm @953 MHz,与传统地端关断整流器相比,下降了7.5 dBm;与传统短路关断整流器相比,降低了23 dBm,功率转换效率提高了1.9 %。该地端关断整流器能满足射频能量收集系统中整流器低功耗待机的要求。     

聚酰亚胺溶液黏度对液晶预倾角的影响

为了制备具有自取向功能的聚酰亚胺(PI)取向膜,避免摩擦工序在取向膜表面造成静电、灰尘、配向不良等不利影响,本实验通过一系列黏度不同且有水平及垂直取向功能的PI溶液,研究了PI液黏度和其取向膜表面粗糙度的关系,进而研究了PI膜表面粗糙度和液晶预倾角(θ_p)的关系。研究发现:取向膜表面粗糙度随着PI液黏度的增大而增大,θ_p随着粗糙度的增大而增大,但当粗糙度大于一定值(3.760nm)后,θ_p增长缓慢并趋于稳定。这主要是因为PI液黏度增大时,阻碍了相邻PI液滴通过分子链段协同运动向彼此扩散的几率,进而形成取向膜表面的"峰谷"形貌,这种"峰谷"形貌表面对液晶垂直取向起到了支撑作用,正是这种支撑作用使得液晶分子获得较大的θ_p。结合液晶面板响应时间对高预倾角的要求和Inkjet PI液滴喷嘴过小对PI液黏度的限制,得出PI液黏度大约为41CP时,此时取向膜表面粗糙度为4.830nm,液晶取向角为5.5°,能较好地满足液晶取向的要求。     

Self‐Powered Distributed Water Level Sensors Based on Liquid–Solid Triboelectric Nanogenerators for Ship Draft Detecting

Ship draft measurement is of great significance for ensuring navigation safety and facilitating ship control. In this work, a self‐powered water level sensor based on a liquid–solid tubular triboelectric nanogenerator (LST‐TENG) is proposed and analyzed. The LST‐TENG is made of multiple copper electrodes uniformly distributed along a polytetrafluoroethylene (PTFE) tube. When water flows into the PTFE tube, it induces alternating flows of electrons between the main electrode and the distributed bottom electrodes. The obvious peaks in the derivative of open‐circuit voltage with respect to time are found to correspond with the electrode distribution. Then it can be utilized as a robust and sensitive indicator for detecting the water level as the number of obvious peaks in the derivative of open‐circuit voltage is directly related to the water level height. The ship draft is successfully detected using the LST‐TENG with an accuracy of 10 mm. It shows that the water level sensor has stable performance for liquid–solid interface monitoring. Therefore, this LST‐TENG is self‐powered, robust, and accurate for extensive applications in marine industry.     

Operability diagram of drop formation and its response to temperature variation in a piezoelectric inkjet nozzle

The present study has focused on the operability diagram of drop formation and its response to temperature variation in an inkjet nozzle driven by a piezoelectric actuator. As an operating fluid, ethylene glycol was used, and square wave pulses were applied to the nozzle in the present experiments. The operability diagram was constructed in driving voltage and pulse width space by changing the operating temperature from 30 °C to 50 °C. Four distinct types of drop response have been uncovered and are summarized in the operability diagram. The four types of response include single primary drop formation, drop formation with satellites, nozzle wetting without drop formation, and emission of a random spray. From the operability diagram, W-shaped regime of single primary drop was found, which was enlarged as temperature increased. Furthermore, the time scale of the W-shaped regime is closely related to the optimal pulse width and meniscus oscillation period of the present inkjet nozzle. In addition, it was found that by increasing the driving voltage and temperature, the size of single primary drop is increased due to the reduction in viscosity and contact angle of the operating liquid.