Fabrication of broad-area laser diodes on a three-inch wafer by asolid-phase diffusion method

We have developed extremely uniform Zn diffusion on a three-inch GaAs-AlGaAs QW laser wafer by an open tube solid-phase diffusion technique and have applied it to fabrication of broad-area laser diodes (LD's) for the first time using 3-inch full-wafer processing. Excellent uniformity of device characteristics have been obtained on a 3-inch wafer; threshold current distribution along the radial direction of a wafer is 356.2±8.3 mA (1σ), emission wavelength is 879.7±0.6 nm (1σ). Such high uniformity is caused by not only uniform Zn diffusion but also uniform epitaxial layer thickness over a three-inch wafer     

端面抽运全固态皮秒被动锁模激光器

利用国产半导体可饱和吸收镜(SESAM),设计了不同的腔型结构,实现了平均功率5W单路输出,5W双路输出,输出透过率可调节的半导体可饱和吸收镜线型腔连续锁模(CWML)激光器,双向输出六镜环行腔连续锁模激光器等。将半导体可饱和吸收镜放在腔内的特殊位置,利用一种新的技术方法实现了锁模激光器的频率翻倍。利用由非线性晶体KTP和双色镜构成的非线性镜(NLM),实现了端面抽运Nd∶YVO4激光器的4W锁模输出。     

Excimer laser projection lithography on a full-field scanning projection system

Optical projection lithography using an excimer laser light source is demonstrated on a commercial state-of-the-art full-wafer scanning 1x projection system. Images are printed on 125-mm-diameter wafers on a Perkin-Elmer Model 500 projection printer using an XeCl laser operating at 308 nm. Near-vertical image profiles and 1-µm resolution are experimentally demonstrated. The anamorphic optical transformation system necessary to transform the collimated, nearly rectangular excimer laser beam into the arc-shaped, effectively self-luminous illumination required by the projection system is also described.     

Highly reliable spot-size converter integrated laser diodes over a wide temperature range for access network systems

In this paper, we present highly reliable high-temperature spot-size converter integrated laser diodes (LDs) fabricated using a full-wafer process with dry etching and MOVPE. The lasers lase at 150°C and operate stably for 10,000 h at 85°C and 10 mW. The median lifetime is estimated to be over 10⁵ h. We also demonstrate a novel screening test procedure for a bar configuration of LDs, which can greatly reduce optical module cost.     

受激布里渊散射在ICF激光驱动器中的应用

本文概述了基于受激布里渊散射 (SBS)的位相共轭镜 (PCM )在惯性约束核聚变 (ICF)激光驱动器领域的实际应用 ,着重介绍了在高功率条件下 ,PCM的能量和功率负载强度、位相保真度和波形控制等关键问题。指出在超饱和工作条件下 ,采用SBS放大器—振荡器双池结构的PCM ,在获得高反射率、高保真度、可控脉冲输出的同时 ,不会增加激光系统的不稳定性。     

横向抽运染料激光振荡器效率分析

染料激光器由于不同的抽运方式,在出光效率和最佳输出耦合率等参数上有很大的不同.根据速率方程理论,分析了铜蒸气激光器(CVL)511 nm横向抽运染料罗丹明6G(Rh6G)激光振荡器的光-光转换效率问题.得出染料对激光的自吸收损耗效应是造成横向抽运和纵向抽运两种方式光-光转换效率与输出耦合率差异的主要原因.对不同的染料Rh6G浓度和不同的输出耦合镜反射率进行横向抽运实验,得到8.2%的最高光-光转换效率.实验结果显示横向抽运时较低的Rh6G浓度可以降低染料自吸收效应对出光效率的影响.同时,最佳输出耦合镜的反射率比纵向抽运时小.     

Cleaved Mirrors for Nitride Semiconductor Lasers

We demonstrate smooth cleaved gallium nitride facet mirrors on Si(111) substrates fabricated by a microcleaving technology. Cantilever features were defined by photolithography, followed by a vertical photo-enhanced electrochemical (PEC) etch until the substrate was exposed. Lateral undercuts underneath the cantilevers were created by a silicon isotropic wet etch, and the nitride cantilevers were isolated from the substrate completely. Mechanical forces were applied to break the cantilevers. The facets made by microcleaving showed improved roughness as confirmed by surface morphology characterization. The fabrication steps for microcleaved facets combined with laser processing on a full-wafer scale are proposed.     

高功率激光器光学元件冷却技术的研究

当前对由热效应引起的激光器及其光学元件变形和破坏问题的研究越来越受到国内外学者的重视。控制镜子温升的方法通常有改进水冷铜镜、采用半导体制冷、相变技术等。文中对这些方法进行了比较，重点阐述了多层水冷这一新技术。工程实践结果证明，该方法能有效地控制镜子温升，将镜面变形控制在一个很小的范围内，为解决阻碍高功率激光器发展的“瓶颈”—热效应问题，提供了有力的参考依据。     

激光二极管侧面抽运声光调QNd∶YAG/KTA 1.57μm人眼安全光参量振荡激光器

利用激光二极管(LD)阵列侧面抽运声光(AO)调Q的Nd∶YAG激光器作为抽运源,研究了在不同声光重复频率和输出镜透过率的情况下,内腔式KTA-光参量振荡器(OPO)的输出特性。通过对单谐振光参量振荡器阈值公式的讨论,采用平凹腔的结构以及较短的腔长,降低了光参量振荡器的振荡阈值。当声光重复频率为4 kHz,输出镜透过率为30%,抽运电流为14.5 A时,光参量振荡器的1570 nm激光输出脉冲峰值功率达到5.6×104W,脉冲宽度为2.5 ns,实验中最大平均输出功率为560.3 mW。结果表明,具有良好热性能的非线性晶体KTA是制造小型、轻便光参量振荡激光器的理想材料。     

Facet Reflection Coefficient of Phase—locked Diode Laser Array in an External Cavity

A diode laser array(DLA) positioned in an external cavity can receive the radiations emitted from its neighboring elements (C1)and that of itself(S) after being reflected at the DLA facet as well as from the external mirror(C0).Considering the fact that |C0/S| should be larger than uniity if the external cavity is effective,and |C1/S| should be larger than unity if the phase locking may be established in the external cavity.The requirements on the reflection at the facet of diode laser array have been specified in terms of the cavity length and reflection coefficient of the external mirror.     

高能激光系统中的二维快速控制水冷反射镜的结构

在高能激光系统中,对发射的高能激光束的光束质量进行精确控制十分重要。本文介绍了一种应用于高能激光系统中的新型二维快速控制水冷反射镜,既可实现精确控制激光发射和接收光轴的方向,对光束整体倾斜方向进行校正,又可实现减小镜面热畸变提高光束质量的功能。该反射镜具有质量轻、转动惯量小、行程小、谐振频率高、响应速度快、动态滞后误差小等优点。试验测试结果表明,二维快速控制水冷反射镜的设计合理,具有应用推广价值。     

Operating regimes of an optical coupler combined fiber laser system

Rate equations have been used to study an optical coupler combined Er³⁺-doped fiber laser system, in which a common mirror attached at one of the coupler output ports is shared by two constituent lasers. Three regimes may be identified for the system depending on the relative magnitude of the wavelength difference δλ between the two constituent laser fields to the reflection band of the fiber gratings. Taking into consideration the transmission features of the coupler-mirror combination, appropriate boundary conditions have been established according to the operation regimes of the compound system. After neglecting the backgrounds losses of the fiber, rate equations have been simplified to a set of algebra equations. Based on the algebra equations, we discussed in detail the case where the laser field generated by the first laser with a wavelength slightly different from that of the field oscillating inside the second laser, is injected into the other laser by the common mirror, leading to a decreased gain for the oscillating field.     

LD抽运高重复频率四通放大MOPA系统中的光纤相位共轭研究

报道了利用多模光纤作为相位共轭镜应用于重复频率100Hz。脉宽20ns的电光调Q四通放大LD抽运激光器的实验研究。由于光纤受激布里渊散射(SBS)存在的阈值效应，可以抑止使用平面全反镜的四通放大系统中难以克服的放大级自振荡(SO)和放大自发辐射(ASE)效应．以获得高能量高光束质量的激光输出。实验中在20ns．100Hz和注入光纤能量4．6mJ的情况下获得了4．1mJ的1064nm的基模激光输出。激光光束模式接近TEMoo模．且脉宽被压缩至4．7ns。在使用了光纤相位共轭镜的四通放大技术后，很好地补偿了由板条放大器热效应造成的光斑畸变。输出光斑很好地复原了振荡级输出光斑的光强空间分布。     

Monolithic two-dimensional GaAs/AIGaAs laser arrays fabricated by chlorine lon-beam-assisted micromachining

Chlorine ion-beam-assisted etching (IBAE) has been used to micromachine laser facets and deflecting mirrors for monolithic two-dimensional GaAs/AIGaAs laser arrays. Three laser cavity/deflector designs have been successfully implemented. The first utilizes a parabolic deflecting mirror to directly focus the laser radiation; the second consists of a folded cavity with a vertical facet, a top surface facet, and an internal 45° reflector; and the third has a folded cavity with an internal Al_0.2Ga_0.8As/Al_0.8Ga_0.2As dielectric mirror stack and a top surface facet formed in a single etch step with two internal 45° reflectors. The parabolic deflecting mirrors are currently modeled forf- 0.8 collection efficiency, making the first design attractive in incoherent arrays for high-power applications such as pumping Nd:YAG lasers. The other two structures are of interest for incoherent or coherent arrays used in high- and medium-power applications, since the top surface facets can easily be antireflection coated. The design with a dielectric mirror stack is particularly simple to fabricate.     

腔镜倾斜扰动对正支共焦腔输出光束模式的影响

针对激光器出光过程中腔内像差扰动带来的光束质量下降问题,分析了正支共焦腔腔镜倾斜扰动对调腔光模式的影响,采用等效透镜波导法计算了凹、凸腔镜倾斜失调状态下的调腔光模式分布、泽尼克(Zernike)像差系数。同时采用哈特曼-夏克(Hartmann-Shack)波前传感器方法对此进行了实验定量研究,用模式法进行了波前重构。得到了扰动量与泽尼克像差的定量关系。结果表明,凹镜倾斜扰动对腔模的影响大于凸镜,对于大菲涅耳数非稳腔,腔内倾斜扰动量与腔外泽尼克倾斜系数具有良好的线性关系,若对凹、凸腔镜分别施加等量倾斜扰动,带来的腔外泽尼克倾斜系数比率约为光腔放大倍率。且腔模倾斜像差增加的同时还将导致离焦、像散等高阶像差的增大,因此作腔内相位补偿或校正时,应使补偿或校正平面尽可能靠近凹面镜;最后对实际激光束与He-Ne调腔光束的异同作了简要比较。     

Nonlinear fiber Fabry-Perot resonator using thermo-optic effect

A new nonlinear fiber-based Fabry-Perot resonator (FFPR) is proposed for bistable optical devices in fiber optics, The device is constructed by embedding a metal-dielectric Fabry-Perot resonator containing a thermo-optic material into a single-mode fiber. The transmission and attenuation characteristics of the linear FFPR have been analyzed under Gaussian-beam approximation by the method of plane-wave expansion. The effects of the mirror separation, the thickness of the metal mirror, the coating number of the multilayer mirror, and the spacer index have been investigated numerically. Moreover optical bistability in the nonlinear FFPR has been investigated by the graphical solution. It has been found that the input-output characteristics of the proposed FFPR are strongly affected by the angular divergence of the beam in the spacer. Optical bistability has been demonstrated experimentally at the milliwatt-power levels by using a 1.3-μm diode laser and single-mode fibers     

直角内圆锥面全反镜折叠腔激光器的输出特性

为简化高功率激光器谐振腔结构,提高激光谐振腔的稳定性特别是热稳定性,增加基模体积,改善光束质量,采用直角内圆锥面反射镜作为全反镜,平行平面镜作为输出镜组成新型激光谐振腔.实验结果表明,在圆锥全反镜失调角小于37.3′时,圆锥折叠腔激光器的单脉冲输出能量下降小于5%,且近场输出光斑没有明显变化;经模式仪分析表明,圆锥折叠腔激光近场光强分布均匀.圆锥反射镜折叠具有非常强的抗失调能力,结构简单,便于安装调整,特别适合于恶劣环境下的强激光系统应用.     

Polarization-preserved and polarization-rotated synchronization of chaotic vertical-cavity surface-emitting lasers

The synchronization process in a vertical-cavity surface-emitting laser (VCSEL) based master-slave configuration, where the master laser has been destabilised by optical feedback from an external mirror, has been investigated. The dynamics of both VCSEL polarization modes have been modeled and used to study the chaos synchronization mechanism in both polarization preserved, and polarization rotated unidirectionally coupled master and slave configurations. Two types of synchronization have been identified in the polarization rotated case, one of which may afford an opportunity to effect multiplexed message encoding using orthogonal laser modes.     

Low threshold InGaAs/GaAs 45° folded cavity surface-emittinglaser grown on structured substrates

A novel folded cavity surface-emitting laser structure integrating a horizontal cavity InGaAs/GaAs laser grown on a structured substrate with a high reflectivity Bragg reflector has been fabricated. Devices with threshold currents of 8 mA and CW wall plug efficiencies at 5% at 6 mW output power have been demonstrated at a wavelength of 0.99 μm. By combining a cleaved uncoated mirror with the 45° deflecting mirror the authors have obtained threshold current as low as 5 mA for a device 450 μm long