Characterization of High-Pressure $hbox{XeF}_{2}$ Vapor-Phase Silicon Etching for MEMS Processing

Typical release for structures in microelectromechanical systems (MEMS) devices requires the use of sacrificial layers and wet etchants. As an alternative, bulk Si can be utilized for nonsilicon MEMS or structures as the sacrificial material when exposed to vapor-phase XeF₂ . This paper presents the results of using relatively high pressures (> 3.0 torr) for the purpose of MEMS processing, while characterizing the physical etching mechanism and its effects on the working Si substrate in relation to the allowed processing time. The observed etch rates for high-pressure release varied from 1.6 to 1.9 mum/min for applied pressures of 4.5-5.5 torr. The resulting roughness is shown to be primarily dependent on time, where the maximum average roughness is approximately 1.4 mum after 3000 s at 5.5 torr. Slightly anisotropic results are produced by the increased pressures, showing a 0.7 : 1.0 (vertical : lateral) etch rate, as well as some detrimental effects to the released structures. Furthermore, the use of etch windows are investigated in relation to etch rate when subjected to these high pressures.     

Delay-Dependent $hbox{H}_{infty }$ Filter Design for Discrete-Time Fuzzy Systems With Time-Varying Delays

This paper investigates delay-dependent $hbox{H}_{bminfty }$ filter design problems for discrete-time fuzzy systems with time-varying delays. First, a novel delay-dependent piecewise Lyapunov–Krasovskii functional (DDPLKF) is proposed in which both the upper bound of delays and the delay interval are considered. Based on this DDPLKF, the delay-dependent stability criteria for discrete-time systems with constant or time-varying delays are obtained, respectively. Then, delay-dependent full-order and reduced-order $hbox{H}_{bminfty }$ filter design approaches are proposed. The filter parameters can be obtained by solving a set of linear matrix inequalities (LMIs). Simulation examples are also given to illustrate the performance of the proposed approaches. It is shown that our approaches are less conservative and that the corresponding $hbox{H}_{bminfty }$ filters can achieve better performance than the existing approaches.      

Firing Sequences Estimation in Vector Space Over $Z_{3}$ for Ordinary Petri Nets

Event sequences estimation is an important issue for fault diagnosis of Discrete event systems, so far as fault events cannot directly be measured. This paper is about event sequences estimation with Petri net models. Events are assumed to be represented with transitions, and firing sequences are estimated from measurements of the marking variation. Estimation with and without measurement errors are discussed in $n$-dimensional vector space over alphabet $Z_{3} = {-1, 0, 1}$. Sufficient conditions and estimation algorithms are provided. Performance is evaluated, and the efficiency of the approach is illustrated on two examples from manufacturing engineering.      

Software Engineering and Scale-Free Networks$^{ast}$

Complex-network theory is a new approach in studying different types of large systems in both the physical and the abstract worlds. In this paper, we have studied two kinds of network from software engineering: the component dependence network and the sorting comparison network (SCN). It is found that they both show the same scale-free property under certain conditions as complex networks in other fields. These results suggest that complex-network theory can be a useful approach to the study of software systems. The special properties of SCNs provide a more repeatable and deterministic way to study the evolution and optimization of complex networks. They also suggest that the closer a sorting algorithm is to the theoretical optimal limit, the more its SCN is like a scale-free network. This may also indicate that, to store and retrieve information efficiently, a concept network might need to be scale-free.      

The M3 multiprocessor laboratory

An integrated programming environment for the M³ multiprocessor is discussed. Three tools support the software development cycle of a parallel program, including the programming, configuration, and debugging/performance measurement phases. Programmer support for performance analysis has been a primary motivation for the system. The sources of performance loss are identified and the ways in which this information is gathered and analyzed are described. As a case study, a fast maze router algorithm is used to show the functionality of the different tools. The M³ environment is compared with other state-of-the-art projects     

Decentralized $H_{infty }$ Filter Design for Discrete-Time Interconnected Fuzzy Systems

This paper describes a decentralized $H_{infty }$ filter design for discrete-time interconnected fuzzy systems based on piecewise-quadratic Lyapunov functions. The systems consist of $J$discrete-time interconnected Takagi–Sugeno (T–S) fuzzy subsystems, and a decentralized $H_infty$ filter is designed for each subsystem. It is shown that the stability of the overall filtering-error system with $H_{infty }$ performance can be established if a piecewise-quadratic Lyapunov function can be constructed. Moreover, the parameters of filters can be obtained by solving a set of linear matrix inequalities that are numerically feasible. Two simulation examples are given to show the effectiveness of the proposed approach.      

${cal H}_{infty}$ Output-Feedback Control Based on an FIR-Type Quasi-Deadbeat Observer

This technical note proposes a novel output-feedback control law based on a finite impulse response (FIR)-type quasi-deadbeat observer for linear systems. For nominal systems without disturbances, this technical note first establishes the deadbeat condition that reduces the state estimation error to zero within a finite time and verifies that all the hidden poles of the closed-loop system under the quasi-deadbeat observer-based control law are zero and that the separation principle holds true. In order to enhance the disturbance rejection capability for systems with random-work disturbances, on the structural merit of the FIR-type observer, we have proposed the conditions for an ${cal H}_{infty}$ quasi-deadbeat observer and an ${cal H}_{infty}$ stabilizer based on the predetermined observer, respectively.      

Group Interaction Analysis in Dynamic Context$^{ast}$

Computer understanding of human actions and interactions is one of the key research issues in human computing. In this regard, context plays an essential role in semantic understanding of human behavioral and social signals from sensor data. This paper put forward an event-based dynamic context model to address the problems of context awareness in the analysis of group interaction scenarios. Event-driven multilevel dynamic Bayesian network is correspondingly proposed to detect multilevel events, which underlies the context awareness mechanism. Online analysis can be achieved, which is superior over previous works. Experiments in our smart meeting room demonstrate the effectiveness of our approach.      

${cal H}_{infty}$ State-Feedback Control Design for Fuzzy Systems Using Lyapunov Functions With Quadratic Dependence on Fuzzy Weighting Functions

This paper proposes a method for designing an ${cal H}_{infty}$ state-feedback fuzzy controller for discrete-time Takagi–Sugeno (T-S) fuzzy systems. To derive less conservative ${cal H}_{infty}$ stabilization conditions, this paper enhances the interactions among the fuzzy subsystems using a multiple Lyapunov function with quadratic dependence on fuzzy weighting functions. Besides, for more allocation of the nonlinearity to the fuzzy control system, this paper introduces a slack variable that is quadratically dependent on the one-step-past fuzzy weighting functions as well as the current ones. In the derivation, the ${cal H}_{infty}$ stabilization conditions are formulated in terms of parameterized linear matrix inequalities (PLMIs), which are reconverted into LMI conditions with the help of an efficient relaxation technique.      

${cal H}_{infty}$ Filtering of Discrete-Time Markov Jump Linear Systems Through Linear Matrix Inequalities

This technical note addresses the discrete-time Markov jump linear systems ${cal H}_{infty}$ filtering design problem. First, under the assumption that the Markov parameter is measurable, the main contribution is the linear matrix inequality (LMI) characterization of all linear filters such that the estimation error remains bounded by a given ${cal H}_{infty}$ norm level, yielding the complete solution of the mode-dependent filtering design problem. Based on this result, a robust filter design able to deal with polytopic uncertainty is considered. Second, from the same LMI characterization, a design procedure for mode-independent filtering is proposed. Some examples are solved for illustration and comparisons.      

A Parameter-Dependent Approach to Robust $H_{infty }$ Filtering for Time-Delay Systems

This paper is concerned with the problem of robust $H_{infty }$ filtering for linear continuous-time systems with polytopic parameter uncertainties and time-varying delay in the state. We utilize the polynomially parameter-dependent idea to solve the robust $H_{infty }$ filtering problem, with new linear matrix inequality conditions obtained for the existence of admissible filters. These conditions are developed based on homogeneous polynomially parameter-dependent matrices of arbitrary degree. The delay-dependence and polynomial parameter-dependence guarantee the proposed approach to be potentially less conservative, which is shown via a numerical example.      

Fuzzy Interpolative Reasoning for Sparse Fuzzy Rule-Based Systems Based on ${bm alpha}$-Cuts and Transformations Techniques

In sparse fuzzy rule-based systems, the fuzzy rule bases are usually incomplete. In this situation, the system may not properly perform fuzzy reasoning to get reasonable consequences. In order to overcome the drawback of sparse fuzzy rule-based systems, there is an increasing demand to develop fuzzy interpolative reasoning techniques in sparse fuzzy rule-based systems. In this paper, we present a new fuzzy interpolative reasoning method via cutting and transformation techniques for sparse fuzzy rule-based systems. It can produce more reasonable results than the existing methods. The proposed method provides a useful way to deal with fuzzy interpolative reasoning in sparse fuzzy rule-based systems.      

Toward the Formal Verification of a Unification System $^{ast}$

Unification grammars are widely used for encoding human knowledge. For unification systems, one major difficulty is the debugging of rules. In this paper, the authors suggest a novel method based on model checking to theoretically verify a complex grammar system for a unification-based parser. We propose the modeling method of the grammar and, more importantly, the abstraction method to compress the state space. We apply partial Kripke structures to model the rules. We prove that the state space can be reduced by several orders of magnitude while still keeping the behaviors of a noncompressed one. Practical verification issues are discussed, including the restrictions on specifications, the properties to check, etc. The proposed method will contribute to the effective debugging and application of unification grammars.      

6H-SiC JFETs for 450 $^{circ}hbox{C}$ Differential Sensing Applications

N-channel 6H-SiC depletion-mode junction field-effect transistors (JFETs) have been fabricated, and characterized for use in high-temperature differential sensing. Electrical characteristics of the JFETs have been measured and are in good agreement with predictions of an abrupt-junction long-channel JFET model. The electrical characteristics were measured across a 2-in wafer for temperatures from 25 $^{ circ}hbox{C}$ to 450 $^{circ}hbox{C}$, and the extracted pinchoff voltage has a mean of 11.3 V and a standard deviation of about 1.0 V at room temperature, whereas pinchoff current has a mean of 0.41 mA with standard deviation of about 0.1 mA. The change in pinchoff voltage is minimal across the measured temperature range, whereas pinchoff current at 450 $^{circ}hbox{C}$ is about half its value at room temperature, consistent with the expected change in the $nmu_{n}$ product. The characterization of differential pairs and hybrid amplifiers constructed using these differential pairs is also reported. A three-stage amplifier with passive loads has a differential voltage gain of 50 dB, and a unity-gain frequency of 200 kHz at 450 $^{circ}hbox{C}$, limited by test parasitics. A two-stage amplifier with active loads has reduced sensitivity to off-chip parasitics and exhibits a differential voltage gain of 69 dB with a unity-gain frequency of 1.3 MHz at 450 $^{circ}hbox{C}$.$hfill$[2009-0029]      

$ {cal L}_{2}$ Gain of Periodic Linear Switched Systems: Fast Switching Behavior

We investigate the $ {cal L}_{2}$ gain of periodic linear switched systems under fast switching. For systems that possess a suitable notion of a time-average system, we characterize the relationship between the ${cal L}_{2}$ gain of the switched system and the ${cal L}_{2}$ gain of its induced time-average system when the switching rate is sufficiently fast. We show that the switched system ${cal L}_{2}$ gain is in general different from the average system ${cal L}_{2}$ gain if the input or output coefficient matrix switches. If only the state coefficient matrix switches, the input-output energy gain for a fixed ${cal L}_{2}$ input signal is bounded by the ${cal L}_{2}$ gain of the average system as the switching rate grows large. Additionally, for a fixed ${cal L}_{2}$ input, the maximum pointwise in time difference between the switched and average system outputs approaches zero as the switching rate grows.      

Piecewise $H_{infty}$ Controller Design of Uncertain Discrete-Time Fuzzy Systems With Time Delays

This paper considers the robust $H_{infty}$ control of uncertain discrete-time fuzzy systems with time delays based on piecewise Lyapunov--Krasovskii functionals. It is shown that the stability with $H_{infty}$ disturbance attenuation performance can be established for the closed-loop fuzzy control systems if there exists a piecewise Lyapunov--Krasovskii functional, and moreover, the functional and the corresponding controller can be obtained by solving a set of linear matrix inequalities that are numerically feasible. A numerical example is given to demonstrate the efficiency and the advantage of the proposed method.      

Coloured Petri nets and graphical simulation for the validation of a robotic cell in aircraft industry

This paper proposes a mixed validation approach based on coloured Petri nets and 3D graphic simulation for the design of supervisory systems in manufacturing cells with multiple robots. The coloured Petri net is used to model the cell behaviour at a high level of abstraction. It models the activities of each cell component and its coordination by a supervisory system. The graphical simulation is used to analyse and validate the cell behaviour in a 3D environment, allowing the detection of collisions and the calculation of process times. The motivation for this work comes from the aeronautic industry. The automation of a fuselage assembly process requires the integration of robots with other cell components such as metrological or vision systems. In this cell, the robot trajectories are defined by the supervisory system and results from the coordination of the cell components. The paper presents the application of the approach for an aircraft assembly cell under integration in Brazil. This case study shows the feasibility of the approach and supports the discussion of its main advantages and limits.     

Relaxed ${cal H}_{infty }$ Stabilization Conditions for Discrete-Time Fuzzy Systems With Interval Time-Varying Delays

To derive less-conservative delay- and range-dependent ${cal H}_{infty }$ stabilization conditions for discrete-time Takagi–Sugeno (T–S) fuzzy systems with interval time-varying delays, the use of a fuzzy-weighting-dependent Lyapunov–Krasovskii functional (FWLKF), in which all variables are set to be affinely or quadratically dependent on fuzzy weighting functions, is proposed. Subsequently, parameterized linear matrix inequality (PLMI)-based ${cal H}_infty$ stabilization conditions are derived by following the free-weighting matrix approach. To fully exploit the convexity of fuzzy weighting functions, the derived PLMIs are sequentially replaced by a finite set of LMIs by considering all possible conditions associated with fuzzy weighting functions.      

New Approach on Robust Delay-Dependent ${H}_infty$ Control for Uncertain T--S Fuzzy Systems With Interval Time-Varying Delay

This paper investigates the robust ${H}_{infty }$ control for Takagi--Sugeno (T--S) fuzzy systems with interval time-varying delay. By employing a new and tighter integral inequality and constructing an appropriate type of Lyapunov functional, delay-dependent stability criteria are derived for the control problem. Because neither any model transformation nor free weighting matrices are employed in our theoretical derivation, the developed stability criteria significantly improve and simplify the existing stability conditions. Also, the maximum allowable upper delay bound and controller feedback gains can be obtained simultaneously from the developed approach by solving a constrained convex optimization problem. Numerical examples are given to demonstrate the effectiveness of the proposed methods.      

Some New Results on Strong $gamma_k$ -$gamma_{cl} H_{infty}$ Stabilization

The strong $gamma_k{hbox{-}}gamma_{cl}~ H_{infty}$ stabilization problem is addressed in this paper. Based on the bounded real lemma, an improved sufficient condition on strong $H_{infty}$ stabilization as well as its dual form is derived, which extends the ARE constraint in the former results into an inequality constraint. Two path-following algorithms are proposed to solve the associated optimization problems with BMI constraints, which lead to full order controllers. A numerical example is presented to demonstrate the effectiveness of the result.