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1.
不同反应气源对制备纳米金刚石膜的影响   总被引:1,自引:0,他引:1       下载免费PDF全文
为确定两种典型的反应气源对制备纳米金刚石膜的影响,分别以CH4/Ar/H2及CH4/N2混合气体作为反应源,用微波等离子体化学气相沉积(MWPCVD)法制备纳米金刚石薄膜.XRD和Raman分析表明两种气源条件下得到的膜材均为金刚石多晶膜,但用CH4/N2气为反应源沉积的膜材中非金刚石相成分明显更多;AFM和SEM对照分析证实所有膜层的平均晶粒尺寸及表面粗糙度均在几十纳米量级,但CH4/N2气源沉积的膜中容易形成异常长大的晶粒,不利于表面质量的提高.研究结果表明,以CH4/Ar/H2混合气体作为反应气源可制备物相组成纯度更高、表面形态更为优越的纳米金刚石膜.  相似文献   

2.
微波等离子体化学气相沉积装置用于制备纳米金刚石膜和纳米金刚石真空窗口,气源为H2、CH4、Ar和少量O2。扫描电镜、拉曼光谱、X射线衍射仪、原子力显微镜用于表征和分析纳米金刚石膜,自制的漏气率测量装置测出纳米金刚石真空窗口漏气率。结果表明:金刚石膜厚20μm、表面平均粗糙度Ra=34. 6 nm,平均晶粒尺寸35 nm,金刚石窗口漏气率为2. 78×10-9Pa·m3/s。  相似文献   

3.
葛芳芳  王红斌 《功能材料》2004,35(Z1):1128-1130
研究了不同衬底上纳米金刚石膜场电子发射性质.纳米金刚石膜是用热灯丝化学气相沉积法合成的.反应气体是CH4、H2和N2的混合物.得到的纳米金刚石膜利用扫描电子显微镜和拉曼谱等进行检测和表征.场发射是在压强为106Pa的真空室进行测量的.实验结果表明,在纳米金刚石膜上涂有碳纳米管展显了更低的开启电场,它比碳纳米管,Mo上纳米金刚石及Si上纳米金刚均要低得多.但Mo和Si上纳米金刚石要比Si上多晶金刚石开启电场低.文中对实验结果进行了讨论.  相似文献   

4.
在热丝化学气相沉积体系中,系统研究了气压对CH4/H2/Ar气氛中纳米金刚石薄膜生长的影响.研究发现,体系气压对纳米金刚石的生长有很大的影响.在40torr的气压下,在CH4/H2/Ar气氛中的Ar气含量需高达90%才能保证纳米金刚石薄膜的生长,但降低气压至5torr时,50%的Ar气含量即可保证纳米金刚石薄膜的生长.压力对薄膜生长表面的气体浓度的影响是这个转变的主要原因.在同样的Ar含量下,在5torr下的C2活性基团的浓度高于40 torr的浓度,因而低的Ar含量会保证纳米金刚石薄膜的生长.  相似文献   

5.
掺氮纳米金刚石膜的制备和性能   总被引:1,自引:0,他引:1  
以Ar、CH4和CO2为反应气源,以三聚氰胺的甲醇饱和溶液为掺杂源,用微波等离子体化学气相沉积法在单晶硅基体上制备了掺氮的金刚石薄膜;用原子力显微镜,拉曼光谱以及霍尔效应测试仪等手段表征了膜的组成结构和半导体特性.结果表明:掺氮的金刚石薄膜晶粒平均尺寸约为20 nm,表面粗糙度约为8.935 nm,其拉曼光谱为典型的纳...  相似文献   

6.
采用直流热阴极等离子体化学气相沉积(PCVD)技术,通过在CH4/H2的混合反应气源中通入不同流量的N2,合成了掺氮纳米金刚石薄膜。结果表明随着氮气流量的增加,金刚石薄膜表面形貌发生明显变化:晶粒细化,晶界和缺陷有所增多,膜层由尺寸较大微晶颗粒转向纳米级菜花状结构,并且薄膜表面粗糙度相应变小。同时薄膜中非金刚石组份相对逐渐增多。氮气的引入可以促进金刚石二次形核,抑制金刚石大颗粒生长,对薄膜的生长取向、形貌及结构都产生一定影响。  相似文献   

7.
直流热阴极PCVD法CH_4:N_2:H_2气氛下制备纳米金刚石膜   总被引:1,自引:1,他引:0  
采用直流热阴极等离子体化学气相沉积(PCVD)技术,在CH4:H2中加入N2改变等离子体能量分布状态,提高二次形核比例,制备纳米金刚石膜。在CH4:H2气体中,在不同压力和温度下,改变通入N2的比例,分析直流热阴极等离子体放电下N2对金刚石膜生长的影响。采用拉曼光谱仪、扫描电镜(SEM)和X射线衍射分析仪(XRD)对样品进行了表征,结果表明,直流热阴极PCVD系统中,CH4:N2:H2气氛下,N2流量小于气体总流量的50%时,在6×103 Pa、850℃条件下,制备的金刚石膜样品的晶粒小于100nm、金刚石1332 cm-1特征峰展宽且强度较高、金刚石的XRD衍射峰强度也较高,具备纳米金刚石膜的基本特征。因此,利用直流热阴极PCVD方法,在较低温度和气压下,CH4:H2中加入少量N2,可以制备出纳米金刚石膜。  相似文献   

8.
采用微波等离子体化学气相沉积法,以Ar/H2/CH4为气源,通过改变气源流量比例和功率,探究生长低粒径纳米金刚石的最佳条件。利用X射线衍射仪和扫描电子显微镜分别对制备出的薄膜的晶粒尺寸和表面形貌进行了表征,并采用拉曼散射光谱仪对薄膜的质量及残余应力进行了分析。结果表明:氩氢浓度比例相对于功率和甲烷浓度等因素对金刚石粒径影响较大;随着氩氢浓度比例增大,金刚石粒径呈减小趋势;金刚石相对于石墨相的含量先减小后增大,且由拉曼G峰引起的拉应力不断增大;膜表面的团聚体尺寸逐渐减小,平整度随之提升。  相似文献   

9.
张兵  王必本 《材料导报》2005,19(Z1):155-156
利用等离子体增强热丝化学气相沉积,用CH4和H2为反应气体,在不同CH4浓度的情况下制备了纳米金刚石颗粒,并用高分辨扫描电子显微镜和显微Raman光谱仪对它们进行了表征.结果表明,纳米金刚石颗粒随CH4浓度的增大而增大.结合与CH4-H2等离子体有关的结果,对纳米金刚石颗粒随CH4浓度的生长进行了分析和讨论.  相似文献   

10.
利用微波等离子体化学气相沉积法,以甲烷、氢气和氩气作为工作气体,在较低的沉积温度下,沉积得到了连续的金刚石薄膜。利用扫描电子显微镜、X射线衍射仪、拉曼光谱仪分别对金刚石薄膜的表面形貌、生长结构以及沉积质量进行了表征。实验结果表明,氩气的引入虽然可以有效的降低获得金刚石薄膜所需的基片温度,但为了提高金刚石薄膜的质量,需要适当的提高微波功率。同时,当基片温度一定时,在CH4/H2/Ar体系和CH4/H2体系下均可获得表面形貌与生长结构相似的金刚石薄膜,且可能利用CH4/H2/Ar作为工作气体沉积金刚石薄膜所需要的微波功率更低。  相似文献   

11.
A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils.  相似文献   

12.
The end of 2007, over 200 unit products of more than 80 Chinese firms have passed the quality grade certification for liquor products. These products involve distilled spirits, beer, wine, yellow wine, fruit syrup wine and others, and cover over 80% of the national top-branded liquor products.……  相似文献   

13.
Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster.  相似文献   

14.
We studied a combined effect of the cryoprotectants both of lipid and carbohydrate origin at the presence of DMSO or without it on cell viability and the RNA synthesis in the embryonic mollusc and echinoderm cell cultures obtained at different developmental stages. Cryoprotective properties of exogenous lipids correlated with their thermotropic behavior. Lipid extracts from marine hydrobiontes, which thermal transitions are characterized by relatively small part of calorimetric thermogram area lying at temperatures above 0 °C (6–18%), were found to possess a considerable cryoprotective activity. The results are discussed in relation to the prediction of the cryoprotective activity of lipid extracts for marine animal cells. In addition, it was found that marine invertebrate cells can be cryopreserved without DMSO at the presence of trehalose and lipid extracts of some marine hydrobiontes.  相似文献   

15.
Pure silver is used extensively in the preparation of high-temperature superconductor wires, tapes, films, and other configurations in which the silver not only shields the superconducting material from the surrounding materials, but also provides a degree of flexibility and strain relief, as well as stabilization and low-resistance electrical contact. Silver is relatively expensive, but at this stage of superconductor development, its unique combination of properties seems to offer the only reasonable means of achieving usable lengths of conductor. In this role, the low-temperature physical (electrical, thermal, magnetic, optical) and mechanical properties of the silver all become important. Here we present a collection of properties data extracted from the cryogenic literature and, to the extent possible, selected for reliability.  相似文献   

16.
ABSTRACT

The production of iron in Biscay (Basque Country, Spain) has been a hallmark of this territory of the North of the Iberian Peninsula throughout its history. The Archaeology team of the Basque Country Mining Museum has spent 13 years, so far, studying the origins of this activity through the evidences left at the old pre-hydraulic iron production workshops known as mountainside ironworks (ferrerías de monte) or haizeolak. It has catalogued 170 archaeometallurgical sites of this type in Biscay, and the archeological excavation of some of them has led to the knowledge of the different stages of the production process that took place in these workshops. The team has also experimentally reproduced the work carried out in a mountainside ironworks from the High Middle Ages, and it has currently started the characterization process of this type of activity through the study of the collected materials.  相似文献   

17.
As demands about environment protection are growing up, dry cutting technology is getting more and more concerns from all over the world. Main works performed here are study on dry cutting performances and wear mechanisms of M2high-speed steel (HSS) twist drills with CrAlTiN multicomponent coatings, which was deposited using magnetron sputter ion plating system, in drilling 45 and 30CrMnSiA steel, and their comparisons to those in drilling the same steel but using monolayer CrN and commercial TiN coated drills. Drilling performances of drills are evaluated mainly through the measurements of width on outer corner flank land and the cutting forces. Results show that performances of CrAlTiN coated drills are better than those of monolayer CrN and TiN coated drills. In drilling 45 and 30CrMnSiA steel, the average tool life of the CrAlTiN coated drills are 17.2 and 11.8 times higher than those of the uncoated drills. Observing wear of the drill with scanning electronic microscope, results show that there is no crack or spallation of the CrAlTiN coatings in wear zones. Main mechanism of the wear here is adhesion.  相似文献   

18.
Arc spraying coatings are widely used in various applications, but uncommon in cast iron substrate. Different surface pretreatment technology is tested on substrates of gray cast iron. Surface roughness and residual stress were measured by TR200 and X-ray diffraction analyzer. Influence of different surface pretreatment methods ( dry blasting and fusebond) on roughness and residual stress was analyzed. The arc-sprayed coatings of wire 3Cr13 (φ2mm) on gray cast iron substrate is studied. The microstructure and interface of bonding layer were observed by SEM. The bond strength was taken by tensile test. Results show that bond strength with grit blasting is higher than fuse-bond; it is feasible to make wire 3Cr13 coating with arc spraying on cast iron substrate roughened by grit blasting.  相似文献   

19.
TiO2 ceramic coatings with thickness of 20 μm were formed on the surface of pure titanium by micro-plasma oxidation. Their micro-structures were investigated by by using X-ray diffraction and their surface images were detected by using scan electronic microscope. There were three kinds of TiO2 coatings, pure anatase type TiO2 phase, mixed phases consisted of rutile type TiO2 phase and anatase type TiO2 phase, pure rutile type TiO2 phase. The coating surface with the pure anatase type TiO2 phase is rough, while the coating surface with the pure rutile type TiO2phase is smooth. The upper coating surface with the mixed type TiO2 phases is anatase type TiO2 structure and the subsurface of the TiO2 coating is rutile type TiO2structure.  相似文献   

20.
The insightful discussion of the relationship between the construction of metallographic and fatigue life and proposition of mathematical relationships describing this relationship was conducted in the paper. This paper presents a method for estimating the fatigue life, based on the construction of the microstructural material taking into account the grain size and the participation of ferrite and pearlite phase.  相似文献   

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