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1.
热处理温度对TbFe2/Fe交换耦合磁致伸缩多层膜的影响 总被引:5,自引:1,他引:4
采用直流磁控溅射在20mm×5mm×240μm抛光单晶硅片上制备了TbFe2/Fe磁致伸缩多层膜,主要研究了热处理温度对TbFe2/Fe磁致伸缩多层膜磁致伸缩系数的影响.采用量热分析法(DSC)、XPS以及光杠杆测试法对TbFe2/Fe磁致伸缩多层膜的晶化曲线、成分随深度的变化以及磁致伸缩系数进行了分析与测试.结果表明TbFe2薄膜的起始晶化温度为327℃,晶化温度为372℃;TbFe2/Fe磁致伸缩多层膜的最佳热处理温度为327℃,在此热处理温度下热处理60min,外加磁场1.6×104A/m时,TbFe2/Fe磁致伸缩多层膜磁致伸缩系数可达1.56×10-4.采用XPS分析了一个周期的TbFe2/Fe成分随薄膜深度的变化,未经热处理的薄膜Fe层和TbFe2层之间界面清晰,两层之间有少量的扩散.经327℃热处理60min的薄膜Fe层和TbFe2层界面发生了互扩散,原子数之比也发生了改变. 相似文献
2.
TbFe/Fe交换耦合磁致伸缩多层膜的制备 总被引:4,自引:0,他引:4
采用双靶磁控溅射法制备了 TbFe/Fe交换耦合磁致伸缩多层膜,考察了热处理时间、Fe层厚度、溅射功率以及Ar气分压对多层膜低场磁致伸缩性能的影响。研究结果表明:TbFe 磁致伸缩层与软磁 Fe层之间通过交换耦合作用以及热处理能明显提高薄膜的软磁性能和磁致伸缩性能;TbFe/Fe多层膜的磁致伸缩性能对热处理时间、Fe 层厚度、溅射功率、Ar 气分压等薄膜沉积参数十分敏感;与 TbFe 磁致伸缩薄膜相比TbFe/Fe交换耦合磁致伸缩多层膜水平方向的矫顽力从 16kA/m降低到 9.6 kA/m。在外加磁场为8000 A/m条件下,TbFe/Fe磁致伸缩多层膜最大磁致伸缩系数可达1.58×10-4。 相似文献
3.
采用直流磁控溅射法制备了非晶态 TbFe磁致伸缩薄膜,通过基片的倾斜安装研究了基片倾斜角度对TbFe薄膜磁致伸缩性能的影响。结果表明:随着基片倾斜角度的增大 TbFe薄膜的磁致伸缩系数增大,在外加磁场110kA·m-1下基片倾斜角度为 60°时薄膜磁致伸缩系数达到最大值 1.02×10-4,并且随着基片倾斜角度的增大 TbFe薄膜的易磁化方向由垂直膜面方向逐渐转向平行膜面方向。这是由于倾斜基片溅射形成的倾斜的薄膜柱状微结构产生的形状各向异性引起的。 相似文献
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磁力显微镜(MFM)作为研究表面磁结构的有力工具广泛地应用于磁性薄膜的研究中.TbFe磁致伸缩薄膜在实际应用中要求易磁化轴平行于膜面,以具有较低的面内饱和场Hs,传统的成膜技术难以实现这一目标,采用倾斜溅射方法制备TbFe薄膜可有效降低面内饱和场Hs.通过测量样品的磁滞回线可以发现,易磁化轴随着溅射角度的增加逐渐偏离样品的法线方向,而取向于平行膜面.本研究工作利用MFM研究了不同溅射角度得到的TbFe薄膜的磁畴结构.发现薄膜的磁畴结构随着溅射角度的增加逐渐由垂直畴转化为水平畴,与磁滞回线测量得到的易轴方向发生偏转的结果相吻合. 相似文献
6.
稀土巨磁致伸缩材料优良的特性和广阔的应用前景受到国内外材料及相关领域的专家和学者的重视,被誉为新一代的Smart材料.介绍了稀土巨磁致伸缩材料的特性和性能优势、应用及器件研究进展,展望了稀土巨磁致伸缩材料今后的研究方向和器件开发. 相似文献
7.
21世纪战略性功能材料:—超磁致伸缩合金 总被引:2,自引:0,他引:2
一、超磁致伸缩合金材料的发展及 产业现状 磁致伸缩指材料尺寸伸长(或缩短)随外加磁场成比例变化。磁致伸缩的大小以相对伸缩l=DL/L来表示,l被称为磁致伸缩系数。超磁致伸缩合金(TbxDy1-xFe2-y)是近期迅速发展起来的高技术新型功能材料,其磁致伸缩系数l最高可达到2400ppm。而传统的磁致伸缩材料的l均很小,在几~几十ppm;随后发现的电致伸缩材料其l也只在100~600ppm。 1971年美国海军表面武器实验室A.E.Clark博士等人开始寻找在室温下仍具有大磁致伸缩的材料,发现TbFe2、DyFe2、SmFe2等具有高于室温的居里 相似文献
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超磁致伸缩薄膜执行器的模型建立 总被引:1,自引:0,他引:1
超磁致伸缩材料的研究已有几十年的历史,其制备工艺已比较成熟,并己实现了工业化生产及应用,但超磁致伸缩薄膜器件的理论建模及计算机模拟研究却鲜见报道,因此有必要开展磁致伸缩薄膜的计算机模拟工作,建立物理机制清晰、可应用于工程实际的数学模型,从而为薄膜器件的实际应用提供理论指导.建立了超磁致伸缩薄膜的磁-机械强耦合模型,并且进行了理论推导,应用无单元Galerkin方法进行数值计算,并与实验值进行比较,对模型的正确性进行了验证. 相似文献
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1997~1998年磁性功能材料进展 总被引:1,自引:0,他引:1
综述了磁性功能材料研究在1997~1998年间的若干新进展。内容包括(1)磁隧穿型巨磁电阻材料,(2)高矫顽力Sm-Co基薄膜永磁材料,(3)垂直磁记录介质材料,(4)纳米晶软磁材料,(5)薄带(膜)巨磁致伸缩材料。 相似文献
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本文研究了热处理对Tb0.27Dy 0.73Fe2薄膜磁性及巨磁致伸缩性能的影响.XRD分析表明制备态的Tb0.27Dy 0.73Fe2薄膜为非晶态,并且在450℃退火仍然保持非晶态,制备态的Tb0.27 Dy0.73Fe2薄膜显示垂直磁各向异性,在退火后向平行磁各向异性变化.热处理提高了Tb0.27Dy0.73Fe2薄膜在低磁场下的磁致伸缩特性. 相似文献
11.
Jiang H.C. Zhang W.L. Peng B. Zhang W.X. Yang S.Q. 《IEEE transactions on magnetics》2005,41(4):1222-1225
We have found that in-plane magnetostriction characteristics at low fields can be greatly improved by an oblique sputtering technique. We report a study of deposition of in-plane anisotropic TbFe giant magnetostrictive films by dc magnetron oblique sputtering, including the influences of deposition angle on TbFe film magnetic and magnetostrictive performances. The in-plane magnetization of TbFe films at 1600 kA/m is drastically increased with a change of deposition angles from 90/spl deg/ to 15/spl deg/. Magnetic domain structures explored by magnetic force microscopy indicate that the easy magnetization directions of the films can be gradually changed from perpendicular to the film plane at sufficiently shallow deposition angles. The in-plane magnetostrictive coefficients /spl lambda/ at 16 kA/m also can be increased by decreasing the deposition angles from 90/spl deg/ to 15/spl deg/. The significant variation in the in-plane magnetic and magnetostrictive performances can be explained by the decrease of perpendicular anisotropy of TbFe films. 相似文献
12.
Hongchuan JIANG Wanli ZHANG Wenxu ZHANG Shiqing YANG Huaiwu ZHANG College of Microelectronics Solid State Electronics University of Electronic Science Technology of China Chengdu China 《材料科学技术学报》2005,21(3):315-318
To increase the low-field magnetostriction of TbFe films, the influences of sputtering angles and annealing temperatures on its magnetic and magnetostrictive performances were systematically investigated. With the change in sputtering angles from 90°to 15°, the in-plane magnetization of TbFe films, at 1600 kA·m-1 external field, is strongly increased. An enhancement in the in-plane magnetostrictive coefficient of the films at 40 kA·m-1 is also observed. A detection of magnetic domains by MFM (magnetic force microscopy) indicates that the easy magnetization direction shifts gradually from perpendicular to parallel to the film plane with decreasing sputtering angles. Annealing can enhance the magnetization and magnetostriction of the TbFe films. However, at too high annealing temperature, both the magnetization and magnetostriction of the TbFe films were suppressed to some extent. 相似文献
13.
G. Balaji R. Aravinda NarayananA. Weber F. Mohammad C.S.S.R. Kumar 《Materials Science and Engineering: B》2012,177(1):14-18
Typically the value of the magnetostrictive coefficient (λ) observed for bulk magnetic materials such as cubic ferrites is 10−6. However, giant magnetostriction (λ ≤ 10−3) is only observed in a few bulk intermetallic materials based on alloys of rare earth and iron such as TbFe, TbFe2, DyFe2 and Terefenol-D. While giant magnetostriction is known in nanostructured films, we show for the first time, this phenomenon occurs in magnetic nanoparticles. By using in-field small angle X-ray scattering (SAXS) as a tool, we demonstrate that a 4% relative change in dimension of the particle can be observed in 5.0 nm Fe3O4 nanoparticles at room temperature with 1 kG magnetic field. Also, we propose that the observed values are due to interaction effects and magnetoelastic coupling of particle magnetic moments and external magnetic field. 相似文献
14.
本文研究了轧制青铜试片的取向对离子束溅射(IBS)制备的TbDy-Fe超磁致伸缩膜(GMF)应力及磁致伸缩性能的影响.结果表明,溅射沉积在沿垂直轧制方向截取的试片上沉积膜的应力小于沿平行轧向截取的试片上沉积膜的应力,从而对薄膜的磁致伸缩性能产生相应的影响. 相似文献
15.
Cluster-assembled Tb-Fe nanostructured films were prepared by the low energy cluster beam deposition method. The microstructure, magnetization and magnetostriction were investigated for the films. It is shown that the film is assembled by monodisperse spherical nanoparticles with average diameter of ~30?nm which are distributed uniformly. The cluster-assembled Tb-Fe nanostructured films exhibit good magnetization and possess giant magnetostriction with saturation value of ~1060 × 10(-6), much higher than that of the common Tb-Fe films. The origin of good magnetization and giant magnetostriction for the cluster-assembled Tb-Fe nanostructured film was discussed. The present work opens a new avenue to produce the nanostructured magnetostrictive alloy in application of a nano-electro-mechanical system. 相似文献
16.
The giant magnetostrictive Tb-Fe films assembled by nanoparticles have been prepared by the low energy cluster beam deposition. The dependence of the magnetostriction on the size of the nanoparticles is examined for the films. It is shown that the nanofilms have obtained higher saturation magnetostriction at the cluster size of 30 nm in average. The dependence of magnetostriction on particle size is ascribed to the degree of magnetic anisotropy which is related to the effective distance of exchange coupling between the adjacent Tb-Fe nanoparticles. This work demonstrates that the magnetostriction can be varied by tuning the particle size, which is important for control over the magnetostrictive properties of the films at nanoscale. 相似文献
17.
分析材料磁化过程中引起磁致伸缩的机理,考虑应力对磁化过程的影响,通过将应力作用等效为磁场,并假设非晶超磁致伸缩薄膜的低场磁化为可逆过程,根据能量最低原理,建立了磁致伸缩薄膜形变与应力之间的关系,给出了表达式. 相似文献
18.