沉积温度对Gd掺杂CeO2电解质薄膜生长及电学特性的影响

采用反应射频磁控溅射技术,在非晶石英衬底上不同温度下制备了纳米多晶Gd掺杂CeO2(简称GDC)氧离子导体电解质薄膜,采用X射线衍射仪、原子力显微镜对薄膜物相、晶粒大小、生长形貌进行了表征,利用交流阻抗谱仪测试了GDC薄膜的电学性能.结果表明,GDC薄膜生长取向随沉积温度而变化:300-400℃时为强(111)织构生长,而500-600℃时薄膜趋于无规则生长;随着沉积温度的升高,薄膜的牛长形貌由同一取向的大棱形生长岛转变为密集球形小生长岛;GDC多晶薄膜的电导活化能约为1.3eV,接近于晶界电导活化能值,说明GDC交流阻抗主要源于晶界的贡献;晶界空间电荷效应导致GDC薄膜电导率随晶粒尺寸而变化,晶粒尺寸越小,电导率越大.     

沉积温度对化学气相沉积法制备铜薄膜性质的影响

以双(2,2,6,6-四甲基-3,5-庚二酮)化铜(Cu(DPM)_2)为前驱体,使用智能化学气相沉积设备在673 K至1173 K下于AlN多晶基板上制备Cu薄膜。研究了不同沉积温度对Cu薄膜的相组成、择优取向、宏观表面、微观结构、元素组成及电导的影响。在873 K至1173 K时制备了具有(111)择优取向的紫铜色铜薄膜,同时存在(200)和(220)取向,且铜晶粒呈岛状生长模式。随着沉积温度的升高,薄膜的导电性先增强后减弱。在1073 K时,制得了导电性最好且高度(111)择优取向的最纯紫铜色Cu薄膜,即1073 K为制备Cu薄膜的最佳沉积温度。     

磁控溅射法在玻璃基片制备VO_2薄膜的结构与性能

采用射频磁控溅射法在玻璃基片上制备了VO2薄膜。采用XRD、AFM和红外光谱仪研究了不同基片温度所得薄膜的结构、光学性能和相变特性。实验结果表明,薄膜的结晶程度随基片温度的增加而增加,并且VO2具有(011)择优取向。基片温度在400℃以上的VO2薄膜均出现较好的相变特性,500℃时的薄膜相变特性最佳。薄膜的红外透过率随着沉积温度的增加而逐渐增加。     

PLD方法制备CaCu3Ti4O12薄膜结构研究

采用脉冲激光沉积法(PLD)分别在LaAlO3(100)以及MgO(100)基片上,在不同的沉积温度下,制备具有体心立方类钙钛矿结构的CaCu3Ti4O12(CCTO)薄膜.在LAO基片上生长的CCTO薄膜,X射线衍射(XRD)分析表明沉积温度在680℃以上可以实现 (400)取向生长,740℃薄膜可以实现cubic-on-cubic的方式外延生长.原子力显微镜(AFM)和扫描电子显微镜(SEM)分析分别显示CCTO薄膜的表面平整,界面清晰.后位的反射高能电子衍射(RHEED)观察到CCTO薄膜的电子衍射图谱,为点状.在MgO基片上,由于薄膜与基片较大的晶格失配,通过生长具有(100)和(110)取向的LaNiO3(LNO)缓冲层,诱导后续生长的CCTO薄膜随着温度的提高,由(220)取向生长转变成(220),(400)取向生长.     

脉冲激光沉积b轴取向BaTi2O5薄膜的研究

采用脉冲激光沉积(PLD)技术,在MgO(100)基片上制备了b轴取向的BaTi2O5薄膜,研究了基片温度(Tsub)、氧分压(Po2)等沉积工艺对薄膜结构的影响.结果表明: BaTi2O5薄膜的物相及取向性都随基片温度和氧分压的改变而变化,薄膜呈现(710)或(020)取向生长,最佳的PLD沉积条件为Tsub=700℃和Po2=12.5Pa.在该条件下,BaTi2O5薄膜表现出明显的b轴取向,薄膜表面平整光滑,结晶良好,晶粒呈棒状交叉分布,结合紧密.     

O_2/Ar比例对直流脉冲磁控溅射制备TiO_2薄膜光催化性能的影响

利用直流脉冲磁控溅射方法在不同O2/Ar比例条件下制备具有不同结构、性能的TiO2薄膜,利用台阶仪、X射线衍射仪及紫外-可见分光光度计等仪器,对薄膜的结构、透光性能、光催化性能等进行表征。研究结果表明:TiO2薄膜的结构、光催化性能等强烈依赖于沉积过程中的O2/Ar比例。在低O2/Ar比例条件下制备的TiO2薄膜,薄膜处于O控制生长阶段,相应薄膜处于高速生长状态,薄膜经退火处理后形成锐钛矿(101)相择优取向结构,同时薄膜对甲基橙溶液降解率较低。随着O2/Ar比例的增加,薄膜生长速率逐渐降低,薄膜逐渐呈现多相混合生长,经退火处理后薄膜呈现锐钛矿(101)相与(004)相的混合相结构,相应薄膜对甲基橙溶液降解率增加,在O2/Ar比为6/14时,其对甲基橙溶液降解率达到最大值,为86.45%。继续增加O2/Ar比例,在高O2/Ar比例条件下,薄膜沉积速率较低,沉积离子有充足的驰豫时间释放自身能量以寻找低能位置,因此在薄膜沉积过程中主要形成能量最低的锐钛矿(101)相结构,经退火处理后薄膜呈现锐钛矿(101)相择优取向结构,在O2/Ar比为20/0时,薄膜对甲基橙溶液降解率下降至52.15%。     

离子束辅助沉积Al2O3薄膜的微观状态及其物理特性研究

本文利用透射电子显微镜、原子力显微镜、X光电子能谱等微观分析手段 ,系统研究了氧离子束辅助离子束沉积方法制备的Al2 O3 薄膜的化学成分、微观结构、表面形貌及其随退火温度的变化 ,并对Al2 O3 薄膜折射率、显微硬度和膜基结合强度等物理特性及其随沉积温度的变化进行了详细研究。研究发现 :用离子束辅助沉积制备的薄膜基本满足Al2 O3 的标准成分配比 ;在沉积温度低于 5 0 0℃制备的Al2 O3 薄膜以非晶Al2 O3 相a Al2 O3 为主 ;Al2 O3 薄膜的表面粗糙度、折射率、显微硬度随沉积温度的增加而增加 ;当沉积温度高于 2 0 0℃时 ,薄膜与基体间的膜基结合强度将随沉积温度的增加而下降。分析表明 :薄膜表面形貌与晶体内部的结构相变有关 ,薄膜的退火相变途径为a Al2 O380 0℃ γ Al2 O310 0 0℃ γ Al2 O3 +α Al2 O312 0 0℃ α Al2 O3 。     

脉冲激光沉积NiZn铁氧体薄膜的微观结构和磁性

采用脉冲激光沉积 (PLD)技术 ,分别在单晶硅基片和玻璃基片上沉积了NiZn铁氧体多晶薄膜 ,薄膜为单相尖晶石结构 ,在两种基片上都呈现出一定的 ( 4 0 0 )晶面的择优取向 ,但在硅基片上择优生长更显著 ;随着基片温度t的升高 ,薄膜晶粒尺寸逐渐增大 ;在t=5 0 0℃附近饱和磁化强度Ms 出现最小值 ,而矫顽力Hc 出现最大值 ;对薄膜进行退火处理 ,可使细小晶粒长大和内应力减小 ,对改善较低温度条件下制备的薄膜的软磁特性具有明显作用     

磁控溅射法制备CdS多晶薄膜工艺研究

采用磁控法制备了CdS薄膜,研究工艺参数对样品沉积质量、沉积速率及晶体结构的影响。实验发现,在不同衬底上制备CdS薄膜时需要采取不同的后续工艺措施以获得较好的沉积质量。同时,制备样品的沉积速率随衬底类型、衬底温度、溅射功率及溅射气压的变化而变化。讨论并给出了工艺参数对上述实验结果的影响机制。X射线衍射谱显示,制备样品是六方和立方两种晶型的混合,沿(002)和(111)晶面择优取向生长。随溅射功率的增大和衬底温度的升高,两种晶型互相竞争生长并分别略微占优势。当溅射功率增大到200 W,衬底温度升高到200℃时,占优势晶型消失,薄膜择优取向特性变得更好。此外,随着溅射气压的增大,样品结晶质量下降,在0.5 Pa时呈现明显非晶化现象。     

基于H—Si（100）表面上原子层沉积Al2O3的仿真研究

通过对原子层沉积过程的计算机仿真,分析不同沉积条件对沉积过程的影响.以H-Si(100)表面原子层沉积Al2O3的过程为基础,通过分析基片上不同表面功能团之间的相互作用,将整个沉积过程分为初始沉积和后续生长两个阶段.基于不同的阶段建立相应的前驱体到达事件模型、反应事件模型以及表面解吸事件模型.采用动力学晶格蒙特卡罗方法实现这一沉积过程的仿真.实现了不同温度、不同真空条件下Al2O3的原子层沉积仿真.结果表明:在一定的范围内,前驱体或基片的温度高,反应室真空度低,薄膜生长速率的增长快,表面粗糙度小;基片温度对于薄膜沉积过程的影响最大,其阈值约为200℃.而且薄膜的生长趋势由初始的三维岛状生长向二维层状生长逐渐转变.     

VLE data for CO2-CF2Cl2, N2-CO2, N2-CF2Cl2 and N2-CO2-CF2Cl

Knowledge about vapour-liquid (VLE) is required as a basis of reliable calculations for separation processes. Correlations available for the prediction of T, p, x, y data are less accurate for mixtures at high pressures and mixtures containing supercritical components. The results of VLE experiments are reported and compared with data calculated with equations of state.     

Preparation of ZrO2-CeO2 and HfO2-CeO2 nanopowders

We prepared weakly agglomerated powders of ZrO₂-CeO₂ and HfO₂-CeO₂ solid solutions 5–8 nm in particle size, consisting of monoclinic and tetragonal phases. After heat treatment at 1200°C, the crystallite size was 30 and 14 nm, respectively. We also examined the effect of precipitate freeze drying on the crystallization of hafnia-based solid solutions containing up to 20 mol % CeO₂.     

Thermal diffusion in binary mixtures H2-CCl2F2 and H2-CHClF2

Thermal diffusion coefficients were measured in two gaseous mixtures, in which one component was close to the critical temperature, in the pressure range (19.6–127.4)·10⁴ N/m² and at a freon concentration of 0.25–0.8.     

Radial GRIN glasses in Li2O-Na2O-Al2O3-TiO2-SiO2 systems

A series of GRIN glass rods have been developed in Li2O-Na2O-Al2O3-TiO2-SiO2 systems. Negative radial refractive index profiles were generated by exchanging Na+ for Li+ ions in these glass rods. It has been observed that TiO2 plays a vital role in increase in the profile depth and maximum change in the refractive index because of its ambivalent nature. Change in the refractive index can be further increased by increasing the concentration of exchanging cation in the base glass.     

Comparison of the Electronic Structures of La2CuO4, Sr2CuO2Cl2, and Sr2CuO2F2

First-principles cluster calculations are reported of the local electronic structure of the three compounds: La₂CuO₄, Sr₂CuO₂Cl₂, and Sr₂CuO₂F₂. The copper ${\text{3d}}_{x^2 - y^2 } $ and the planar oxygen 2p _σ atomic orbitals exhibit a similar degree of covalency. The out-of-plane orbitals, however, are quite different with the ${\text{3}}d_{3z^2 - r^2 } $ atomic orbital lowered significantly in energy for chlorine and fluorine apical positions.     

Elastic and Electronic Properties of Superconducting CaPd 2 As 2 and SrPd 2 As 2 vs. Non-superconducting BaPd 2 As 2

The first-principles calculations were performed to predict the elastic and electronic properties of the superconducting ThCr₂Si₂-type phases CaPd₂As₂ and SrPd₂As₂ in comparison with the non-superconducting CeMg₂Si₂-type phase BaPd₂As₂. Besides, the same properties were compared for CeMg₂Si₂- and ThCr₂Si₂-type polymorphs of BaPd₂As₂. We found that all these phases are mechanically stable and belong to soft materials with low hardness. The near-Fermi region is formed by the valence states of the blocks [Pd₂As₂] with decisive contributions of Pd 4d states. The values of N(E _F) increase in the sequence: CaPd₂As₂ < SrPd₂As₂ < BaPd₂As₂, i.e. in the reverse sequence relative to the transition temperatures T _C. Thus, the change in T _C cannot be explained by the electronic factor, i.e. by the simple correlation T _C～N(E _F). Most likely the decrease in T _C in the sequence CaPd₂As₂ → SrPd₂As₂ and the absence of a superconducting transition in BaPd₂As₂ are related to the structural factors and the peculiarities of the electron–phonon coupling mechanism.     

Thermoelectric power of single-phase samples of Tl2CaBa2Cu2O y and Ba2CaSr2Cu2O y

Single-phase 2122 samples of thallium and bismuth superconductors were made by the precursor matrix method. The thermopower of these samples was measured in the temperature range 250 K-T _c . The thermopower was positive and decreased linearly with increasing temperature aboveT _c (onset). The exponential enhancement of thermopower seen in the undoped and doped YBCO was not observed in these samples. The linear variation of thermopower can be explained on the basis of either a two-band model or a narrow band model.