压电驱动微泵泵膜振动有限元分析

以压电驱动微泵泵膜为研究对象,分析了压电复合泵膜膜片的弹性曲面微分方程,建立了泵膜膜片有限元数值模拟的模型,对泵模膜态进行了计算和分析,模拟并分析了驱动电压、泵膜压电层半径与泵膜单晶硅层半径之比、单晶硅层厚度、压电层厚度对泵膜位移的影响。所作研究为压电驱动微泵的优化设计提供了理论依据。     

采用无阀微泵的微调焦系统特性研究

该文提出了一种由一组无阀压电微泵、调焦透镜、储液容器、位移传感器、电源和控制器等组成的微流控调焦透镜系统,介绍了该系统的结构及工作原理,建立了无阀压电微泵及系统的动态数学模型,并利用Matlab/Simulink软件,分别对单泵工作和双泵工作两种工作模式下系统的动态特性进行了仿真研究,给出了仿真结果并进行了分析。     

无阀气体压电泵仿真分析与实验

为了提高微型泵输出流量以及获得连续出流能力,设计了一种基于合成射流原理的无阀气体压电泵。首先,分析了压电气泵的工作原理,测试了压电振子的振幅;其次,利用CFX软件对无阀气泵进行仿真分析,得到压电气泵在0T,1/4T,2/4T和3/4T时刻的气体流速分布,以及容腔高度、泵腔高度、射流孔直径和出口直径对气泵流量的影响规律;最后,制作了无阀气体压电泵的实验样机。测试结果表明,当无阀压电气泵在驱动电压为120V、驱动频率为400Hz、容腔高度为0.1mm、泵腔高度为1.4mm、射流孔直径为1.3mm和出口直径为2mm时,泵输出气体流量为1800ml/min左右,实验与仿真分析基本吻合。该气泵能输出较大气体流量并具有连续出流的能力。     

双压电驱动微泵泵膜的ANSYS仿真和结构优化分析

提出了一种新型的双压电泵膜结构,分析了泵膜小挠度弯曲形变理论。运用ANSYS软件建立了泵膜的有限元模型,并对泵膜进行了电压驱动静态分析和模态分析,通过正交试验法对泵膜结构进行了优化。分析表明,压电层厚度对膜片形变影响最大,其次依次是驱动电压、泵膜半径、电极层厚度、基层厚度;泵膜半径对膜片频率影响最大,其次依次是压电层厚度、电极层厚度、基层厚度;对泵膜结构进行优化,可以提高微泵的工作效率,研究结果为微泵的优化设计提供了依据。     

非对称分叉流管无阀压电泵的设计及试验

具有微混合功能的多级Y型流管无阀压电泵存在着输出流量与振子带载能力不平衡的问题。为此，提出了一种非对称分叉流管无阀压电泵。首先，理论分析了该无阀压电泵输出流量与流管流阻间的关系；其次，利用有限元软件数值计算了多级Y型流管的流阻特性；最后，采用光固化快速成型技术加工了样机，并进行了泵特性试验和振子振动测试。试验结果表明：在峰峰值200 V正弦波交流电驱动下，该压电泵的流量、扬程和压电振子的振幅都随驱动频率增加呈现先增大后减小的趋势；当驱动频率为31 Hz时，最大流量为4 g/min；驱动频率为38 Hz时，最大扬程为40.5 mmH2O。在试验施加电压范围内，该泵的输出性能与驱动电压呈正相关性。本研究验证了非对称流道树型无阀压电泵的可行性，为非对称无阀压电泵在微流道滴灌和微混合等领域的应用提供了参考。     

微型无阀泵流动特征仿真与试验研究

介绍了微型无阀泵的结构及基本原理,应用 CFD（Computational fluid dynamics）技术对典型驱动频率下的流场流态进行了动态仿真。在不同结构参数、控制频率、振动幅值及驱动膜刚度等多种条件下,对无阀泵性能进行了试验研究。讨论了结构参数、驱动条件等因素对无阀泵流动特性的影响,分析了无阀泵管道周期、振动频率、驱动膜刚度等因素与流动参数之间的关系,在此基础上提出了微型无阀泵设计与控制的改进方案。     

微型无阀泵的数值仿真与参数设计

介绍了无阀型微泵的特点及其工作原理，针对无阀微型泵收缩/扩散口的流动特征进行了数值分析，得出了流量，压力的分布特征和关系曲线，分析了收/扩散口的几何参数对泵的输出性能的影响，采用CFD（Computational Fluid Dynamics)技术对泵内流体进行了有限元仿真，并将仿真与计算结果进行限分析比较。     

半球缺阻流体无阀压电泵的实验验证

设计了一套压电双晶片作为激励源的半球缺阻流体无阀压电泵。分析了该压电泵的结构及工作原理,并采用有限元软件对其内部流场进行模拟分析。仿真结果表明:该泵存在正反向流阻不等特性,半球缺阻可以作为泵的无运动部件阀。最后,实际制作了半球缺无阀压电样泵和多组半径不等的半球缺,并进行了泵的流阻及流量实验。实验结果表明:该泵正反向流时间差随入口压强增大而减小;当驱动电压为150V,频率为17Hz,半球缺半径为4.0mm时,泵的输出流量达到最大,其值为121.4ml/min;同时,该泵单位时间内的输出流量随半球缺半径增大而呈递减的变化趋势,而且半球缺的半径大小对该类无阀压电泵的工作效能有较大的影响。     

柔性微型阀对静电驱动振膜微泵压力性能的影响

将最小能量法与均匀压力载荷下圆薄膜大变形半解析解相结合,分析了静电驱动柔性微型阀对静电驱动振膜微泵压升性能的影响。微型阀容积的引入会导致静电驱动振膜微泵的压升出现一定程度的降低,但降低幅度远小于阀门容积对常规定排量泵的影响。微型阀的阀片以柔性薄膜为基片,因此所需的关阀电压远远低于微泵泵腔的驱动电压,从而使静电微泵和微型阀运行的可靠性得到了极大的提高。     

悬臂梁双压电晶片振子发电性能研究

以双压电晶片振子为研究对象,对悬臂梁式双压电晶片振子在正压电效应下电压输出特性进行了有限元分析与试验研究,给出了压电晶片在悬臂梁上的最佳粘贴位置,并且利用有限元分析软件建立了悬臂梁双压电晶片振子的有限元模型,进行了结构尺寸参数对悬臂梁双压电晶片振子输出电压影响规律的仿真分析;利用压电陶瓷发电能力测试系统进行了试验测试,通过仿真和试验结果对比分析,得出了结构尺寸参数对悬臂梁双压电晶片振子发电的输出电压影响规律。     

Simulation and optimization of a piezoelectric micropump for medical applications

We designed a valveless micropump excited by a piezoelectric actuator for medical applications. The complete electric–fluid–solid coupling model is built upon using ANSYS software (Canonsburg, PA) to investigate the behaviors of the micropump. The effects of the geometrical dimensions on the micropump characteristics and its efficiency are analyzed. The simulation results show that there is an optimal thickness of the piezoelectric layer to obtain a large pump flow, and that this optimal thickness is affected by the material and the thickness of the pump membrane. To enhance the performance of the micropump, some important diffuser parameters, such as the diffuser length, the diffuser angle, and the neck width, should be optimized. However, the variations of the diffuser’s geometrical dimensions do not affect the optimal thickness of the piezoelectric layer.     

多级“Y”型流管无阀压电泵的原理与试验验证(实验视频)

针对目前微流体混合器多需要外接动力源,且多数微混合器只能进行液体混合而不能输送液体的问题,提出将无阀压电泵引入微混合器领域,并研制了一种集混合与输送于一体的多级“Y”型流管无阀压电泵。首先,提出了多级“Y”型流管,进而设计了多级“Y”型流管无阀压电泵,并分析其工作原理;然后,对该无阀压电泵的流管流阻特性及泵流量进行理论分析;同时,利用有限元软件对多级“Y”型流管无阀压电泵进行了流场模拟,结果表明该压电泵具有单向传输作用。最后,制作了多级“Y”型流管无阀压电泵样机,并进行了泵流量与背压试验。试验结果显示：驱动电压峰峰值为100 V,频率为16 Hz时,流量达到最大,为16.2 ml/min;驱动电压峰峰值为100 V,频率为14 Hz时,输出背压最大,约为64 mm水柱。得到的试验数据证明了多级“Y”型流管无阀压电泵的有效性。(实验视频)     

无阀压电微流体泵工作特性与结构参数

根据平面无阀压电微流体泵的结构特点,采用厚度平均的浅水模型和有限元法,得到微流体泵液体－振动片耦合方程。耦合方程的模态分析给出硅片一阶模态自然频率和振型,以及硅片振幅－频率关系。在模态分析之后,加入压电力考察振动片响应、微泵流动特征和微泵流量。同时研究微泵结构参数(微泵压电片半径、扩散管长度、最小宽度、扩散张角)对微流体泵液—固耦合系统的自然频率、振动片振幅和微泵流量的影响,得出对微流体泵优化设计有重要意义的结果。     

3D打印的锥管坡面腔底无阀压电泵

为提高无阀压电泵的流量特性和解决泵加工工艺性差的问题,研制出了锥形流管坡面腔底无阀泵。首先,提出并设计了锥形流管坡面腔底无阀泵,分析了该泵的工作原理;然后,利用ansys软件对泵腔内流场做了模拟分析,分析结果表明该泵具有传输流体的能力;最后,利用3D打印技术制作了锥形流管坡面腔底无阀泵,并对泵的频率-流量特性进行了试验,驱动频率为8Hz时,锥形流管坡面腔底无阀泵的流量达到最大值26.8ml/min,比相同尺寸坡面腔底无阀压电泵在相同驱动电压条件下输出的最大流量增加了18.6%。试验结果表明,锥形流管坡面腔底无阀泵的流量特性优于坡面腔底无阀压电泵,且采用3D打印技术制作压电泵,提高了泵加工的工艺性,缩短了加工周期,降低了加工成本。     

Study of fluid damping effects on resonant frequency of an electromagnetically actuated valveless micropump

As fluid flow effects on the actuation and dynamic response of a vibrating membrane are crucial to micropump design in drug delivery, this paper presents both a mathematical and finite-element analysis (FEA) validation of a solution to fluid damping of a valveless micropump model. To further understand the behavior of the micropump, effects of geometrical dimensions and properties of fluid on the resonant frequency are analyzed to optimize the design of the proposed micropump. The analytical and numerical solutions show that the resonant frequency decreases with the slenderness ratio of the diffuser and increases with the opening angle, high aspect ratio, and thickness ratio between the membrane and the fluid chamber depth. A specific valveless micropump model with a 6-mm diameter and 65-μm thickness polydimethylsiloxane (PDMS) composite elastic membrane was studied and analyzed when subjected to different fluids conditions. The resonant frequency of a clamped circular membrane is found to be 138.11 Hz, neglecting the fluid. For a gas fluid load, the frequency is attenuated by slightly shifting to 104.76 Hz and it is significantly reduced to 5.53 Hz when the liquid fluid is loaded. Resonant frequency remarkably shifts the flow rate of the pump; hence, frequency-dependent characteristics of both single-chamber and dual-chamber configuration micropumps were investigated. It was observed that, although the fluid capacity is doubled for the latter, the maximum flow rate was found to be around 27.73 μl/min under 0.4-A input current with an excitation frequency of 3 Hz. This is less than twice the flow rate of a single chamber of 19.61 μl/min tested under the same current but with an excitation frequency of 4.36 Hz. The proposed double-chamber model analytical solution combined with the optimization of the nozzle/diffuser design and assuming the effects of damping proved to be an effective tool in predicting micropump performance and flow rate delivery.     

三棱柱阻流体无阀压电泵的设计与试验

以三棱柱阻流体为无移动部件阀,结合3D打印技术的快速一体成型特点,设计并制作了以压电振子为动力源的三棱柱阻流体无阀压电泵。分析了该无阀压电泵的工作原理、理论流量和振子振动特性,推导出了它的的流量表达式。利用有限元法对三棱柱阻流体的流阻特性进行了仿真模拟,由其内部压强分布及进出口流速情况,定性分析了三棱柱阻流体的正反向流阻大小。最后,使用3D打印机制作了该无阀泵的试验样机,并进行了流阻和流量测量试验。试验结果表明:三棱柱阻流体具有正反向绕流流阻不等的特性,当驱动电压为550V,驱动频率为8 Hz时,该压电泵的输出流量达到最大,为29.8mL/min。结果证明了该三棱柱阻流体无阀压电泵具有良好的输送流体的能力。     

Simulation analysis and experimental verification of spiral-tube-type valveless piezoelectric pump with gyroscopic effect

The current research of the valveless piezoelectric pump focuses on increasing the flow rate and pressure differential. Compared with the valve piezoelectric pump, the valveless one has excellent performances in simple structure, low cost, and easy miniaturization. So, their important development trend is the mitigation of their weakness, and the multi-function integration. The flow in a spiral tube element is sensitive to the element attitude caused by the Coriolis force, and that a valveless piezoelectric pump is designed by applying this phenomenon. The pump has gyroscopic effect, and has both the actuator function of fluid transfer and the sensor function, which can obtain the angular velocity when its attitude changes. First, the present paper analyzes the flow characteristics in the tube, obtains the calculation formula for the pump flow, and identifies the relationship between pump attitude and flow, which clarifies the impact of flow and driving voltage, frequency, spiral line type and element attitude, and verifies the gyroscopic effect of the pump. Then, the finite element simulation is used to verify the theory. Finally, a pump is fabricated for experimental testing of the relationship between pump attitude and pressure differential. Experimental results show that when Archimedes spiral θ=4π is selected for the tube design, and the rotation speed of the plate is 70 r/min, the pressure differential is 88.2 Pa, which is 1.5 times that of 0 r/min rotation speed. The spiral-tube-type valveless piezoelectric pump proposed can turn the element attitude into a form of pressure output, which is important for the multi-function integration of the valveless piezoelectric pump and for the development of civil gyroscope in the future.     

A bidirectional valveless piezoelectric micropump with three chambers applying synthetic jet

A new type of valveless piezoelectric micropump is presented. Synthetic jet and Coanda effect are utilized to achieve larger and bidirectional flow rate. The numerical simulation applying the velocity and pressure boundary conditions as well as the SST turbulence model were utilized to research the performance and internal flow state of the micropump. The simulation method was tested by the previous experimental data and the results matched well. The results suggest that the flow rate of the micropump is related to the Reynolds number and frequency. The entrainment flow rate of synthetic jet accounts for over 80% of the total outflow rate. The outflow rate is much larger than the volume change of the micropump chambers. There is an optimal frequency to obtain the maximum flow rate regarding the volume change of the chambers as a constant. The fluctuation of the flow rate decreases with the increase of frequency. When the frequency is higher than 25 Hz, the outflow can be continuous. Working at the Reynolds number of 1000 and optimal frequency of 50 Hz, the flow rate is 6.8 ml/min.