非一致曲率表面下的气压砂轮磨粒剪胀及加工试验研究#br#

针对软固结磨粒气压砂轮在加工异形曲面时,工件所受的切削力以及接触区内磨粒速度因工件曲率发生变化,导致工件不同曲率处材料去除量不均匀的问题, 基于修正的Rowe剪胀理论建立砂轮切削力模型,提出了非一致曲率表面下修正的气压砂轮材料去除模型。通过EDEM软件建立了软固结磨粒气压砂轮模型,分析了砂轮下压量为1.5 mm时工件曲率对接触力以及接触区内磨粒速度的影响。搭建气压砂轮加工试验平台,通过光整加工试验验证修正的材料去除模型。研究结果表明：修正的材料去除模型平均绝对值误差为0.095,而原始的材料去除模型平均绝对值误差为0.291,说明修正的材料去除模型可以用于气压砂轮抛光过程中的定量分析,且工件加工表面划痕明显减少。     

非一致曲率表面下的气压砂轮磨粒剪胀及加工试验研究

针对软固结磨粒气压砂轮在加工异形曲面时,工件所受的切削力以及接触区内磨粒速度因工件曲率发生变化,导致工件不同曲率处材料去除量不均匀的问题,基于修正的Rowe剪胀理论建立砂轮切削力模型,提出了非一致曲率表面下修正的气压砂轮材料去除模型。通过EDEM软件建立了软固结磨粒气压砂轮模型,分析了砂轮下压量为1.5 mm时工件曲率对接触力以及接触区内磨粒速度的影响。搭建气压砂轮加工试验平台,通过光整加工试验验证修正的材料去除模型。研究结果表明:修正的材料去除模型平均绝对值误差为0.095,而原始的材料去除模型平均绝对值误差为0.291,说明修正的材料去除模型可以用于气压砂轮抛光过程中的定量分析,且工件加工表面划痕明显减少。     

面向曲面的机器人摆线抛光轨迹及速度优化

根据手工抛光多方向性的特点,提出一种三维类摆线抛光轨迹。为解决三维类摆线相交处抛光材料去除较多的问题,依据材料去除深度模型和轨迹相交的特点,确定摆线参数的控制范围,在参数控制范围内进行基于均匀材料去除的区域进给速度优化,把去除深度相近的轨迹点视为一个区域,分区域控制抛光的进给速度,最终实现各区域内的材料去除深度基本相同。仿真和机器人抛光实验结果表明,分区域规划进给速度减少了轨迹相交处的材料去除,使得工件表面的去除深度总体上趋于一致,解决了因轨迹重叠导致的表面材料去除不均匀问题,提高了抛光件表面质量。     

基于粘弹性球形小磨头的小口径非球面模具抛光

传统的抛光方法加工小口径非球面模具，存在工具容易干涉和面型误差补偿精度差的问题。提出一种使用粘弹性聚酯纤维布包裹球形小磨头的子孔径抛光方式，以适应小口径非球面模具的轮廓形状变化。首先，通过探究纤维布的压缩量与其不可恢复形变量和粘弹性应力的关系，确定抛光过程中纤维布的压缩形变规律，提出以纤维布的粘弹特性为基础，建立抛光压强分布模型，并结合抛光工具与模具的位姿得出合线速度分布规律，建立小磨头抛光单位时间去除函数；然后，通过单点抛光和均匀抛光实验，证明了粘弹性聚酯纤维布包裹球形小磨头的抛光方式比单独采用刚性球形小磨头抛光的效果更佳；接着使用粘弹性球形小磨头进行环带实验，探究了驻留时间、抛光压力、抛光工具转速和工件轴线速度等工艺参数对碳化钨模具的材料去除深度和表面粗糙度的影响规律，并对直径为9.7mm的回转对称非球面碳化钨模具进行面型误差补偿仿真与验证；最后，结果表明模具的面型误差仿真结果和实验补偿效果都有效收敛，面型误差PV值(Peak to valley)从0.208 7μm改善至0.079 9μm，而且中心处表面粗糙度Ra由20nm降至10nm。证明了提出的基于粘弹性球形小磨头的子孔径抛...     

匀光阵列微结构模具高性能非接触仿形抛光

匀光元件具有优良的光束扩散性能,被广泛应用于投影、照明及成像系统,抛光可有效去除匀光模具表面刀纹从而提升性能,但现有的抛光方法通常难以在保持微结构面形精度的同时提升表面质量。为解决上述问题,提出了一种用于阵列微结构模具的高性能非接触仿形抛光方法,研究了加工间隙和工具转速对材料去除的影响,分析了模具表面质量及面形变化。最后,通过打光测试表征了不同加工方法与元件性能的关系。结果表明,抛光对匀光元件性能提升作用显著,提出的高性能非接触仿形抛光方法可大幅提高塑件匀光性能。抛光后,模具表面粗糙度由初始的164.2 nm Ra下降至8.1 nm Ra,形状精度误差小于0.8μm,同时刀纹和毛刺被有效去除。塑件匀光亮度提升了40.4%,匀光均匀度提升了67.1%,塑件匀光性能显著提升。提出的非接触仿形抛光方法可以为高性能光学微结构元件的制造提供技术支撑。     

基于修正Preston方程的百页轮抛光材料去除深度建模

由于百页轮具有一定的柔性,故实际材料去除深度与名义抛光深度不一致,直接影响抛光效率及表面质量的控制。基于Hertz弹性接触理论建立了抛光接触区抛光压力和切削速度分布函数,并依据修正的Preston方程建立了材料去除深度模型,据此确定了影响材料去除深度的关键抛光工艺参数(磨粒粒度、主轴转速、百页轮变形量和进给速度),获得了百页轮抛光接触区的材料去除深度分布规律和关键抛光工艺参数对材料去除深度的影响规律。最后,通过模拟仿真和抛光实验验证了所建模型和影响规律的正确性,结果表明,该模型可以较好地预测百页轮柔性抛光的材料去除深度。     

模具曲面抛光时表面去除的建模与试验研究

提出用表面去除廓形来描述模具表面在垂直于抛光轨迹方向的抛光去除量。在假设抛光工具与模具自由曲面的接触服从椭圆赫兹接触的前提下,利用提出的抛光去除系数推导了表面去除廓形的理论方程。仿真和试验结果揭示了抛光表面去除的规律,验证了表面去除廓形的理论模型。     

离子束抛光去除函数计算与抛光实验

由于传统的离子抛光工艺采用的确定去除函数的方法操作复杂且成本很高,本文提出了利用法拉第杯对离子束流空间分布进行测量、标定的方法,并计算得到不同离子源工作参数对应的去除函数。首先,基于离子束抛光材料去除原理,研究了离子束抛光过程中束流分布与能量对去除函数的影响,并提出简化的离子束抛光去除函数模型。然后,设计实验并得出离子束流空间分布与去除函数相关参数间的关系,计算得到了不同离子源工作参数产生的离子束流对应的去除函数。对硅和融石英玻璃的相关实验表明:利用法拉第杯扫描结果计算相同材料的去除函数的单位时间体积去除率与实际测量值误差小于2%。结合抛光实验,对Φ800mm碳化硅表面硅改性层平面镜进行抛光,得到的初始面形误差均方根(RMS)值为57.886nm,两次抛光后RMS值为11.837nm,收敛率达到4.89,满足精密光学加工对去除函数的确定性及精度的要求,并大大提升了确定去除函数的效率。     

气囊抛光去除函数的数值仿真与试验研究

为提高光学元件的面形精度,提高加工效率,对超精密气囊抛光方法的去除函数进行了理论和试验研究.通过分析气囊抛光的原理,以Preston方程为基础,应用运动学原理推导了气囊抛光"进动"运动的材料去除函数,利用计算机仿真的方法,得到近似高斯分布的去除函数,通过仿真分析几个主要参数对"进动"抛光运动去除特性的影响,总结得到三点气囊抛光工艺过程中重要的结论.通过在一台超精密气囊式智能抛光机上的试验对比,两者吻合很好,并得到面形精度 RMS=0.012 6 μm的超精密的光滑表面,为开展气囊抛光的工艺研究提供了理论依据.     

基于砂带千页轮的模具抛光加工过程研究

砂带千页轮是一种异型砂带抛光工具。具有抛光效率高、质量好、抛光方法简便、成本低等优点。针对砂带千页轮的这些研抛加工特性,通过在铣床上改进装置．来实现对回转模具的抛光加工。通过对吃刀量、进给速度、主轴转速、加工时间及千页轮粒径等参数对表面粗糙度及加工效率的影响研究,得出了合理的千页轮抛光参数,最终得到接近镜面的抛光效果。     

Utilisation of time-variant influence functions in the computer controlled polishing

In the computer controlled polishing, a polishing tool moves in a well-defined manner across the workpiece surface in order to individually remove the surface error-profile. The commonly used technique to calculate the moving of the polishing tool is the dwell time method. Based on a constant (time-invariant) removal characteristic of the polishing tool (influence function) the amount of material to be removed is controlled via the dwell time. The longer the polishing tool is in contact with a particular area of the workpiece, the more material is removed at this position.Mathematical basics to calculate dwell time-profiles are shown, and a new approach considering time-variant influence functions for the computer controlled polishing is introduced. The results point out that time-variant influence functions may contribute to further decrease the process time, and thus to make a computer controlled polishing process more efficient. The reduction of the process time was observed to approximately 35% using a combination of the dwell time method with time-variant influence functions.     

Modelling of the Polished Profile in Computer-Controlled Polishing by a Sub-Aperture Pad

High-quality part surfaces with high surface finish and form accuracy are increasingly in demand in the mold/die and optics industries. The computer-controlled polishing (CCP) is commonly used as the final procedure to improve the surface quality. This paper presents a theoretical and experimental study on the polished profile of CCP with sub-aperture pad. A material removal model is proposed based on the evaluation of the amount of material removed from the surface along a direction orthogonal to the tool path. The model assumes that the material removal rate follows the Peterson equation. The distribution of the sliding velocity at the contact region is presented. On the basis above, the approaches to calculate the polished profiles are developed for the sub-aperture pad polishing along a straight path and a curved path. The model is validated by a series of designed polishing experiments, which reveals that polishing normal force, angular spindle velocity, feed rate and polishing path all have effects on the polished profile. The result of experiments demonstrates the capability of the model-based simulation in predicting the polished profile.     

基于VRML的模具边界提取方法与加工轨迹优化研究

为解决气压砂轮进动抛光在模具边界区域的振动加剧、边界棱线过度磨损和气压砂轮失效等问题,将VRML技术应用到气压砂轮进动抛光轨迹规划中。经过对VRML文本内容的分析,采用一系列三角形平面取代原始的多边形平面和自由曲面的VRML描述模型表面的方法,建立了文本数据与模型边界线之间的对应关系,提出了一种基于VRML的模具边界线三维解析式提取方法,并将该方法应用到气压砂轮进动抛光轨迹优化中;通过限制气压砂轮切削速度方向与模具边界外法向量的夹角,获得了理想的切削速度分布特性。实验及研究结果表明:通过该优化方法获得的模具边界线数据具有较好的完整性和准确性,适用于各种复杂形貌的模具零件的轨迹优化,并可通过调整阈值来满足具有不同曲率曲面的识别要求。     

模具边界邻域气压砂轮进动光整轨迹优化

针对气压砂轮进动光整在模具边界区域的振动加剧和边界棱线过度磨损等问题,提出在进动光整轨迹规划过程中对气压砂轮与工件相对切削速度方向进行约束的方案,推导出边界约束条件,并编写具有边界约束条件的进动光整轨迹生成程序。优化后的进动光整轨迹在连续曲面/平面内采用常规的进动光整方法,在边界附近采用具有约束的进动光整方法,因此兼具了进动光整方法切削速度方向的无序性优势,又避免了在工件边界附近引起剧烈振动和材料过度去除等问题。应用边界约束条件后的进动光整轨迹相比无约束的进动光整轨迹,在边界附近具有更小的振动和更完好的边界线,对加工过程和加工结果的改善在实际加工中得到了验证。     

Finishing of structured surfaces by abrasive polishing

A new polishing process for the finishing of structured optical elements was introduced by the authors. Abrasive polishing using pin type and wheel type polishing tools made of polyamide was applied to improve the surface roughness of structured molds exhibiting fly-cut and precision ground V-grooves. Surface roughness of abrasive polished sides of V-grooves was found to be about 5 nm Ra. Furthermore, material removal rates were determined according to Preston's equation resulting in increasing removal rates with increasing polishing pressure and relative velocity. Material removal in abrasive polishing of structured surfaces was observed to be caused mainly by two-body abrasion but also by three-body abrasion, depending on relative velocity and polishing pressure. Tribological investigations showed that in abrasive polishing of structures mainly micro-ploughing and less micro-cutting occurs.     

Material removal model considering influence of curvature radius in bonnet polishing convex surface

The bonnet tool polishing is a novel, advanced and ultra-precise polishing process, by which the freeform surface can be polished. However, during the past few years, not only the key technology of calculating the dwell time and controlling the surface form in the bonnet polishing has been little reported so far, but also little attention has been paid to research the material removal function of the convex surface based on the geometry model considering the influence of the curvature radius. Firstly in this paper, for realizing the control of the freeform surface automatically by the bonnet polishing, on the basis of the simplified geometric model of convex surface, the calculation expression of the polishing contact spot on the convex surface considering the influence of the curvature radius is deduced, and the calculation model of the pressure distribution considering the influence of the curvature radius on the convex surface is derived by the coordinate transformation. Then the velocity distribution model is built in the bonnet polishing the convex surface. On the basis of the above research and the semi-experimental modified Preston equation obtained from the combination method of experimental and theoretical derivation, the material removal model of the convex surface considering the influence of the curvature radius in the bonnet polishing is established. Finally, the validity of the model through the simulation method has been validated. This research presents an effective prediction model and the calculation method of material removal for convex surface in bonnet polishing and prepares for the bonnet polishing the free surface numerically and automatically.     

气压砂轮抛光工具振动稳动性分析

针对气压砂轮光整加工过程中的振动问题,对气压砂轮抛光工具进行了振动稳动性研究;通过确定抛光工具结合面的等效动力特性参数,建立结合面的动力学模型,进行了有限元模态分析,得出了气压砂轮抛光工具在不同工况下的固有频率,发现抛光工具的主要振动部件为保持架和连接板;在有限元模态分析基础上搭建了模态测试平台,进行了实验模态验证;对比有限元分析结果和实验验证结果,分析了误差产生的原因;根据有限元分析和实验测试结果,对振动部件连接板进行了局部增强,优化了抛光工具结构;研究结果表明优化后的抛光工具能有效提高其振动稳定性,满足光整加工需求。     

硅晶片化学机械抛光材料去除机制与模型

通过分析软质层的形成、作用以及纳米磨料的自身变形对材料去除的影响，改进了CMP过程的接触力学模型；分析了纳米磨料自身变形量对磨料嵌入硅晶片基体材料的深度的影响，以及纳米磨料硬度对抛光表面粗糙度的影响。结果表明：软质层的存在增加了单个纳米磨料所去除材料的体积，且对基体材料有保护作用，减小了纳米磨料嵌入基体材料的深度；纳米磨料的自身变形抵消了纳米磨料嵌入基体材料的切削深度，从而也决定了抛光表面的粗糙度；纳米磨料的自身变形量与纳米磨料的硬度有关，硬度低的纳米磨料自身变形量大，因而切削深度小，抛光后表面的粗糙度值低。     

Development and Polishing Process of a Mobile Robot Finishing Large Mold Surface

□ A novel self-determination polishing robot finishing large mold free-form surface is developed, and the finishing process method is researched. Contrary to traditional approaches, our premise is that a large mold surface can be polished by using a small robot. This robot system is mainly composed of a polishing robot part, a computer system and a visual positioning system. A type of robot with four uniform distribution wheels was designed, which has two driving wheels and two driven wheels. Active compliant control of the polishing tool was provided by a pneumatic servo system, and a new special compliant abrasive tool was proposed on the basis of robot characteristics. The process planning steps consisted of subdividing the free-form surface, choosing an abrasive tool, planning the polishing path and optimizing machining parameters. Based on the orthogonal experiment and the grey relational analysis method, the optimal parameter combination was obtained for polishing force, tool speed and feed rate. Aiming to polishing times, the surface roughness method and polishing efficiency method were studied in detail. The polishing experiments were carried out in the robot using process parameters obtained by the efficiency method. These research results provided significant theory foundation and experimental data for a mobile robot planning polishing to realize intelligible process parameter selection.