独特涡旋技术IDP-3新型水泵

IDP-3水泵，通过采用涡旋技术，广泛应用于那些对真空性能、泵的尺寸以及相关环境要求苛刻的使用场合。该泵具有袖珍、低噪音以及低消耗的特点，OEM使用起来也相当方便。该无油真空抽气泵是各种分析仪器、高能物理、半导体加工和工业生产等同领域的理想选择。IDP-3采用密封设计，其中马达和轴承在真空层之外而确保了抽出气体的完全隔离。     

世界泵业文献题目

CE-7设备用液水透平泵轴系振动问题及其对策；立式泵因汽蚀振动的运转状态；低速循环泵；美国Veljan Hydrair Ltd公司的滑片泵；医疗用波纹管式微型泵的研制；德国Wilo公司在冷热水泵壳内安装关闭装置便于检修；泵站的监控系统；真空泵的最优选择方法；美国Vaccon Co．，Inc．公司的气动式真空泵；德国Fipa GmbH公司的新型真空喷射泵。     

油扩散泵抽速測定研究

本文对Florescu的油扩散泵抽速测定方法作了一些探討,提出了一种改进方法,并从初步試驗中对比了用这种方法和用一般标准方法測得的抽速曲綫,供油扩散泵真空抽速测試方法研究的参考。     

世界泵业文献题录

固液两相流泵叶轮内流体可视化和压力变化的测定[日]，家用自动给水泵装置[日]，燃油、滑油大量处理用泵[英]，气体和液体用微型泵设计[英]，渣浆泵系列的开发[英]……     

方便抽油装置

老式抽油方法是用一个活塞式手拉泵的管子伸到油桶的底部,然后使劲上下拉动活塞拉手才能使油桶中的油抽入容器,如用力过猛会使油溅在身上。同一泵的管子抽完一种油,再去抽另一种油,会把不同种类的油混在一起而影响油的质量。同时,还容易污染环境。为此,我们设计了方便抽油装置。     

平面磨床真空夹具

在平面磨床加工不导磁工件时,我们制成一套真空夹具。结构简单(见图)。夹紧力靠大气压力与真空夹其内的压力差产生,力的大小可近似计算为:P≈(1-p)·(F_1+(F_2)-F_1)/2)P——夹紧力(公斤);p——夹具内真空压力(公斤/厘米~2);F_1——夹具抽气孔面积(厘米~2);F_2——工件对夹具能盖严的面积(厘米~2)。直接影响夹紧力的是工件安装面大小,针对磨床工作特点,选用较小的真空泵,泵的容量为30升。为使吸力稳定,并防止     

基于CFD技术管道气体流场计算与分析

基于CFD技术,运用CFD软件结合气体运动基本理论,以电子束焊接真空系统中管道设计为例,对中真空条件下气体在管道内的流动状态、速度、压力分布进行2D有限元数值模拟仿真和可视化研究,为真空系统管道参数确定和结构优化设计提供了有参考价值的数据。提出在真空系统设计选择前级泵时,为保证获得较大的抽速,达到高效与经济的效果,优先考虑主泵排气口直径与前级泵相匹配,再校核前级泵最大反压力和最大排气量,可以极大提高设计效率。     

油扩散泵主要故障的修复方法

油扩散泵是一种高真空泵,全名叫扩散式蒸气流泵,是以机械泵作为前级泵,连续地抽除密封容器中的空气和其他对金属泵体及泵油不起作用的气体,从而获得高真空的设备,它的极限压强可达L×10~2～1×10~7Pa,抽速     

KF-600型径流式宽程拖动分子泵

径流式宽程拖动分子泵,具有无油抽空的特点,抽真空范围比较宽,从133Pa至10~(-5)P可以替代机械增压泵和油扩散泵之作用,所以特别适用于各种真空镀膜设备使用。 性能指标: 极限真空:6.67×10~(-5)Pa 抽速:>6000升/秒 功率:7.5千瓦 用水量:0.5T/小时     

便携式汽车车轮检测仪磁力夹紧定位装置研发

已有的便携式汽车车轮检测仪夹紧定位装置存在着检测周期长、费时、费力、效率低,夹紧力受人为因素影响的不足,针对以上便携式汽车车轮检测仪夹紧定位装置的缺点,进行了便携式汽车车轮检测仪磁力夹紧定位装置的结构设计。该装置利用磁力发生机构产生的磁力夹紧车轮,使被测车轮受力均匀基本无变形且夹紧力不受人为因素干扰,对检测精度影响很小。对设计要求的夹紧力进行了理论研究和计算,验证了设计的可行性。     

Design and Verification of an Auxiliary System for High Vacuum Die Casting

Vacuum die casting is the optimal method to produce high quality aluminum alloy components.At present,there are still very few systematic studies on vacuum die casting theory and equipment design.On the basis of the existing theories of the vacuum die casting pumping and venting systems,a simplified model is established in this research.The model has an aggregate unit consisted of "vacuum pump + buffer tank" and a cylindrical container(including the shot sleeve,cavity and exhaust channel).The theoretical analysis is carried out between the cavity pressure and the pumping time under different volume models.An auxiliary system for high vacuum die casting is designed based on the above analysis.This system is composed of a vacuum control machine and a new vacuum stop valve.The machine has a human-computer control mode with "programmable logic controller(PLC) + touch screen" and a real-time monitoring function of vacuum degree for buffer tank and die cavity.The vacuum stop valve with the "compressed gas + piston rod + labyrinth groove" structure can realize the function of whole-process vacuum venting.The new system shows great advantages on vacuuming the cavity with a much faster speed by making tests on an existing die casting mold and a 250 t die casting machine.A die cavity pressure less than 10 kPa can be reached within 0.8 s in the experiment and the porosity of castings can be greatly decreased.The systematic studies on vacuum die casting theory and equipment have a great guiding significance for high vacuum die casting,and can also be applied to other high vacuum forming in related theoretical and practical research.     

Analysis of the compression characteristics of vapor jet injected into high vacuum

The working principle of diffusion pump, a kind of vacuum pumps, is to use the high momentum of vapor jet which is injected into high vacuum. Since flow regime inside the diffusion pump consists of continuum, transition and free molecular, a continuum approach is not valid to calculate the flow field. In this paper, the compression characteristics of a vapor jet into high vacuum were simulated using the direct simulation Monte Carlo (DSMC) method. The hard sphere model is used as a molecular model and the no time counter (NTC) scheme is employed as a collision sampling technique. Steady state flow characteristics such as velocity, temperature, density distributions of the pumped gas and oil vapor are calculated by simulating about hundreds of thousand molecules. The main result is that the pumping speed of a single stage pump can be described based on the transmission probabilities which have nearly constant values irrespective of pressures at the inlet and outlet. Using these features, compression characteristics of diffusion pump can also be described by transmission probability concept as in the case of other high vacuum pump.     

磁悬浮分子泵用Hartley涡流传感器

工业领域的磁悬浮分子泵用位移传感器除了要具有良好的静态特性外,还应具有高动态响应特性,同时其体积大小还影响着磁悬浮分子泵的抽速、真空度和压缩比。针对高真空磁悬浮分子泵,提出了一种基于Hartley原理的电涡流位移传感器设计方法,将传感器对称探头接入同一振荡电路作为工作电感。对传感器的动态特性进行了分析,并提出了对其动态响应特性在不影响灵敏度和线性度等静态性能的情况下进行补偿的方法。实验结果表明,在-0.4~0.4mm内,传感器的线性度为±1.17%,灵敏度为9.901mV/μm,分辨率为0.25%,动态响应带宽达到了10.2kHz,两径向四路位移信号测量集成电路板体积仅为π×4~2 cm~2,大大减小了传感器体积,满足了磁悬浮分子泵面向更高抽速和更高真空度的发展需求。     

一种压电式精密输液微泵的试验研究

提出了一种用于精密输液的压电驱动式微型泵,该泵在结构、原理上均有别于传统泵.在实验室中设计、制作了实验样机,同时为取得控制流体精密输送的方法与规律,自行设计、制作了专用电源.通过系统的实验测试和研究进一步验证:压电驱动式微泵性能稳定、能够实现流体的精密输送、且适于微小型化,可为研发具有实用意义的精密输液微泵提供有益借鉴.     

基于Pro/E的新型真空油泵设计

为了提高抽油效率,设计了一种新型真空抽油泵。利用工程软件Pro/E为设计工具,创建了油泵的结构模型,进行了干涉检验和三维运动仿真。试制了油泵样机,并进行了试验研究。试验表明该油泵具有体积小、容积效率高、密封性和自吸性好等特点。具有良好的应用前景。     

Design and application of an efficient scheme for wafer transfer procedure during ion implantation process

Ion implantation is widely used in semiconductor manufacturing to modify electrical properties of the near-surface region of silicon wafers. The efficiency of ion implantation process deeply relies on wafer transfer procedure. Increasing wafer transfer speed is one of the most efficient ways to accelerate the ion implantation process for higher productivity of silicon chips. This study focuses on developing an efficient scheme for wafer transfer procedure to acquire higher transfer speed and reduce cycle time during ion implantation process. The scheme we proposed improves the layout of the vacuum chamber in currently used ion implanter by introducing an additional wafer transfer robot inside while placing the alignment station outside, planning optimal motion sequence of three wafer transfer robots in order to make all of them keep working without spending a long time waiting for other robots. Experimental platform has been established and the results show that wafer transfer speed based on the proposed scheme is over three times faster than the commonly used apparatus.     

单晶片离子注入机垂直扫描机构的差分密封设计

垂直扫描机构是单晶片离子注入机靶盘的支撑部件,起着将高速直线运动从靶室外传递到靶盘的作用.文中针对垂直扫描机构进行了差分密封的设计和计算,结果显示,此垂直扫描机构具有无摩擦、漏气率小的特点,因此它能满足晶片处理过程中对靶室高真空度及金属颗粒的要求.     

Injector for scattering measurements on fully solvated biospecies

We describe a liquid jet injector system developed to deliver fully solvated microscopic target species into a probe beam under either vacuum or ambient conditions. The injector was designed specifically for x-ray scattering studies of biological nanospecies using x-ray free electron lasers and third generation synchrotrons, but is of interest to any application in which microscopic samples must be delivered in a fully solvated state and with microscopic precision. By utilizing a gas dynamic virtual nozzle (GDVN) to generate a sample-containing liquid jet of diameter ranging from 300 nm to 20 μm, the injector avoids the clogging problems associated in this size range with conventional Rayleigh jets. A differential pumping system incorporated into the injector shields the experimental chamber from the gas load of the GDVN, making the injector compatible with high vacuum systems. The injector houses a fiber-optically coupled pump laser to illuminate the jet for pump-probe experiments and a hermetically sealed microscope to observe the liquid jet for diagnostics and alignment during operation. This injector system has now been used during several experimental runs at the Linac Coherent Light Source. Recent refinements in GDVN design are also presented.     

柔性尾长对尾鳍式压电泵的影响

为克服传统的容积型无阀压电泵存在的流动波动大、有回流、泵水能力差等通病,提出并设计模仿鱼尾摆动的无阀泵,并针对具有柔性尾鳍的变截面摆动子进行研究。在研究巡游速度最大的金枪鱼尾鳍摆动的基础上,设计具有柔性尾鳍的变截面摆动子;基于有限元分析软件ANSYS进行摆动子在水中的谐响应分析,提取不同长度的柔性尾鳍工作在二阶谐振下的端部振幅,分析表明,摆动子端部振幅对泵的理论流量影响较大;利用电荷耦合器件(Charge coupled device,CCD)激光位移传感器对摆动子的端部振幅进行测量,柔性尾鳍长度为5 mm时,摆动子的二阶弯振端部振幅达到0.4 mm,端部振幅随柔性尾鳍长度变化的趋势和ANSYS分析结果一致;对泵进行试验研究:在60 V的电压的激励下,柔性尾鳍长度为5 mm时,泵的压差达到78 mm。研究表明,在摆动子的其他结构参数一定的情况下,泵的性能对柔性尾长较为敏感,并存在最优的柔性尾鳍长度值。