Dynamic modelling of a flexure-based mechanism for ultra-precision grinding operation

This paper presents the dynamic modelling and performance evaluation methodologies of a flexure-base mechanism for ultra-precision grinding operation. The mechanical design of the mechanism is briefly described. A piezoelectric actuator is utilized to drive the moving platform. A flexure-based structure is utilized to guide the moving platform and to provide preload for the piezoelectric actuator. By simplifying the Hertzian contact as a linear spring and damping component, a bilinear dynamic model is developed to investigate the dynamic characteristics of the flexure-based mechanism. Based on the established model, the separation phenomenon between the moving platform and the piezoelectric actuator is analyzed. The influences of the control voltage and the preload stiffness on the maximum overshoot are extensively investigated. The slope and cycloidal command signals are utilized to reduce and/or avoid the overshoot of such flexure-based mechanism for rapid positioning. The effects of the rising time of the command signals on the maximum overshoot and the settling time are also explored. Experiments are performed to verify the established dynamic model and the performance of the developed flexure-based mechanism.     

Development and dynamic modelling of a flexure-based Scott–Russell mechanism for nano-manipulation

This paper presents the design methodology and dynamic modelling of a piezo-driven flexure-based Scott–Russell mechanism for nano-manipulations. Based on finite element analysis, the Scott–Russell mechanism is monolithically constructed to provide high positioning accuracy and long-term repeatability. With consideration for the effect of the driving circuit, the dynamic model of the flexure-based Scott–Russell mechanism is established. The influence of the time constant RC on the dynamic response is investigated. The transient responses of the flexure-based Scott–Russell mechanism to three typical signals are derived based on the Laplace transform method. It is noted that the cycloidal command signal can generate vibration-free motion, and thus improve the dynamic performance of the flexure-based mechanism. Experimental tests have been carried out to verify the developed Scott–Russell mechanism and the established models.     

Computational parametric analysis and experimental investigations of a compact flexure-based microgripper

This paper presents a flexure-based piezoelectric actuated microgripper for high precision grasping/releasing tasks. The design of the microgripper consists of a three-stage amplification and transmission mechanism, and the parallel grasping technique. A bridge-type mechanism and two sequential lever-type mechanisms are symmetrically connected to amplify the output displacement of the embedded piezoelectric actuator. The parallelogram mechanisms assist in linearizing the output displacement of both jaws of the microgripper. The computational analysis is conducted to investigate the effect of the dimensional parameters on the characteristics of the microgripper. A computational parametric optimization methodology is established to achieve the required attributes of the microgripper. The design optimization resulted in a compact design, a high displacement amplification ratio, and a large output displacement of the microgripper. The experimental studies are conducted to investigate the key characteristics of the microgripper such as the displacement amplification ratio, the output displacement, tracking performance. Further, the parasitic motion, input-end and output-end motion resolution of the microgripper are identified. The experimental results indicate that the compact microgripper can achieve a high displacement amplification ratio and large output displacement with a high positioning accuracy.     

压电驱动器的非线性模型及其精密定位控制研究

压电驱动器的非线性特性和迟滞特性是影响微动平台定位控制精度的主要因素。采用改进的Preisach模型对压电驱动器的迟滞特性进行建模，利用建立的Preisach模型进行开环精密定位控制和作为PID反馈控制的前馈环节的研究。实验结果表明，该模型能够有效地降低非线性迟滞特性对压电驱动器位移输出精度的影响，提高驱动器的动态响应特性。     

容性负载高压线性驱动电源的研究

介绍一种高压可调大功率动态驱动电源的设计,它用于高速微小孔振动钻床振动装置的压电陶瓷激振器,可以实现压电陶瓷的可控振动,其主要由D/A控制卡、放大电路、高压直流电源电路等几部分组成.该驱动电源具有线性好、容易控制等优点.     

柔性二级差动式微位移放大机构优化设计

微位移放大机构常常用来扩大压电陶瓷致动器的行程范围。鉴于差动式微位移放大机构具有"小结构大倍数"的特点,设计了一种新型二级差动式杠杆微位移放大机构。应用矩阵表示法对其进行了运动静力学分析,在此基础之上,以柔性铰链的分布位置及其几何特征参数为优化变量,并以提高位移放大比和减小最大应力为目标函数建立一种双目标优化模型。机构经过优化设计后位移放大倍数高达48倍,并对其进行有限元仿真分析,计算结果为44倍,理论模型与有限元模型的误差小于10%。结果表明：提出的优化模型具有准确性和高效性,同样可适用于其他柔性铰链机构的优化设计。     

A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part II: theoretical analysis

A simple mechanical vibration model was formulated to analyze the dynamic characteristics of the precision positioning table utilizing a spring-mounted piezoelectric actuator. The formulated model was validated by comparing the results of numerical simulations with the experimental data of Part I. The performance of the precision positioning table was predicted by changing the parameters of mass ratio and stiffness of spring. It is found that the analytic method described in this paper can provide an effective means in designing the precision positioning table utilizing a spring-mounted piezoelectric actuator.     

基于自抗扰重复控制的压电驱动器高精度跟踪控制

针对压电驱动器的高精度控制问题,提出一种自抗扰重复控制设计方法。首先,给出压电驱动系统的动力学模型;然后,在线性自抗扰控制(LADRC)中引入输出反馈积分控制器和一类插入式重复控制器,提出一种具有阶跃、斜坡和周期信号跟踪/抑制能力的自抗扰重复控制策略。进一步,结合小增益定理,分析闭环系统的稳定性及控制系统的设计方法。最后,将所提方法应用于一类压电驱动系统,实验结果表明该方法与LADRC相比,能显著提升控制效果,且高精度跟踪/抑制多种外部信号。     

杠杆式尺蠖压电直线驱动器

设计了一种基于尺蠖运动原理的压电直线驱动器,用于解决光学领域中的精密定位问题。该驱动器采用了对称杠杆式位移放大机构,在保证钳紧力的同时,可以获得较大的驱动位移。阐述了尺蠖式压电驱动器的工作原理,对杠杆式柔性放大机构的位移损失、压电陶瓷与柔性机构的耦合特性及箝位机构与中间驱动机构的刚度进行了分析。利用有限元软件Ansys对钳位机构和驱动机构的变形、应力、输出位移和固有频率等参数进行了仿真分析。最后,搭建了实验平台,测试了驱动器的各项性能。测试结果显示,该驱动器的行程为±25mm,钳紧力为17N,承载力为11N,最大和最小步距分别为55μm和60nm。当驱动电压为150V时,驱动器的最高驱动速度为1.259mm/s。得到的性能指标满足光学领域精密定位需要。     

压电双晶片型惯性冲击式旋转精密驱动器研究

研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元的新型惯性冲击式旋转精密驱动器。对自由端带有集中质量的悬臂式压电双晶片的动态特性进行了有限元法和实验分析,提出了压电双晶片型惯性冲击式精密驱动器特定的定频调压驱动方法。对压电双晶片型惯性冲击式旋转精密驱动器进行了性能测试,驱动器旋转行程为180°、旋转步长分辨力为1μrad、最大转速为0.2 rad/min、最大扭矩为0.02 Nm。该驱动器结构简单,特别是成本为传统惯性冲击式驱动器的1/100左右。     

Novel linear piezoelectric motor for precision position stage

Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus 0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.     

Impact drive rotary precision actuator with piezoelectric bimorphs

An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorphs, a specific fixed-frequency and adjustable-amplitude is confirmed to control the actuator. The results show that an actuator excited by fixed-frequency and the adjustable-amplitude ramp voltage waveform works with a large travel range (180°), high resolution (1 ?rad), speed (0.2 rad/min) and heavy-load ability (0.02 Nm). With advantages of high-precision positioning ability, simple structure and only one percent the cost of traditional impact drive mechanisms, the actuator is expected to be widely used in precision industries.     

A flexure-based long-stroke fast tool servo for diamond turning

This paper describes the development of the fast tool servo (FTS) in detail and categorizes existing FTSs according to different principles. The characteristics and differences of these FTSs have been analyzed. A flexure-based long-stroke FTS system for diamond turning is presented with displacement range of 1?mm and bandwidths of 10?Hz. The vertical jump is about 0.045?μm, and the full stroke tracking error is less than 0.15%. A voice coil motor and a piezoelectric actuator are used as the driving elements, and two flexure hinges are developed as the guide mechanisms. The FTS utilizes a linear encoder and a capacitive sensor to measure the displacement of the tool for closed-loop control. The electromechanical design of the FTS and its motion analysis are described. Experimental tests have been carried out to verify the performance of the FTS system. This long-stroke FTS has the advantage of easy machining, high resonance frequency, and error compensation in y-axis direction.     

基于FTS的非轴对称微结构表面超精密切削系统研究

介绍了基于快速伺服刀架(FTS)的微结构表面超精密金刚石车削加工系统,并利用该系统成功实现了典型非轴对称结构正弦网格表面的加工。作为FTS的驱动元部件,压电陶瓷微位移驱动器的迟滞、蠕变非线性特性大大影响了系统的动态性能与加工精度。因此,建立了基于拓展输入空间法的FTS神经网络逆模型,并结合PID反馈控制,实现了FTS的闭环控制。实验结果表明,该控制策略可以有效提高FTS的动态性能,其跟踪误差小于150 nm,为微结构表面的加工提供了可靠的保证。     

基于改变正压力的惯性式压电旋转机构的研究

提出通过机械方式控制压电移动机构和支撑面之间摩擦力的有序变化,形成有规律的新型惯性式压电旋转机构的研究方案。设计了旋转机构的结构模型,分析了机构的运动原理,建立了机构的动力学模型,应用现代控制理论,利用Matlab对机构进行了运动学仿真,得到了机构位移、速度仿真曲线,设计、制作了旋转机构样机,并作了相关的性能测试。仿真分析结果和试验结果表明了运动机理和动力学模型的正确性。     

Design and testing of a hybrid polymeric electrostrictive/piezoelectric beam with bang–bang control

Electrostrictive materials, hard ceramics and soft polymers, have been used as precision actuators in many engineering applications. This study is to examine bang–bang control performance of a hybrid Plexiglas beam laminated with polymeric electrostrictive (RTV 270) actuator and piezoelectric polyvinylidene fluoride (PVDF) sensor layers using both analytical and experimental techniques. Material characteristics are calibrated via static testing first; a hybrid beam model is then fabricated and an experiment set-up, consisting of a bang–bang controller, high-voltage amplifier, data acquisition system and the hybrid beam system, is designed to evaluate vibration control characteristics (i.e., damping ratio estimation) of the hybrid beam subjected to various control conditions. Due to the quadratic behaviour of electrostrictive materials, the controller activates the electrostrictive actuator only in upward motion of the beam, with reference to signals generated from the piezoelectric sensor. Base on constitutive equations and dynamic/control characteristics, a mathematic hybrid beam model is also derived from the electrostrictive thin shell theory and its dynamic responses, based on the finite difference discretization, are simulated to predict damping ratios resulting from control forces induced by the electrostrictive actuators. Dynamic responses (with and without control) of the physical beam model are measured and compared with simulation results. Favourable comparison suggests that the mathematical model describes the experimental model very well and its application to other advanced structures can be proceeded.     

尺蠖型压电直线驱动器的动态特性

分析了尺蠖型压电直线驱动器的结构原理,建立了驱动器系统动力学模型。对驱动器定子进行了模态分析,并对分析结果进行了评价。对设计开发的驱动器样机输出特性进行了试验测试,实验测得驱动器单步输出位移稳定可靠,100 V驱动电压下,单步输出位移为9.8 μm。对驱动器直线动子的速度、加速度特性进行了测试,依据速度、加速度信号进一步分析了驱动器的动态响应特性。实验结果表明,所开发的驱动器具有动态特性好、运动稳定等优点。     

压电旋转驱动器制作及性能测试

提出了通过控制正压力来改变摩擦力的方案,进而研制了一种以压电叠堆为动力转换元件的新型压电旋转驱动器。采用两个驱动用压电叠堆对称布置的方式设计了该旋转驱动器结构,探讨了旋转驱动器运动机理,制作了压电旋转驱动器试验样机并对其进行了试验测试。试验结果表明,该驱动器输出步长线性度较好,当驱动电压为10 V、频率为2 Hz时,驱动器旋转步长为20 μrad。分析了驱动器输出稳定性,针对存在的问题提出通过施加控制系统来有效提高不同起始位置驱动器的运动稳定性。对试验结果进行误差分析,找出了产生误差的原因,为驱动器的进一步优化设计提供了参考。研究证明了该压电旋转驱动器设计方法的可行性,利用该方法可以制作出结构简单,体积小,适合在微驱动领域中应用的驱动器。     

尺蠖型压电驱动器的闭环控制研究

针对尺蠖型压电驱动器的输出特性,提出利用驱动电压与输出位移分段线性拟合曲线、逐步“搜索”驱动电压值,从而逼近目标位置的闭环控制方法,分析了控制方法的可行性。针对该方法,构建了闭环控制试验系统,对该方法进行了验证,试验结果表明：采用该方法可以实现对尺蠖型压电驱动器的闭环精确控制,相比于开环工作而言定位精度提高了14.4%,该方法具有控制精度较高、响应迅速等优点。     

压电微动工作台的位移复合控制

为解决稳态精度和稳定性之间的矛盾,提高压电陶瓷执行器的控制性能,进而提高其驱动的微动工作台的定位精度,构造了一种前馈补偿同反馈调节相结合的复合控制算法。其中,前馈补偿为基于压电陶瓷执行器迟滞非线性模型的前馈控制,通过自学习算法来实现,用来补偿压电陶瓷执行器的迟滞非线性,提高对参考位移信号的跟踪能力;反馈调节为PID反馈控制,用来进一步校正前馈补偿没有消除的偏差以及由模型的不确定性所引起的误差,且为了减小积分饱和作用以及微分对扰动的敏感性,对PID算法进行了改进,使之成为一种变系数积分与加权微分的PID算法。试验验证了该算法的有效性,并将该算法同其他控制算法——开环控制、前馈控制、PID 反馈控制进行了对比试验研究,结果表明,复合控制算法比其他控制算法具有更好的性能。