聚合物微结构热辅助超声波压印成形

提出了基于硅模具的热辅助超声波压印成形方法,用于高效率、高精度地复制热塑性聚合物微结构。该方法利用作用于聚合物基片与模具间的超声波振动,快速升高界面温度,以达到聚合物的成形温度。为了降低破坏模具的风险,将模具预热到低于玻璃点转化温度(Tg)以下35℃至50℃之后再施加超声波进行成形。最后,通过正交实验研究了超声振幅、超声波压力、超声波时间、热辅助温度以及聚合物基片厚度对压印结果的影响,揭示了超声波压印工艺的成形机理。实验结果表明,热辅助温度对压印影响最大,其次为超声波振幅,而超声波压力是影响复制均匀性的最重要的参数;薄的聚合物基片在同样的超声波参数和模具结构下更容易成形。通过优化参数,对聚甲基丙烯酸甲酯(PMMA)基片的深度复制精度达到了99%,复制周期小于50s。研究表明,热辅助超声波压印成形效率高,是一种具有批量制造潜力的聚合物微结构成形方法。     

电驱动微纳米模塑技术的成形机理及工艺参数影响研究

电驱动微纳米模塑技术较之常规压印光刻技术具有其独特的优势,其利用电场产生的Maxwell压强替代外部机械压力,实现对聚合物薄膜流变的有效驱动,可以避免压印光刻技术中机械压力引发的结构变形等问题,实现微纳米结构的保真复形。针对电驱动微纳米模塑技术中电场施加方式以及模具几何约束的差异,提出非接触式与接触式两种电驱动模塑成形方法,并采用理论分析、数值仿真以及试验等手段探究电场作用下聚合物的流变成形机理,分析电压、空气间隙和膜厚等工艺参数对复形模塑结构的影响,探讨非接触式与接触式两种电驱动微纳米结构成形方法的异同。研究结果表明,两种电驱动模塑技术都能有效避免常规压印光刻技术的不足之处,在无机械压力条件下实现微纳米结构的模板图案完整复型,但接触式电驱动微纳米模塑方式在图形复制精确性、成形效率和工艺可控性等方面更具优势,是一种具有广阔应用潜力的纳米结构图形化方法。     

柔性触觉传感器的三维打印制造技术研究进展

聚合物基柔性触觉传感器在智能机器人、人工假肢与人体健康状态监测等领域有着广泛的应用,将三维打印技术应用于柔性触觉传感器的制造过程可以克服传统制造方法加工周期长、复杂聚合物基微结构制造困难等缺陷。因此发展聚合物基触觉传感器的三维打印制造技术及工艺是当前的学科研究热点,具有广阔的发展前景。首先,在阐述柔性触觉传感器的传感检测原理和性能指标的基础上,重点阐述了柔性触觉传感器三维打印制造技术方面的最新研究进展,包括聚合物基柔性触觉传感器的结构设计、三维打印材料的分类和应用、以及传感器的打印制造方法及工艺等。然后,还总结预测了基于新材料制备和新制造工艺的柔性触觉传感器设计与制造的发展趋势,并对柔性触觉传感器的三维打印制造技术未来的发展趋势进行了展望。     

静电场辅助的微压印光刻技术

介绍了一种静电场辅助的新型微压印光刻技术,并对其工艺过程进行了深入的理论研究。首先,采用数值仿真软件COMSOL~(TM) Multiphysics,建立了静电场辅助的压印光刻瞬态仿真分析模型,讨论了不同时域微结构的演化过程。然后,详细分析了微结构的成型与仿真实验参数的定性关系,发现:适当地减小极板间距、模板凸起结构周期,同时增加模板的凸起高度、初始聚合物薄膜厚度和电压有助于微纳结构的成型。最后,通过仿真实验参数优化,得到了带有31μm中空结构的球冠微结构。与传统压印方法相比,静电场辅助的微压印技术工艺过程简单且成本较低,能够广泛应用于微电子机械系统、光子学、遗传学和组织系统等。     

一种提高压印光刻软模复制精度的方法

由于传统的光刻生产工艺有透镜光学极限性 ,压印光刻为集成电路的生产提供了一种新思路。在压印光刻中 ,模具的制造是重点。为了获得高精度的压印模具 ,在实验中着重从模具材料的选择、固化剂的添加量、真空压力大小、固化温度、固化时间等方面进行分析和研究。采用正交实验方式和数理方差分析 ,通过检测压印模具的平整度、一致性、特征尺寸及模具表面的固化收缩率等参数的变化 ,特别是模具的特征尺寸变化 ,得到了压印模具制作的最佳工艺组合     

微结构模芯的精密磨削及其在微注塑成形中应用

针对微结构聚合物元器件的批量化生产与制造效率低等问题，采用精密修整成V形尖端的金刚石砂轮，在自润滑性和脱模性良好的钛硅碳陶瓷模芯表面加工制造出形状精度可控的V沟槽阵列结构，然后利用微注塑成形工艺将模芯表面的V沟槽阵列结构一次成形复制到聚合物表面，高效注塑成形制造出倒V形阵列结构的聚合物工件。分析了微模芯的表面加工质量与形状精度，研究了熔体温度、注射速度、保压压力、保压时间等微注塑成形工艺参数对微结构聚合物注塑成形角度偏差和填充率的影响。实验结果表明：通过微细磨削加工技术和微注塑成形工艺可以高效率、高精度地制造出规则整齐的微结构注塑工件，注射速度对微成形角度偏差的影响最大，保压压力对微成形填充率的影响最大，微结构模芯的微细磨削形状精度值为4.05 μm，微成形的最小角度偏差和最大填充率分别为1.47°和99.30%。     

下一代光刻技术——压印光刻

通过分析集成电路制造工艺中的核心环节--光刻技术,采用机械微复形原理的压印光刻技术可避免传统光学光刻的光学衍射限制,能够对最小到6 nm特征尺寸的图形进行复制.通过研究压印光刻原理,详细分析对比热压印及常温压印的工艺特点、复形面积、模具结构和阻蚀胶固化过程等,揭示出常温压印更适用于多层套刻的图形制作.针对基于紫外光固化的常温压印光刻工艺在压印过程中的关键技术:阻蚀胶成膜控制、对准、套刻、精确加载、留膜厚度控制、阻蚀胶固化控制等进行深入研究,提出释放保形软压印工艺,能够实现基于常温软模具压印的大面积亚100 nm级特征尺寸图形的复制.最后,以SIL-Ⅰ型分步式常温紫外光固化压印光刻机的研究为例,对其结构特性做出深入分析,估算出系统的精度等级;通过试验,对系统的压印复形精度做出评估.     

基于非接触式热压印技术的微透镜阵列制作

为了降低热压印工艺制作微透镜阵列对模具的要求,提出了非接触式热压印工艺制作微透镜阵列,采用了自主研制的纳米压印样机与光刻工艺制作的通孔式不锈钢模具在PMMA表面压印出微透镜阵列,并分析了压印过程中温度、压力、时间等参数对微透镜阵列表面形貌的影响。研究结果表明,利用非接触式热压印工艺可以制作表面形貌好、位置精度高的微透镜阵列,压印时最佳压印温度为140℃~180℃,最佳脱模温度为80℃,最佳压力为1 500 Pa~3 500 Pa,且采用通孔式模具不需要真空,降低了对环境的要求。     

纳米压印光刻模具制作技术研究进展及其发展趋势

模具是纳米压印光刻(Nanoimprint lithography,NIL)与传统光学光刻工艺最大的区别所在,模具作为压印特征的初始载体直接决定着压印图型的质量,要实现高质量的压印复型,必须要有高质量的压印模具。不同于传统光学光刻使用的掩模(4X),纳米压印光刻使用的是1X模版,它在模具制作、检查和修复技术面临更大挑战。当前,模具的制作已经成为NIL最大的技术瓶颈,而且随着纳米压印光刻研究的日益深入以及应用领域的不断扩大,NIL模具的制造将变的越来越重要并面临着更加严峻的挑战。因此,模具的制造已经成为当前纳米压印光刻一个最重要的研究热点,纳米压印光刻发展的历史也是压印模具不断发展创新的历史。综述了当前国内外各种纳米压印光刻模具制作技术研究进展,并指出三维模具、大面积模具和高分辨率模具的制作、模具缺陷的检查和修复是当前及其将来最迫切的需求、最主要的研究热点和挑战。     

PPDO滑扣型血管支架制备方法与性能研究

比较成形工艺对聚对二氧环已酮(PPDO)滑扣式可降解血管支架性能的影响。对微压印和3D打印(3DP)两种聚合物成形工艺进行比较,主要包括其成形表面质量和径向强度两方面。试验结果显示:微压印制备支架内表面Ra0.429、外表面Ra1.24,优于3DP制备支架,而支架内外表面质量的差异化与可控性也更适合血管支架在抑制凝血和置放稳定等临床医学的需要;另外,两种制备方法所制支架的径向强度均高于临床需要的80 k Pa的标准,其中微压印比3DP略高4%。原因可能是微压印制备将PPDO材料的成形温度降低在材料粘流态温度范围内,使该高分子材料的热降解大大降低,较好的保留了原材料的力学性能与强度保障时间。     

激光材料加工技术的工业应用

主要介绍激光切割、激光焊接、激光打标、激光打孔和激光表面处理等激光材料加工技术在工业中应用的新进展，并介绍近年发展起来的激光材料加工新技术和新工艺及其在工业中的应用。同时展望激光材料加工技术工业应用的发展趋势。     

Tribological Investigation of the Polymer-Based Lubrication System Using a Laboratory Reciprocating Bench Test

Flooded oil lubrication systems are commonly utilized for many manufacturing processes. However, there is an increasing concern with the flooded lubrication systems due to their biological and environmental impact as well as their maintenance and disposal cost. Polymer-based material, a sponge-like solid lubricant allowing the oil to weep out while in use, provides a promising alternative environmentally benign lubrication solution to satisfy the lubrication requirements for some manufacturing processes. In addition, it can minimize contamination of the coolant system, reduce waste processing and disposal costs, and alleviate the in-plant safety hazard from oil leakage on floor surfaces.

The goal of this study is to develop and improve the current lubrication system by applying a polymer-based near-dry lubrication system in order to replace the oil-flooded transfer line lubrication systems currently in production use. Using a laboratory reciprocating bench test based on the design of experiments, this study characterized the tribological performance of the polymer-based lubrication system under a variety of operating conditions, identified the main factor that impacts the tribological performance of the polymer-based lubrication system, and developed a model to predict the wear loss of the polymer-based lubricant plate. These results provide the guidelines for possible applications of the polymer-based lubrication system used in the manufacturing process.     

The Strategic Issues in Implementation of CIM Technology in PRC/HK Enterprises

Since the 1980s, CIM concepts and technologies have been applied by many manufacturing enterprises to remain competitive in the keen market environment. Faced with so many new technologies, entrepreneurs of PRC/HK enterprises sometimes feel ill at ease and even bewildered, although the PRC government has been supporting a number of CIM development initiatives since 1986. This paper sketches the development trends of modern manufacturing technologies and their applications in PRC/HK industries. The findings are based on a series of survey visits carried out in PRC/HK. The implementation strategies and methodologies appropriate for manufacturing automation and computerisation are put forward, taking into account the opportunities and challenges faced by these PRC/HK enterprises.     

A theoretical and experimental investigation of orthogonal slow tool servo machining of wavy microstructured patterns on precision rollers

Precision cylinders, or rollers, with patterned microstructures on the surface are the key tooling component in the Roll-to-Roll and Roll-to-Plane fabrication process for precision manufacturing of microstructured plastic films. These films are widely used in optical applications such as the backlight guide and brightness enhancement films in LCD and LED displays. Compared with other fabrication processes, such as lithography, Single-Point Diamond Turning (SPDT), using a Fast Tool Servo (FTS) or Slow Tool Servo (STS) process, is an enabling and efficient machining method to fabricate microstructures. Most studies of the tool servo machining process focus on either machining microstructures in the axial direction for face machining of flat parts or in the radial direction on the surface of a precision roller. There is relatively little research work found on the machining of patterned microstructures on the surface of precision rollers using the tool servo in the axial direction. This paper presents a pilot study on the development of a tool path generator for machining wavy microstructure patterns on precision rollers by using an Orthogonal Slow Tool Servo (OSTS) process. The machining concept of OSTS is first explained, and then the tool path generator is developed in detail for machining wavy microstructure patterns on a roller surface. Modelling and simulation of pattern generation for different microstructures with different wavy patterns and grooves are presented based on the proposed tool path generator. Preliminary experimental work using SPDT on a 4-axis ultra-precision machine tool is presented and clearly shows the generation of unique wavy microstructure patterns on a precision roller. The machined wavy microstructures on the roller surface are measured and analyzed to evaluate the validity of the proposed tool path generator.     

Evaluation of micromechanical manufacturing processes for microfluidic devices

In this paper, several micromechanical manufacturing technologies were studied in order to characterize their performance for prototyping miniaturized geometries known as microchannels, which are the main geometric features of microfluidic devices. The technologies used were microend milling, wire electrodischarge machining/sandblasting, and abrasive water jet. Their capabilities were compared with lithography capabilities, which is the conventional process for microchannel manufacturing. The evaluation consists in a comprehensive study of surface quality and topography, made with the help of advanced contact and noncontact profilometers over each prototype. Also economical considerations have been taken into account in order to choose the most appropriate manufacturing process for the prototyping of microfluidic devices. The results show that microend milling process can compete with lithography, in terms of achieving acceptable levels of product quality and economics.     

网络制造技术分析及其发展趋势

详细阐述了网络制造的技术内涵,对网络制造研究及发展中的关键技术如网络数据的存取与交换技术、网络安全性、网络制造的管理模式等做了详细分析,并指出了网络制造的发展趋势。     

Friction-Induced Nanofabrication:A Review

As the bridge between basic principles and applications of nanotechnology,nanofabrication methods play significant role in supporting the development of nanoscale science and engineering,which is changing and improving the production and lifestyle of the human.Photo lithography and other alternative technologies,such as nanoimprinting,electron beam lithography,focused ion beam cutting,and scanning probe lithography,have brought great progress of semiconductor industry,IC manufacturing and micro/nanoelectromechanical system(MEMS/NEMS)devices.However,there remains a lot of challenges,relating to the resolution,cost,speed,and so on,in realizing high-quality products with further development of nanotechnology.None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time,and it is essential to explore new nanofabrication methods.As a newly developed scanning probe microscope(SPM)-based lithography,friction-induced nanofabrication provides opportunities for maskless,flexible,low-damage,low-cost and environment-friendly processing on a wide variety of materials,including silicon,quartz,glass surfaces,and so on.It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates,microfluidic devices,and micro/nano optical structures.This paper hereby involved the principals and operations of friction-induced nanofabrication,including friction-induced selective etching,and the applications were reviewed as well for looking ahead at oppor-tunities and challenges with nanotechnology development.The present review will not only enrich the knowledge in nanotribology,but also plays a positive role in promoting SPM-based nanofabrication.     

扩展型混合磨削云PAAS系统的研究与设计

计算机辅助磨削制造软件是磨削制造加工领域的软实力资源,扩展型混合磨削云PAAS系统为整合利用磨削制造软件资源提供了一个通用的、可扩展的平台,它利用混合云计算技术为磨削制造加工企业使用CAM软件资源提供了方便可靠、费用低廉的途径。设计了PAAS系统的网络及软件体系架构,阐述了系统的实现原理、功能及关键技术,利用人工智能技术设计了CAM方案控制算法,开发了磨削云PAAS软件系统,并对其在磨削行业的实践应用及发展趋势做了介绍。     

航天大型薄壁回转曲面构件成形制造技术的发展与挑战

薄壁曲面构件是广泛应用于航空航天等高端运载装备的关键构件。大型薄壁曲面构件成形制造技术是新一代航空航天飞行器、战略导弹和船舶等尖端装备向大型化、轻量化、高性能化、长寿命和高可靠性方向发展的迫切需要。然而,这类构件的壁薄、直径等尺寸大、曲率变化、大小尺寸极端结合,且材料轻质高强、性能要求高等,使其制造难度大。首先概述了航天领域大型薄壁回转曲面构件及其制造技术的发展历程与类型,据此针对不同类型的大型薄壁回转曲面构件制造技术综述了其应用与研究进展,然后对比分析了各制造工艺的技术特色、构件性能与发展潜力,探讨了大型薄壁回转曲面构件制造技术的未来发展趋势与面临的挑战。