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针对传统半固结研磨盘由于盘面较软使得加工衬底面形精度难以保证的问题,提出一种蜂窝状结构的半固结磨料研磨盘的设计与制备方法。该研磨盘采用环氧树脂蜂窝结构作为支撑“骨架”,减小研磨盘的变形,以保证研磨衬底的面形精度,同时采用含有金刚石磨粒的凝胶体作为半固结研磨介质实现对衬底的研磨加工,获得了较好的衬底表面质量。基于该原理制备了一套新型研磨盘,并用于蓝宝石衬底的双面研磨加工。试验结果表明,研磨后衬底表面粗糙度较小,表面划痕和裂纹少,能够获得较好的表面质量;相应地,研磨后蓝宝石衬底的面形精度不仅没有变差,反而得到很大的改善,研磨后衬底的翘曲度、弯曲度和总厚度偏差均大幅减小。另外,研磨效率也相对较高,材料去除率可达0.3~0.4 μm/min。试验结果证明了该新型结构研磨盘不仅可以获得较好的表面质量和较高的研磨效率,同时还可提高衬底的面形精度,可用于面形精度要求较高的薄片衬底零件的精密研磨加工。 相似文献
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《光学精密工程》2021,29(7)
行星研磨技术由于提升磨削接触点相对速度,能够有效提高材料去除效率。但由于传统研磨盘不均匀磨损,导致研磨盘形状持续改变,从而影响了研磨过程中去除函数的稳定性和准确性,限制了该技术的应用。本文针对基于小磨头行星运动方式,通过建立构建磨损函数,预置研磨盘曲率半径,使研磨盘满足在加工单周期后各点去除量相等,从而提升去除函数稳定性。通过实验验证,研磨去除函数与模型仿真计算结果一致,验证了模型的准确性,利用优化后的研磨盘可获得高效稳定的去除函数。采用直径40 mm SiC研磨盘研磨SiC工件,实验结果表明:对比加工前后研磨盘磨损情况,面形变化小于1%,符合均匀去除要求;对比多组不同研磨阶段去除函数,体积去除率误差小于2.3%,满足光学研磨去除函数稳定性要求;在公转100 r·min~(-1),自转-100 r·min~(-1)条件下,体积去除率达到6.879 mm~3·min~(-1),比同样参数下的平转动研磨提高了40.9%的去除量。证明了行星研磨技术能够通过参数设计获得高稳定性的高效去除函数,为行星运动研磨技术应用于SiC镜片高效加工提了供可靠的理论指导。 相似文献
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行星研磨机研磨盘的设计改进 总被引:1,自引:0,他引:1
为了实现研磨盘工作面各点等速磨损,提高被研磨表面的精度,试验分析了使用平面研磨盘和等距槽研磨盘的磨损及工件质量问题,从而寻求出新型研磨盘的设计方法,并经验证取得了令人满意的效果。 相似文献
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为了实现较大工件的平面研磨,研磨机需要完成大回转直径的行星运动。通过分析工件与研磨盘的相对运动,确定了获得较佳研磨效果的研磨轨迹和研磨速度,然后分析了采用锥齿轮传动实现研磨工件的大回转直径平动的可行性,设计了锥齿轮传动平面研磨机的主传动系统的具体传动机构,并对锥齿轮传动的主要参数进行了设计计算。对锥齿轮传动行星运动传动比进行了计算,通过合理选择各锥齿轮齿数,实现了工件的平动。加大锥齿轮传动轴的长度,可以获得更大回转直径的平面研磨运动。 相似文献
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《仪表技术与传感器》1971,(2)
非球面光学零件的加工方法有许多种,本文所提出的是在研磨——抛光机上用球面研磨盘加工球面零件毛坯而获得非球面的方法。其特点是研磨盘和零件毛坯曲率半径大小不等,而它们的旋转轴心线则保持平行,借助于凸轮和传动链使研磨盘或工件作往复运动,并使研磨盘和零件表面均匀接触,以螺旋线的运动形式磨削零件表面。实现上述加工方法的装置如图所示,球面零件1和球面研磨盘2借助凸轮3和传动链而互相接触磨削,研磨盘和工件的曲率半径大小不等,并要求上板4和研磨盘的旋转轴心线保持平行。上板4和作往复运动的连杆5固定在一 相似文献
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变位自转式双平面研磨方法仿真研究及加工实验 总被引:1,自引:0,他引:1
针对传统平面研磨方法中,工件中心研磨轨迹重复率高,研磨速度径向分布不均的缺点,基于固着磨料研磨技术提出一种变位自转式双平面研磨加工方法。工件在研具的运动中获得变化的研磨力,在隔离盘内实现变位自转的研磨运动形式。从研磨原理上改变了传统研磨加工中工件的运动模式,增加了工件的自由度,实现了工件在自转的同时其回转中心与研具中心存在时变的相对运动,即工件回转中心相对于研具的运动轨迹是具有时变性的曲线。不同的研磨运动形式从根本上克服了传统方法的缺点,并依此原理研制了新型数控研磨机床。通过对变位自转研磨加工轨迹曲线的仿真分析,证明了这种研磨方法有利于改善研磨相对速度分布均匀性、研磨轨迹时变性,获得更好的研磨加工质量,加工实验证明在相同加工参数下,该研磨方法相对于行星轮式的研磨方法获得了更低的表面粗糙度。 相似文献
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In machining of pieces that require surface finishing levels finer than grinding can offer, it is necessary to use specific finishing processes. However, these processes, which have lapping as the most classic representative, are usually difficult to setup and demand much time in setting the large number of variables. This paper discusses the investigation of an abrasive process for finishing of flat workpieces based on the combination of important grinding and lapping characteristics. Instead of loosing abrasive grains between the workpiece and the lapping plate, a resinoid grinding wheel of hot-pressed silicon carbide is fixed on the plate of a device resembling to a lapping machine. The grinding wheel is dressed with a single-point diamond for maintaining its form flat and mainly for interfering in the workpieces surface finishing by varying of the overlap factor (Ud). It was noticed that the studied process can simplify the setup and make it easier than in lapping, which is a painstaking process. The surface roughness values and flatness deviations showed to be comparable to those achieved in lapping, or even better. The best surface roughness and flatness deviation found were Ra = 0.8 nm and 0.4 μm with Ud = 3, respectively. The workpiece material was made of quenched and tempered SAE 4340 steel, reaching a hardness of 60 HRC. The process was also monitored by acoustic emission (AE), which indicates to be a promising and suitable technique to be used in this process. Compared to lapping, there is an additional advantage of a less contaminated workpiece surface with a shiny appearance. 相似文献
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对偏心运动双平面超精研抛圆柱面的加工技术进行了理论和试验研究。基于几何运动学理论建立了加工系统数学模型,应用速度矢量法求解圆柱工件各运动参数,进而实现了工件圆柱面加工轨迹的仿真,分别分析了工件中心至夹具中心距离与夹具中心至研磨盘中心距离的比值、夹具自转转速与夹具公转转速的比值对加工轨迹形态和轨迹交叉角度的影响规律。在自制试验装置上对轴承钢GCr15圆柱滚子进行了超精研磨和抛光试验,改善了一批工件圆柱面的圆度和表面粗糙度及其偏差。仿真结果和试验结果的比较分析说明,仿真结果可反映实际工件表面微观加工痕迹的相互交叉的几何特征。 相似文献
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Dominic S. Guevarra Akira Kyusojin Hiromi Isobe Yoshiaki Kaneko 《Precision Engineering》2002,26(4):389-395
This paper presents a new approach in lapping process in making appropriate condition to improve the manufacturing operations for ball screw. After grinding, high precision ball screw is lapped by highly skilled operators. These operators have the ability to control and maintain the lapping conditions by sensing the lapping torque manually. Prior to lapping process, the effective diameter must be measured to find out the effective threaded profile along the screw shaft. The section which has a large effective diameter will be primarily lapped wherein the lapping torque is high. The aim of this study is to establish a control scheme on the automatic lapping machine for high precision ball screw in both measuring and finishing process. A prototyped horizontal lapping machine with in-process torque monitoring system has been designed, built, and tested. This is to determine the relationship among lapping torque, effective diameter, and error on travel to establish the measurement system to control the finishing operations efficiently and eventually improve and eliminate the various sorts of error components in a ball screw. The experimental results showed that the new lapping method could adequately predict the effective diameter and error on travel by observing the lapping torque. 相似文献
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基于新型抛光磨头的结构特点,通过理论分析法推导出外啮合副齿轮啮合效率计算公式,利用啮合功率法导出磨头内行星传动的啮合效率方程,并结合其他功率损失得出磨头对工作总效率方程。最后通过实例计算出其理论效率,并通过现场磨头对工作效率进行了验证。 相似文献
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Meipeng Zhong Julong Yuan Weifeng Yao Zhixiang Chen Kaiping Feng 《The International Journal of Advanced Manufacturing Technology》2018,97(1-4):175-188
To improve the convexity uniformity, processing efficiency, and surface quality of precision-machined crowned rollers, this paper proposes a double-curved disc ultrasonic-assisted lapping (DUAL) method. Firstly, a DUAL machine is designed according to the technical requirements of crowned roller lapping, and the working principle is presented. Then, the ultrasonic-coupled processing mechanism for crowned roller surfaces is analyzed, and the abrasive particle motion and material removal regularities under cavitation are acquired. Subsequently, an ultrasonic amplitude transformer for DUAL is developed, and the DUAL experimental platform for precision-machined crowned rollers is established. Finally, comparative processing experiments using non-ultrasonic lapping and through-feed super-finishing are performed. The experimental results indicate that the proposed DUAL method can improve processing efficiency and surface roughness, and also the batch uniformity of the convex metric. 相似文献
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叙述了钢球硬磨和精研过程中产生的脱落物的具体尺寸,提供了钢球精研液净化处理的各种方法,对控制精研液的清洁度、提高钢球表面质量和精研液的利用率、降低加工成本具有参考价值。 相似文献
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硬齿面精加工在加工精度和加工效率上取得了一些进步,出现了一些新的工艺方法。本文对国内外硬齿面的滚齿、插齿、剃齿、珩齿以及磨齿的最新工艺方法及装备进行了介绍,尤其是对磨齿加工的成形法和展成法工艺现状进行了详细介绍,指出了硬齿面精加工方法的发展方向。 相似文献
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