外差干涉仪光路调节方法及对拍频的理解

外差激光干涉仪由于测量精度高,环境适应能力强和实时动态高速测量等特点而广泛应用于机床误差的实时监测中。外差激光干涉仪中,使用平面镜作为转向装置时,接收器上的两束光有可能只是相交而不是重合,这给光路的调节增加了很大的难度。针对这一问题,提出一种辅助光路调节方法,先将光路切换到单频干涉仪,调好光路,再切换到外差干涉仪,利用单频干涉条纹的直观性能可看出外差干涉仪光路调节的好坏。理论分析和实验结果表明,提出的调节方案具有可行性,效果良好,同时通过从单频切换到双频能更深入地理解拍频。     

Frequency discriminators for the characterization of narrow-spectrum heterodyne beat signals: application to the measurement of a sub-hertz carrier-envelope-offset beat in an optical frequency comb

We describe a radio-frequency (RF) discriminator, or frequency-to-voltage converter, based on a voltage-controlled oscillator phase-locked to the signal under test, which has been developed to analyze the frequency noise properties of an RF signal, e.g., a heterodyne optical beat signal between two lasers or between a laser and an optical frequency comb. We present a detailed characterization of the properties of this discriminator and we compare it to three other commercially available discriminators. Owing to its large linear frequency range of 7 MHz, its bandwidth of 200 kHz and its noise floor below 0.01 Hz(2)/Hz in a significant part of the spectrum, our frequency discriminator is able to fully characterize the frequency noise of a beat signal with a linewidth ranging from a couple of megahertz down to a few hertz. As an example of application, we present measurements of the frequency noise of the carrier envelope offset beat in a low-noise optical frequency comb.     

Calibration of laser Doppler vibrometer and laser interferometers in high-frequency regions using electro-optical modulator

We proposed a new primary calibration method of a laser Doppler vibrometer (LDV) using the optical modulated excitation of an electro-optical modulator and validated this approach by comparing mechanical modulated excitation with homodyne laser interferometer at the National Metrology Institute of Japan (NMIJ). The velocity sensitivity of the LDV was evaluated with the uncertainty budget at a high-frequency range up to 1 MHz, which is indicated as the upper limit of 50 kHz in ISO (International Organization for Standardization) 16063–41. As the results, we confirmed that velocity sensitivities between optical and mechanical modulated excitations are flat within their uncertainty from 100 Hz up to 1 MHz. Moreover, in order to evaluate the accurate phase shift of the accelerometer up to 20 kHz using optical modulated excitation, we also revealed the reliability of two time shifts between homodyne and heterodyne laser interferometers.     

Improvement and validity of shock measurements using heterodyne laser interferometer

The improvement and validity of shock measurements using only the laser head (heterodyne laser interferometer) of a commercial laser Doppler vibrometer was investigated by comparing acceleration waveforms measured by a homodyne laser interferometer with those measured by a heterodyne laser interferometer. The acceleration waveforms were generated from the displacement waveforms obtained with a reference quadrature homodyne laser interferometer by applying a numeric differentiation process twice. The differences between the two acceleration waveforms were found to be small with the measurement uncertainty in case of high acceleration level. In a further investigation, the accuracy of the shock measurements taken by the homodyne and heterodyne laser interferometers were compared in computational simulation. The results indicated that the accuracy of the heterodyne laser interferometer was superior to that of the homodyne laser interferometer.     

重复频率锁定的783 nm飞秒光纤激光器研制

设计并搭建了重复频率长时精确锁定的783 nm飞秒光纤激光器。该激光器基于全保偏非线性干涉环镜(NALM),实现掺铒光纤振荡器锁模脉冲输出,由与脉冲分离器级联的环境稳定掺铒光纤双级放大器进行功率放大,实现了平均功率1.30 W、脉冲宽度130 fs、重复频率77.1 MHz、1560 nm脉冲输出;通过周期极化铌酸锂(PPLN)光学晶体倍频,获得了平均功率为0.52 W、脉冲宽度为140 fs、783 nm脉冲输出。通过重复频率监测及锁相环技术,进一步将掺铒光纤振荡器的重复频率溯源至参考铷原子钟,12 h内频率抖动峰-峰值为5 mHz、标准偏差为1.2 mHz。该激光器系统具有稳定性高、集成度高、体积小的特点。     

空间光混频器分光性能的分析与优化

为了进一步提高零差相干光通信系统的接收灵敏度,对空间光混频器的信号光分光比进行了优化。根据零差相干通信系统数学模型,推导了信号光分光比和环路相位误差、通信误码率的数学表达式,经过计算分析可知当光混频器Q支路的信号光满足锁相环要求时,可通过提高I支路信号光分光比来降低误码率和提高接收灵敏度。在分光比优化后光混频效率提高了53.5%,通信探测灵敏度提高了3dB。利用VPI软件进行建模仿真,得到不同分光比下系统的眼图和相位噪声功率。仿真结果显示,探测灵敏度提高了2.83dB。最后,搭建了零差相干光通信桌面实验系统,研究了空间光混频器分光比和系统误码率、锁相环工作的影响规律,当分光比由0.5减小至0.2时,系统误码率由3.53×10~(-9)下降至4.25×10~(-10),当分光比为0.1时,锁相环失锁,误码率为1。实验结果基本符合理论和仿真结果,所得分光比的影响规律和优化结果将为空间零差相干通信系统的研制提供技术参考。     

高Q值微机电陀螺的快速起振控制

针对高Q值微机电陀螺的快速起振问题,研究其驱动轴控制方法。分析了高Q值谐振器的振动相位随频率的变化率,阐明了锁相环方案启动时间长且对初始频率偏差敏感的原因。用平均法推导了自激振荡方案下起振初始阶段振幅随时间的变化规律。提出了"自激-锁相"驱动轴控制方案,先采用自激振荡方式使陀螺快速起振,再转为锁相环方式使振动频率精确稳定。经实验测试,采用锁相环方案,当初始频率偏差在±10 Hz以内,陀螺的启动时间为2s;采用自激-锁相方案,只要初始频率偏差在±1 000Hz以内,陀螺均可在0.3s内达到频率误差小于0.01%,在0.4s内达到振幅误差小于0.1%。"自激-锁相"方案大幅度缩短了陀螺的启动时间,而且对陀螺初始频率的设置偏差不敏感,对环境温度变化的适应性好,适用于微机电陀螺的批量生产。     

Real-time displacement measurements with a Fabry-Perot cavity and a diode laser

We present the basic operating principles of a traceable measurement system suitable for use with atomic force microscopes (AFMs) and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is servo-locked via a phase-modulated heterodyne locking technique to a Fabry-Perot interferometer cavity. We discuss mechanical considerations for the use of this cavity as a displacement metrology system and we describe methods for making real-time (sub 10 ms sampling period) measurements of the optical heterodyne signals. Our interferometer system produces a root-mean-squared (RMS) displacement measurement resolution of 20 pm. Two applications of the system are described. First, the system was used to examine known optical mixing errors in a heterodyne Michelson interferometer. Second, the Fabry-Perot interferometer was integrated into the Z axis of a commercial AFM scanning stage and used to produce interferometer-based images of a 17 nm step height specimen. We also demonstrate atomic resolution interferometer-based images of a 0.3 nm silicon single atomic step-terrace specimen.     

Ground-based prototype quantum cascade laser heterodyne radiometer for atmospheric studies

The advent of quantum cascade lasers has provided matured continuously tunable solid state laser sources emitting from mid-infrared to terahertz wavelengths. Such sources, used as local oscillators, offer the practical prospect of aircraft, high altitude platform, and satellite deployment of compact and shot noise limited heterodyne radiometers for Earth observation and astronomy. A ground-based prototype of a quantum cascade laser heterodyne radiometer operating in the mid-infrared has been developed and is presented. The instrument design and concepts are described, together with evaluation of the instrument in the laboratory and during field measurements of atmospheric ozone. In this study the best performance achieved by the prototype quantum cascade laser heterodyne radiometer was a signal-to-noise ratio of three times the theoretical shot-noise limit. The prototype has allowed the main sources of excess noise to be identified as residual optical feedback in the local oscillator optical path and a lack of mechanical and thermal stability in the local oscillator collimation system. Instrument improvements are currently being implemented and enhanced performance is expected in the near future.     

声光式外差干涉仪的光路设计与分析

制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量.文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量.     

Offset phase locking of noisy diode lasers aided by frequency division

For heterodyne phase locking, frequency division of the beat note between two oscillators can improve the reliability of the phase lock and the quality of the phase synchronization. Frequency division can also reduce the size, weight, power, and cost of the instrument by excluding the microwave synthesizer from the control loop when the heterodyne offset frequency is large (5 to 10 GHz). We have experimentally tested the use of a frequency divider in an optical phase-lock loop and compared the achieved level of residual phase fluctuations between two diode lasers with that achieved without the use of a frequency divider. The two methods achieve comparable phase stability provided that sufficient loop gain is maintained after frequency division to preserve the required bandwidth. We have also numerically analyzed the noise properties and internal dynamics of phase-locked loops subjected to a high level of phase fluctuations, and our modeling confirms the expected benefits of having an in-loop frequency divider.     

Phase-locked laser system for use in atomic coherence experiments

We describe a phase-coherent laser system designed for use in experiments involving coherently prepared atomic media. We implement a simple technique based on a sample-and-hold circuit together with a reset of the integrating electronics that makes it possible to scan continuously the relative frequency between the lasers of over tens of gigahertz while keeping them phase locked. The system consists of three external-cavity diode lasers operating around 795 nm. A low-power laser serves as a frequency reference for two high-power lasers which are phased locked with an optical phase-locked loop. We measured the residual phase noise of the system to be less than 0.04 rad(2). In order to show the application of the system towards atomic coherence experiments, we used it to implement electromagnetically induced transparency in a rubidium vapor cell and obtained a reduction in the absorption coefficient of 92%.     

超精密外差利特罗式光栅干涉仪位移测量系统

开展了扫描干涉光刻机工作台超精密位移测量的实验研究,以提高扫描干涉光刻机的环境鲁棒性。针对扫描干涉光刻机工作台位移测量精度,提出了新型高环境鲁棒性外差利特罗式光栅干涉仪测量系统。介绍了系统测量原理,设计了测量系统,提出了基于Elden公式的系统死程误差建模方法。设计制造了尺寸仅为48mm×48mm×18mm的光栅干涉仪。基于误差模型计算了死程误差,计算结果表明:对于1.52mm死程的光栅干涉仪,宽松的环境波动指标(温度波动为0.01℃、压力梯度为±7.5Pa、相对湿度波动为1.5%、CO2含量波动为±50×10-6)仅引起±0.05nm的死程误差。最后,设计了基于商用双频激光平面镜干涉仪的测量比对系统,开展了光栅干涉仪原理验证实验和测并量稳定性实验。原理验证实验表明:光栅干涉仪原理正确且系统分辨率达0.41nm。测量稳定性实验表明:常规实验室环境下,环境波动引起的死程误差为7.59nm(3σ)@0.9Hz1~10Hz,优于同等环境条件下平面镜干涉仪的31.11nm(3σ)@0.9Hz1~10Hz。实验结果显示系统具有很高的环境鲁棒性。     

Image formation in scanned heterodyne microscope systems

Several new scanning microscopic techniques have recently been developed which rely on modulation of the optical beam to enhance the imaging performance. These systems have the common feature that the image is formed by detection or demodulation of an a.c. signal. Techniques have been developed which are sensitive to both intensity and phase information in the sample. We refer to such microscopes as heterodyne imaging systems (and by analogy single-frequency microscopes, operating at d.c. only, are referred to as homodyne) although as we will point out this term is only strictly applicable to the interferometric-based methods. Although the theory for the conventional homodyne scanning optical microscope is well developed there has been no systematic study of heterodyne microscopic techniques, which is the purpose of this paper. Several techniques are discussed and compared and the different ways of extracting amplitude and phase information are considered in detail with reference to experimental systems which have been demonstrated to have good imaging performance.     

高速平衡零拍探测器的设计与实现

平衡零拍探测器存在共模抑制比小、响应带宽低等问题。针对以上问题,尝试从两方面进行改进：一方面,通过测试探测器中光电检测器（PIN光电二极管）的响应特性,选择性能相近的器件进行平衡探测,以提升共模抑制比;另一方面,采用跨阻放大与比例运放级联的方式对光电流信号进行提取,解决一级采样放大器增益带宽积局限的问题,在保障灵敏度的同时提升探测器的响应带宽。由此实现了300 MHz的平衡零拍探测,共模抑制比高达66 dB,并有效检测了光信号中的量子散粒噪声,为高速灵敏探测提供了一种有效技术方案。     

宽谱段空间外差干涉光谱仪

研究了基于中阶梯光栅多级衍射特性实现谱段展宽的宽谱段空间外差干涉光谱仪的基础理论和系统设计方法。阐述了宽谱段空间外差干涉光谱仪的特点,分析了仪器性能指标(光谱分辨率、光谱范围、视场、信噪比、衍射级次等)与初始光学和电子学参数(光栅、视场棱镜、成像系统、探测器等)之间的理论关系。然后,设计并搭建了宽谱段空间外差干涉光谱仪实验平台,该系统的理论光谱分辨率为0.173cm-1@16 950cm-1,光谱区为500~700nm。最后,给出了激光(543.5nm、632.8nm)、Na灯(589nm、589.6nm)、Hg灯(576.96nm、579.07nm)光源的宽谱段实验结果,其复原光谱的平均波数采样间隔为0.17cm-1;光谱复原过程中采用三角切趾函数,平均光谱分辨率为0.39cm-1。实验结果与理论设计符合良好,且复原谱各级次之间的对应关系与光栅方程确定的理论关系完全符合。     

Real-time wavelength corrected heterodyne laser interferometry

We describe the combined methods of displacement heterodyne laser interferometry with wavelength tracking based on a Fabry-Perot cavity to correct the instantaneous wavelength in air. The optical frequency of the interferometry source was locked to the resonance peak of an open cavity, directly linking the refractive index changes to frequency changes. Using this method, refractive index changes are compensated by an appropriate change in the laser frequency in real time, eliminating the limitations with environmental parameter measurement bandwidth uncertainties associated with equation-based corrections. In this paper, the principles of the system are explained and experimental results showed a difference of 2 nm compared with traditional equation-based techniques. The measurement uncertainty and practical considerations for implementation are also discussed.     

3.53μm激光外差太阳光谱测量系统

激光外差技术具有高光谱分辨率特性,常用于地球大气探测研究,尤其是测量整层大气透过率及气体浓度反演。本论文设计了以窄线宽3.53μm分布反馈式带间级联激光器作为本振光源的激光外差系统,实现了整层大气中水汽和甲烷气体吸收光谱的测量,系统光谱分辨率达到0.002cm-1,信噪比为24.9dB,达到多普勒线型吸收谱线的测量要求。利用自行搭建的测量系统测量了3.53μm波段整层大气透过率,与辐射传输软件仿真分析结果进行对比,其绝对差值小于0.1,实测透过率与仿真透过率具有相同的变化趋势。该系统结合最小二乘法实现了实际大气中水汽和甲烷的同步反演,合肥地区春季水汽和甲烷的柱浓度均值分别为1.20g/cm2和1.31mg/cm2。通过对3.53μm激光外差太阳光谱测量系统的研究,掌握了调提高光谱分辨率和信噪比的方法,为获取大气分子更加准确的吸收谱线和气体浓度反演奠定了基础。     

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is ±30 nm∕200 nm and ±0.04 arcsec∕0.1 arcsec at 1000 Hz.