基于MEMS微电极芯片的电穿孔系统

报道了一种基于微加工金电极的细胞电穿孔芯片及一套完整的细胞电穿孔系统。该系统能够在多种细胞系中实现高效细胞电穿孔(对典型HEK-293A(人胚胎肾细胞)细胞的穿孔效率高于90%,3T3-L1(小鼠胚胎成纤维细胞)的电穿孔效率高达80%)。并且具有手动模式和自动模式。同时,由于基于独特的电极设计,其所需电压也远低于现有设备(典型工作电压为60 V),成本更低,操作更安全。     

Preparation and properties of deep dye fibers from poly(ethylene terephthalate)/SiO2 nanocomposites by in situ polymerization

In this study, poly(ethylene terephthalate) (PET)/SiO₂ nanocomposites were synthesized by in situ polymerization and melt‐spun to fibers. The superfine structure and properties of PET/SiO₂ fibers were studied in detail by means of TEM, DSC, SEM, and a universal tensile machine. According to the TEM, SiO₂ nanoparticles were well dispersed in the PET matrix at a size level of 10–20 nm. The DSC results indicated that the SiO₂ nanoparticles might act as a marked nucleating agent promoting the crystallization of the PET matrix from melt but which inhibited the crystallization from the glassy state, owing to the “crosslink” interaction between the PET and SiO₂ nanoparticles. The tensile strength of 5.73 MPa was obtained for the fiber from PET/0.1 wt % SiO₂, which was 17% higher than that of the pure PET. The fibers were treated with aqueous NaOH. SEM photographs showed that more and deeper pits were introduced onto PET fibers, which provided shortcuts for disperse dye and diffused the reflection to a great extent. According to the K/S values, the color strength of the dyeing increased with increasing SiO₂ content. It is found that the deep dyeability of PET fibers was improved greatly. © 2007 Wiley Periodicals, Inc. J Appl Polym Sci 2007     

Construction of two-dimensional supramolecular structure containing water tetramer and octamer

The complex [Cd₂(phen)₄(p-phth)(H₂O)₂](p-phth) · 10H₂O (1) has been synthesized by the reaction Cd(NO₃)₂ with phen and p-phth (where phen = 1,10-phenanthroline, p-phth = p-phthalic acid) in a solution of ethanol and distilled water. The crystal structure was characterized by X-ray single-crystal diffraction and infrared spectrum. In 1, a novel 2D supramolecular structure was formed, containing water octamer and tetramer.     

一种新型玻璃基底可用于微陀螺的反磁悬浮结构的设计与制造

主要介绍了反磁悬浮系统的悬浮和稳定的原理以及用作惯性传感器的原理。研究了对反磁悬浮微器件理论。使用ANSOFT的MAXWELL3D有限元软件包分析了反磁转子悬浮微器件的悬浮问题,对于转子的悬浮、稳定和旋转进行了系统的仿真分析,包括受力分析与位移分析。对反磁悬浮微器件的制作工艺进行了研究。对反磁悬浮器件进行了相关实验。     

一种高性能人造视网膜微刺激器的设计

微刺激器是人造视网膜系统的核心组成部分,其设计面临诸多挑战.设计了一个驱动4×4微电极阵列的人造视网膜微刺激器,通过采用内部计数和内部RAM策略,将传输数据量减小到1/16.通过采用宽摆幅共源共栅结构使微刺激器的输出阻抗和输出电压摆幅分别达到2～4兆欧姆和90%以上,提高了其生物环境适应性.通过引入电荷平衡机制,减小了失配引起的电荷积累,提高了人造视网膜长期工作的安全性.仿真结果验证了该微刺激器方案的正确性.     

一种新型的电热驱动MEMS微继电器的研制

设计和制备了一种新型的电热驱动微电子机械(MEMS)继电器,并进行了性能测试.整个工艺采用非硅MEMS工艺,利用Cu作为牺牲层材料,Ni作为微继电器的结构材料.微继电器是基于杠杆放大原理设计的,因此能够获得较大的行程;驱动臂采用"U"型梁设计,能够在不增加功耗的条件下,获得较大的驱动力.并采用Ansys10.0有限元软件对微继电器进行了模拟分析.测试结果表明,这种微型继电器具有体积小、驱动电压低、切换速度快等优点.     

自加热非晶锗热电阻MEMS流速传感器的制造与测试

为扩大流速传感器的测量范围并降低功耗,制造并测试了一种基于自加热非晶锗薄膜热电阻的MEMS流速传感器,它是由嵌入氮化硅薄膜的四个非晶锗热敏电阻和一对环境测温补偿电阻组成。四个非晶锗热电阻同时作为自加热热源和测温元件,相互连接以形成惠斯通电桥。给出了MEMS工艺流程,微加工制造了尺寸为8.9 mm×5.6 mm×0.4 mm的流速传感器芯片。搭建了低流速和高流速气流通道实验装置,对传感器的惠斯通电桥施加50μA的恒定电流(CCA),实现了0～50 m/s范围内的流速测量。结果表明,传感器在低流速(0～2 m/s)时的灵敏度约为81.6 mV/(m/s),在高流速(2～50 m/s)时的灵敏度约为51.9 mV/(m/s),最大功耗仅约为1.03 mW。     

Comparison of the RF MEMS switches with dielectric layers on the bridge’s lower surface and on the transmission line

Previously, we proposed that the dielectric layer of RF MEMS switch can be fabricated either on the transmission line, as traditional switches, or on the lower surface of the bridge. This paper presents a detailed comparison of the RF MEMS switches with different positions of dielectric layer. Through theoretically analyzing the physical model of fringing capacitance, it is revealed that different positions of dielectric layer can result in different switch capacitances. Therefore, the change of d...     

Modeling, microfabrication and experiments of a free–free cantilever bistable micro mechanism supported with a diamond configuration

Bistable micro mechanisms are gaining great attention in MEMS applications. This paper presents the mechanical modeling and experimental characterization of a bistable torsion/cantilever micro latching mechanism for performing low power bistable relay applications. The bistable micro mechanism consists of two cantilevers which form symmetrical rocker levers. The free–free cantilever is suspended by a diamond skeleton which in turn is attached to a torsion cantilever. A permanent magnet is placed beside for holding the closed state with a permalloy soft magnetic circuit. The special diamond support is designed to enhance the stiffness of the overhang beams. In order to deduce the spring stiffness of system, a mechanical modeling of the leveraged torsion/cantilever system was performed by Castigliano’s theorem. Meanwhile, the magnetostatic latching force was also deduced by the Maxwell electromagnetism theory. Then the device has been prepared by a laminated copper sacrificial layer process. This process can facilitate the fabrication complexities of traditional magnetic device with coil structures. Finally, mechanical performance was characterized by an atomic force microscopy, combined with finite element simulation using ANSYS^™ package and analysis model as well. Two stable states of the micro mechanism were hold successfully with no power consumption by interferoscope profilometry of WYKO optical profiling system.     

A scalable delay based analytical framework for CSMA/CA wireless mesh networks

We present an analytical framework for the performance analysis of CSMA/CA based wireless mesh networks. This framework can provide an accurate throughput-delay evaluation for both saturated and unsaturated cases. An efficient algorithm that determines the collision domain for each node based on both the interference range and routing in the network is presented. As another important application of this framework, we develop an analytic model that enables us to obtain closed form expressions for delay in terms of multipath routing variables. A flow-deviation algorithm is used to derive the optimal flow over a given set of routes for any number of classes. The model takes into account the effects of neighbor interference and hidden terminals, and tools are provided to make it feasible for the performance analysis and optimization of large-scale networks. Numerical results are presented for different network topologies and compared with simulation studies.