Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C6F12O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a negative effect on the global environment owing to its high global warming potential (GWP) value. An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF₃ with C₆F₁₂O, which has a low GWP and is in a liquid state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using inductively coupled CF₄ +C₆F₁₂O+O₂ mixed plasmas. Subsequently, the etching characteristics of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated. A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface. Consequently, the etching characteristics of the C₆F₁₂O mixed plasma exhibited a lower etching rate, higher SiON/Si selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF₃ mixed plasma. In addition, the C₆F₁₂O gas can be recovered in the liquid state, thereby decreasing global warming. These results confirmed that the C₆F₁₂O precursor can sufficiently replace the conventional etching gas.     

Feedforward control of the transverse strip profile in hot-dip galvanizing lines

Hot-dip galvanizing is a standard technology to produce coated steel strips. The primary objective of the galvanizing process is to establish a homogeneous zinc layer with a defined thickness. One condition to achieve this objective is a uniform transverse distance between the strip and the gas wiping dies, which blow off excessive liquid zinc. Therefore, a flat strip profile at the gas wiping dies is required. However, strips processed in such plants often exhibit residual curvatures which entail unknown flatness defects of the strip. Such flatness defects cause non-uniform air gaps and hence an inhomogeneous zinc coating thickness. Modern hot-dip galvanizing lines often use electromagnets to control the transverse strip profile near the gas wiping dies. Typically, the control algorithms ensure a flat strip profile at the electromagnets because the sensors for the transverse strip displacement are also located at this position and it is unfeasible to mount displacement sensors directly at the gas wiping dies. This brings along that in general a flatness defect remains at the gas wiping dies, which in turn entails a suboptimal coating.In this paper, a model-based method for a feedforward control of the strip profile at the position of the gas wiping dies is developed. This method is based on a plate model of the axially moving strip that takes into account the flatness defects in the strip. First, an estimator of the flatness defects is developed and validated for various test strips and settings of the plant. Using the validated mathematical model, a simulation study is performed to compare the state-of-the-art control approach (flat strip profile at the electromagnets) with the optimization-based feedforward controller (flat strip profile at the gas wiping dies) proposed in this paper. Moreover, the influence of the distance between the gas wiping dies and the electromagnets is investigated in detail.     

Optimal design of nonlinear model predictive controller based on new modified multitracker optimization algorithm

The controller design for the robotic manipulator faces different challenges such as the system's nonlinearities and the uncertainties of the parameters. Furthermore, the tracking of different linear and nonlinear trajectories represents a vital role by the manipulator. This paper suggests an optimal design for the nonlinear model predictive control (NLMPC) based on a new improved intelligent technique and it is named modified multitracker optimization algorithm (MMTOA). The proposed modification of the MTOA is carried out based on opposition-based learning (OBL) and quasi OBL approaches. This modification improves the exploration behavior of the MTOA to prevent it from becoming trapped in a local optimum. The proposed method is applied on the robotic manipulator to track different linear and nonlinear trajectories. The NLMPC parameters are tuned by the MMTOA rather than the trial and error method of the designer. The proposed NLMPC based on MMTOA is compared with the original MTOA, genetic algorithm, and cuckoo search algorithm in literature. The superiority and effectiveness of the proposed controller are confirmed to track different linear and nonlinear trajectories. Furthermore, the robustness of the proposed method is emphasized against the uncertainties of the parameters.     

Improved error performance for generalised spatial modulation with enhanced spectral efficiency

The existing analytical average bit error rate (ABER) expression of conventional generalised spatial modulation (CGSM) does not agree well with the Monte Carlo simulation results in the low signal‐to‐noise ratio (SNR) region. Hence, the first contribution of this paper is to derive a new and easy way to evaluate analytical ABER expression that improves the validation of the simulation results at low SNRs. Secondly, a novel system termed CGSM with enhanced spectral efficiency (CGSM‐ESE) is presented. This system is realised by applying a rotation angle to one of the two active transmit antennas. As a result, the overall spectral efficiency is increased by 1 bit/s/Hz when compared with the equivalent CGSM system. In order to validate the simulation results of CGSM‐ESE, the third contribution is to derive an analytical ABER expression. Finally, to improve the ABER performance of CGSM‐ESE, three link adaptation algorithms are developed. By assuming full knowledge of the channel at the receiver, the proposed algorithms select a subset of channel gain vector (CGV) pairs based on the Euclidean distance between all CGV pairs, CGV splitting, CGV amplitudes, or a combination of these.     

基于启发式BP算法的软件缺陷预测模型

针对软件缺陷预测时缺陷数据集中存在的类别分布不平衡问题，结合上采样算法SMOTE与Edited Nearest Neighbor (ENN) 数据清洗策略，提出了一种基于启发式BP神经网络算法的软件缺陷预测模型。模型中采用上采样算法SMOTE增加少数类样本以改善项目中的数据不平衡状况，并针对采样后数据噪声问题进行ENN数据清洗，结合基于启发式学习的模拟退火算法改进四层BP神经网络后建立分类预测模型，在AEEEM数据库上使用交叉验证对提出的方案进行性能评估，结果表明所提出的算法能够有效提高模型在预测类不平衡数据时的分类准确度。     

无人机在输电线路巡检中的多种应用

无人机技术目前的快速发展使得我们国家输电线路自身的巡检能力得到了持续的提升,基于此本文在对无人机技术给予认识的情况下,在了解了输电线路巡检过程中的使用优势之后,还总结了无人机技术在当前我国线路巡检过程中的应用路径以及应用方法;之后使用案例分析的方式分析了无人机技术在当前输电线路巡检过程中的应用方法。     

干扰条件下的“北斗”信号解扩重构DOA估计

在干扰条件下，卫星导航抗干扰波束形成算法往往需要卫星信号波达方向（Direction-of-Arrival，DOA）的先验信息。但当存在低信噪比信号或主动干扰源时，常规的DOA估计算法性能急剧下降甚至失效。针对此问题，提出了一种被干扰信号压制的低信噪比“北斗”信号的DOA估计算法。该算法首先通过对接收信号进行子空间投影抑制干扰信号，然后对抑制干扰后的信号进行解扩重构处理，最后通过多重信号分类算法完成对“北斗”信号的DOA估计。仿真结果表明，在干扰信号干信比80 dB条件下，“北斗”信号DOA估计误差在5°以内，为下一步进行波束形成计算提供了高精度的入射角信息。     

Sustainable disassembly line balancing model based on triple bottom line

End of life (EOL) phase of a product is receiving more attention due to increase in environmental concerns, and many studies have been conducted for value creation in EOL, focusing on concepts as remanufacturing, reuse and recycling in sustainable production manner. This study especially focuses on one of global problem, e-waste. To minimise the amount of wastes and maximise recovered materials from EOL, disassembly is one of the most important concept, associated with reuse, and balancing disassembly line in an optimal way is essential for organisations. In disassembly line balancing (DLB), not only precedence of tasks, but also risk criteria related to environment and human safety should be considered for sustainability. The aim of this study is to propose a model based on triple bottom line (TBL) dimensions, i.e. human safety, environmental safety and business criteria. To achieve sustainability in DLB, and for risk assessment in sustainable DLB, it had been decided to use a multi-criteria method, i.e. TODIM, acronym in Portuguese of ‘Tomada de Decisão Iterativa Multicritério’. The proposed model included 22 disassembly criteria categorised under TBL dimensions, which are derived from the literature. Implementation of the study was conducted for computer disassembly processes, and as a result of the study approximately 12% an improvement in cycle time was succeeded. In the long run, the integration of sustainability in disassembly operations may contribute to the competitive advantage of the company in terms of differentiation and corporate image by achieving business, environment and human targets simultaneously.     

基于残差决策的自动飞行控制系统远程实时故障诊断

针对自动飞行控制系统结构复杂、关联部件众多,发生故障时诊断时间长,从而影响飞机运行效率的问题,提出一种基于飞机通信寻址报告系统(ACARS)的远程实时故障诊断方案。首先,分析自动飞行控制系统的故障特点,设计搭建检测滤波器;然后,利用ACARS数据链实时发送的自动飞行控制系统的关键信息进行相关部件的残差计算,并根据残差决策算法进行故障诊断及定位;最后,针对不同故障部件残差间的差异大、决策门限无法统一的缺点,提出基于二次差值的残差决策改进算法,减缓了检测对象的整体变化趋势,降低了随机噪声和干扰的影响,避免了将瞬态故障诊断为系统故障的情况。实验仿真结果表明,基于二次差值的改进残差决策算法避免了多决策门限的复杂性,在采样时间为0.1 s的情况下,故障检测所需时间大约为2 s,故障检测时间大幅降低,有效故障检测率大于90%。