Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

Deposition of Ag films by direct liquid injection-metal organic chemical vapor deposition (DLI-MOCVD) was chosen because this preparation method allows precise control of precursor flow and prevents early decomposition of the precursor as compared to the bubbler-delivery. Silver(I)-2,2-dimethyl-6,6,7,7,8,8,8-heptafluoro-3,5-octanedionato-triethylphosphine [Ag(fod)(PEt₃)] as the precursor for Ag CVD was studied, which is liquid at 30 °C. Ag films were grown on different substrates of SiO₂/Si and TiN/Si. Argon and nitrogen/hydrogen carrier gas was used in a cold wall reactor at a pressure of 50–500 Pa with deposition temperature ranging between 220 °C and 350 °C. Ag films deposited on a TiN/Si diffusion barrier layer have favorable properties over films deposited on SiO₂/Si substrate. At lower temperature (220 °C), film growth is essentially reaction-limited on SiO₂ substrate. Significant dependence of the surface morphology on the deposition conditions exists in our experiments. According to XPS analysis pure Ag films are deposited by DLI-MOCVD at 250 °C by using argon as carrier gas.     

A comparison of transformation methods for evaluating two‐dimensional weakly singular integrals

Accurate numerical evaluation of integrals arising in the boundary element method is fundamental to achieving useful results via this solution technique. In this paper, a number of techniques are considered to evaluate the weakly singular integrals which arise in the solution of Laplace's equation in three dimensions and Poisson's equation in two dimensions. Both are two‐dimensional weakly singular integrals and are evaluated using (in a product fashion) methods which have recently been used for evaluating one‐dimensional weakly singular integrals arising in the boundary element method. The methods used are based on various polynomial transformations of conventional Gaussian quadrature points where the transformation polynomial has zero Jacobian at the singular point. Methods which split the region of integration into sub‐regions are considered as well as non‐splitting methods. In particular, the newly introduced and highly accurate generalized composite subtraction of singularity and non‐linear transformation approach (GSSNT) is applied to various two‐dimensional weakly singular integrals. A study of the different methods reveals complex relationships between transformation orders, position of the singular point, integration kernel and basis function. It is concluded that the GSSNT method gives the best overall results for the two‐dimensional weakly singular integrals studied. Copyright © 2002 John Wiley & Sons, Ltd.     

环糊精降低重整汽油的苯含量

选用β环糊精（β-CD）和羟丙基-β环糊精（HP-β-CD）的水溶液分离混合烃中的苯，通过比较得出HP-β-CD对苯的分离具有较高的选择性。在重整原料油中采用HP-β-CD实现液-液分离，运用正交实验设计方法设计实验，得出最佳分离条件为：HP-β-CD溶液的含量30％，HP-β-CD溶液与重整汽油的体积比3：1，萃取次数9。在此工艺条件下，萃取后重整汽油中的苯含量从5．72％降到1．08％。     

Mass Transfer in a Flat Gas/Liquid Interface using non‐Newtonian Media

Gas/liquid mass transfer has been investigated using a stirred vessel gas/liquid contactor using non‐Newtonian media and carbon dioxide as absorbent and gas phase, respectively. The volumetric mass transfer coefficients at different operational variables have been determined. Non‐Newtonian media (liquid phase) were prepared as aqueous solutions of sodium carboxymethyl cellulose salt. The influence of the rheological properties, polymer concentration, stirring rate, and gas flow rate on mass transfer was studied for these liquid phases. Kinematic viscosity and density experimental data were used to calculate the average molecular weight corresponding to the polymer employed. The Ostwald model has been used to fit the rheological behavior of aqueous solutions of the polymer employed as absorbent phase. Reasonably good agreement was found between the predictions of the proposed models and the experimental data of mass transfer coefficients.     

CHAOTIC HYDRODYNAMICS IN HORIZONTAL GAS-LIQUID BUBBLY FLOW

ＮＯＭＥＮＣＬＡＴＵＲＥｄ———ｅｍｂｅｄｄｉｎｇｄｉｍｅｎｓｉｏｎ ,ｄｉｍｅｎｓｉｏｎｌｅｓｓＣｄ(ｒ)———ｃｏｒｒｅｌａｔｉｏｎｓｕｍ ,ｄｉｍｅｎｓｉｏｎｌｅｓｓＮ———ｎｕｍｂｅｒｏｆｐａｉｒｓｏｆｐｏｉｎｔｓｏｎｔｈｅｒｅｃｏｎ ｓｔｒｕｃｔｅｄａｔｔｒａｃｔｏｒ,ｄｉｍｅｎｓｉｏｎｌｅｓｓｒ———ｓｃａｌｉｎｇｄｉｓｔａｎｃｅ ,ｄｉｍｅｎｓｉｏｎｌｅｓｓＤｃ ———ｃｏｒｒｅｌａｔｉｏｎｄｉｍｅｎｓｉｏｎ ,ｄｉｍｅｎｓｉｏｎｌｅｓｓＫ———Ｋｏｌｍｏｇｏｒｏｖｅｎｔｒｏｐｙ ,ｂｉｔｓ/ｓＲ…     

Niobium-containing catalysts—the state of the art

This review article is devoted to the materials containing niobium, which have been discovered or developed in the past few years and exhibit the potential application in heterogeneous catalysis. Niobium oxides and mixed oxides as well as sulfides, nitrides (oxynitrides), carbides (oxycarbides), and phosphates are considered. Among the catalytic processes in which Nb-containing materials were tested, liquid and gas phase oxidation is described in details, and the role of niobium in the prevention of the catalyst from SO₂ poisoning is mentioned.     

磷酸酯类离子液体在燃油深度脱硫中的应用

研究了3种磷酸酯类离子液体,即1,3-二甲基咪唑磷酸二甲酯盐([MM im]DM P)、1-乙基-3-甲基咪唑磷酸二乙酯盐([EM im]DEP)和1-丁基-3-甲基咪唑磷酸二丁酯盐([BM im]DBP)的制备过程,考察了这3种磷酸酯类离子液体对模型油中3-甲基噻吩、苯并噻吩和二苯并噻吩的脱除效果及磷酸酯类离子液体的电化学再生方法。实验结果表明,这3种磷酸酯类离子液体的脱硫能力强弱顺序为:[EM im]DEP>[BM im]DBP[MM im]DM P;且对二苯并噻吩的脱除效果最好,对苯并噻吩的脱除效果次之,对3-甲基噻吩的脱除效果较差。以[EM im]DEP为萃取剂,油剂质量比为1∶1时,经5次萃取后,二苯并噻吩的脱除率可达到99.5%。利用电解法对[EM im]DEP进行了再生,在5~10V电压下电解10h,[EM im]DEP的脱硫率可以达到新鲜[EM im]DEP的90%以上。     

基于MODBUS协议的激光雕刻切割系统HMI人机交互设备

近年来,国内激光雕刻切割控制器技术发展迅速,基于PC的传统控制器已相当成熟.为了显著提高工业生产效率,适应工业生产规模扩张的需要以及工业对系统稳定性要求的提高,目前国内几家专业运动控制器厂家已经实现了激光雕刻切割控制器的完全脱机运行.本文针对脱机控制器的需要设计一款人机交互设备,该设备采用AT89C55WD单片机为主控制器,采用标准的MODBUS协议实现HMI与脱机控制器的可靠通讯.     

脉冲液体射流泵时均值基本方程中的流速系数

运用非恒定的动量方程和时均值计算方法,对脉冲液体射流泵时均值基本方程中的流速系数进行了理论研究,推导出了喉管和喉管进口段流速系数φ2和φ5的计算式。通过与恒定射流的流速系数计算式对比,阐明了脉冲频率是影响φ2和φ5的主要因素,沟通了脉冲射流与恒定射流流速系数之间的关系。     

气田集输工艺的选择

近几年我国加快天然气工业的发展，开发了几个大型气田，在与外国石油公司的合作开发中，引进了一些先进的技术及设计理念，集气管道从传统的气液分输工艺发展到气液混输工艺。介绍了气田集输采用的新工艺，分析、总结了各种集输工艺的适用场所。