Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

鲁奇加压气化炉的火层控制

通过对影响气化炉火层各因素的分析，理论与实际相结合，推导出现见性控制气化炉火层的经验式，应用于生产实际中，起到了指导生产的作用。     

DIRECT RESONANCE OF TURBULENT BOUNDARY LAVER OVER COMPLIANT WALLS

１．　ＩＮＴＲＯＤＵＣＴＩＯＮＴｈｅｍａｉｎｇｏａｌｏｆｔｈｉｓｐａｐｅｒｉｓｔｏｅｘｐｌｏｒｅｔｈｅｐｏｓｓｉｂｉｌｉｔｙｔｏｌｅａｒｎｍｏｒｅａｂｏｕｔｔｈｅｍｅｃｈａｎｉｓｍｏｆｔｕｒｂｕｌｅｎｔｂｏｕｎｄａｒｙｌａｙｅｒｆｌｏｗｉｎｔｅｒａｃｔｉｏｎｓａｎｄｉｔｓｅｆｆｅｃｔｓｏｎｃｏｍｐｌｉａｎｔｗａｌｌｐｅｒｆｏｒｍａｎｃｅ．Ｔｈｅｒｅａｒｅｃｅｒｔａｉｎｐｒｅｒｅｑｕｉｓｉｔｅｃｏｎｄｉｔｉｏｎｓｔｏｆｕｒｔｈｅｒｔｈｅｓｔｕｄｙｏｎｔｈｅｍｅｃｈａｎｉｓｍ，ｉ．ｅ．ｔｈｅｃｏ…     

遥感在水面薄层研究中应用的可行性分析及其验证

从遥感测温的基本原理出发，结合发生在水面热力薄层内热结构变化的物理特征，分析了遥感技术用于监测水面薄层热结构垂直温度廊线与变化的可行性。据此，在气一水热力薄层的实验室模拟研究中得到了应用与验证，经实验证实这种新技术与常规手段结合可为水面热力边界层研究提供可靠的数据来源。由此认为，这一方法的研究将在微尺度海面过程、全球气候变化和水一气间能量通量研究中有着广阔的推广应用前景。     

预处理工艺对硬质合金与金刚石膜间粘结力的影响

在两种经不同预处理的硬质合金YG8基底上，采用微波等离子体化学气相沉积法，在微波功率2kW，压强4.0kPa和6.5kPa，CH4和H2流量分别为1.6cm/s和100.0cm/s的条件下生长金刚石薄膜。利用X射线衍射检测了金刚石薄膜是否存在，用拉曼光谱分析了薄膜的质量，用金相显微镜观察了薄膜的洛氏硬度压痕，标定并比较了不同预处理工艺膜与基底的结合力。实验结果表明，不同的预处理方法对于粘结力的影响不大，最主要的因素是钴含量的多少。     

不锈钢及镍基堆焊层厚度测量

叙述了运用磁性法或超声法对核电和化工容器中不锈钢及镍基堆焊层厚度进行测量的原理、方法及主要影响因素 ,比较了这两种方法的测量结果     

Si1-xGex/Si应变材料的生长及热稳定性研究

利用分子束外延（MBE）技术生长了Ge组份为0.1-0.46的Si1-xGex外延层。X射线衍射线测试表明，SiGe/Si异质结材料具有良好的结晶质量和陡峭界面，其它参数与可准确控制。通过X射线双晶衍射摆曲线方法，研究了经700℃、800℃和900℃退火后应变SiGe/Si异质结材料的热稳定性。结果表明，随着退火温度的提高，应变层垂直应变逐渐减小，并发生了应变弛豫，导致晶体质量退化；且Ge组分越小，Si1-xGex应变结构的热稳定性越好；室温下长时间存放的应变材料性能稳定。     

用化学腐蚀制备多孔硅太阳电池减反射膜的研究

采用HF HNO3溶液化学腐蚀 ,在硅片上制备减反射效果优良的多孔硅太阳电池减反射膜 ,借助原子力显微镜 (AFM)和X光电子谱 (XPS)对其表面形貌和成分进行观察 ,发现该膜与电化学阳极腐蚀得到的多孔硅具有相似性 ,其主要成分为非化学配比的硅的氧化物SiOx(X <2 )。采用带积分球的光度分光计 ,测得形成多孔硅减反射膜后 ,硅片表面反射率大大下降 ,,在波长 330～ 80 0nm范围反射率只有 1 5～ 2 9%。研究指出这种强减反射作用 ,与多孔硅具有合适的折射率及其多孔特性的光陷阱作用有关     

共晶碳化物团球化对铸铁激光熔敷层抗裂性的影响

为提高铸铁表面大面积激光熔敷层抗裂性问题，通过冶金因元素控制熔敷层组织形态在熔敷材料中加入碱金属元素钾，研究了在激光快速加热条件下钾对铸铁激光熔敷层组织团球化的影响，进而分析了该球状组织对熔敷层抗裂性的影响，结果表明随熔敷金属内钾含量增多熔敷层内共晶碳化物组织呈球状及孤岛状，这种组织明显提高了熔敷层抗裂性，此外大量的渗碳体组织确保了熔敷层具有较高的耐磨性；获得了无裂纹的大面积搭接熔敷层，其对应合金系统为Fe-C-Si-Ni-K。     

Corrosion behaviour of low-Si alloyed steels in neutral reducing conditions at 90 °C

Electrochemical investigations on low-Si alloyed steels with Si content ranging from 0.25 to 3.2 wt.% were carried out in a 0.1 M NaCl borate-buffered solution (pH 8.4) in reducing conditions at 90 °C. Silicon as an alloying element was proved to degrade at first the steel ability to passivate. For longer immersion times, protective effects developed more efficiently on the steel containing 3.2 wt.% silicon. Passive layers electrochemically formed in the transpassive domain on the steel containing 3.2% Si were shown to be significantly different from those grown at rest potential.