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91.
92.
Atilla Bilgin 《国际能源研究杂志》2002,26(11):987-1000
Flame front surface area and enflamed volume (the volume enclosed with flame front) is theoretically analysed for a spark‐ignition engine, having cylindrical disc‐shaped combustion chamber with two spark plugs located axisymmetrically on cylinder head, between cylinder axis and cylinder wall. Spherical flame front assumption is used. A computer code is developed based on purely geometric consideration of the flame development process in combustion chamber, and is used to investigate the effects of variations of spark plugs' locations on geometric features of the flame front. A comparison has also been made with a spark‐ignition engine having one spark plug at the same location. Copyright © 2002 John Wiley & Sons, Ltd. 相似文献
93.
采用二次回归正交设计进行烧结试验,获得了七个目标的数学模型,并验证了其可靠性,用多目标计算机选优法对四烧车间的工艺参数进行了选优。 相似文献
94.
本文研究了采用锁定放大相干检测技术的等离子体光发射谱检测系统。用该系统检测了仅用CF4作为刻蚀气体刻蚀非晶硅基薄膜的等离子体光发射谱。分析了检测结果和刻蚀机理。 相似文献
95.
Xiang Lu S. Sundar Kumar Iyer Jin Lee Brian Doyle Zhineng Fan Paul K. Chu Chenming Hu Nathan W. Cheung 《Journal of Electronic Materials》1998,27(9):1059-1066
We have demonstrated feasibility to form silicon-on-insulator (SOI) substrates using plasma immersion ion implantation (PIII)
for both separation by implantation of oxygen and ion-cut. This high throughput technique can substantially lower the high
cost of SOI substrates due to the simpler implanter design as well as ease of maintenance. For separation by plasma implantation
of oxygen wafers, secondary ion mass spectrometry analysis and cross-sectional transmission electron micrographs show continuous
buried oxide formation under a single-crystal silicon overlayer with sharp Si/SiO2 interfaces after oxygen plasma implantation and high-temperature (1300°C) annealing. Ion-cut SOI wafer fabrication technique
is implemented for the first time using PIII. The hydrogen plasma can be optimized so that only one ion species is dominant
in concentration and there are minimal effects by other residual ions on the ion-cut process. The physical mechanism of hydrogen
induced silicon surface layer cleavage has been investigated. An ideal gas law model of the microcavity internal pressure
combined with a two-dimensional finite element fracture mechanics model is used to approximate the fracture driving force
which is sufficient to overcome the silicon fracture resistance. 相似文献
96.
97.
N‐(4‐Acetoxyphenyl) maleimide (APMI) and three kinds of comonomers bearing a trimethylsilyl group were copolymerized at 60°C in the presence of azobisisobutyronitrile (AIBN) as an initiator in 1,4‐dioxane to obtain the three IP, IIP, and IIIP copolymers. These copolymers were removed from the acetoxy group in a transesterification process into new IVP, VP, and VIP copolymers with a pendant hydroxyl group. Two modified processes were adopted to prepare photoresists using these copolymers. The first process involved mixing the dissolution inhibitor, o‐nitrobenzyl cholate, with the new copolymers. Second, o‐nitrobenzyl cholate was introduced into the copolymers using 1,8‐diazabicyclo[5.4.0]undec‐7‐ene (DBU) in dimethylformamide (DMF). The cyclic maleimide structure is responsible for the high thermal stability of these copolymers. After irradiation using deep–UV light and development with aqueous Na2CO3 (0.01 wt %), the developed patterns showed positive images and exhibited good adhesion to the silicon wafer without using any adhesion promoter. The resolution of these resists was at least 0.8 μm and an oxygen‐plasma etching rate was 1/5.3 to that of hard‐baked HPR‐204. © 2002 Wiley Periodicals, Inc. J Appl Polym Sci 83: 2791–2798, 2002; DOI 10.1002/app.10255 相似文献
98.
99.
评述了国内外粉末冶金铁基烧结炉的发展动向和具体改进装备。即功能带设计、脱蜡装置,烧结带气氛控制,淬火带的设想,加热元件配置及新型可塑性耐火材料。 相似文献
100.
简要介绍了湘潭新大粉末冶金设备制造有限公司研制的一体化真空烧结炉的炉子结构、脱蜡系统、工艺气体的引入系统、设备的控制系统以及炉子性能的鉴定结果。 相似文献