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41.
42.
Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a
negative effect on the global environment owing to its high global warming potential (GWP) value.
An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional
perfluorocarbon etching gases such as CHF3 with C6F12O, which has a low GWP and is in a liquid
state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using
inductively coupled CF4 +C6F12O+O2 mixed plasmas. Subsequently, the etching characteristics
of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated.
A double Langmuir probe was used and optical emission spectroscopy was performed for plasma
diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used
to confirm the change in the surface properties of the etched SiON film surface. Consequently, the
etching characteristics of the C6F12O mixed plasma exhibited a lower etching rate, higher SiON/Si
selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF3 mixed plasma. In addition, the C6F12O gas can be recovered in the liquid state, thereby decreasing
global warming. These results confirmed that the C6F12O precursor can sufficiently replace the
conventional etching gas. 相似文献
43.
44.
反应堆屏蔽计算中经常出现厚屏蔽、小探测器问题,常规蒙特卡罗方法难以有效解决。基于自动重要抽样(AIS)方法,本文提出了小探测器自动重要抽样(SDAIS)方法,并针对小探测器问题,优化了AIS方法的虚粒子赌分裂算法。该方法在自主开发的蒙特卡罗屏蔽程序MCShield上进行了实现。使用NUREG/CR-6115 PWR基准题验证该方法的正确性和计算效率。结果表明,SDAIS方法可有效地解决厚屏蔽小探测器问题,相比AIS方法及传统的重要性方法,计算效率提升1~2个量级。 相似文献
45.
不同给液方式对铜电解过程中有重要的影响,不同的循环方式会影响槽内温度分布、电解液成分及阳极泥沉降等,因此,根据铜电解生产不同情况的需要,分析对比了多种给液方式在贵冶电解车间的应用,总结了这几种给液方式的优缺点和适用条件。 相似文献
46.
A 2D computational fluid dynamics (Eulerian–Eulerian) multiphase flow model coupled with a population balance model (CFD-PBM) was implemented to investigate the fluidization structure in terms of entrance region in an industrial-scale gas phase fluidized bed reactor. The simulation results were compared with the industrial data, and good agreement was observed. Two cases including perforated distributor and complete sparger were applied to examine the flow structure through the bed. The parametric sensitivity analysis of time step, number of node, drag coefficient, and specularity coefficient was carried out. It was found that the results were more sensitive to the drag model. The results showed that the entrance configuration has significant effect on the flow structure. While the dead zones are created in both corners of the distributors, the perforated distributor generates more startup bubbles, heterogeneous flow field, and better gas–solid interaction above the entrance region due to jet formation. 相似文献
47.
An ultrasonic tomographic velocimeter to provide quantitative images of axial flow fields in pipes is developed and presented in this work. To detect the flow in various directions and positions, a novel transducer configuration strategy is proposed. All-in-one transducers are mounted in two sectional planes of the pipe. In each plane, N transducers are equally spaced along the circumference. Overlapped propagation paths are introduced by the configuration strategy, and the influence of the vortex flow can be eliminated theoretically by averaging the line velocities of the overlapped paths. To achieve a fast detection speed, the projection data is collected via an electrical scan in a fan-beam mode. After rearrangement and interpolation of the projection data, the parallel beam filtered back projection (FBP) algorithm is implemented to reconstruct the axial flow field. Numerical simulations with the theoretical velocity profiles were performed. The compensation method for the vortex flow is proved to be effective and necessary, and the number of transducers required for reconstruction of common flow profiles was estimated. Accordingly, an ultrasonic tomographic velocimeter consisting of 2×12 transducers was fabricated. Experiments were conducted in the straight pipe and downstream of a single bend pipe and compared with the computational fluid dynamics (CFD) simulation results. As demonstrated, the ultrasonic tomographic velocimeter was capable of visualizing both symmetric and asymmetric axial flow fields with high reliability. 相似文献
48.
《International Journal of Hydrogen Energy》2021,46(69):34449-34462
Three-dimensional Bödewadt flow (fluid rotates at a large enough distance from the stationary plate) of carbon nanomaterial is examined. Single walled and multi walled CNTs are dissolved in water and gasoline oil baseliquids. Darcy-Forchheimer porous medium is considered. Stationary disk is further stretched linearly in radial direction. Heat transfer effect is examined in presence of radiation and convection. Effect of viscous dissipation is accounted. Entropy generation rate is studied. By using adequate transformation (von Kármán relations), the flow field equations (PDEs) are transmitted into ODEs. Solutions to these ODEs are constructed via implementation of shooting method (bvp4c). In addition to Entropy generation rate, Bejan number, heat transfer rate (Nusselt number), skin friction and temperature of fluid are examined through involved physical parameters. Axial component of velocity intensifies with increment in nanoparticles volume fraction and ratio of stretching rate to angular velocity parameter while it decays with higher porosity parameter. Higher nanoparticles volume fraction and porosity parameter lead to decay in radial as well as tangential component of velocity. However it enhances with higher ratio of stretching rate to angular velocity parameter. Temperature of fluid directly varies with higher ratio of stretching rate to angular velocity parameter, radiation parameter, Eckert number, Biot number and nanoparticles volume fraction. Rate of Entropy generation is reduced with higher estimations of porosity parameter, nanoparticles volume fraction and radiation parameter. Skin friction coefficient decays with higher porosity parameter and ratio of stretching rate to angular velocity parameter. Intensification in porosity parameter, nanoparticles volume fraction and Biot number leads to higher Nusselt number. Prominent impact is shown by multiple-walled CNTs with gasoline oil basefluid than single-walled CNTs with water basefluid. 相似文献
49.
50.