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为了适应LTPS TFT LCD显示屏超高分辨率极细布线的趋势,降低LTPS TFT层间绝缘层过孔刻蚀带来的良率损失,提高产品品质,本文研究了LTPS TFT层间绝缘层过孔刻蚀的工艺优化。实验以干法刻蚀为主刻蚀,湿法刻蚀为辅刻蚀的方式,既结合干法刻蚀对侧壁剖面角及刻蚀线宽的精确控制能力,又利用了湿法刻蚀高刻蚀选择比的优良特性,改善了层间绝缘层刻蚀形貌,减少干法刻蚀对器件有源层的损伤,避免有源层被氧化,防止刻蚀副产物污染开孔表面。实验结果表明,干法辅助湿法刻蚀能基本解决刻蚀过程中过刻、残留的问题,使得层间绝缘层过孔不良良率损失减少73%以上,且TFT源漏电极接触电阻减小约90%,器件开态电流提升约15%。干法辅助湿法刻蚀是一种优化刻蚀工艺,提升产品性能的新方法。 相似文献
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2010年10月27日至29日,中共中央政治局委员、国务院副总理张德江分别到广州、佛山、东莞、深圳等地就中小企业发展问题进行视察调研。27日下午,张德江副总理视察了节能中央空调的新秀企业广州市华德工业有限公司,陪同视察的还有国务院副秘书长肖亚庆,工业和信息化部副部长苗圩,中央政治局委员、广东省委书记汪洋, 相似文献
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A novel anaerobic reactor, jet biogas inter-loop anaerobic fluidized bed (JBILAFB), was designed and constructed. The start-up and performance of the reactor was investigated in the Process. of .artificial glucose wastewater treatment. With the wastewater recycle ratio of 2.5 : 1, the recycled wastewater with biogas could mix sludge and wastewater in the JBILAFB reactor completely. The start-up of the JBILAFB reactor could be completed in less than 70 d through maintenance of hydraulic retention time (HR~I") and stepwise increase of feed total organic carbon (TOC) concentration. After the start-up, with the volumetric TOC loadings of 14.3 kg·m ^-3·d^-1, the TOC removal ratio, the effluent pH, and the volatile fatty acids (VFA)/alkalinity of the JBILAFB reactor were more than 80%, close to 7.0 and less than 0.4, respectively. Moreover, CH4 was produced at more than 70% of the theoretical value, The reactor exhibited high stability under the condition of high volumetric TOC loading. Sludge granules in the JBILAFB reactor were developed during the start-up and their sizes were enlarged with the stepwise increase of volumetric TOC loadings from 0.8 kg.m^-3.d ^-1 to 14.3 kg.m^-3.d^-1. Granules, an offwhite color and a similar spherical shape, were mainly comprised of global-like bacteria. These had good methanogenic activity and settleability, which were formed probably through adhesion of the bacteria. Some inorganic metal compounds such as Fe, Ca, Mg, Al, etc. were advantageous to the formation of the granules. 相似文献
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新型A/O生物流化床处理高浓食品加工废水 总被引:1,自引:0,他引:1
采用自行设计的新型结构A/O生物流化床处理食品加工废水,处理规模为800m^3/d。当进水COD、NH3-N、SS和油浓度分别为957.6~6841.4、11.5~42.3、50.3~982.5和6.2~22.7mg/L时,处理出水水质能达到GB8978-1996中的一级排放标准。A段新型射流曝气内循环厌氧流化床通过生物气和废水共同循环,实现了废水与污泥充分混合,在回流比为1.2、HRT为24h、容积负荷为2.06~3.96kg/(m^3·d)的条件下,可去除约80%的COD,最高产气量达到180.5m^3/d。0段新型卧流式好氧三相流化床在高长和高宽比为0.47和0.64时,较好地实现了流态化。此外,流化床内高效三相分离区的成功设计,维持了反应器内污泥的高浓度,为高效率、低能耗的稳定运行提供了保障。 相似文献
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内蒙古大红山晶质石墨矿床位于阴山隆起的渣尔泰山中—新元古代裂谷带,矿体赋存于中—新元古界蓟县系渣尔泰山群阿古鲁沟组二段的炭质板岩中,目前共圈定矿体2条,其中Ⅰ号矿体为主矿体。本文立足于区域地质与矿产勘查资料,结合前人研究成果,在成矿地质背景、矿床与矿体特征、样品化学分析、矿石矿物赋存状态及特征研究的基础上,总结了内蒙古大红山地区晶质石墨矿床的成矿地质特征及找矿标志。研究表明:(1)大红山晶质石墨矿床是经区域变质作用而形成的区域变质型矿床;(2)该矿床的成矿物质主要来源于变质黏土岩和粉砂质页岩中的有机物;(3)含炭粉砂细晶灰岩与含炭粉砂质板岩接触部位,含矿岩石形成的负地貌是找矿的有利地区。 相似文献