首页 | 本学科首页   官方微博 | 高级检索  
文章检索
  按 检索   检索词:      
出版年份:   被引次数:   他引次数: 提示:输入*表示无穷大
  收费全文   1篇
  国内免费   1篇
  完全免费   1篇
  自动化技术   3篇
  2016年   2篇
  2008年   1篇
排序方式: 共有3条查询结果,搜索用时 15 毫秒
1
1.
纳米定位系统中广泛采用的压电驱动器因存在非线性、多映射的迟滞特性而严重影响了纳米定位系统的 定位精度. 为消除迟滞对定位精度的影响, 将其视为干扰, 设计不基于迟滞及定位系统精确数学模型的自抗扰控制 算法, 利用扩张状态观测器实时估计迟滞, 进而补偿其对定位精度的影响, 获得了良好的定位系统控制仿真效果. 仿 真结果表明, 自抗扰控制器能够有效消除迟滞、提高纳米定位系统的定位精度  相似文献
2.
This paper presents the design, kinematic and dynamic analysis, fabrication and characterization of a monolithic micro/nanopositioning three degrees-of-freedom (DOF) (XYθ) stage. The design of the proposed MEMS (micro-electro-mechanical system) stage is based on a parallel-kinematic mechanism (PKM) scheme that allows for translation in the XY plane and rotation about the Z axis, an increased motion range, and linear kinematics in the operating region (or work area) of the stage. The truss-like structure of the PKM results in higher modal frequencies by increasing the structural stiffness and reducing the moving mass of the stage. The stage is fabricated on a silicon-on-insulator (SOI) wafer using surface micromachining and deep reactive ion etching (DRIE) processes. Three sets of electrostatic linear comb drives jointly actuate the mechanism to produce motion in the X, Y and θ (rotation) directions. The fabricated stage provides a motion range of 18 μm and 1.72° at a driving voltage of 85 V. The resonant frequency of the stage under ambient conditions is 465 Hz. Additionally a high Q factor (66) is achieved from this parallel-kinematics mechanism design.  相似文献
3.
In this study, an intelligent integral backstepping sliding‐mode control (IIBSMC) system using a recurrent neural network (RNN) is proposed for the three‐dimensional motion control of a piezo‐flexural nanopositioning stage (PFNS). First, the dynamic model of the PFNS is derived. Then, an integral backstepping sliding‐mode control (IBSMC) system is proposed for the tracking of the reference contours. The steady‐state response of the control system can be improved effectively due to the addition of the integrator in the IBSMC. Moreover, to relax the requirements of the bound and discard the switching function in the IBSMC, an IIBSMC system using an RNN estimator is proposed to improve the control performance and the robustness of the PFNS. The RNN estimator is proposed to estimate the lumped uncertainty, including the system parameters and external disturbance, online. Furthermore, the online tuning law for the training of the parameters of the RNN is derived using the Lyapunov stability theorem. In addition, a robust compensator is proposed to confront the minimum reconstructed error occurring in the IIBSMC system. Finally, some experimental results for the tracking of various contours are given to demonstrate the validity of the proposed IIBSMC system. From the performance measurements of the proportional‐integral control, sliding mode control, IBSMC, and IIBSMC systems, the proposed IIBSMC system has the lowest maximum, average, and standard deviation of the position tracking errors for three‐dimensional motion control of the PFNS.  相似文献
1
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号