不同过渡层对钢基金刚石薄膜的影响

采用超高真空热丝化学气相沉积(HFCVD)系统,以甲烷和氢气为反应气体,在高速钢W18Cr4V基体上利用3种不同的过渡层(WC、Cr、WC/Cr)制备金刚石薄膜。采用场发射扫描电子显微镜(FE–SEM)、X射线衍射仪(XRD)、显微激光拉曼光谱仪(Raman)以及洛氏硬度计对过渡层和金刚石薄膜进行检测分析,研究了不同过渡层对金刚石薄膜形貌质量和附着性能的影响。结果表明,3种过渡层均可以有效减少钢基中Fe对金刚石薄膜的负面影响,提高金刚石的形核率;其中,采用WC/Cr过渡层时膜基间残余应力最小,仅为0.25 Gpa,附着性能最好。     

过渡层对铜基金刚石薄膜的影响

采用热丝化学气相沉积(HFCVD)在纯铜基体及4种不同的过渡层(Ti、Nb、Ni、W)上制备金刚石薄膜。利用场发射扫描电子显微镜(FE-SEM)、拉曼光谱仪(Raman)以及维氏硬度计对金刚石薄膜进行检测分析,研究了不同过渡层对金刚石薄膜形貌质量和附着性能的影响。结果表明,在纯铜基体以及多种过渡层上都能制备高纯度的金刚石薄膜;在形核率较高的基体上金刚石颗粒的尺寸较小,在Ni过渡层上金刚石颗粒的尺寸较大;金刚石薄膜在Ti过渡层上结合性能最好,但是非金刚石相最多。在Nb、W过渡层上的结合性能最差。     

热丝辐射距离与甲烷浓度对CVD金刚石薄膜的影响

以H2和CH4作为反应气体,采用热丝化学气相沉积法(Hot filaments chemical vapor deposition,HFCVD),在WC-3%Co条状平板上制备金刚石薄膜,利用扫描电镜(SEM)、X射线衍射(XRD)、激光拉曼光谱(Raman)和洛氏硬度仪分析薄膜的形貌、结构、成分和附着性能,研究热丝辐...     

Influence of methane on hot filament CVD diamond films deposited on high-speed steel substrates with WC-Co interlayer

Diamond films were deposited on high-speed steel substrates by hot filament chemical vapor deposition (HFCVD) method. To minimize the early formation of graphite and to enhance the diamond film adhesion, a WC-Co coating was used as an interlayer on the steel substrates by high velocity oxy-fuel spraying. The effects of methane content on nucleation, quality, residual stress and adhesion of diamond films were investigated. The results indicate that the increasing methane content leads to the increase in nucleation density, residual stress, the degradation of quality and adhesion of diamond films. Diamond films deposited on high-speed steel (HSS) substrate with a WC-Co interlayer exhibit high nucleation density and good adhesion under the condition of the methane content initially set to be a higher value (4%, volume fraction) for 30 min, and then reduced to 2% for subsequent growth at pressure of 3 kPa and substrate temperature of 800 °C.