Synthesis of β-Si3N4 by Chemical Vapor Deposition

Beta-type CVD-Si₃N₄ plates (up to 1.1 mm thick) have been prepared by adding TiCl₄ vapor to the system SiCl₄-NH₃-H₂ at deposition temperatures of 1350° to 1450°C, while α-type or amorphous CVD-Si₃N₄ was obtained without TiCl₄ vapor at the same deposition temperature. Three to four wt % 777V was included in the β-type CVD-Si₃N₄ matrix. The density, preferred orientation, and lattice parameters of β-type CVD-Si₃N₄ were examined.     

Work of Fracture and Crack Healing in Glass

The work of fracture, γwoF, of a soda-lime-silica glass was determined as 5.5 J/m² in an inert atmosphere and 4.4 J/m² in air by using a short bar specimen with a chevron notch. The critical stress intensity factor K_IC calculated from γ_wof obtained in an inert atmosphere agreed with the value, 0.88 MN/m^3/2, determined by the indentation method. In unloading-loading cycles during stable crack growth, crack healing was observed both on the diagram of load vs load-point displacement and visually. Crack healing is more prevalent in an inert atmosphere, occurring only minimally in air. The energy for healing was measured as 0.65 J/m² in an inert atmosphere and ∼0.21 J/m² in air.