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随着微机电系统(MEMS)技术的迅速发展,硅基加速度传感器已经得到广泛应用。但在敏感结构设计中,普遍存在灵敏度与固有谐振频率相互制约的矛盾。为此,采用多晶硅纳米膜作应变电阻,设计了300 nm超薄微梁加速度敏感结构。这种结构的设计改善了灵敏度与谐振频率之间的矛盾,使两者乘积值提高了30余倍,从而使压阻加速度计的性能得到大幅提升。 相似文献
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A model of subthreshold characteristics for both undoped and doped double-gate (DG) MOSFETs has been proposed. The models were developed based on solution of 2-D Poisson's equation using variable separation technique. Without any fitting parameters, our proposed models can exactly reflect the degraded subthreshold characteristics due to nanoscale channel length. Also, design parameters such as body thickness, gate oxide thickness and body doping concentrations can be directly reflected from our models. The models have been verified by comparing with device simulations' results and found very good agreement. 相似文献
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关于短沟道双栅无结型晶体管的仿真研究 总被引:1,自引:1,他引:0
We study the characteristics of short channel double-gate(DG) junctionless(JL) FETs by device simulation. OutputⅠ-Ⅴcharacteristic degradations such as an extremely reduced channel length induced subthreshold slope increase and the threshold voltage shift due to variations of body doping and channel length have been systematically analyzed.Distributions of electron concentration,electric field and potential in the body channel region are also analyzed.Comparisons with conventional inversion-mode(IM) FETs,which can demonstrate the advantages of JL FETs,have also been performed. 相似文献
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