Influence of Microwave Power on the Properties of Hydrogenated Diamond-Like Carbon Films Prepared by ECR Plasma Enhanced DC Magnetron Sputtering

Electron cyclotron resonance (ECR) plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon (H-DLC) films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×109 Ωcm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.     

核聚变实验中相似波形智能检索方法研究综述

随着核聚变实验数据量的与日俱增,需要针对相似波形开发智能检索方法来加速数据识别和分析。波形的相似性查询包括全序列相似查询和子序列相似查询2个方面。日本的LABCOM小组和欧盟的JET-EFDA小组在这方面做了大量的研究工作,并取得一系列成果。通过详细评述波形相似性查询方法的基本思想和关键技术,对这些方法进行分析和比较,总结了这些方法的优点和不足,并对进一步的研究方向作出了展望。      

离子束溅射制备CuInSe_2薄膜的研究

利用离子束溅射沉积技术,设计三元复合靶,直接制备CuInSe_2(CIS)薄膜.通过X射线衍射仪(XRD)、原子力显微镜(AFM)和分光光度计检测在不同衬底温度和退火温度条件下制备的CIS薄膜的微结构、表面形貌和光学性能.实验结果表明:使用离子束溅射沉积技术制备的CIS薄膜具有黄铜矿结构,在一定的条件下,适当温度的热处理可以制备结构紧密、颗粒均匀、致密性和结晶性良好的CIS薄膜,具有强烈的单一晶向生长现象.     

On-Line Measurement of Ion Density in Atmospheric Nitrogen Discharge Filaments via Radiation Signals from Plasma Oscillation

Diagnosis of the particle number density of plasma plays an important role in the understanding of plasma sources and processing.Regular radiation signals from plasma oscillation in filaments of atmospheric nitrogen discharge,which were excited by the injection of secondary electron beams during the propagation of the streamer,are employed to determine the ion density of plasma and its evolution in the filaments.Results show that the density of N_4~+ in a filament of atmospheric nitrogen discharge is of the order of 10~(13) cm~(-3).It is also found that the recombination processes play a dominant role in plasma decay,and that the ion density decreases non-monotonically with time during streamer propagation.