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Microclusters from different structures of silicon and carbon are studied by SIMS under UHV conditions in the mass range below M=200. The sputtered mass spectra of ions Sin+, Cn+ and Cn were obtained from the 10 keV O2+ primary beam bombardment. Comparisons of each spectrum in each group have shown the strong structure effects on the cluster patterns. A brief discussion on the results has been given. 相似文献
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