基于MEMS 加速度计的倾斜姿态角传感器设计

针对应用领域中判断水平面及水平面夹角的问题,设计一种倾斜姿态角传感器。把MEMS加速度计SCA103T-D04与C8051F47单片机组合在一起,对MEMS加速度计输出信号进行调理和AD采集,单片机C8051F047完成数据分析和温度补偿,并通过CAN总线通讯接口和RS232通讯接口输出倾斜角度值,输出周期为200 ms。该倾斜姿态角传感器测量精度为0.03°,测量范围为–6°~6°,具有体积小、重量轻、精度高、温度适应范围宽的特性,可广泛应用于建筑、道路、桥梁及军用设备等领域。     

捷联惯性导航系统加速度计误差建模与标定补偿

研究了车载筒装导弹状态下捷联惯性导航系统加速度计误差系数标定问题。首先对加速度计进行了误差分析,在此基础上推导了误差模型,提出了以车的机动作为激励方式,设计了一种不开箱标定方法。仿真结果表明,该误差模型正确且标定方法能够对误差进行补偿,从而提高导航精度。     

用静电力和SAW滤波器对悬臂梁式SAW加速度计的扩程及其计量标定

提出了用声表面波滤波器测知加速度方向和大小的原理和方法,研究了电容器中的静电吸引力对加速度计敏感质量块的位置稳定作用,以及用它扩大悬臂梁式加速度计量程的原理.还对静电力扩程之后,加速度计测量值的校准、计量标定等问题进行了有益地探讨,针对电容器静电力的非线性扩程特点,提出了查询表式的在线实时测量换算读值方案.     

电容式力平衡加速度计的设计

电容式微机械加速度计是一种将加速度转换成差分电容、通过检测差分电容的变化来检测加速度大小的一类高精度的惯性传感器.利用开关电容电路实现C-V变换,利用反馈静电力实现力平衡闭环控制,设计了一种电容式微机械加速度计.通过构建电容式加速度传感器及外围电路的数学模型,推导了闭环工作的系统函数.并对实际系统进行研制,最后给出了整个系统的测试结果.     

数码手榴弹引信研究与设计

通过引入三轴加速度传感器和单片机,解决现行手榴弹由于延期时间不准确而导致的早爆和迟爆,以及手榴弹未扔出安全范围起爆对操作手引起意外伤亡的问题,提出了一种新型手榴弹引信——数码手榴弹引信的设计方案与研究思路。     

Anti-vibration analysis of vortex probe based on three-axis acceleration measurement

According to the diversity of the pipeline vibration and unicity of vortex signal in direction, a new idea is proposed to distinguish the vortex signal from the vibration interference by the directional character. This idea is applied to improve the anti-vibration performance of vortex flow-meter by a new probe structure based on three-axis accelerometer. Then model analysis is used to optimize the material, and the harmonic response analysis is applied to optimize the shape of probe tip. Finally, experiment is carried out to compare the anti-vibration performance of the traditional piezoelectric vortex probe and the new design. Experimental results show that new probe can accurately distinguish vortex signal from the vibration interference according to the directional character of signal. And its anti-vibration performance is superior to the traditional piezoelectric vortex probe.     

A contribution towards model-based design of application-specific MEMS

The design process of heterogeneous systems containing electro-mechanical components and electronic circuits involves expert knowledge, methods, and tools from different engineering domains. Cost-efficient research and development of such heterogeneous systems requires a systematic design flow without gaps. A contribution towards this global goal is presented in this article. A development and synthesis tool for one-dimensional accelerometer MEMS has been implemented, calculating sensor solutions and generating the models and layouts required for a hierarchical design flow in an automatic, module-based approach. Utilizing this flow, different accelerometers have been designed, manufactured, and characterized. A dedicated readout ASIC was developed to validate their dynamic behaviour.     

Experimental investigation into the effects of exciter motions on the primary calibration of single-ended accelerometer

It is widely known that in the primary calibration of accelerometers by using a laser interferometer, a device under test (DUT) and the laser interferometer should measure vibration at the same reference position. However, this is not applicable to single-ended accelerometers because of the limitation of their design. One way of overcoming this limitation is to measure the vibration at several positions on the exciter table surface which connects DUT to a vibration exciter. However this can present the effects of rocking motions of the exciter. Although the motions of vibration exciters are presented in several studied, the different model of exciters might have different characteristics. This paper aims to study the motions of an air-bearing exciter (model 2911) used at National Institute of Metrology (Thailand) in order to expose their characteristics, their effects on the calibration results and the measurement errors due to these effects. The motions of the exciter are shown in terms of magnitude and phase shift distributions of sensitivities. These can be obtained by measuring the magnitudes and phase shifts at several positions on the exciter surface. The effects of exciter motions are measured in terms of how much the magnitudes and phase shifts at each measured positions deviate from the average values. To illustrate these effects, parametric studies were conducted. The influences of four parameters, i.e. the angular positions of the laser points, the distance of the laser positions from the centre of the exciter surface, the number of measured positions to be averaged and the mass loading effect, were examined experimentally. The frequency of interest is between 10 Hz and 15 kHz.     

Evaluation of aspects affecting measurement of three-axis accelerometers

In order to set integrated procedures involving geotechnical and structural aspects finalized to buildings diagnostics, uncertainty aspects are discussed concerning three-axis accelerometers and inclinometers for a distributed sensor network. This network allows to operate in a selective manner, preferring the most critical situations. To this aim, the main aspects affecting the measurement uncertainty of sensors to be used for building diagnostic should be known. As the firstly step of the uncertainty evaluation procedure, we focused on the calibration of sensors used for the task. The requirement of low cost and complexity of sensors and test benches was considered. Experimental results show that satisfactory calibration accuracy could be achieved, also for the low frequency range, 0–10 Hz. Systematic errors are minimized and main parameters affecting uncertainty are identified, such as: the motion positioning of the accelerometer with respect to the vertical axis, the imposed motion law, the parameter used as the reference and, finally, the real radial positioning of the sensor. Requirements to be satisfied by the sensor are also analysed.     

双悬梁光纤布拉格光栅低频加速度传感器

为了实现光纤布拉格光栅（FHG）加速度信号的准确测量,提出了一种新颖的双悬梁FBG加速度传感器。设计了传感器的结构及封装方法,理论分析了传感器的工作原理。实验研究了传感器的线性响应、温度响应、共振频率和方向抗干扰特性,结果表明,传感器的加速度响应灵敏度为7．81pm／m／s2,相对误差为2．62％,加速度与波长具有较好...