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传感器Q值对加速度计量化噪声的影响
引用本文:李刚,车录锋,黎晓林,王跃林.传感器Q值对加速度计量化噪声的影响[J].传感器与微系统,2013(11):40-43.
作者姓名:李刚  车录锋  黎晓林  王跃林
作者单位:[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050 [2]中国科学院大学,北京100039
基金项目:国家自然科学基金资助项目(41074129);国家“863”计划资助项目(2012AA061102)
摘    要:高品质因数(Q)的加速度计因其具有较低的机械热噪声而适合高性能的振动检测,但Q值过高会带来接口电路的不稳定。为了充分利用传感器的特性优化Sigma.Delta(∑△)数字接口电路设计,通过分析加速度计的数字接口电路模型,验证了Q值的变化对数字量化噪声的影响,并且适当的Q值能降低数字接口电路基带内的量化噪声。设计和测试了基于三明治加速度计的PCB板级电路,测试结果表明:传感器的高Q特性会在基带引入一对共轭零点,抑制了基带内的量化噪声。

关 键 词:加速度计  Q值  ∑△  量化噪声

Influence of Q value on accelerometer quantization noise
LI Gang CHE Lu-feng,LI Xiao-lin,WANG Yue-lin.Influence of Q value on accelerometer quantization noise[J].Transducer and Microsystem Technology,2013(11):40-43.
Authors:LI Gang CHE Lu-feng  LI Xiao-lin  WANG Yue-lin
Affiliation:1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystems and Information Technology, Chinese Academy of Sciences, Shanghai 2000S0, China; 2. University of Chinese Academy of Sciences ,Beijing 100039, China)
Abstract:Because of lower mechanical thermal noise, accelerometer sensor with high quality value (Q value) is suitable for high-performance vibration detection, but over high Q value will cause instability of interface circuits. In order to make good use of characteristic of sensor to optimize design of Sigma-Delta (∑△ ) digital interface circuit,through analyzing model for digital interface circuit of aecelerometer, verify effect of Q value on digital quantization noise, and the quantization noise in base band will be reduced by choosing proper Q value. PCB circuit based on sandwich aceelerometer is designed and tested, and test results show that high Q value of sensor will bring a pair of conjugate zero point in base-band and restrain quantization noise in base-band.
Keywords:accelerometer  Q value  ∑△  quantization noise
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