基于非线性退化模型的加速度计寿命评估

针对传统性能退化模型难以对退化轨迹为非线性的设备进行有效寿命评估的问题,首先,建立了一种基于扩散过程的非线性模型,并将推导其失效阈值首达时间分布的问题转化为推导标准布朗运动失效阈值首达时间分布的问题,得到了首达时间意义下的近似寿命分布;然后,提出了该模型未知参数的极大似然函数估计方法;最后,使用此模型评估分析了一组加速度计的寿命,并与传统退化模型进行比对分析。实验结果证明了模型的评估结果更为准确有效。     

MEMS高量程压阻加速度计侵彻双层钢靶性能测试

设计一种MEMS高量程压阻加速度计,利用其组成的弹体测试系统进行双层钢靶实弹侵彻试验,并获得完整的侵彻数据。利用Matlab数据处理软件对其进行处理,获得有效的侵彻数据。试验结果表明,弹体在整个发射、侵彻钢靶过程中,测试系统所测数据误差均小于10%,说明设计的MEMS高量程压阻加速度计性能稳定,可完全满足工程化应用要求,为研究双层介质侵彻特性及控制弹体在特定介质层的爆破技术提供参考依据。     

Anti-vibration analysis of vortex probe based on three-axis acceleration measurement

According to the diversity of the pipeline vibration and unicity of vortex signal in direction, a new idea is proposed to distinguish the vortex signal from the vibration interference by the directional character. This idea is applied to improve the anti-vibration performance of vortex flow-meter by a new probe structure based on three-axis accelerometer. Then model analysis is used to optimize the material, and the harmonic response analysis is applied to optimize the shape of probe tip. Finally, experiment is carried out to compare the anti-vibration performance of the traditional piezoelectric vortex probe and the new design. Experimental results show that new probe can accurately distinguish vortex signal from the vibration interference according to the directional character of signal. And its anti-vibration performance is superior to the traditional piezoelectric vortex probe.     

Experimental investigation into the effects of exciter motions on the primary calibration of single-ended accelerometer

It is widely known that in the primary calibration of accelerometers by using a laser interferometer, a device under test (DUT) and the laser interferometer should measure vibration at the same reference position. However, this is not applicable to single-ended accelerometers because of the limitation of their design. One way of overcoming this limitation is to measure the vibration at several positions on the exciter table surface which connects DUT to a vibration exciter. However this can present the effects of rocking motions of the exciter. Although the motions of vibration exciters are presented in several studied, the different model of exciters might have different characteristics. This paper aims to study the motions of an air-bearing exciter (model 2911) used at National Institute of Metrology (Thailand) in order to expose their characteristics, their effects on the calibration results and the measurement errors due to these effects. The motions of the exciter are shown in terms of magnitude and phase shift distributions of sensitivities. These can be obtained by measuring the magnitudes and phase shifts at several positions on the exciter surface. The effects of exciter motions are measured in terms of how much the magnitudes and phase shifts at each measured positions deviate from the average values. To illustrate these effects, parametric studies were conducted. The influences of four parameters, i.e. the angular positions of the laser points, the distance of the laser positions from the centre of the exciter surface, the number of measured positions to be averaged and the mass loading effect, were examined experimentally. The frequency of interest is between 10 Hz and 15 kHz.     

Evaluation of aspects affecting measurement of three-axis accelerometers

In order to set integrated procedures involving geotechnical and structural aspects finalized to buildings diagnostics, uncertainty aspects are discussed concerning three-axis accelerometers and inclinometers for a distributed sensor network. This network allows to operate in a selective manner, preferring the most critical situations. To this aim, the main aspects affecting the measurement uncertainty of sensors to be used for building diagnostic should be known. As the firstly step of the uncertainty evaluation procedure, we focused on the calibration of sensors used for the task. The requirement of low cost and complexity of sensors and test benches was considered. Experimental results show that satisfactory calibration accuracy could be achieved, also for the low frequency range, 0–10 Hz. Systematic errors are minimized and main parameters affecting uncertainty are identified, such as: the motion positioning of the accelerometer with respect to the vertical axis, the imposed motion law, the parameter used as the reference and, finally, the real radial positioning of the sensor. Requirements to be satisfied by the sensor are also analysed.     

MEMS高g加速度传感器高过载能力的优化研究

设计的MEMS高g加速度传感器抗高过载能力差,将导致在冲击等恶劣环境中应用时结构易破坏。本文通过分析传感器结构对其抗过载能力的影响,及在高冲击测试中传感器结构损坏情况的统计,提出了一种新颖的优化高g加速度传感器抗高过载能力的方法。该方法是在结构最易断裂的梁根部和端部添加倒角,以分散在冲击作用下传感器结构这些部位受到的应力,进而提高加速度传感器的高过载能力,并从理论仿真分析了该方法的可行性。最后利用Hopkinson杆测试方法对优化前后的加速度传感器进行冲击测试,测试结果表明,加速度计的抗高过载能力从180,000 g提高到240,000g,说明该优化方法显著,明显提高了该类加速度传感器的抗高过载能力,设计的加速度传感器达到了较理想的抗高过载能力。     

带有力反馈控制的三明治式微机械干涉加速度计

设计了一种静电力反馈控制的三明治式微机械干涉加速度计,加速度计由敏感芯片、半导体激光器、光电二极管以及相应的驱动电路和反馈控制电路组成.敏感芯片为玻璃-硅-玻璃3层结构,通过硅-玻璃键合体硅工艺制成.硅质量块由铝梁支撑,底部玻璃基片上有金属光栅和电极,通过在质量块和底部玻璃基片上的电极之间施加电压可以调节质量块与玻璃基片间的间隙.入射激光照射到敏感芯片上的光栅上,产生衍射光束,其光强随质量块与下玻璃的间距而变化.反馈控制电路通过测量衍射光强的变化来改变质量块与底电极之间的电压,使得质量块与底部玻璃基片的距离保持为入射光波长1/8的奇数倍,从而提高输出线性度,改善灵敏度,增大量程.     

基于模糊神经网络的石英加速度计的温度控制

提出了基于模糊神经网络的石英加速度计的温度控制系统.该系统包括模糊神经网络的温度控制软件设计和基于数字信号处理器和可编程逻辑器件(DSP+ FPGA)硬件开发平台的电路设计.模糊神经网络的反向学习过程采用离线学习方法在matlab7.0中进行;根据所设置的样本点对网络参数进行训练,然后把参数训练好的模糊控制程序写入温度控制单元DSP6713中,实现系统的温度控制.实验结果表明,该系统具有响应速度快,稳定性好,控制精度高等优点,其温度控制精度达到0.2℃,满足系统的实际应用要求.     

EMC材料特性对MEMS加速度计封装可靠性的影响

采用有限元法分析了EMC(环氧模塑封材料)材料特性对MEMS(微电子机械系统)加速度计封装可靠性的影响.使用有限元软件ANSYS分别模拟了加速度计的输出电压、悬臂梁的挠度以及加速度计芯片的等效应力在温度循环载荷下的变化情况.结果发现,EMC的材料模式不同,MEMS加速度计的性能有明显差异.在使用EMC温度相关弹性模式和...     

双悬梁光纤布拉格光栅低频加速度传感器

为了实现光纤布拉格光栅（FHG）加速度信号的准确测量,提出了一种新颖的双悬梁FBG加速度传感器。设计了传感器的结构及封装方法,理论分析了传感器的工作原理。实验研究了传感器的线性响应、温度响应、共振频率和方向抗干扰特性,结果表明,传感器的加速度响应灵敏度为7．81pm／m／s2,相对误差为2．62％,加速度与波长具有较好...