| 隧道状态下纳米级振动检测技术的研究 |
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| 引用本文： | 李梦超,傅星,郭彤,胡小唐.隧道状态下纳米级振动检测技术的研究[J].计量学报,2006,27(2):141-144. |
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| 作者姓名： | 李梦超 傅星 郭彤 胡小唐 |
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| 作者单位： | 天津大学,精密测试技术及仪器国家重点实验室,天津,300072 |
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| 摘 要： | 使用德国SIOS公司生产的纳米坐标测量机微动平台作为调整机构,配合自行研制的隧道电流传感器,通过外加振动源,在隧道状态下对纳米级振动进行了检测实验。纳米级振动的研究既可以分析微弱振动对扫描隧道显微镜的作用机理,为以后的扫描隧道显微镜设计提供参考,又可以使振动测量的结果作为扫描隧道显微镜的振动补偿,提高扫描隧道显微镜的测量精度。
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| 关 键 词： | 计量学 纳米级振动 隧道效应 纳米测量机 微动平台 振动补偿 |
| 文章编号： | 1000-1158（2006）02-0141-04 |
| 收稿时间： | 2004-06-30 |
| 修稿时间： | 2004-09-18 |
The Nano-level Vibration Sensor Based on Tunneling Effect |
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| LI Meng-chao,FU Xing,GUO Tong,HU Xiao-tang.The Nano-level Vibration Sensor Based on Tunneling Effect[J].Acta Metrologica Sinica,2006,27(2):141-144. |
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| Authors: | LI Meng-chao FU Xing GUO Tong HU Xiao-tang |
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| Affiliation: | State Key Lab of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China |
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| Abstract: | With the nano-level micromotion stage of a German-produced nano-measuring machine as the adjusting device and together with a self-made tunneling current sensor,experiments of nano-level vibration in tunneling state are carried out by applying the external vibration.Through the study of nano-level vibration,the effect of micro-vibration on scanning tunneling microscope can be analyzed and provides a reference for scanning tunneling microscope design.At the same time,the result can be make use to compensate the vibration of scanning tunneling microscope simultaneously. |
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| Keywords: | Metrology Nano-level vibration Tunneling effect Nano-measuring machine Micromotion stage Vibration compensation |
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