Affiliation: | 1. DECHEMA‐Forschungsinstitut, , 60486 Frankfurt a. M., (Germany);2. Ebara Corporation Fluid Machinery & Systems Company, , Futtsu‐shi, Chiba, 293‐0011 (Japan);3. Ebara Corporation 4‐2‐1 Honfujisawa, , Fujisawa‐shi, Kanagawa, 251‐8502 (Japan);4. Ebara Environmental Plant Co., Ltd., , Ohta‐ku, Tokyo, 144‐0042 (Japan) |