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| Fe-Ni合金薄膜组成表面分析测量国际 | |
| 引用本文： | 王海,宋小平,程斌,冯颖.Fe-Ni合金薄膜组成表面分析测量国际[J].计量学报,2012,33(5):463-466. |
| 作者姓名： | 王海 宋小平 程斌 冯颖 |
| 作者单位： | 1. 中国计量科学研究院, 北京 100013 2. 北京化工大学分析测试中心, 北京 100029 3. 北京联合大学生物化学工程学院, 北京 100023 |
| 基金项目： | 国家科技基础条件平台建设项目（2005DKA10800/2005DKA10806）;中央级公益性科研院所基本科研业务费专项（2007QK20 / AKY0727） |
| 摘 要： | 利用X射线光电子能谱技术,建立了Fe-Ni合金薄膜组成表面分析准确定量方法,中国计量科学研究院参加了国际关键比对CCQM-K67。根据最近公布的关键比对结果,中国计量科学研究院测量的Fe原子分数结果为51.48%,与参加的各国国家计量研究院的结果（50.02%）达到了等效一致。 |
| 关 键 词： | 计量学 Fe-Ni合金薄膜 表面分析 X射线光电子能谱 国际关键比对 |
nternational Key Comparison CCQM-K67:Surface Analysis Measurement of Composition for Fe-Ni Alloy Film |
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| WANG Hai,SONG Xiao-ping,CHENG Bin,FENG Ying.nternational Key Comparison CCQM-K67:Surface Analysis Measurement of Composition for Fe-Ni Alloy Film[J].Acta Metrologica Sinica,2012,33(5):463-466. | |
| Authors: | WANG Hai SONG Xiao-ping CHENG Bin FENG Ying |
| Affiliation: | 1. National Institute of Metrology, Beijing 100013, China 2. Analysis and Testing Center of Beijing University of Chemical Technology, Beijing 100029, China 3. Biochemical Engineering College of Beijing Union University, Beijing 100023, China |
| Abstract: | Based on X-ray photoelectron spectroscopy technique,the National Institute of Metrology of China developed an accurate analytical method and took part in the CCQM-K67 international key comparison on surface analysis measurement of the composition for Fe-Ni alloy film.According to the recently published comparison results, the measured Fe atom fraction (51.48%) by the National Institute of Metrology of China was agreed with the reference value (50.02%) of the CCQM-K67 key comparison. |
| Keywords: | Metrology Fe-Ni alloy film Surface analysis X-ray photoelectron spectroscopy International key comparison |
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