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| 基于等效面积法的线宽及线宽粗糙度测量 | |
| 引用本文： | 李洪波,赵学增,赵维谦.基于等效面积法的线宽及线宽粗糙度测量[J].计量学报,2011,32(1):16-19. |
| 作者姓名： | 李洪波 赵学增 赵维谦 |
| 作者单位： | 1.北京理工大学光电学院, 北京 100001 2.中国航空工业集团公司长城计量测试技术研究所, 北京 100095 3. 哈尔滨工业大学机电工程学院, 黑龙江 哈尔滨 150001 |
| 摘 要： | 建立一种基于刻线边缘轮廓特征求取刻线线宽和线宽粗糙度的测量方法。理想情况下,刻线线宽方向截面为矩形,面积为该矩形高度和宽度的乘积。实际测量中,沿刻线线宽方向截面为一多边形,认为该多边形面积S1和理想矩形面积S相等。利用Tsai给出的台阶高度算法计算刻线单扫描轮廓的高度以获得线宽截面高度H。刻线等效宽度We可根据上述高度H和截面面积S1求出。线宽粗糙度定义为线宽变化的3倍标准偏差,因此线宽粗糙度也能用该方法求出。 |
| 关 键 词： | 计量学 原子力显微镜 线宽 线宽粗糙度 等效面积 |
Measurement of Line-width and Line-width Roughness Based on Equivalent Area |
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| LI Hong-bo,ZHAO Xue-zeng,ZHAO Wei-qian.Measurement of Line-width and Line-width Roughness Based on Equivalent Area[J].Acta Metrologica Sinica,2011,32(1):16-19. | |
| Authors: | LI Hong-bo ZHAO Xue-zeng ZHAO Wei-qian |
| Affiliation: | 1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China 2.AVIC Changcheng Institute of Metrology, Beijing 100095, China 3. School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China |
| Abstract: | A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai’s height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation. |
| Keywords: | Metrology Atomic force microscope Linewidth Linewidth roughness Equivalent area |
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